characterised by the method used for generating reactive gas streams

Industry

CPC
C23C16/448

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/448characterised by the method used for generating reactive gas streams

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material supply apparatus and raw material supply method
- Patent number 11,965,242
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Seishi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for making a vapor of precise concentration by...
- Patent number 11,965,243
- Issue date Apr 23, 2024
- CeeVee Tech, LLC
- Egbert G. Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organo tin compound for thin film deposition and method for forming...
- Patent number 11,958,874
- Issue date Apr 16, 2024
- EGTM CO., LTD.
- Jang Keun Sim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fill on demand ampoule refill
- Patent number 11,959,175
- Issue date Apr 16, 2024
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source precursor vessel
- Patent number 11,959,168
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor supply unit, substrate processing system, and method of f...
- Patent number 11,959,170
- Issue date Apr 16, 2024
- Samsung Electronics Co., Ltd.
- Soyoung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing device
- Patent number 11,946,136
- Issue date Apr 2, 2024
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and associated accessories, methods and uses for visualis...
- Patent number 11,937,919
- Issue date Mar 26, 2024
- The Secretary of State for Defence
- Roberto Stefano Pasquale King
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Process and apparatus for synthesizing multiwall carbon nanotubes f...
- Patent number 11,932,541
- Issue date Mar 19, 2024
- Ngee Ann Polytechnic
- Sundaramurthy Jayaraman
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,926,894
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for fabricating high quality superconducting tapes
- Patent number 11,923,105
- Issue date Mar 5, 2024
- University of Houston System
- Goran Majkic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,913,112
- Issue date Feb 27, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasmonic metal/graphene heterostructures and related methods
- Patent number 11,908,960
- Issue date Feb 20, 2024
- University of Kansas
- Judy Z. Wu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Concentration control system, concentration control method and prog...
- Patent number 11,906,984
- Issue date Feb 20, 2024
- Horiba Stec, Co., Ltd.
- Kotaro Takijiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pigments having a vapor deposited colorant
- Patent number 11,891,524
- Issue date Feb 6, 2024
- Viavi Solutions Inc.
- Alberto Argoitia
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for making a PD-coated electrode
- Patent number 11,891,707
- Issue date Feb 6, 2024
- King Fahd University of Petroleum & Minerals
- Muhammad Ali Ehsan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene synthesis
- Patent number 11,885,012
- Issue date Jan 30, 2024
- Commonwealth Scientific and Industrial Research Organization
- Dong Han Seo
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Alkoxysilacyclic or acyloxysilacyclic compounds and methods for dep...
- Patent number 11,884,689
- Issue date Jan 30, 2024
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer and method for manufacture thereof
- Patent number 11,885,017
- Issue date Jan 30, 2024
- WELCON INC.
- Yutaka Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material supply apparatus and film forming apparatus
- Patent number 11,873,556
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Tomohisa Kimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 11,869,764
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer, substrate processing apparatus, and method of manufactur...
- Patent number 11,866,822
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ampoule for a semiconductor manufacturing precursor
- Patent number 11,859,281
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a coating on a yarn in a microwave field
- Patent number 11,858,859
- Issue date Jan 2, 2024
- SAFRAN CERAMICS
- Arnaud Delehouze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,854,799
- Issue date Dec 26, 2023
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus and a method of forming...
- Patent number 11,851,755
- Issue date Dec 26, 2023
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, system, and method for generating gas for use in a proce...
- Patent number 11,834,740
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- David Marquardt
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Precursor supply system and precursors supply method
- Patent number 11,819,838
- Issue date Nov 21, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Toshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...
- Publication number 20240145301
- Publication date May 2, 2024
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE PRECURSOR DELIVERY SYSTEM
- Publication number 20240141485
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...
- Publication number 20240141498
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...
- Publication number 20240136179
- Publication date Apr 25, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD...
- Publication number 20240124971
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE
- Publication number 20240124973
- Publication date Apr 18, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING RAW MATERIAL SOLUTION, METHOD OF FILM-FORMING A...
- Publication number 20240124974
- Publication date Apr 18, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takenori WATABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCATALYST WITH A NiMoO4 LAYER WITH NANOFLOWER MORPHOLOGY
- Publication number 20240124991
- Publication date Apr 18, 2024
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Muhammad Ali EHSAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...
- Publication number 20240124972
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Kyungrim KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIGMENTS HAVING A VAPOR DEPOSITED COLORANT
- Publication number 20240117194
- Publication date Apr 11, 2024
- VIAVI SOLUTIONS INC.
- Alberto Argoitia
- C01 - INORGANIC CHEMISTRY
Information Patent Application
LIQUID-SOURCE PRECURSOR DELIVERY SYSTEM APPARATUS AND METHOD OF USI...
- Publication number 20240117492
- Publication date Apr 11, 2024
- ASM IP HOLDING B.V.
- Koei Aida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING GALLIUM PRECURSOR AND METHOD FOR PRODUCING LAM...
- Publication number 20240102159
- Publication date Mar 28, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID RAW MATERIAL SUPPLYING METHOD AND GAS SUPPLY APPARATUS
- Publication number 20240093371
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Hiroaki DEWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...
- Publication number 20240096615
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Akinori TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20240071750
- Publication date Feb 29, 2024
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COM...
- Publication number 20240060176
- Publication date Feb 22, 2024
- Tanaka Kikinzoku Kogyo K.K.
- Kazuharu SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU SOLID CHEMICAL VAPOR DEPOSITION PRECURSOR DELIVERY
- Publication number 20240060178
- Publication date Feb 22, 2024
- Raytheon Technologies Corporation
- Jun Nable
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS
- Publication number 20240052484
- Publication date Feb 15, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatuses for Fabricating Polymeric Conformal Coating...
- Publication number 20240042481
- Publication date Feb 8, 2024
- UCL Business LTD
- Paul Beard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION METHOD AND NiVOx MATERIA...
- Publication number 20240044026
- Publication date Feb 8, 2024
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Muhammad Ali EHSAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR SUPPLY SYSTEM
- Publication number 20240035159
- Publication date Feb 1, 2024
- Samsung Electronics Co., Ltd.
- Kyungrim KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING MONITORING PROCESS
- Publication number 20240035164
- Publication date Feb 1, 2024
- ASM IP HOLDING, B.V.
- Jan Deckers
- G01 - MEASURING TESTING
Information Patent Application
FLOW CONTROL METHOD USING PLASMA SYSTEM
- Publication number 20240026539
- Publication date Jan 25, 2024
- Samsung Electronics Co., Ltd.
- Suncheul Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID VAPORIZER
- Publication number 20240026538
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZER, GAS SUPPLY APPARATUS, AND METHOD OF CONTROLLING GAS SUPP...
- Publication number 20240003006
- Publication date Jan 4, 2024
- Fujikin Incorporated
- Yuta AYAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR ELECTRONIC DEVICES INCLUDING SIDEWALL BARRIER LAYERS...
- Publication number 20230411484
- Publication date Dec 21, 2023
- Corning Incorporated
- Hoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION OF NICKEL SULFIDE NANOWI...
- Publication number 20230407497
- Publication date Dec 21, 2023
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Muhammad Ali EHSAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE METAL-ORGANIC MOLECULAR BEAM EPITAXY FOR DEPOSITION OF...
- Publication number 20230407520
- Publication date Dec 21, 2023
- Regents of the University of Minnesota
- Bharat Jalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING
- Publication number 20230399741
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Marvin Clayton BREES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION SOURCE HAVING DIFFERENT MODES OF OPERATION
- Publication number 20230395357
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the method used for generating reactive gas streams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vaporizer, substrate processing apparatus and method for manufactur...

