characterized by the apparatus

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CPC
C23C16/45544

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45544characterized by the apparatus

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,368,024
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Abdullah Zafar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus with pressure sensor and shower head on same p...
- Patent number 12,365,985
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and method of forming metal oxide layer using...
- Patent number 12,359,313
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,362,143
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Satoru Kawakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming a layer comprising aluminum, titani...
- Patent number 12,362,171
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Lifu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Targeted temporal ALD
- Patent number 12,351,912
- Issue date Jul 8, 2025
- Microsoft Technology Licensing, LLC
- Ville Kalevi Saunajoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Porous inlet
- Patent number 12,351,915
- Issue date Jul 8, 2025
- Picosun Oy
- Marko Pudas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming metal oxide layer using deposition apparatus
- Patent number 12,331,398
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for homogenous intermixing of precursors in all...
- Patent number 12,331,396
- Issue date Jun 17, 2025
- Lam Research Corporation
- Ilanit Fisher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,334,336
- Issue date Jun 17, 2025
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solids vaporizer
- Patent number 12,312,685
- Issue date May 27, 2025
- Entegris, Inc.
- Benjamin Cardozo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and semiconductor processing met...
- Patent number 12,312,690
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Minju Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,312,683
- Issue date May 27, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for filling gap using atomic layer deposition
- Patent number 12,312,686
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Eunhyoung Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dithering or dynamic offsets for improved uniformity
- Patent number 12,305,283
- Issue date May 20, 2025
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing methods and apparatus
- Patent number 12,297,535
- Issue date May 13, 2025
- Picosun Oy
- Juhana Kostamo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,300,523
- Issue date May 13, 2025
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,297,536
- Issue date May 13, 2025
- Tokyo Electron Limited
- Manabu Honma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scrubber, ALD process system including the scrubber and method for...
- Patent number 12,290,778
- Issue date May 6, 2025
- Samsung Electronics Co., Ltd.
- Seo Young Maeng
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools
- Patent number 12,291,775
- Issue date May 6, 2025
- Halliburton Energy Services, Inc.
- James M. Price
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing gap filling fluids and related systems and d...
- Patent number 12,293,942
- Issue date May 6, 2025
- ASM IP Holding B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Throughput improvement with interval conditioning purging
- Patent number 12,291,777
- Issue date May 6, 2025
- Lam Research Corporation
- Chun-Hao Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,288,683
- Issue date Apr 29, 2025
- Kokusai Electric Corporation
- Yasunobu Koshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas container and deposition system including the same
- Patent number 12,287,064
- Issue date Apr 29, 2025
- Samsung Electronics Co., Ltd.
- Sunhye Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,281,389
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, method of manufacturing semiconductor...
- Patent number 12,278,108
- Issue date Apr 15, 2025
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,276,025
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Kwang Ryul Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate and method of manufacturing semicond...
- Patent number 12,278,103
- Issue date Apr 15, 2025
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment fixture for a reactor system
- Patent number 12,278,129
- Issue date Apr 15, 2025
- ASM IP Holding B.V.
- Surojit Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition method and apparatus for filling a recess forme...
- Patent number 12,272,593
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250241039
- Publication date Jul 24, 2025
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF OPERATING A SPATIAL DEPOSITION TOOL
- Publication number 20250239479
- Publication date Jul 24, 2025
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVE DEPOSITION OF DIELECTRIC FILMS
- Publication number 20250239445
- Publication date Jul 24, 2025
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION DEVICE FOR UNIFORM COATING ON INNER SURFACE...
- Publication number 20250236953
- Publication date Jul 24, 2025
- HARBIN INSTITUTE OF TECHNOLOGY
- GANG GAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250223692
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250226207
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Yasunobu KOSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250223690
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Hajime KARASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND METHOD FOR...
- Publication number 20250223693
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- YU-SEN CHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250218784
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215564
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215563
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Takashi YOKOGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...
- Publication number 20250215565
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Jocelyn Kofi Brobbey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION EQUIPMENT
- Publication number 20250207243
- Publication date Jun 26, 2025
- SAMSUNG DISPLAY CO., LTD.
- Sung Woon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER, ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
- Publication number 20250207252
- Publication date Jun 26, 2025
- BENEQ OY
- Pekka SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K DIELECTRIC PROTECTION DURING PLASMA DEPOSITION OF SILICON NIT...
- Publication number 20250197996
- Publication date Jun 19, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS HUB FOR MULTI-STATION WAFER PROCESSING SYSTEM
- Publication number 20250198002
- Publication date Jun 19, 2025
- EUGENUS, INC.
- Sangdon Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250201584
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, INSERT AND APPARATUS FOR PROCESS CONTROL AND MONITORING OF...
- Publication number 20250198004
- Publication date Jun 19, 2025
- Picosun Oy
- Jesse KALLIOMÄKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Gauge Protector for Deposition Systems
- Publication number 20250189397
- Publication date Jun 12, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for depositing transition metal carbide
- Publication number 20250188602
- Publication date Jun 12, 2025
- ASM IP HOLDING B.V.
- Paloma Ruiz Y Kärkkäinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAM-FREE AND CRACK-FREE DEPOSITION
- Publication number 20250188609
- Publication date Jun 12, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for Performing Plasma Treatment, and Method for Performing P...
- Publication number 20250188610
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Jianming HAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250188617
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Yuki TAIRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250188604
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Kazuki GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL
- Publication number 20250179634
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Mariusch GREGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20250179641
- Publication date Jun 5, 2025
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Ren ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL THERMAL PROFILE TUNING USING MULTIPLE HEATED ZONES AND THE...
- Publication number 20250179633
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Gary B. LIND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID MATERIAL REMAINING AMOUNT MEASUREMENT METHOD, SUBLIMATED GAS...
- Publication number 20250171897
- Publication date May 29, 2025
- L'Air Liquide, Société Anonyme Pour l'Etude et l'Etude et l'Exploitation des...
- Mikio GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER ASSEMBLY INCLUDING COOLING APPARATUS AND METHOD OF USING SAME
- Publication number 20250171898
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250163576
- Publication date May 22, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and apparatus for processing a substrate

