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H01L21/68792
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/68792
characterised by the construction of the shaft
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Patents Grants
last 30 patents
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Patent Grant
Substrate holding apparatus and substrate processing apparatus
Patent number
11,961,757
Issue date
Apr 16, 2024
SCREEN Holdings Co., Ltd.
Ryo Muramoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ceramic heater
Patent number
11,937,345
Issue date
Mar 19, 2024
MiCo Ceramics Ltd.
Jung Chul Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual-function wafer backside pressure control and edge purge
Patent number
11,923,233
Issue date
Mar 5, 2024
Applied Materials, Inc.
Joseph AuBuchon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...
Patent number
11,908,720
Issue date
Feb 20, 2024
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Linghan Shen
B08 - CLEANING
Information
Patent Grant
Plasma processing apparatus
Patent number
11,908,664
Issue date
Feb 20, 2024
Tokyo Electron Limited
Naohiko Okunishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic-layer-deposition equipment and atomiclayer-deposition method...
Patent number
11,891,694
Issue date
Feb 6, 2024
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pre-loaded bowl mechanism for providing a symmetric radio frequency...
Patent number
11,887,884
Issue date
Jan 30, 2024
Applied Materials, Inc.
Ravikumar Patil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
Patent number
11,826,794
Issue date
Nov 28, 2023
Tokyo Electron Limited
Yuki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate carrier apparatus, substrate processing apparatus, and me...
Patent number
11,823,873
Issue date
Nov 21, 2023
ASM IP Holding B.V.
Kazuhiro Nishiwaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple zone heater
Patent number
11,823,890
Issue date
Nov 21, 2023
Watlow Electric Manufacturing Company
Alfred Grant Elliot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Piping assembly and substrate processing apparatus
Patent number
11,810,769
Issue date
Nov 7, 2023
Tokyo Electron Limited
Kazuki Oshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
In-situ wafer rotation for carousel processing chambers
Patent number
11,798,825
Issue date
Oct 24, 2023
Applied Materials, Inc.
Joseph Yudovsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for maintenance of rotation-lift assembly
Patent number
11,774,306
Issue date
Oct 3, 2023
Applied Materials, Inc.
Thomas Ackermann
G01 - MEASURING TESTING
Information
Patent Grant
Substrate processing method and substrate processing device
Patent number
11,764,055
Issue date
Sep 19, 2023
SCREEN Holdings Co., Ltd.
Nobuyuki Shibayama
B08 - CLEANING
Information
Patent Grant
Rotating shaft sealing device and processing apparatus for semicond...
Patent number
11,764,102
Issue date
Sep 19, 2023
Sealink Corp.
Hee Jang Rhee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer processing apparatus
Patent number
11,749,557
Issue date
Sep 5, 2023
ZEUS CO., LTD.
Jiho Park
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Movable wafer holder for film deposition chamber having six degrees...
Patent number
11,742,231
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Chih Chu
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Device for transferring substrate, system for processing substrate,...
Patent number
11,728,205
Issue date
Aug 15, 2023
Tokyo Electron Limited
Masahiro Dogome
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Substrate support unit and substrate treating apparatus having the...
Patent number
11,721,575
Issue date
Aug 8, 2023
Semes Co., Ltd.
Inhwang Park
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,674,225
Issue date
Jun 13, 2023
Tokyo Electron Limted
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing equipment with high temperature resistant...
Patent number
11,648,620
Issue date
May 16, 2023
Watlow Electric Manufacturing Company
Brent Elliot
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus with moving device for connecting an...
Patent number
11,637,035
Issue date
Apr 25, 2023
Tokyo Electron Limited
Satoshi Morita
B08 - CLEANING
Information
Patent Grant
Substrate pedestal including backside gas-delivery tube
Patent number
11,634,817
Issue date
Apr 25, 2023
Lam Research Corporation
Troy Alan Gomm
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
11,621,176
Issue date
Apr 4, 2023
SCREEN Holdings Co., Ltd.
Yasuhiko Ohashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low temperature chuck for plasma processing systems
Patent number
11,594,428
Issue date
Feb 28, 2023
Applied Materials, Inc.
Toan Q. Tran
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Robot for simultaneous substrate transfer
Patent number
11,590,662
Issue date
Feb 28, 2023
Applied Materials, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate lift mechanism and reactor including same
Patent number
11,587,821
Issue date
Feb 21, 2023
ASM IP Holding B.V.
Eric Hill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
External substrate system rotation in a semiconductor processing sy...
Patent number
11,574,825
Issue date
Feb 7, 2023
Applied Materials, Inc.
Tuan Anh Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ceramic pedestal having atomic protective layer
Patent number
11,574,838
Issue date
Feb 7, 2023
Watlow Electric Manufacturing Company
Mohammad Nosrati
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fast response pedestal assembly for selective preclean
Patent number
11,515,130
Issue date
Nov 29, 2022
Applied Materials, Inc.
