characterised by the construction of the shaft

Industry

CPC
H01L21/68792

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68792characterised by the construction of the shaft

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate support assembly for substrate treatment apparatus
- Patent number 12,170,222
- Issue date Dec 17, 2024
- DEVICEENG CO., LTD
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor for high-temperature use having shaft with low thermal co...
- Patent number 12,154,799
- Issue date Nov 26, 2024
- MiCo Ceramics Ltd.
- Jung Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic stopper for a rotary motion system
- Patent number 12,154,820
- Issue date Nov 26, 2024
- Etel SA
- Philippe Tamigniaux
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing equipment with high temperature resistant...
- Patent number 12,128,494
- Issue date Oct 29, 2024
- Watlow Electric Manufacturing Company
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbomolecular pump and cathode assembly for etching reactor
- Patent number 12,106,946
- Issue date Oct 1, 2024
- Lam Research Corporation
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method of controlling rot...
- Patent number 12,094,746
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Ryotaro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 12,046,465
- Issue date Jul 23, 2024
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B08 - CLEANING
Information Patent Grant
Substrate supporting member, substrate treating apparatus including...
- Patent number 12,040,216
- Issue date Jul 16, 2024
- Semes Co., Ltd.
- Yong Hoon Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 12,040,217
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detecting wafer status in a wafer chuck assembly
- Patent number 12,027,409
- Issue date Jul 2, 2024
- Lam Research Corporation
- Aaron Louis LaBrie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus having improved temperature control
- Patent number 12,009,185
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Jun Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature chuck for plasma processing systems
- Patent number 12,009,228
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of, and an apparatus for, rinsing materialographic samples
- Patent number 11,998,956
- Issue date Jun 4, 2024
- STRUERS APS
- Thomas Matschofsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus, substrate processing apparatus having...
- Patent number 12,002,704
- Issue date Jun 4, 2024
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast response pedestal assembly for selective preclean
- Patent number 11,990,321
- Issue date May 21, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Ceramic susceptor
- Patent number 11,990,322
- Issue date May 21, 2024
- MiCo Ceramics Ltd.
- Haneum Bae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck (ESC) pedestal voltage isolation
- Patent number 11,990,360
- Issue date May 21, 2024
- Lam Research Corporation
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal chamber with improved thermal uniformity
- Patent number 11,978,646
- Issue date May 7, 2024
- Applied Materials, Inc.
- Dongming Iu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus and substrate processing apparatus
- Patent number 11,961,757
- Issue date Apr 16, 2024
- SCREEN Holdings Co., Ltd.
- Ryo Muramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic heater
- Patent number 11,937,345
- Issue date Mar 19, 2024
- MiCo Ceramics Ltd.
- Jung Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-function wafer backside pressure control and edge purge
- Patent number 11,923,233
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...
- Patent number 11,908,720
- Issue date Feb 20, 2024
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Linghan Shen
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus
- Patent number 11,908,664
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Naohiko Okunishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic-layer-deposition equipment and atomiclayer-deposition method...
- Patent number 11,891,694
- Issue date Feb 6, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-loaded bowl mechanism for providing a symmetric radio frequency...
- Patent number 11,887,884
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Ravikumar Patil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 11,826,794
- Issue date Nov 28, 2023
- Tokyo Electron Limited
- Yuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier apparatus, substrate processing apparatus, and me...
- Patent number 11,823,873
- Issue date Nov 21, 2023
- ASM IP Holding B.V.
- Kazuhiro Nishiwaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple zone heater
- Patent number 11,823,890
- Issue date Nov 21, 2023
- Watlow Electric Manufacturing Company
- Alfred Grant Elliot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piping assembly and substrate processing apparatus
- Patent number 11,810,769
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Kazuki Oshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CANTILEVER WITH ETCH CHAMBER FLOW DESIGN
- Publication number 20240387147
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR
- Publication number 20240355596
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTING WAFER STATUS IN A WAFER CHUCK ASSEMBLY
- Publication number 20240312827
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Aaron Louis LaBrie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Pedestal Shaft with Heated/Cooled Gas Tube
- Publication number 20240304491
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN
- Publication number 20240282556
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20240282619
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUSCEPTOR
- Publication number 20240266208
- Publication date Aug 8, 2024
- NGK Insulators, Ltd.
- Keiichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION
- Publication number 20240266202
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHAFT MEMBERS, PROCESS KITS AND SEMICONDUCTOR PROCESSING SYSTEMS HA...
- Publication number 20240222187
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Aniket Chitale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTATIONAL INDEXERS WITH WAFER CENTERING CAPABILITY
- Publication number 20240213070
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Brian Lewis Ratliff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK HEATER AND FILM DEPOSITION APPARATUS
- Publication number 20240203779
- Publication date Jun 20, 2024
- NGK Insulators, Ltd.
- Tomohiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE ACTUATOR PARTICLE SHIELD
- Publication number 20240186176
- Publication date Jun 6, 2024
- ONTO INNOVATION INC.
- Paul Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240071785
- Publication date Feb 29, 2024
- NEXTIN, INC.
- Seoung-Ju Na
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20240038509
- Publication date Feb 1, 2024
- MICO CERAMICS LTD.
- Haneum BAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...
- Publication number 20240033786
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Yuki ITO
- B08 - CLEANING
Information Patent Application
METHOD OF ETCHING THIN FILM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230377911
- Publication date Nov 23, 2023
- SEMES CO., LTD.
- Won-Geun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230326757
- Publication date Oct 12, 2023
- EBARA CORPORATION
- Masayuki SATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER
- Publication number 20230317506
- Publication date Oct 5, 2023
- NGK SPARK PLUG CO., LTD.
- Makoto HINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230317480
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...
- Publication number 20230278123
- Publication date Sep 7, 2023
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEVICE FOR ETCHING THE PERIPHERY EDGE OF A SUBSTRATE
- Publication number 20230268221
- Publication date Aug 24, 2023
- DEVICEENG CO., LTD
- Taek Youb LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE
- Publication number 20230220549
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS
- Publication number 20230223281
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC-LAYER-DEPOSITION EQUIPMENT AND ATOMICLAYER-DEPOSITION METHOD...
- Publication number 20230203653
- Publication date Jun 29, 2023
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...
- Publication number 20230162999
- Publication date May 25, 2023
- Applied Materials, Inc.
- Tuan Anh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME
- Publication number 20230163019
- Publication date May 25, 2023
- ASM IP HOLDING B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM COVER PLATE TO REDUCE WAFER PLANAR NONUNIFORMITY
- Publication number 20230130756
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID SUPPLY UNIT, SUBSTRATE TREATING APPARATUS, AND BOTTLE REPLAC...
- Publication number 20230131562
- Publication date Apr 27, 2023
- SEMES CO., LTD.
- Dae Woon LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLIES HAVING INTERNAL SHAFT AREAS WITH ISOLA...
- Publication number 20230113486
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN
- Publication number 20230086640
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the construction of the shaft

