characterized by the ALD cycle

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CPC
C23C16/45527

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45527characterized by the ALD cycle

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods of forming dielectric layers through deposition and anneal...
- Patent number 12,368,044
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wan-Yi Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming a layer comprising aluminum, titani...
- Patent number 12,362,171
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Lifu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of oxides and nitrides
- Patent number 12,359,315
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Henri Jussila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,351,913
- Issue date Jul 8, 2025
- Kioxia Corporation
- Tomoki Ishimaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming doped metal oxide films on a substrate by cyclic...
- Patent number 12,354,872
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for depositing molybdenum layers
- Patent number 12,351,903
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-reflective optical coatings and methods of forming the same
- Patent number 12,339,421
- Issue date Jun 24, 2025
- Corning Incorporated
- Ming-Huang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for homogenous intermixing of precursors in all...
- Patent number 12,331,396
- Issue date Jun 17, 2025
- Lam Research Corporation
- Ilanit Fisher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor delivery system and method for cyclic deposition
- Patent number 12,325,914
- Issue date Jun 10, 2025
- Eugenus, Inc.
- Martin J. Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods using same for thermal deposition silicon-...
- Patent number 12,320,001
- Issue date Jun 3, 2025
- VERSUM MATERIALS US, LLC
- Chandra Haripin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal and smooth titanium nitride layers and methods of forming...
- Patent number 12,308,226
- Issue date May 20, 2025
- Eugenus, Inc.
- Sung-Hoon Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,305,280
- Issue date May 20, 2025
- Kioxia Corporation
- Tomoki Ishimaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of selective atomic layer deposition
- Patent number 12,291,779
- Issue date May 6, 2025
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low refractive index surface layers and related methods
- Patent number 12,281,384
- Issue date Apr 22, 2025
- UChicago Argonne, LLC
- Elena Shevchenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,281,389
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal and smooth titanium nitride layers and methods of forming...
- Patent number 12,283,486
- Issue date Apr 22, 2025
- Eugenus, Inc.
- Hyunchol Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal and smooth titanium nitride layers and methods of forming...
- Patent number 12,272,599
- Issue date Apr 8, 2025
- Eugenus, Inc.
- Hyunchol Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a ceramic matrix composite component
- Patent number 12,269,779
- Issue date Apr 8, 2025
- RTX Corporation
- Paul Sheedy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film using surface protection material
- Patent number 12,247,289
- Issue date Mar 11, 2025
- EGTM CO., LTD.
- Geun Su Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,249,502
- Issue date Mar 11, 2025
- Kokusai Electric Corporation
- Kazuki Nonomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for increasing the density of high-index nanoimprint lithog...
- Patent number 12,242,186
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Andrew Ceballos
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods for depositing a molybdenum nitride film on a surface of a...
- Patent number 12,215,416
- Issue date Feb 4, 2025
- ASM IP Holding B.V.
- Eric Christopher Stevens
- G11 - INFORMATION STORAGE
Information Patent Grant
Deposition of organic films
- Patent number 12,205,820
- Issue date Jan 21, 2025
- ASM IP Holding B.V.
- Eva E. Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Defect free germanium oxide gap fill
- Patent number 12,198,936
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Huiyuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a transition metal containing film on a substrate...
- Patent number 12,173,402
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for continuous atomic layer deposition
- Patent number 12,163,221
- Issue date Dec 10, 2024
- UChicago Argonne, LLC
- Jeffrey W. Elam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for flowable gap-fill
- Patent number 12,129,546
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of area-selective deposition and method of fabricating an el...
- Patent number 12,116,667
- Issue date Oct 15, 2024
- SK Hynix Inc.
- Woo-Hee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhancing gapfill performance of dram word line
- Patent number 12,114,488
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,104,243
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION
- Publication number 20250230545
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND METHOD FOR...
- Publication number 20250223693
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- YU-SEN CHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215564
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215563
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Takashi YOKOGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING INDIUM MOLYBDENUM OXIDE LAYERS AND ASSOCIATED IN...
- Publication number 20250215558
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Hameeda Jagalur Basheer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM SHIELDING AGENT, METHOD OF FORMING THIN FILM USING THIN F...
- Publication number 20250214959
- Publication date Jul 3, 2025
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...
- Publication number 20250201548
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Zhijie Chua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING THIN FILM
- Publication number 20250188607
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- Jungmin Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDING COMPOUND, METHOD OF FORMING THIN FILM USING SHIELDING COM...
- Publication number 20250188599
- Publication date Jun 12, 2025
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS RECYCLING
- Publication number 20250171900
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-PLASMA COATING
- Publication number 20250149302
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Kai Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECT ATOMIC LAYER DEPOSITION AND/OR ETCHING METHOD
- Publication number 20250137117
- Publication date May 1, 2025
- ATLANT 3D
- Ivan KUNDRATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUSES FOR TEMPERATURE INDEXED ALD
- Publication number 20250129473
- Publication date Apr 24, 2025
- ASM IP HOLDING B.V.
- Bert Jongbloed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF ORGANIC FILMS
- Publication number 20250118562
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Eva E. Tois
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SURFACE CLEANING, MODIFICATION AND DOPING OF ARGYRODITE TYPE SOLID...
- Publication number 20250112266
- Publication date Apr 3, 2025
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SEMICONDUCTOR PROCESSING
- Publication number 20250105002
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Hunter Frost
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...
- Publication number 20250092513
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Eric Christopher Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...
- Publication number 20250087534
- Publication date Mar 13, 2025
- EUGENUS, INC.
- Vinayak Veer Vats
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON NITRIDE DEPOSITION
- Publication number 20250069882
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING GERMANIUM FILMS BY ATOMIC LAYER DEPOSITION
- Publication number 20250059646
- Publication date Feb 20, 2025
- Micron Technology, Inc.
- Jean-Sebastien Materne Lehn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOVEL 2-IN-1 (UV-ASSISTED AND PLASMA ENHANCED) ALD & ALE CHAMBER DE...
- Publication number 20250051912
- Publication date Feb 13, 2025
- SKY TECH INC.
- JUNG-HUA CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL
- Publication number 20250011927
- Publication date Jan 9, 2025
- ASM IP HOLDING B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...
- Publication number 20250011928
- Publication date Jan 9, 2025
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Songtao Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250006493
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING INSULATING FILM BY USING ATOMIC LAYER DEPOSITION
- Publication number 20240429043
- Publication date Dec 26, 2024
- Samsung Electronics Co., Ltd.
- Jeonggyu SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING SILICON FILMS BY ATOMIC LAYER DEPOSITION
- Publication number 20240425983
- Publication date Dec 26, 2024
- Micron Technology, Inc.
- Jean-Sebastien Materne Lehn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION PROCESSES
- Publication number 20240417852
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EROSION RESISTANT METAL FLUORIDE COATINGS DEPOSITED BY ATOMIC LAYER...
- Publication number 20240401197
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF PURE METAL FILMS
- Publication number 20240401196
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Shruti Vivek Thombare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20240404822
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the ALD cycle

