characterised by the imaging problems involved

Industry

CPC
H01J2237/2809

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2809characterised by the imaging problems involved

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
- Patent number 12,080,513
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measuring apparatus and method of setting observation condition
- Patent number 11,043,358
- Issue date Jun 22, 2021
- HITACHI HIGH-TECH CORPORATION
- Ryoko Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffraction pattern detection in a transmission charged particle mi...
- Patent number 11,004,655
- Issue date May 11, 2021
- FEI Company
- Bart Buijsse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,971,328
- Issue date Apr 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Takanori Kishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Guided scanning electron microscopy metrology based on wafer topogr...
- Patent number 10,957,608
- Issue date Mar 23, 2021
- KLA-Tencor Corporation
- Arpit Yati
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of image acquisition and electron microscope
- Patent number 10,923,314
- Issue date Feb 16, 2021
- Jeol Ltd.
- Akiho Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of aberration measurement and electron microscope
- Patent number 10,886,099
- Issue date Jan 5, 2021
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device with distance setting between irradiat...
- Patent number 10,879,037
- Issue date Dec 29, 2020
- HITACHI HIGH-TECH CORPORATION
- Natsuki Tsuno
- G01 - MEASURING TESTING
Information Patent Grant
Specimen observation method
- Patent number 10,852,253
- Issue date Dec 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Kiyotaka Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Crystal orientation figure creating device, charged particle beam d...
- Patent number 10,811,217
- Issue date Oct 20, 2020
- Nippon Steel Corporation
- Takafumi Amino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,734,191
- Issue date Aug 4, 2020
- HITACHI HIGH-TECH CORPORATION
- Takanori Kishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using deep learning based defect detection and classification schem...
- Patent number 10,672,588
- Issue date Jun 2, 2020
- KLA-Tencor Corporation
- Hari Pathangi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image generation method
- Patent number 10,614,999
- Issue date Apr 7, 2020
- TASMIT, INC.
- Shinichi Nakazawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 10,586,676
- Issue date Mar 10, 2020
- Hitachi High-Technologies Corporation
- Takanori Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for adjusting imaging co...
- Patent number 10,566,172
- Issue date Feb 18, 2020
- Hitachi High-Technologies Corporation
- Tomohito Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus
- Patent number 10,522,319
- Issue date Dec 31, 2019
- Hitachi High-Technologies Corporation
- Keigo Kasuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder and electron microscope
- Patent number 10,504,690
- Issue date Dec 10, 2019
- Jeol Ltd.
- Kazuki Yagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction method, aberration correction system, and cha...
- Patent number 10,446,361
- Issue date Oct 15, 2019
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sparse sampling methods and probe systems for analytical instruments
- Patent number 10,431,419
- Issue date Oct 1, 2019
- Battelle Memorial Institute
- Libor Kovarik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for computing angular range for measurement of ab...
- Patent number 10,332,719
- Issue date Jun 25, 2019
- Jeol Ltd.
- Shigeyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection of a lithographic mask that is protected by a pellicle
- Patent number 10,156,785
- Issue date Dec 18, 2018
- Applied Materials Israel Ltd.
- Alon Litman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,121,632
- Issue date Nov 6, 2018
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 9,997,326
- Issue date Jun 12, 2018
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuit tracing using a focused ion beam
- Patent number 9,915,628
- Issue date Mar 13, 2018
- TECHINSIGHTS INC.
- Christopher Pawlowicz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and charged particle beam device contr...
- Patent number 9,881,769
- Issue date Jan 30, 2018
- Hitachi High-Technologies Corporation
- Kenji Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving quality of scanning charged particle microscope...
- Patent number 9,859,093
- Issue date Jan 2, 2018
- Hitachi High-Technologies Corporation
- Kenji Nakahira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for computing amount of drift and charged particl...
- Patent number 9,773,315
- Issue date Sep 26, 2017
- Jeol Ltd.
- Masaki Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus and method of correcting landing an...
- Patent number 9,679,744
- Issue date Jun 13, 2017
- Hitachi High-Technologies Corporation
- Masumi Shirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for line pattern shape evaluation
- Patent number 9,658,063
- Issue date May 23, 2017
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning transmission electron microscope having multiple beams and...
- Patent number 9,607,804
- Issue date Mar 28, 2017
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
- Publication number 20240395499
- Publication date Nov 28, 2024