Deposition apparatus with pressure sensor and shower head on same p...

Deposition apparatus and method of forming metal oxide layer using...

Plasma processing apparatus and plasma processing method

Methods and systems for forming a layer comprising aluminum, titani...

Targeted temporal ALD

Porous inlet

Method of forming metal oxide layer using deposition apparatus

Systems and methods for homogenous intermixing of precursors in all...

Method of manufacturing semiconductor device, substrate processing...

Solids vaporizer

Semiconductor processing apparatus and semiconductor processing met...

Substrate processing method and substrate processing device

Method and apparatus for filling gap using atomic layer deposition

Dithering or dynamic offsets for improved uniformity

Substrate processing methods and apparatus

Substrate processing apparatus and method

Substrate processing apparatus and substrate processing method

Scrubber, ALD process system including the scrubber and method for...

Depositing coatings on and within housings, apparatus, or tools

Methods for depositing gap filling fluids and related systems and d...

Throughput improvement with interval conditioning purging

Method of manufacturing semiconductor device, substrate processing...

Gas container and deposition system including the same

Substrate processing method and substrate processing apparatus

Substrate processing method, method of manufacturing semiconductor...

Substrate processing apparatus and substrate processing method

Method of processing substrate and method of manufacturing semicond...

Alignment fixture for a reactor system

Cyclical deposition method and apparatus for filling a recess forme...

Patents Applicationslast 30 patents

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS OF OPERATING A SPATIAL DEPOSITION TOOL

METHOD AND APPARATUS FOR SELECTIVE DEPOSITION OF DIELECTRIC FILMS

ATOMIC LAYER DEPOSITION DEVICE FOR UNIFORM COATING ON INNER SURFACE...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

APPARATUS FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND METHOD FOR...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING S...

DEPOSITION EQUIPMENT

REACTION CHAMBER, ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD

LOW-K DIELECTRIC PROTECTION DURING PLASMA DEPOSITION OF SILICON NIT...

GAS HUB FOR MULTI-STATION WAFER PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

METHOD, INSERT AND APPARATUS FOR PROCESS CONTROL AND MONITORING OF...

Vacuum Gauge Protector for Deposition Systems

Method and system for depositing transition metal carbide

SEAM-FREE AND CRACK-FREE DEPOSITION

Device for Performing Plasma Treatment, and Method for Performing P...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS

SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL

SEMICONDUCTOR DEVICE

PEDESTAL THERMAL PROFILE TUNING USING MULTIPLE HEATED ZONES AND THE...

SOLID MATERIAL REMAINING AMOUNT MEASUREMENT METHOD, SUBLIMATED GAS...

HEATER ASSEMBLY INCLUDING COOLING APPARATUS AND METHOD OF USING SAME

SUBSTRATE PROCESSING APPARATUS