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of forming dielectric layers through deposition and anneal...

Methods and systems for forming a layer comprising aluminum, titani...

Deposition of oxides and nitrides

Film forming apparatus and film forming method

Method for forming doped metal oxide films on a substrate by cyclic...

Method and system for depositing molybdenum layers

Anti-reflective optical coatings and methods of forming the same

Systems and methods for homogenous intermixing of precursors in all...

Precursor delivery system and method for cyclic deposition

Compositions and methods using same for thermal deposition silicon-...

Conformal and smooth titanium nitride layers and methods of forming...

Film forming apparatus and film forming method

Methods of selective atomic layer deposition

Low refractive index surface layers and related methods

Substrate processing method and substrate processing apparatus

Conformal and smooth titanium nitride layers and methods of forming...

Conformal and smooth titanium nitride layers and methods of forming...

Method for producing a ceramic matrix composite component

Method for forming thin film using surface protection material

Method of manufacturing semiconductor device, substrate processing...

Methods for increasing the density of high-index nanoimprint lithog...

Methods for depositing a molybdenum nitride film on a surface of a...

Deposition of organic films

Defect free germanium oxide gap fill

Method of forming a transition metal containing film on a substrate...

System for continuous atomic layer deposition

Methods and apparatuses for flowable gap-fill

Method of area-selective deposition and method of fabricating an el...

Enhancing gapfill performance of dram word line

Methods and apparatus for processing a substrate

Patents Applicationslast 30 patents

METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION

APPARATUS FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND METHOD FOR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS OF FORMING INDIUM MOLYBDENUM OXIDE LAYERS AND ASSOCIATED IN...

THIN FILM SHIELDING AGENT, METHOD OF FORMING THIN FILM USING THIN F...

METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...

METHOD OF MANUFACTURING THIN FILM

SHIELDING COMPOUND, METHOD OF FORMING THIN FILM USING SHIELDING COM...

PROCESS GAS RECYCLING

ANTI-PLASMA COATING

DIRECT ATOMIC LAYER DEPOSITION AND/OR ETCHING METHOD

METHOD AND APPARATUSES FOR TEMPERATURE INDEXED ALD

DEPOSITION OF ORGANIC FILMS

SURFACE CLEANING, MODIFICATION AND DOPING OF ARGYRODITE TYPE SOLID...

METHOD FOR SEMICONDUCTOR PROCESSING

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...

MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...

SILICON NITRIDE DEPOSITION

METHODS FOR DEPOSITING GERMANIUM FILMS BY ATOMIC LAYER DEPOSITION

NOVEL 2-IN-1 (UV-ASSISTED AND PLASMA ENHANCED) ALD & ALE CHAMBER DE...

METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL

ATOMIC LAYER DEPOSITION METHODS FOR MAKING OMNIDIRECTIONAL STRUCTUR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF FORMING INSULATING FILM BY USING ATOMIC LAYER DEPOSITION

METHODS FOR DEPOSITING SILICON FILMS BY ATOMIC LAYER DEPOSITION

VAPOR DEPOSITION PROCESSES

EROSION RESISTANT METAL FLUORIDE COATINGS DEPOSITED BY ATOMIC LAYER...

DEPOSITION OF PURE METAL FILMS

MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING