characterised by the imaging method

Industry

CPC
H01J2237/2803

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2803characterised by the imaging method

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam system and method for determining observation...
- Patent number 12,191,111
- Issue date Jan 7, 2025
- HITACHI HIGH-TECH CORPORATION
- Fumiya Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of determining aberrations in images obtained b...
- Patent number 12,183,540
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Yifeng Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,125,667
- Issue date Oct 22, 2024
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System comprising a multi-beam particle microscope and method for o...
- Patent number 11,935,721
- Issue date Mar 19, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scintillator for charged particle beam apparatus and charged partic...
- Patent number 11,846,736
- Issue date Dec 19, 2023
- HITACHI HIGH-TECH CORPORATION
- Eri Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,798,780
- Issue date Oct 24, 2023
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring CD using scanning electron microscope
- Patent number 11,740,073
- Issue date Aug 29, 2023
- Samsung Electronics Co., Ltd.
- Jooho Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Super-resolution microscopy
- Patent number 11,676,794
- Issue date Jun 13, 2023
- United Kingdom Research and Innovation
- Lin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-section observation device, and control method
- Patent number 11,600,463
- Issue date Mar 7, 2023
- Hitachi High-Tech Science Corporation
- Xin Man
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Rapid and automatic virus imaging and analysis system as well as me...
- Patent number 11,593,938
- Issue date Feb 28, 2023
- BORRIRS PTE. LTD.
- Zhongwei Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image forming method and impedance microscope
- Patent number 11,454,605
- Issue date Sep 27, 2022
- Toshihiko Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image generation method, non-transitory computer-readable medium, a...
- Patent number 11,443,917
- Issue date Sep 13, 2022
- HITACHI HIGH-TECH CORPORATION
- Chikako Abe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged-particle beam device and cross-sectional shape estimation p...
- Patent number 11,443,914
- Issue date Sep 13, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,239,052
- Issue date Feb 1, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffraction pattern detection in a transmission charged particle mi...
- Patent number 11,004,655
- Issue date May 11, 2021
- FEI Company
- Bart Buijsse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for imaging vias inside trenches
- Patent number 10,984,980
- Issue date Apr 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Kei Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of image acquisition and electron microscope
- Patent number 10,923,314
- Issue date Feb 16, 2021
- Jeol Ltd.
- Akiho Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen observation method
- Patent number 10,852,253
- Issue date Dec 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Kiyotaka Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope and sample observation method
- Patent number 10,840,060
- Issue date Nov 17, 2020
- HITACHI HIGH-TECH CORPORATION
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and control method
- Patent number 10,741,359
- Issue date Aug 11, 2020
- Jeol Ltd.
- Akira Abe
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device
- Patent number 10,720,306
- Issue date Jul 21, 2020
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for high throughput SEM and AFM for character...
- Patent number 10,714,310
- Issue date Jul 14, 2020
- Nanowear Inc.
- Vijay Varadan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods and apparatus for high throughput SEM and AFM for character...
- Patent number 10,438,772
- Issue date Oct 8, 2019
- Nanowear Inc.
- Vijay Varadan
- G01 - MEASURING TESTING
Information Patent Grant
Electron microscope and image acquisition method
- Patent number 10,361,061
- Issue date Jul 23, 2019
- Jeol Ltd.
- Yukihito Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning transmission electron microscope and method of image gener...
- Patent number 10,340,118
- Issue date Jul 2, 2019
- Jeol Ltd.
- Ryusuke Sagawa
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle system and method for measuring deflection fields...
- Patent number 10,332,720
- Issue date Jun 25, 2019
- Jeol Ltd.
- Kazuya Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wide field atmospheric scanning electron microscope
- Patent number 10,262,832
- Issue date Apr 16, 2019
- Gerasimos Daniel Danilatos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,249,474
- Issue date Apr 2, 2019
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement system and measurement method
- Patent number 10,002,743
- Issue date Jun 19, 2018
- Hitachi High-Technologies Corporation
- Shoji Hotta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning electron microscope and sample observation method
- Patent number 9,991,092
- Issue date Jun 5, 2018
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
- Publication number 20240395499
- Publication date Nov 28, 2024
- RINKEN
- Takahiro SHIMOJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...
- Publication number 20240379327
- Publication date Nov 14, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yuval Tsedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PREPARING A SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPY (...
- Publication number 20240297015
- Publication date Sep 5, 2024
- FEI Company
- Ludek Cervinka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...
- Publication number 20240290571
- Publication date Aug 29, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...
- Publication number 20240212977
- Publication date Jun 27, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...
- Publication number 20240128050
- Publication date Apr 18, 2024
- FEI Company
- Yuchen DENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Imaging And Milling A Sample
- Publication number 20230162945
- Publication date May 25, 2023
- FEI Company
- Jaroslav Velcovský
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING
- Publication number 20230145436
- Publication date May 11, 2023
- DIRECT ELECTRON, LP
- Benjamin BAMMES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
- Publication number 20230088951
- Publication date Mar 23, 2023
- NuFlare Technology, Inc.
- Masataka SHIRATSUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
- Publication number 20220392793
- Publication date Dec 8, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION
- Publication number 20220351936
- Publication date Nov 3, 2022
- Carl Zeiss MultiSEM GmbH
- Nicolas Kaufmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220328281
- Publication date Oct 13, 2022
- Hitachi High-Tech Corporation
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods of determining aberrations in images obtained b...
- Publication number 20220328282
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Yifeng SHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING CD USING SCANNING ELECTRON MICROSCOPE
- Publication number 20220299315
- Publication date Sep 22, 2022
- Samsung Electronics Co., Ltd.
- JOOHO KIM
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam System and Method For Determining Observation...
- Publication number 20220246394
- Publication date Aug 4, 2022
- Hitachi High-Tech Corporation
- Fumiya ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCINTILLATOR FOR CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTIC...
- Publication number 20220244412
- Publication date Aug 4, 2022
- HITACHI HIGH-TECH CORPORATION
- Eri TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20220122804
- Publication date Apr 21, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki YOKOSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RAPID AND AUTOMATIC VIRUS IMAGING AND ANALYSIS SYSTEM AS WELL AS ME...
- Publication number 20220108443
- Publication date Apr 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged-Particle Beam Device and Cross-Sectional Shape Estimation P...
- Publication number 20210366685
- Publication date Nov 25, 2021
- Hitachi High-Tech Corporation
- Toshiyuki YOKOSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPER-RESOLUTION MICROSCOPY
- Publication number 20210366688
- Publication date Nov 25, 2021
- UNITED KINGDOM RESEARCH AND INNOVATION
- Lin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...
- Publication number 20210343499
- Publication date Nov 4, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE FORMING METHOD AND IMPEDANCE MICROSCOPE
- Publication number 20210270758
- Publication date Sep 2, 2021
- National Institute of Advanced Industrial Science and Technology
- Toshihiko OGURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image Generation Method, Non-Transitory Computer-Readable Medium, a...
- Publication number 20210043418
- Publication date Feb 11, 2021
- HITACHI HIGH-TECH CORPORATION
- Chikako ABE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20200312615
- Publication date Oct 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki YOKOSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFRACTION PATTERN DETECTION IN A TRANSMISSION CHARGED PARTICLE MI...
- Publication number 20200144022
- Publication date May 7, 2020
- FEI Company
- Bart BUIJSSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CROSS-SECTION OBSERVATION DEVICE, AND CONTROL METHOD
- Publication number 20200111639
- Publication date Apr 9, 2020
- Hitachi High-Tech Science Corporation
- XIN MAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUS FOR HIGH THROUGHPUT SEM AND AFM FOR CHARACTER...
- Publication number 20200006035
- Publication date Jan 2, 2020
- Nanowear Inc.
- Vijay Varadan
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20190180979
- Publication date Jun 13, 2019
- Hitachi High-Technologies Corporation
- Toshiyuki YOKOSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN OBSERVATION METHOD
- Publication number 20190051489
- Publication date Feb 14, 2019
- Hitachi High-Technologies Corporation
- Kiyotaka Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20190035600
- Publication date Jan 31, 2019
- Hitachi High-Technologies Corporation
- Kei SAKAI
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the imaging method

