characterised by the construction of the shaft

Industry

CPC
H01L21/68792

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68792characterised by the construction of the shaft

Industries

Patents Grantslast 30 patents

Information Patent Grant
Wafer cleaning apparatus
- Patent number 12,341,052
- Issue date Jun 24, 2025
- ZEUS CO., LTD.
- Seung Dae Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing target material in deposition chamber with ti...
- Patent number 12,341,042
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Filter device and plasma processing apparatus
- Patent number 12,334,309
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Naohiko Okunishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spindle assembly for wafer transfer in a multi-station process module
- Patent number 12,334,375
- Issue date Jun 17, 2025
- Lam Research Corporation
- Andrew Borth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor with centering pin for epitaxial deposition
- Patent number 12,322,644
- Issue date Jun 3, 2025
- Veeco Instruments, Inc.
- Alexander Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom cover plate to reduce wafer planar nonuniformity
- Patent number 12,315,746
- Issue date May 27, 2025
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing device and wafer conveying method
- Patent number 12,308,277
- Issue date May 20, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Hui Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated substrate support
- Patent number 12,309,888
- Issue date May 20, 2025
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus and wafer processing method
- Patent number 12,293,938
- Issue date May 6, 2025
- ZEUS CO., LTD.
- Woon Kong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,283,501
- Issue date Apr 22, 2025
- Kokusai Electric Corporation
- Takayuki Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic heater with shaft
- Patent number 12,284,729
- Issue date Apr 22, 2025
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for performing film forming process on substrate and meth...
- Patent number 12,247,287
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,243,760
- Issue date Mar 4, 2025
- BEILAB CORP.
- Jihyun Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for etching the periphery edge of a substrate
- Patent number 12,237,206
- Issue date Feb 25, 2025
- DEVICEENG CO., LTD
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assembly for substrate treatment apparatus
- Patent number 12,237,205
- Issue date Feb 25, 2025
- Deviceeng Co. Ltd
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,217,998
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Junnosuke Taguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 12,202,016
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Yuki Ito
- B08 - CLEANING
Information Patent Grant
Substrate support assembly for substrate treatment apparatus
- Patent number 12,170,222
- Issue date Dec 17, 2024
- DEVICEENG CO., LTD
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor for high-temperature use having shaft with low thermal co...
- Patent number 12,154,799
- Issue date Nov 26, 2024
- MiCo Ceramics Ltd.
- Jung Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic stopper for a rotary motion system
- Patent number 12,154,820
- Issue date Nov 26, 2024
- Etel SA
- Philippe Tamigniaux
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing equipment with high temperature resistant...
- Patent number 12,128,494
- Issue date Oct 29, 2024
- Watlow Electric Manufacturing Company
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbomolecular pump and cathode assembly for etching reactor
- Patent number 12,106,946
- Issue date Oct 1, 2024
- Lam Research Corporation
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method of controlling rot...
- Patent number 12,094,746
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Ryotaro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 12,046,465
- Issue date Jul 23, 2024
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B08 - CLEANING
Information Patent Grant
Substrate supporting member, substrate treating apparatus including...
- Patent number 12,040,216
- Issue date Jul 16, 2024
- Semes Co., Ltd.
- Yong Hoon Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 12,040,217
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detecting wafer status in a wafer chuck assembly
- Patent number 12,027,409
- Issue date Jul 2, 2024
- Lam Research Corporation
- Aaron Louis LaBrie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus having improved temperature control
- Patent number 12,009,185
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Jun Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature chuck for plasma processing systems
- Patent number 12,009,228
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUSCEPTOR INCLUDING PURGE GAS FLOW PASSAGE
- Publication number 20250191965
- Publication date Jun 12, 2025
- MICO CERAMICS LTD.
- Jung-Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250167040
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...
- Publication number 20250140597
- Publication date May 1, 2025
- LPE S.P.A.
- Silvio Preti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID SHAFT ASSEMBLY FOR THERMAL CONTROL IN HEATED SEMICONDUCTOR P...
- Publication number 20250069943
- Publication date Feb 27, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Michael PARKER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEXAPOD-BASED PEDESTAL SYSTEMS FOR USE IN SEMICONDUCTOR PROCESSING...
- Publication number 20250062156
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Jacob Lee Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...
- Publication number 20250050439
- Publication date Feb 13, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MAPPING APPARATUS AND LOAD PORT APPARATUS
- Publication number 20250054790
- Publication date Feb 13, 2025
- TDK Corporation
- Tatsuhiro KOTSUGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250038041
- Publication date Jan 30, 2025
- NGK Insulators, Ltd.
- Yutaka UNNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...
- Publication number 20250022745
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiwei LIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CANTILEVER WITH ETCH CHAMBER FLOW DESIGN
- Publication number 20240387147
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR
- Publication number 20240355596
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTING WAFER STATUS IN A WAFER CHUCK ASSEMBLY
- Publication number 20240312827
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Aaron Louis LaBrie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Pedestal Shaft with Heated/Cooled Gas Tube
- Publication number 20240304491
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN
- Publication number 20240282556
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20240282619
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUSCEPTOR
- Publication number 20240266208
- Publication date Aug 8, 2024
- NGK Insulators, Ltd.
- Keiichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION
- Publication number 20240266202
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHAFT MEMBERS, PROCESS KITS AND SEMICONDUCTOR PROCESSING SYSTEMS HA...
- Publication number 20240222187
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Aniket Chitale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTATIONAL INDEXERS WITH WAFER CENTERING CAPABILITY
- Publication number 20240213070
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Brian Lewis Ratliff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK HEATER AND FILM DEPOSITION APPARATUS
- Publication number 20240203779
- Publication date Jun 20, 2024
- NGK Insulators, Ltd.
- Tomohiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE ACTUATOR PARTICLE SHIELD
- Publication number 20240186176
- Publication date Jun 6, 2024
- ONTO INNOVATION INC.
- Paul Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240071785
- Publication date Feb 29, 2024
- NEXTIN, INC.
- Seoung-Ju Na
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20240038509
- Publication date Feb 1, 2024
- MICO CERAMICS LTD.
- Haneum BAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...
- Publication number 20240033786
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Yuki ITO
- B08 - CLEANING
Information Patent Application
METHOD OF ETCHING THIN FILM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230377911
- Publication date Nov 23, 2023
- SEMES CO., LTD.
- Won-Geun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230326757
- Publication date Oct 12, 2023
- EBARA CORPORATION
- Masayuki SATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER
- Publication number 20230317506
- Publication date Oct 5, 2023
- NGK SPARK PLUG CO., LTD.
- Makoto HINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230317480
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...
- Publication number 20230278123
- Publication date Sep 7, 2023
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEVICE FOR ETCHING THE PERIPHERY EDGE OF A SUBSTRATE
- Publication number 20230268221
- Publication date Aug 24, 2023
- DEVICEENG CO., LTD
- Taek Youb LEE
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the construction of the shaft

