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H01J2237/121

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/121characterised by shape

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,961,627
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Axially progressive lens for transporting charged particles
- Patent number 11,791,149
- Issue date Oct 17, 2023
- Agilent Technologies, Inc.
- Tong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,705,252
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Particle beam system for adjusting the current of individual partic...
- Patent number 11,562,880
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 11,527,379
- Issue date Dec 13, 2022
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam electron characterization tool with telecentric illumina...
- Patent number 11,373,838
- Issue date Jun 28, 2022
- KLA Corporation
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,094,426
- Issue date Aug 17, 2021
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Micro stigmator array for multi electron beam system
- Patent number 11,056,312
- Issue date Jul 6, 2021
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beam inspection apparatus with through-hole with...
- Patent number 10,950,410
- Issue date Mar 16, 2021
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 10,622,184
- Issue date Apr 14, 2020
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 10,586,625
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Cylindrical multi-reflecting time-of-flight mass spectrometer
- Patent number 9,941,107
- Issue date Apr 10, 2018
- Leco Corporation
- Anatoly N. Verenchikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electrode electron optics
- Patent number 9,905,322
- Issue date Feb 27, 2018
- Mapper Lithography IP B.V.
- Marco Jan-Jaco Wieland
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Ion beam line
- Patent number 9,502,213
- Issue date Nov 22, 2016
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-energy ion implanter, beam collimator, and beam collimation me...
- Patent number 9,373,481
- Issue date Jun 21, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kouji Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electrode stack arrangement
- Patent number 9,355,751
- Issue date May 31, 2016
- Mapper Lithography IP B.V.
- Willem Henk Urbanus
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Apparatus for treating ion beam
- Patent number 9,165,744
- Issue date Oct 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electrode cooling arrangement
- Patent number 9,165,693
- Issue date Oct 20, 2015
- Mapper Lithography IP B.V.
- Willem Henk Urbanus
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Projection lens arrangement
- Patent number 9,105,439
- Issue date Aug 11, 2015
- Mapper Lithography IP B.V.
- Marco Jan Jaco Wieland
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Projection lens arrangement
- Patent number 8,890,094
- Issue date Nov 18, 2014
- Mapper Lithography IP B.V.
- Marco Jan Jaco Wieland
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron microscope
- Patent number 8,742,342
- Issue date Jun 3, 2014
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic corrector
- Patent number 8,723,134
- Issue date May 13, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Roland Janzen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle optical system, drawing apparatus, and method of m...
- Patent number 8,716,672
- Issue date May 6, 2014
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Hybrid electrostatic lens for improved beam transmission
- Patent number 8,664,619
- Issue date Mar 4, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle extraction device and method of design there for
- Patent number 8,653,474
- Issue date Feb 18, 2014
- FEI Company
- Roderick Boswell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple beam charged particle optical system
- Patent number 8,648,318
- Issue date Feb 11, 2014
- Mapper Lithography IP B.V.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple beam charged particle optical system
- Patent number 8,598,545
- Issue date Dec 3, 2013
- Mapper Lithography IP B.V.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling an asymmetric electrostatic le...
- Patent number 8,519,353
- Issue date Aug 27, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle extraction device and method of design there for
- Patent number 8,405,043
- Issue date Mar 26, 2013
- FEI Company
- Roderick Boswell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced integrity projection lens assembly
- Patent number 8,362,441
- Issue date Jan 29, 2013
- Mapper Lithography IP B.V.
- Johan Joost Koning
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES
- Publication number 20240038521
- Publication date Feb 1, 2024
- Agilent Technologies, Inc.
- Tong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20230386696
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES
- Publication number 20220336199
- Publication date Oct 20, 2022
- Agilent Technologies, Inc.
- Tong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20210383941
- Publication date Dec 9, 2021
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...
- Publication number 20210210303
- Publication date Jul 8, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC FILTER WITH SHAPED ELECTRODES
- Publication number 20210090845
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Robert C. Lindberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20200243296
- Publication date Jul 30, 2020
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20200194141
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MULTIPLE ELECTRON BEAM INSPECTION APPARATUS
- Publication number 20200176216
- Publication date Jun 4, 2020
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING ION BEAM
- Publication number 20140110596
- Publication date Apr 24, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROJECTION LENS ARRANGEMENT
- Publication number 20140014852
- Publication date Jan 16, 2014
- Marco Jan Jaco WIELAND
- B82 - NANO-TECHNOLOGY
Information Patent Application
Focused Charged Particle Column for Operation at Different Beam Ene...
- Publication number 20130327952
- Publication date Dec 12, 2013
- FEI Company
- Mostafa Maazouz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICAL SYSTEM, DRAWING APPARATUS, AND METHOD OF M...
- Publication number 20130273478
- Publication date Oct 17, 2013
- Canon Kabushiki Kaisha
- Kentaro Sano
- B82 - NANO-TECHNOLOGY
Information Patent Application
HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION
- Publication number 20130256526
- Publication date Oct 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION
- Publication number 20130256527
- Publication date Oct 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY
- Publication number 20130256554
- Publication date Oct 3, 2013
- Johan Joost Koning
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON BEAM APPARATUS AND LENS ARRAY
- Publication number 20130248731
- Publication date Sep 26, 2013
- Hitachi High-Technologies Corporation
- Sayaka TANIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Extraction Device and Method of Design There for
- Publication number 20130240751
- Publication date Sep 19, 2013
- FEI Company
- Roderick Boswell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC LENS FOR CHARGED PARTICLE RADIATION
- Publication number 20130009070
- Publication date Jan 10, 2013
- HORIBA, LTD.
- Akira Onoguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope
- Publication number 20120217393
- Publication date Aug 30, 2012
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
- Publication number 20120211677
- Publication date Aug 23, 2012
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING AN ELECTROSTATIC LENS ABOUT A...
- Publication number 20120168637
- Publication date Jul 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROJECTION LENS ARRANGEMENT
- Publication number 20120061583
- Publication date Mar 15, 2012
- MAPPER LITHOGRAPHY IP BV
- Marco Jan Jaco WIELAND
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
- Publication number 20110168910
- Publication date Jul 14, 2011
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
- Publication number 20110163244
- Publication date Jul 7, 2011
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CORRECTOR
- Publication number 20110147605
- Publication date Jun 23, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Roland JANZEN
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged Particle Extraction Device And Method Of Design There for
- Publication number 20110100798
- Publication date May 5, 2011
- FEI Company
- Roderick Boswell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY
- Publication number 20110084220
- Publication date Apr 14, 2011
- Johan Joost Koning
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTIPOLE LENS FOR ELECTRON COLUMN
- Publication number 20110079731
- Publication date Apr 7, 2011
- Ho Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Extraction Device and Method of Design There For
- Publication number 20100044580
- Publication date Feb 25, 2010
- FEI Company
- Roderick Boswell
- H01 - BASIC ELECTRIC ELEMENTS

