characterised by the method used for generating reactive gas streams

Industry

CPC
C23C16/448

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/448characterised by the method used for generating reactive gas streams

Industries

Patents Grantslast 30 patents

Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,344,930
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Yuichi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid raw material supplying method and gas supply apparatus
- Patent number 12,344,936
- Issue date Jul 1, 2025
- TOLYO ELECTRON LIMITED
- Hiroaki Dewa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of ceramic layers using liquid organometallic precursors
- Patent number 12,344,932
- Issue date Jul 1, 2025
- X ENERGY, LLC.
- Howard Taery Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 12,341,004
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporization system
- Patent number 12,331,401
- Issue date Jun 17, 2025
- Horiba Stec, Co., Ltd.
- Akihiro Taguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for controlling precursor delivery
- Patent number 12,334,364
- Issue date Jun 17, 2025
- Entegris, Inc.
- Michael Watson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing gallium oxide film
- Patent number 12,327,725
- Issue date Jun 10, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takenori Watabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-temperature quartz insert design for controlling material input
- Patent number 12,320,000
- Issue date Jun 3, 2025
- Massachusetts Institute of Technology
- Vladimir Bulovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Refillable large volume solid precursor sublimation vessel
- Patent number 12,319,999
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solids vaporizer
- Patent number 12,312,685
- Issue date May 27, 2025
- Entegris, Inc.
- Benjamin Cardozo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing N-doped carbon nanomesh
- Patent number 12,312,679
- Issue date May 27, 2025
- Joz̃Stefan Institute
- Miran Mozetic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of producing single-layer transition metal selenide
- Patent number 12,305,277
- Issue date May 20, 2025
- City University of Hong Kong
- Thuc Hue Ly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid precursor vapor pressure control
- Patent number 12,297,533
- Issue date May 13, 2025
- ASM IP Holding B.V.
- Michael Schmotzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal chalcogenide film and method and device for manufacturing the...
- Patent number 12,297,532
- Issue date May 13, 2025
- Samsung Electronics Co., Ltd.
- Kyung-Eun Byun
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Precursor delivery systems, precursor supply packages, and related...
- Patent number 12,258,662
- Issue date Mar 25, 2025
- Entegris, Inc.
- Paolo Moreschini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing oxide film and display appara...
- Patent number 12,258,663
- Issue date Mar 25, 2025
- LG Display Co., Ltd.
- Jaeyoon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming method and raw material solution
- Patent number 12,247,285
- Issue date Mar 11, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takahiro Sakatsume
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow control method using plasma system
- Patent number 12,247,290
- Issue date Mar 11, 2025
- Samsung Electronics Co., Ltd.
- Suncheul Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carbon nanotube preparation system
- Patent number 12,234,551
- Issue date Feb 25, 2025
- SUZHOU JERNANO CARBON CO., LTD.
- Zhenzhong Yong
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Vapor accumulator for corrosive gases with purging
- Patent number 12,227,842
- Issue date Feb 18, 2025
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of forming a semiconductor layer
- Patent number 12,224,175
- Issue date Feb 11, 2025
- Infineon Technologies AG
- Olaf Fiedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Increased deposition efficiency via dual reactor system
- Patent number 12,209,199
- Issue date Jan 28, 2025
- Robert Eugene Askin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 12,209,309
- Issue date Jan 28, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takenori Watabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,198,929
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing oxide crystal thin film
- Patent number 12,195,844
- Issue date Jan 14, 2025
- FLOSFIA INC.
- Masaya Oda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and device for providing vapor
- Patent number 12,188,122
- Issue date Jan 7, 2025
- Singulus Technologies AG
- Oliver Hohn
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for producing gallium precursor and method for producing lam...
- Patent number 12,180,585
- Issue date Dec 31, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi Hashigami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat-dissipating circuit board, heat-dissipating member, and produc...
- Patent number 12,177,972
- Issue date Dec 24, 2024
- NOF Corporation
- Toshinobu Fujimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature-controlled chemical delivery system and reactor system...
- Patent number 12,163,225
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR MAKING MULTICOMPONENT PEROVSKITES
- Publication number 20250212674
- Publication date Jun 26, 2025