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer cleaning apparatus

Method for depositing target material in deposition chamber with ti...

Filter device and plasma processing apparatus

Spindle assembly for wafer transfer in a multi-station process module

Reactor with centering pin for epitaxial deposition

Bottom cover plate to reduce wafer planar nonuniformity

Wafer processing device and wafer conveying method

Heated substrate support

Wafer processing apparatus and wafer processing method

Substrate processing apparatus, method of manufacturing semiconduct...

Ceramic heater with shaft

Apparatus for performing film forming process on substrate and meth...

Substrate processing apparatus

Device for etching the periphery edge of a substrate

Substrate support assembly for substrate treatment apparatus

Substrate processing apparatus

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Substrate support assembly for substrate treatment apparatus

Susceptor for high-temperature use having shaft with low thermal co...

Magnetic stopper for a rotary motion system

Semiconductor processing equipment with high temperature resistant...

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Turbomolecular pump and cathode assembly for etching reactor

Semiconductor manufacturing apparatus and method of controlling rot...

Substrate treatment method and substrate treatment apparatus

Substrate supporting member, substrate treating apparatus including...

Substrate lift mechanism and reactor including same

Detecting wafer status in a wafer chuck assembly

Semiconductor processing apparatus having improved temperature control

Low temperature chuck for plasma processing systems

Patents Applicationslast 30 patents

SUSCEPTOR INCLUDING PURGE GAS FLOW PASSAGE

LIFTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...

HYBRID SHAFT ASSEMBLY FOR THERMAL CONTROL IN HEATED SEMICONDUCTOR P...

HEXAPOD-BASED PEDESTAL SYSTEMS FOR USE IN SEMICONDUCTOR PROCESSING...

SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...

MAPPING APPARATUS AND LOAD PORT APPARATUS

CERAMIC SUSCEPTOR

Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...

CANTILEVER WITH ETCH CHAMBER FLOW DESIGN

TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR

DETECTING WAFER STATUS IN A WAFER CHUCK ASSEMBLY

Ceramic Pedestal Shaft with Heated/Cooled Gas Tube

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

SUSCEPTOR

ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION

SHAFT MEMBERS, PROCESS KITS AND SEMICONDUCTOR PROCESSING SYSTEMS HA...

ROTATIONAL INDEXERS WITH WAFER CENTERING CAPABILITY

ELECTROSTATIC CHUCK HEATER AND FILM DEPOSITION APPARATUS

STAGE ACTUATOR PARTICLE SHIELD

SEMICONDUCTOR MANUFACTURING APPARATUS

CERAMIC SUSCEPTOR

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...

METHOD OF ETCHING THIN FILM AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE HOLDER

GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...

DEVICE FOR ETCHING THE PERIPHERY EDGE OF A SUBSTRATE