characterised by shape

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vacuum chamber arrangement for charged particle beam generator

Axially progressive lens for transporting charged particles

Vacuum chamber arrangement for charged particle beam generator

Particle beam system for adjusting the current of individual partic...

Objective lens arrangement usable in particle-optical systems

Multi-beam electron characterization tool with telecentric illumina...

Vacuum chamber arrangement for charged particle beam generator

Micro stigmator array for multi electron beam system

Multiple electron beam inspection apparatus with through-hole with...

Objective lens arrangement usable in particle-optical systems

Vacuum chamber arrangement for charged particle beam generator

Cylindrical multi-reflecting time-of-flight mass spectrometer

Multi-electrode electron optics

Ion beam line

High-energy ion implanter, beam collimator, and beam collimation me...

Multi-electrode stack arrangement

Apparatus for treating ion beam

Multi-electrode cooling arrangement

Projection lens arrangement

Projection lens arrangement

Electron microscope

Electrostatic corrector

Charged particle optical system, drawing apparatus, and method of m...

Hybrid electrostatic lens for improved beam transmission

Charged particle extraction device and method of design there for

Multiple beam charged particle optical system

Multiple beam charged particle optical system

Method and apparatus for controlling an asymmetric electrostatic le...

Charged particle extraction device and method of design there for

Enhanced integrity projection lens assembly

Patents Applicationslast 30 patents

AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...

ELECTROSTATIC FILTER WITH SHAPED ELECTRODES

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

MULTIPLE ELECTRON BEAM INSPECTION APPARATUS

APPARATUS FOR TREATING ION BEAM

PROJECTION LENS ARRANGEMENT

Focused Charged Particle Column for Operation at Different Beam Ene...

CHARGED PARTICLE OPTICAL SYSTEM, DRAWING APPARATUS, AND METHOD OF M...

HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION

HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION

ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY

ELECTRON BEAM APPARATUS AND LENS ARRAY

Charged Particle Extraction Device and Method of Design There for

ELECTROSTATIC LENS FOR CHARGED PARTICLE RADIATION

Electron Microscope

MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM

METHOD AND APPARATUS FOR CONTROLLING AN ELECTROSTATIC LENS ABOUT A...

PROJECTION LENS ARRANGEMENT

MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM

MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM

ELECTROSTATIC CORRECTOR

Charged Particle Extraction Device And Method Of Design There for

ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY

MULTIPOLE LENS FOR ELECTRON COLUMN

Charged Particle Extraction Device and Method of Design There For