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characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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CPC
C23C16/455
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/455
characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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Patents Grants
last 30 patents
Information
Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,970,772
Issue date
Apr 30, 2024
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead for providing multiple materials to a process chamber
Patent number
11,970,775
Issue date
Apr 30, 2024
Applied Materials, Inc.
Prashanth Kothnur
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Light emitting sealed body, light emitting unit, and light source d...
Patent number
11,972,931
Issue date
Apr 30, 2024
Hamamatsu Photonics K.K.
Akio Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
Patent number
11,970,771
Issue date
Apr 30, 2024
Kokusai Electric Corporation
Atsushi Morikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for depositing dielectric material
Patent number
11,972,943
Issue date
Apr 30, 2024
Applied Materials, Inc.
Bhargav S. Citla
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing a gap-fill layer by plasma-assisted deposition
Patent number
11,972,944
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Timothee Julien Vincent Blanquart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas transport system
Patent number
11,971,057
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Jheng-Syun Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,768
Issue date
Apr 30, 2024
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition of metal films
Patent number
11,970,776
Issue date
Apr 30, 2024
Lam Research Corporation
Joshua Collins
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus
Patent number
11,970,778
Issue date
Apr 30, 2024
Tokyo Electron Limited
Reita Igarashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus and film forming method
Patent number
11,972,929
Issue date
Apr 30, 2024
Tokyo Electron Limited
Makoto Wada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for chemical vapour deposition
Patent number
11,970,765
Issue date
Apr 30, 2024
Ionautics AB
Henrik Pedersen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sequential infiltration synthesis apparatus
Patent number
11,970,766
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Ivo Johannes Raaijmakers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,767
Issue date
Apr 30, 2024
Tokyo Electron Limited
Taichi Monden
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cyclical deposition methods
Patent number
11,970,769
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Trigagema Gama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for atomic layer deposition (ALD)
Patent number
11,970,773
Issue date
Apr 30, 2024
Beneq Oy
Matti Malila
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of operating a deposition or cleaning apparatus
Patent number
11,970,774
Issue date
Apr 30, 2024
Picosun Oy
Timo Malinen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of low-k films
Patent number
11,970,777
Issue date
Apr 30, 2024
Applied Materials, Inc.
Shuaidi Zhang
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Electrochemical catalysts with enhanced catalytic activity
Patent number
11,973,233
Issue date
Apr 30, 2024
The Board of Trustees of the Leland Stanford Junior University
Friedrich B. Prinz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Precursor solution for thin film deposition and thin film forming m...
Patent number
11,972,941
Issue date
Apr 30, 2024
SK TRICHEM
Chang Sung Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for nucleation of conductive nitride films
Patent number
11,965,239
Issue date
Apr 23, 2024
Entegris, Inc.
Gavin Richards
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,967,501
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Hiroaki Hiramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective deposition of metal oxides on metal surfaces
Patent number
11,965,238
Issue date
Apr 23, 2024
ASM IP Holding B.V.
Andrea Illiberi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
Patent number
11,965,262
Issue date
Apr 23, 2024
ASM IP Holding B.V.
Yong Min Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, substrate processing apparatus using t...
Patent number
11,965,244
Issue date
Apr 23, 2024
Wonik IPS Co., Ltd.
Kyung Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing an alumina dispersible at a pH greater than 8
Patent number
11,965,245
Issue date
Apr 23, 2024
Allison L. Hann
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,967,500
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Arito Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Organo tin compound for thin film deposition and method for forming...
Patent number
11,958,874
Issue date
Apr 16, 2024
EGTM CO., LTD.
Jang Keun Sim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Capacitive sensor for monitoring gas concentration
Patent number
11,959,868
Issue date
Apr 16, 2024
Applied Materials, Inc.
Xiaopu Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective cobalt deposition on copper surfaces
Patent number
11,959,167
Issue date
Apr 16, 2024
Applied Materials, Inc.
Sang-Ho Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR MANUFACTURING DISPLAY DEVICE
Publication number
20240145219
Publication date
May 2, 2024
SAMSUNG DISPLAY CO., LTD.
Min Gyu PARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DUAL DEPOSITION CHAMBER APPARATUS FOR PRODUCING SILICON MATERIAL
Publication number
20240141480
Publication date
May 2, 2024
Feng-Yi Precision Technology Co., Ltd.
Chung-Wen LAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...