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate support assembly for substrate treatment apparatus

Susceptor for high-temperature use having shaft with low thermal co...

Magnetic stopper for a rotary motion system

Semiconductor processing equipment with high temperature resistant...

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Turbomolecular pump and cathode assembly for etching reactor

Semiconductor manufacturing apparatus and method of controlling rot...

Substrate treatment method and substrate treatment apparatus

Substrate supporting member, substrate treating apparatus including...

Substrate lift mechanism and reactor including same

Detecting wafer status in a wafer chuck assembly

Semiconductor processing apparatus having improved temperature control

Low temperature chuck for plasma processing systems

Method of, and an apparatus for, rinsing materialographic samples

Substrate holding apparatus, substrate processing apparatus having...

Fast response pedestal assembly for selective preclean

Ceramic susceptor

Electrostatic chuck (ESC) pedestal voltage isolation

Thermal chamber with improved thermal uniformity

Substrate holding apparatus and substrate processing apparatus

Ceramic heater

Dual-function wafer backside pressure control and edge purge

CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...

Plasma processing apparatus

Atomic-layer-deposition equipment and atomiclayer-deposition method...

Pre-loaded bowl mechanism for providing a symmetric radio frequency...

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Substrate carrier apparatus, substrate processing apparatus, and me...

Multiple zone heater

Piping assembly and substrate processing apparatus

Patents Applicationslast 30 patents

CANTILEVER WITH ETCH CHAMBER FLOW DESIGN

TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR

DETECTING WAFER STATUS IN A WAFER CHUCK ASSEMBLY

Ceramic Pedestal Shaft with Heated/Cooled Gas Tube

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

SUSCEPTOR

ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION

SHAFT MEMBERS, PROCESS KITS AND SEMICONDUCTOR PROCESSING SYSTEMS HA...

ROTATIONAL INDEXERS WITH WAFER CENTERING CAPABILITY

ELECTROSTATIC CHUCK HEATER AND FILM DEPOSITION APPARATUS

STAGE ACTUATOR PARTICLE SHIELD

SEMICONDUCTOR MANUFACTURING APPARATUS

CERAMIC SUSCEPTOR

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...

METHOD OF ETCHING THIN FILM AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE HOLDER

GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...

DEVICE FOR ETCHING THE PERIPHERY EDGE OF A SUBSTRATE

SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE

LOW TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS

ATOMIC-LAYER-DEPOSITION EQUIPMENT AND ATOMICLAYER-DEPOSITION METHOD...

EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...

SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME

BOTTOM COVER PLATE TO REDUCE WAFER PLANAR NONUNIFORMITY

LIQUID SUPPLY UNIT, SUBSTRATE TREATING APPARATUS, AND BOTTLE REPLAC...

SUBSTRATE SUPPORT ASSEMBLIES HAVING INTERNAL SHAFT AREAS WITH ISOLA...

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN