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H01J2237/31706

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31706characterised by the area treated

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus
- Patent number 11,749,501
- Issue date Sep 5, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Jian Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ angle measurement using channeling
- Patent number 11,387,073
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for nanofabrication using a pliable membrane...
- Patent number 9,588,416
- Issue date Mar 7, 2017
- Columbia University
- Dirk Robert Englund
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
High spatial resolution particle detectors
- Patent number 9,158,008
- Issue date Oct 13, 2015
- UT-Battelle, LLC
- Lynn A. Boatner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 8,772,741
- Issue date Jul 8, 2014
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanting system
- Patent number 8,575,574
- Issue date Nov 5, 2013
- Samsung Display Co., Ltd.
- Jin-Hee Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 8,368,036
- Issue date Feb 5, 2013
- Nissin Ion Equipment Co., Ltd.
- Masayoshi Hino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High spatial resolution particle detectors
- Patent number 8,258,483
- Issue date Sep 4, 2012
- UT-Battelle, LLC
- Lynn A. Boatner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implanter having combined hybrid and double mechanical scan arc...
- Patent number 8,124,947
- Issue date Feb 28, 2012
- Axcelis Technologies. Inc.
- Manny Sieradzki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for enhancing tensile stress and source/drain activation usi...
- Patent number 8,124,487
- Issue date Feb 28, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Helen L. Maynard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method
- Patent number 7,683,350
- Issue date Mar 23, 2010
- Advanced Ion Beam Technology, Inc.
- Cheng-Hui Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter having combined hybrid and double mechanical scan arc...
- Patent number 7,586,111
- Issue date Sep 8, 2009
- Axcelis Technologies, Inc.
- Manny Sieradzki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for ion beam angle spread control for advanced applications
- Patent number 7,394,078
- Issue date Jul 1, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20220189736
- Publication date Jun 16, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Jian WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA ION SOURCE WITH MULTIPLE ANTENNAS FOR WI...
- Publication number 20140042337
- Publication date Feb 13, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SPATIAL RESOLUTION PARTICLE DETECTORS
- Publication number 20120318993
- Publication date Dec 20, 2012
- UT-BATTELLE, LLC.
- Lynn A. Boatner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20120252194
- Publication date Oct 4, 2012
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20120104285
- Publication date May 3, 2012
- NISSIN ION EQUIPMENT CO., LTD.
- Masayoshi Hino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20110215263
- Publication date Sep 8, 2011
- NISSIN ION EQUIPMENT CO., LTD.
- Masayoshi Hino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTING SYSTEM
- Publication number 20110140005
- Publication date Jun 16, 2011
- Sumsung Mobile Display Co., Ltd.
- Jin-Hee KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ENHANCING TENSILE STRESS AND SOURCE/DRAIN ACTIVIATION US...
- Publication number 20100155898
- Publication date Jun 24, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Helen L. Maynard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implanter Having Combined Hybrid and Double Mechanical Scan Arc...
- Publication number 20090321625
- Publication date Dec 31, 2009
- Axcelis Technologies, Inc.
- Manny Sieradzki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD
- Publication number 20090230329
- Publication date Sep 17, 2009
- Advanced Ion Beam Technology, Inc.
- Cheng-Hui Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR TREATING A WORKPIECE USING A GAS CLUSTER...
- Publication number 20090032725
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTER HAVING COMBINED HYBRID AND DOUBLE MECHANICAL SCAN ARC...
- Publication number 20090032726
- Publication date Feb 5, 2009
- Manny Sieradzki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for ion beam angle spread control for advanced applications
- Publication number 20060208204
- Publication date Sep 21, 2006
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the area treated

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion implantation apparatus

In situ angle measurement using channeling

Methods and apparatus for nanofabrication using a pliable membrane...

High spatial resolution particle detectors

Ion implantation method and ion implantation apparatus

Ion implanting system

Ion implantation method and ion implantation apparatus

High spatial resolution particle detectors

Ion implanter having combined hybrid and double mechanical scan arc...

Method for enhancing tensile stress and source/drain activation usi...

Ion implantation method

Ion implanter having combined hybrid and double mechanical scan arc...

Technique for ion beam angle spread control for advanced applications

Patents Applicationslast 30 patents

ION IMPLANTATION APPARATUS

INDUCTIVELY COUPLED PLASMA ION SOURCE WITH MULTIPLE ANTENNAS FOR WI...

HIGH SPATIAL RESOLUTION PARTICLE DETECTORS

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTING SYSTEM

METHOD FOR ENHANCING TENSILE STRESS AND SOURCE/DRAIN ACTIVIATION US...

Ion Implanter Having Combined Hybrid and Double Mechanical Scan Arc...

ION IMPLANTATION METHOD

APPARATUS AND METHODS FOR TREATING A WORKPIECE USING A GAS CLUSTER...

ION IMPLANTER HAVING COMBINED HYBRID AND DOUBLE MECHANICAL SCAN ARC...

Technique for ion beam angle spread control for advanced applications