Publication number
20240145301
Publication date
May 2, 2024
Soulbrain Co., LTD
Chang Bong YEON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR PHASE PRECURSOR DELIVERY SYSTEM
Publication number
20240141485
Publication date
May 2, 2024
ASM IP HOLDING B.V.
Theodorus G.M. Oosterlaken
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COATED SUBSTRATE SUPPORT ASSEMBLY FOR SUBSTRATE PROCESSING IN PROCE...
Publication number
20240141488
Publication date
May 2, 2024
Applied Materials, Inc.
David JORGENSEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...
Publication number
20240145232
Publication date
May 2, 2024
Applied Materials, Inc.
Feng Q. Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
Publication number
20240141486
Publication date
May 2, 2024
ASM IP HOLDING B.V.
Hannu Huotari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240141490
Publication date
May 2, 2024
Kokusai Electric Corporation
Mika Urushihara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...
Publication number
20240141498
Publication date
May 2, 2024
Applied Materials, Inc.
Zuoming ZHU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ACOUSTIC WAVE ASSISTED CHEMICAL VAPOR IINFILTRATION
Publication number
20240141479
Publication date
May 2, 2024
RTX Corporation
JinQuan Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF APPLYING A DIELECTRIC COATING ON A COMPONENT OF AN ELECTR...
Publication number
20240141503
Publication date
May 2, 2024
Quantinuum LLC
Christopher Todd Ertsgaard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NOZZLE FOR REMOTE PLASMA CLEANING OF PROCESS CHAMBERS
Publication number
20240141482
Publication date
May 2, 2024
LAM RESEARCH CORPORATION
Jeremy Jerome Pool
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EPI OVERLAPPING DISK AND RING
Publication number
20240141487
Publication date
May 2, 2024
Applied Materials, Inc.
Zhepeng CONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME
Publication number
20240141489
Publication date
May 2, 2024
SAMSUNG DISPLAY CO., LTD.
JAEWAN SEOL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240145236
Publication date
May 2, 2024
ASM IP HOLDING B.V.
Hyunchul Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING DEVICE AND FILM FORMING METHOD
Publication number
20240133031
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Jun YAMAWAKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...
Publication number
20240136179
Publication date
Apr 25, 2024
Shin-Etsu Chemical Co., Ltd.
Takahiro SAKATSUME
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
Publication number
20240136192
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ALD DEPOSITION METHOD AND SYSTEM
Publication number
20240133030
Publication date
Apr 25, 2024
ASM IP HOLDING B.V.
Dieter Pierreux
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME
Publication number
20240133033
Publication date
Apr 25, 2024
ASM IP HOLDING B.V.
Jacqueline Wrench
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
Publication number
20240136161
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Karl Frederick LEESER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...
Publication number
20240133029
Publication date
Apr 25, 2024
Shin-Etsu Chemical Co., Ltd.
Takahiro SAKATSUME
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRANSITION METAL DEPOSITION METHOD
Publication number
20240133032
Publication date
Apr 25, 2024
ASM IP HOLDING B.V.
Charles Dezelah
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD...
Publication number
20240124971
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yuichi FURUYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR DEPOSITING CARBON CONDUCTING FILMS BY ATOMIC LAYER DEPO...
Publication number
20240124977
Publication date
Apr 18, 2024
Micron Technology, Inc.
Jean-Sebastien Materne Lehn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUANTUM DOT COMPOSITE STRUCTURE AND A FORMING METHOD THEREOF
Publication number
20240124350
Publication date
Apr 18, 2024
Lextar Electronics Corporation
Ching LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE
Publication number
20240124973
Publication date
Apr 18, 2024
Shin-Etsu Chemical Co., Ltd.
Hiroshi HASHIGAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEALING MATERIAL FOR COMPOUNDS HAVING NON-STOICHIOMETRIC COMPOSITIO...
Publication number
20240128144
Publication date
Apr 18, 2024
THE UNIVERSITY OF TOKYO
Junichi TAKEYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS DIFFUSER PLATE COATED WITH EMISSIVITY-CONTROLLING THIN FILM AND...
Publication number
20240124978
Publication date
Apr 18, 2024
EUGENUS, INC.
Behzad Mahmoudi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING T...
Publication number
20240124979
Publication date
Apr 18, 2024
Sansung Electronics Co., Ltd.
Chan Kyu LIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...