- RINKEN
- Takahiro SHIMOJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEM IMAGE ENHANCEMENT
- Publication number 20240212108
- Publication date Jun 27, 2024
- ASML NETHERLANDS B.V.
- Thomas Jarik HUISMAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam System
- Publication number 20240177964
- Publication date May 30, 2024
- Hitachi High-Tech Corporation
- Heita KIMIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE ENHANCEMENT BASED ON CHARGE ACCUMULATION REDUCTION IN CHARGED...
- Publication number 20230162944
- Publication date May 25, 2023
- ASML NETHERLANDS B.V.
- Xiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR OBSERVING PERMEATION AND DIFFUSION PATH OF OBSERVATION T...
- Publication number 20230127466
- Publication date Apr 27, 2023
- National Institute for Materials Science
- Akiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF CONTROL OF A CHARGED PARTICLE BEAM
- Publication number 20230048580
- Publication date Feb 16, 2023
- ASML NETHERLANDS B.V.
- Albertus Victor Gerardus MANGNUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods of determining aberrations in images obtained b...
- Publication number 20220328282
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Yifeng SHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Overlay Measurement System and Overlay Measurement Device
- Publication number 20220319804
- Publication date Oct 6, 2022
- Hitachi High-Tech Corporation
- Masaki SUGIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20220301811
- Publication date Sep 22, 2022
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20200312606
- Publication date Oct 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Takanori KISHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USING DEEP LEARNING BASED DEFECT DETECTION AND CLASSIFICATION SCHEM...
- Publication number 20200161081
- Publication date May 21, 2020
- KLA-Tencor Corporation
- Hari Pathangi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DIFFRACTION PATTERN DETECTION IN A TRANSMISSION CHARGED PARTICLE MI...
- Publication number 20200144022
- Publication date May 7, 2020
- FEI Company
- Bart BUIJSSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING APPARATUS AND METHOD OF SETTING OBSERVATION CONDITION
- Publication number 20200111638
- Publication date Apr 9, 2020
- Hitachi High-Technologies Corporation
- Ryoko ARAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTAL ORIENTATION FIGURE CREATING DEVICE, CHARGED PARTICLE BEAM D...
- Publication number 20200066480
- Publication date Feb 27, 2020
- NIPPON STEEL CORPORATION
- Takafumi AMINO
- G01 - MEASURING TESTING
Information Patent Application
Method of Aberration Measurement and Electron Microscope
- Publication number 20190267210
- Publication date Aug 29, 2019
- JEOL Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE
- Publication number 20190198284
- Publication date Jun 27, 2019
- Hitachi High-Technologies Corporation
- Soichiro MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Method for Adjusting Imaging Co...
- Publication number 20190172676
- Publication date Jun 6, 2019
- Hitachi High-Technologies Corporation
- Tomohito NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20190108970
- Publication date Apr 11, 2019
- Hitachi High-Technologies Corporation
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN OBSERVATION METHOD
- Publication number 20190051489
- Publication date Feb 14, 2019
- Hitachi High-Technologies Corporation
- Kiyotaka Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPARSE SAMPLING METHODS AND PROBE SYSTEMS FOR ANALYTICAL INSTRUMENTS
- Publication number 20180025887
- Publication date Jan 25, 2018
- Battelle Memorial Institute
- Libor Kovarik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Noise Mitigation in a Multi-Beam Scanning Ele...
- Publication number 20170084423
- Publication date Mar 23, 2017
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Improving Quality of Scanning Charged Particle Microscope...
- Publication number 20160343540
- Publication date Nov 24, 2016
- Hitachi High-Technologies Corporation
- Kenji NAKAHIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS
- Publication number 20160322192
- Publication date Nov 3, 2016
- EBARA CORPORATION
- Takehide HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND...
- Publication number 20160300689
- Publication date Oct 13, 2016
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND...
- Publication number 20160300688
- Publication date Oct 13, 2016
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20160217967
- Publication date Jul 28, 2016
- Hitachi High-Technologies Corporation
- Hideto DOHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and Method for Computing Amount of Drift and Charged Particl...
- Publication number 20160019696
- Publication date Jan 21, 2016
- JEOL Ltd.
- Masaki Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Device and Method for Computing Angular Range for Measurement of Ab...
- Publication number 20160020066
- Publication date Jan 21, 2016
- JEOL Ltd.
- Shigeyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150228443
- Publication date Aug 13, 2015
- Hitachi High-Technologies Corporation
- Kenichi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20150144804
- Publication date May 28, 2015
- Hitachi High-Technologies Corporation
- Tohru Ando
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the imaging problems involved