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam system and method for determining observation...

Systems and methods of determining aberrations in images obtained b...

Charged particle beam device

System comprising a multi-beam particle microscope and method for o...

Scintillator for charged particle beam apparatus and charged partic...

Charged particle beam device

Method for measuring CD using scanning electron microscope

Super-resolution microscopy

Cross-section observation device, and control method

Rapid and automatic virus imaging and analysis system as well as me...

Image forming method and impedance microscope

Image generation method, non-transitory computer-readable medium, a...

Charged-particle beam device and cross-sectional shape estimation p...

Charged particle beam device

Diffraction pattern detection in a transmission charged particle mi...

Charged particle beam device for imaging vias inside trenches

Method of image acquisition and electron microscope

Specimen observation method

Scanning electron microscope and sample observation method

Electron microscope and control method

Charged particle beam device

Methods and apparatus for high throughput SEM and AFM for character...

Methods and apparatus for high throughput SEM and AFM for character...

Electron microscope and image acquisition method

Scanning transmission electron microscope and method of image gener...

Charged particle system and method for measuring deflection fields...

Wide field atmospheric scanning electron microscope

Charged particle beam device

Measurement system and measurement method

Scanning electron microscope and sample observation method

Patents Applicationslast 30 patents

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...

METHOD OF PREPARING A SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPY (...

CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...

SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...

METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...

Method Of Imaging And Milling A Sample

METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER

MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION

CHARGED PARTICLE BEAM DEVICE

Systems and methods of determining aberrations in images obtained b...

METHOD FOR MEASURING CD USING SCANNING ELECTRON MICROSCOPE

Charged Particle Beam System and Method For Determining Observation...

SCINTILLATOR FOR CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTIC...

Charged Particle Beam Device

RAPID AND AUTOMATIC VIRUS IMAGING AND ANALYSIS SYSTEM AS WELL AS ME...

Charged-Particle Beam Device and Cross-Sectional Shape Estimation P...

SUPER-RESOLUTION MICROSCOPY

SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...

IMAGE FORMING METHOD AND IMPEDANCE MICROSCOPE

Image Generation Method, Non-Transitory Computer-Readable Medium, a...

Charged Particle Beam Device

DIFFRACTION PATTERN DETECTION IN A TRANSMISSION CHARGED PARTICLE MI...

CROSS-SECTION OBSERVATION DEVICE, AND CONTROL METHOD

METHODS AND APPARATUS FOR HIGH THROUGHPUT SEM AND AFM FOR CHARACTER...

CHARGED PARTICLE BEAM DEVICE

SPECIMEN OBSERVATION METHOD

Charged Particle Beam Device