Sequential infiltration synthesis apparatus

Raw material supply apparatus and raw material supply method

Method and apparatus for making a vapor of precise concentration by...

Organo tin compound for thin film deposition and method for forming...

Fill on demand ampoule refill

Solid source precursor vessel

Precursor supply unit, substrate processing system, and method of f...

Semiconductor processing device

Apparatus and associated accessories, methods and uses for visualis...

Process and apparatus for synthesizing multiwall carbon nanotubes f...

Reactant vaporizer and related systems and methods

Methods and systems for fabricating high quality superconducting tapes

Processes for depositing silicon-containing films using halidosilan...

Plasmonic metal/graphene heterostructures and related methods

Concentration control system, concentration control method and prog...

Pigments having a vapor deposited colorant

Method for making a PD-coated electrode

Graphene synthesis

Alkoxysilacyclic or acyloxysilacyclic compounds and methods for dep...

Vaporizer and method for manufacture thereof

Raw material supply apparatus and film forming apparatus

Substrate processing apparatus, substrate processing method and non...

Vaporizer, substrate processing apparatus, and method of manufactur...

Ampoule for a semiconductor manufacturing precursor

Method for depositing a coating on a yarn in a microwave field

Method of manufacturing semiconductor device, substrate processing...

Sequential infiltration synthesis apparatus and a method of forming...

Apparatus, system, and method for generating gas for use in a proce...

Precursor supply system and precursors supply method

Patents Applicationslast 30 patents

METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...

VAPOR PHASE PRECURSOR DELIVERY SYSTEM

METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...

OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...

VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD...

METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE

METHOD OF PRODUCING RAW MATERIAL SOLUTION, METHOD OF FILM-FORMING A...

ELECTROCATALYST WITH A NiMoO4 LAYER WITH NANOFLOWER MORPHOLOGY

CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...

PIGMENTS HAVING A VAPOR DEPOSITED COLORANT

LIQUID-SOURCE PRECURSOR DELIVERY SYSTEM APPARATUS AND METHOD OF USI...

METHOD FOR PRODUCING GALLIUM PRECURSOR AND METHOD FOR PRODUCING LAM...

LIQUID RAW MATERIAL SUPPLYING METHOD AND GAS SUPPLY APPARATUS

SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COM...

IN-SITU SOLID CHEMICAL VAPOR DEPOSITION PRECURSOR DELIVERY

SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS

Methods and Apparatuses for Fabricating Polymeric Conformal Coating...

AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION METHOD AND NiVOx MATERIA...

PRECURSOR SUPPLY SYSTEM

SEMICONDUCTOR MANUFACTURING MONITORING PROCESS

FLOW CONTROL METHOD USING PLASMA SYSTEM

LIQUID VAPORIZER

VAPORIZER, GAS SUPPLY APPARATUS, AND METHOD OF CONTROLLING GAS SUPP...

SEMICONDUCTOR ELECTRONIC DEVICES INCLUDING SIDEWALL BARRIER LAYERS...

AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION OF NICKEL SULFIDE NANOWI...

SOLID SOURCE METAL-ORGANIC MOLECULAR BEAM EPITAXY FOR DEPOSITION OF...

SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING

ION SOURCE HAVING DIFFERENT MODES OF OPERATION