- OXFORD PHOTOVOLTAICS LIMITED
- Lidón Gil ESCRIG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL ORGANOPLATINUM COMPOUND, METHOD FOR MANUFACTURING SAME, METHO...
- Publication number 20250197433
- Publication date Jun 19, 2025
- Korea Research Institute of Chemical Technology
- Chang Gyoun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING SOURCE HAVING A REFILL DEVICE
- Publication number 20250188589
- Publication date Jun 12, 2025
- SINGULUS TECHNOLOGIES AG
- Sergiy BORODIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR FOR FORMING METAL THIN FILM, MANUFACTURING METHOD USING T...
- Publication number 20250154648
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Hyunwoo KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING FACILITY AND SHOWER HEAD COATING METHOD...
- Publication number 20250146129
- Publication date May 8, 2025
- SEMES CO., LTD.
- Yeong Gyu KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR ACCUMULATOR FOR CORROSIVE GASES WITH PURGING
- Publication number 20250137125
- Publication date May 1, 2025
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20250129471
- Publication date Apr 24, 2025
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE ZONE HEATED ENCLOSURE FOR OPTIMIZED SUBLIMATION OF SOLID-P...
- Publication number 20250106944
- Publication date Mar 27, 2025
- VERSUM MATERIALS US, LLC
- THOMAS W. PILTZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105000
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105001
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON CARBIDE CONVERSION COAT ON CARBON USING G...
- Publication number 20250092512
- Publication date Mar 20, 2025
- GOODRICH CORPORATION
- STEVEN POTEET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR CAPSULE, A VESSEL AND A METHOD
- Publication number 20250092517
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE
- Publication number 20250075322
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Takuya HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF SUPPRESSING OXYGEN INC...
- Publication number 20250075319
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF USING A THERMAL LASER EVAPORATION SYSTEM AND THERMAL LASE...
- Publication number 20250066911
- Publication date Feb 27, 2025
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang BRAUN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF USING A THERMAL LASER EVAPORATION SYSTEM AND THERMAL LASE...
- Publication number 20250066912
- Publication date Feb 27, 2025
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang BRAUN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COM...
- Publication number 20250059642
- Publication date Feb 20, 2025
- Tanaka Kikinzoku Kogyo K.K.
- Kazuharu SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM, A SEMICONDUCTOR PRECURSOR STORAGE...
- Publication number 20250059644
- Publication date Feb 20, 2025
- ASM IP HOLDING B.V.
- Dieter Pierreux
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFIGURABLE SOURCE
- Publication number 20250043417
- Publication date Feb 6, 2025
- ULTRA CLEAN HOLDINGS, INC
- Michael RAMACCIOTTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR DELIVERY VESSEL, PRECURSOR DELIVERY SYSTEM, AND PRECURSOR...
- Publication number 20250034703
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Quentin Nikitas Nicolas Lionel Eric Tricas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR CHEMICAL PRECURSOR WITH GAS PASSAGES
- Publication number 20250027199
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE SYNTHESIS METHOD OF TWO DIMENSIONAL MATERIAL
- Publication number 20250027193
- Publication date Jan 23, 2025
- UIF (UNIVERSITY INDUSTRY FOUNDATION), YONSEI UNIVERSITY
- Jong-Hyun AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC VAPOR JET PRINTING SYSTEM
- Publication number 20250024746
- Publication date Jan 16, 2025
- THE REGENTS OF THE UNIVERSITY OF MICHIGAN, INNOVATION PARTNERSHIPS
- Stephen R. FORREST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL GETTERS IN VAPORIZERS FOR IMPURITY REMOVAL
- Publication number 20250019822
- Publication date Jan 16, 2025
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
- Publication number 20250011930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Kentaro GOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...
- Publication number 20250011933
- Publication date Jan 9, 2025
- TORAY ENGINEERING CO., LTD.
- Naoto SUGANUMA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESS APPARATUS INCLUDING GAS SUPPLIER AND METHOD OF OPERATING TH...
- Publication number 20250010257
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- Dongsik Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PRODUCING COATED SUBSTRATES AND COATED SUBSTRATE AND US...
- Publication number 20250003080
- Publication date Jan 2, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Kevin SCHUCK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING RAW MATERIAL, METHOD OF PRODUCING THIN-FILM, THIN...
- Publication number 20240425975
- Publication date Dec 26, 2024
- ADEKA CORPORATION
- Masako HATASE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD, AND OXIDE SEMICONDU...
- Publication number 20240425982
- Publication date Dec 26, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method used for generating reactive gas streams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Deposition method and deposition apparatus