Lara Hawrylchak
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20240071785
Publication date
Feb 29, 2024
NEXTIN, INC.
Seoung-Ju Na
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...
Publication number
20240033786
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Yuki ITO
B08 - CLEANING
Information
Patent Application
CERAMIC SUSCEPTOR
Publication number
20240038509
Publication date
Feb 1, 2024
MICO CERAMICS LTD.
Haneum BAE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF ETCHING THIN FILM AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230377911
Publication date
Nov 23, 2023
SEMES CO., LTD.
Won-Geun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230326757
Publication date
Oct 12, 2023
EBARA CORPORATION
Masayuki SATAKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDER
Publication number
20230317506
Publication date
Oct 5, 2023
NGK SPARK PLUG CO., LTD.
Makoto HINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20230317480
Publication date
Oct 5, 2023
TOKYO ELECTRON LIMITED
Masahiro DOGOME
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...
Publication number
20230278123
Publication date
Sep 7, 2023
WATLOW ELECTRIC MANUFACTURING COMPANY
Brent Elliot
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DEVICE FOR ETCHING THE PERIPHERY EDGE OF A SUBSTRATE
Publication number
20230268221
Publication date
Aug 24, 2023
DEVICEENG CO., LTD
Taek Youb LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE
Publication number
20230220549
Publication date
Jul 13, 2023
LAM RESEARCH CORPORATION
Troy Alan Gomm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS
Publication number
20230223281
Publication date
Jul 13, 2023
Applied Materials, Inc.
Toan Q. Tran
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC-LAYER-DEPOSITION EQUIPMENT AND ATOMICLAYER-DEPOSITION METHOD...
Publication number
20230203653
Publication date
Jun 29, 2023
SKY TECH INC.
JING-CHENG LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...
Publication number
20230162999
Publication date
May 25, 2023
Applied Materials, Inc.
Tuan Anh NGUYEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME
Publication number
20230163019
Publication date
May 25, 2023
ASM IP HOLDING B.V.
Eric Hill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BOTTOM COVER PLATE TO REDUCE WAFER PLANAR NONUNIFORMITY
Publication number
20230130756
Publication date
Apr 27, 2023
Applied Materials, Inc.
Zubin HUANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LIQUID SUPPLY UNIT, SUBSTRATE TREATING APPARATUS, AND BOTTLE REPLAC...
Publication number
20230131562
Publication date
Apr 27, 2023
SEMES CO., LTD.
Dae Woon LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT ASSEMBLIES HAVING INTERNAL SHAFT AREAS WITH ISOLA...
Publication number
20230113486
Publication date
Apr 13, 2023
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN
Publication number
20230086640
Publication date
Mar 23, 2023
Applied Materials, Inc.
Lara HAWRYLCHAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUSCEPTOR FOR HIGH-TEMPERATURE USE HAVING SHAFT WITH LOW THERMAL CO...
Publication number
20230088822
Publication date
Mar 23, 2023
MICO CERAMICS LTD.
Jung Chul JIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT ASSEMBLY FOR SUBSTRATE TREATMENT APPARATUS
Publication number
20230060570
Publication date
Mar 2, 2023
DEVICEENG CO. LTD
Taek Youb LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT ASSEMBLY FOR SUBSTRATE TREATMENT APPARATUS
Publication number
20230062042
Publication date
Mar 2, 2023
DEVICEENG CO. LTD
Taek Youb LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230068123
Publication date
Mar 2, 2023
Kokusai Electric Corporation
Takayuki OTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230057937
Publication date
Feb 23, 2023
TOKYO ELECTRON LIMITED
Naohiko OKUNISHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTIPLE ZONE HEATER
Publication number
20230058143
Publication date
Feb 23, 2023
WATLOW ELECTRIC MANUFACTURING COMPANY
Alfred Grant ELLIOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILTER DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20230031368
Publication date
Feb 2, 2023
TOKYO ELECTRON LIMITED
Naohiko OKUNISHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRAY ELEVATING AND LOWERING APPARATUS OF TEST HANDLER
Publication number
20230024139
Publication date
Jan 26, 2023
SEMES CO., LTD.
Jin Ho KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS WITH A TEMPERATURE SEN...
Publication number
20230005770
Publication date
Jan 5, 2023
ASM IP HOLDING B.V.
Wiebren Harm Damsma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE LIFT MECHANISM AND SUBSTRATE PROCESSING APPARATUS INCLUDI...
Publication number
20220415701
Publication date
Dec 29, 2022
ASM IP HOLDING B.V.
Kazuhiro Nishiwaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CANTILEVER WITH ETCH CHAMBER FLOW DESIGN
Publication number
20220359164
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chien-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER HOLDER FOR FILM DEPOSITION CHAMBER
Publication number
20220359232
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsuan-Chih Chu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...