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cross-talk cancellation in multiple charged-particle beam inspection

Measuring apparatus and method of setting observation condition

Diffraction pattern detection in a transmission charged particle mi...

Charged particle beam device

Guided scanning electron microscopy metrology based on wafer topogr...

Method of image acquisition and electron microscope

Method of aberration measurement and electron microscope

Charged particle beam device with distance setting between irradiat...

Specimen observation method

Crystal orientation figure creating device, charged particle beam d...

Charged particle beam device

Using deep learning based defect detection and classification schem...

Image generation method

Charged particle beam device

Charged particle beam apparatus and method for adjusting imaging co...

Electron beam apparatus

Sample holder and electron microscope

Aberration correction method, aberration correction system, and cha...

Sparse sampling methods and probe systems for analytical instruments

Device and method for computing angular range for measurement of ab...

Inspection of a lithographic mask that is protected by a pellicle

Charged particle beam apparatus

Charged particle beam device

Circuit tracing using a focused ion beam

Charged particle beam device and charged particle beam device contr...

Method of improving quality of scanning charged particle microscope...

Device and method for computing amount of drift and charged particl...

Charged particle beam apparatus and method of correcting landing an...

Method and device for line pattern shape evaluation

Scanning transmission electron microscope having multiple beams and...

Patents Applicationslast 30 patents

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

SEM IMAGE ENHANCEMENT

Charged Particle Beam System

IMAGE ENHANCEMENT BASED ON CHARGE ACCUMULATION REDUCTION IN CHARGED...

DEVICE FOR OBSERVING PERMEATION AND DIFFUSION PATH OF OBSERVATION T...

APPARATUS FOR AND METHOD OF CONTROL OF A CHARGED PARTICLE BEAM

Systems and methods of determining aberrations in images obtained b...

Overlay Measurement System and Overlay Measurement Device

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

Charged Particle Beam Device

USING DEEP LEARNING BASED DEFECT DETECTION AND CLASSIFICATION SCHEM...

DIFFRACTION PATTERN DETECTION IN A TRANSMISSION CHARGED PARTICLE MI...

MEASURING APPARATUS AND METHOD OF SETTING OBSERVATION CONDITION

CRYSTAL ORIENTATION FIGURE CREATING DEVICE, CHARGED PARTICLE BEAM D...

Method of Aberration Measurement and Electron Microscope

ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE

Charged Particle Beam Apparatus and Method for Adjusting Imaging Co...

CHARGED PARTICLE BEAM DEVICE

SPECIMEN OBSERVATION METHOD

SPARSE SAMPLING METHODS AND PROBE SYSTEMS FOR ANALYTICAL INSTRUMENTS

Method and System for Noise Mitigation in a Multi-Beam Scanning Ele...

Method of Improving Quality of Scanning Charged Particle Microscope...

INSPECTION APPARATUS

SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND...

SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND...

Charged Particle Beam Device

Device and Method for Computing Amount of Drift and Charged Particl...

Device and Method for Computing Angular Range for Measurement of Ab...

CHARGED PARTICLE BEAM APPARATUS

Charged Particle Beam Apparatus