Liquid raw material supplying method and gas supply apparatus

Deposition of ceramic layers using liquid organometallic precursors

Film formation method and film formation apparatus

Vaporization system

Systems and methods for controlling precursor delivery

Method for manufacturing gallium oxide film

High-temperature quartz insert design for controlling material input

Refillable large volume solid precursor sublimation vessel

Solids vaporizer

Method for producing N-doped carbon nanomesh

Methods of producing single-layer transition metal selenide

Liquid precursor vapor pressure control

Metal chalcogenide film and method and device for manufacturing the...

Precursor delivery systems, precursor supply packages, and related...

Apparatus and method of manufacturing oxide film and display appara...

Film-forming method and raw material solution

Flow control method using plasma system

Carbon nanotube preparation system

Vapor accumulator for corrosive gases with purging

Apparatus and method of forming a semiconductor layer

Increased deposition efficiency via dual reactor system

Film forming method

Concentration control using a bubbler

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing oxide crystal thin film

Process and device for providing vapor

Method for producing gallium precursor and method for producing lam...

Heat-dissipating circuit board, heat-dissipating member, and produc...

Temperature-controlled chemical delivery system and reactor system...

Patents Applicationslast 30 patents

PROCESS FOR MAKING MULTICOMPONENT PEROVSKITES

NOVEL ORGANOPLATINUM COMPOUND, METHOD FOR MANUFACTURING SAME, METHO...

COATING SOURCE HAVING A REFILL DEVICE

PRECURSOR FOR FORMING METAL THIN FILM, MANUFACTURING METHOD USING T...

SEMICONDUCTOR MANUFACTURING FACILITY AND SHOWER HEAD COATING METHOD...

VAPOR ACCUMULATOR FOR CORROSIVE GASES WITH PURGING

FILM FORMING APPARATUS AND FILM FORMING METHOD

MULTIPLE ZONE HEATED ENCLOSURE FOR OPTIMIZED SUBLIMATION OF SOLID-P...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF FORMING SILICON CARBIDE CONVERSION COAT ON CARBON USING G...

PRECURSOR CAPSULE, A VESSEL AND A METHOD

METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF SUPPRESSING OXYGEN INC...

METHOD OF USING A THERMAL LASER EVAPORATION SYSTEM AND THERMAL LASE...

METHOD OF USING A THERMAL LASER EVAPORATION SYSTEM AND THERMAL LASE...

RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COM...

SEMICONDUCTOR PROCESSING SYSTEM, A SEMICONDUCTOR PRECURSOR STORAGE...

CONFIGURABLE SOURCE

PRECURSOR DELIVERY VESSEL, PRECURSOR DELIVERY SYSTEM, AND PRECURSOR...

SEMICONDUCTOR CHEMICAL PRECURSOR WITH GAS PASSAGES

LOW TEMPERATURE SYNTHESIS METHOD OF TWO DIMENSIONAL MATERIAL

ORGANIC VAPOR JET PRINTING SYSTEM

METAL GETTERS IN VAPORIZERS FOR IMPURITY REMOVAL

Substrate Processing Apparatus, Substrate Processing Method, Method...

LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...

PROCESS APPARATUS INCLUDING GAS SUPPLIER AND METHOD OF OPERATING TH...

PROCESS FOR PRODUCING COATED SUBSTRATES AND COATED SUBSTRATE AND US...

THIN-FILM FORMING RAW MATERIAL, METHOD OF PRODUCING THIN-FILM, THIN...

FILM FORMING APPARATUS AND FILM FORMING METHOD, AND OXIDE SEMICONDU...