characterized by the apparatus

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CPC
C23C16/45544

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45544characterized by the apparatus

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming thin film
- Patent number 12,252,788
- Issue date Mar 18, 2025
- Soulbrain Co., Ltd.
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting assembly and substrate processing apparatus
- Patent number 12,249,536
- Issue date Mar 11, 2025
- Wonik IPS Co., Ltd.
- Hyun Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater assembly including cooling apparatus and method of using same
- Patent number 12,247,286
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,247,288
- Issue date Mar 11, 2025
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum gauge protector for deposition systems
- Patent number 12,247,890
- Issue date Mar 11, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Impurity removal in doped ALD tantalum nitride
- Patent number 12,243,774
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Rui Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combination CVD/ALD method, source and pulse profile modification
- Patent number 12,241,156
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle remover and method
- Patent number 12,233,368
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Hao Cheng
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor processing apparatus and methods for monitoring and c...
- Patent number 12,234,552
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor accumulator for corrosive gases with purging
- Patent number 12,227,842
- Issue date Feb 18, 2025
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 12,228,534
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for semiconductor processing
- Patent number 12,230,530
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming an enhanced unexposed photoresist layer
- Patent number 12,222,644
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas manifold for simultaneous gas property control in deposition sy...
- Patent number 12,215,423
- Issue date Feb 4, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal thermal profile tuning using multiple heated zones and the...
- Patent number 12,215,420
- Issue date Feb 4, 2025
- Lam Research Corporation
- Gary B. Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for pulse width modulated dose control
- Patent number 12,215,421
- Issue date Feb 4, 2025
- Lam Research Corporation
- Mariusch Gregor
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Silica glass disc having dimples formed thereon
- Patent number 12,215,052
- Issue date Feb 4, 2025
- Shin-Etsu Quartz Products Co., Ltd.
- Kyoichi Inaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor and related methods
- Patent number 12,209,308
- Issue date Jan 28, 2025
- ASM IP Holding B.V.
- Antonius Aarnink
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal deposition
- Patent number 12,203,168
- Issue date Jan 21, 2025
- Lam Research Corporation
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an injector
- Patent number 12,195,852
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods to transfer substrates into and out of a spat...
- Patent number 12,183,618
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Loading device, arrangement and method for loading a reaction chamber
- Patent number 12,180,588
- Issue date Dec 31, 2024
- Beneq Oy
- Johannes Wesslin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation device
- Patent number 12,183,572
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Yumiko Kawano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum chamber and arrangement for atomic layer deposition
- Patent number 12,180,587
- Issue date Dec 31, 2024
- Beneq Oy
- Johannes Wesslin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 12,173,405
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and plasma processing apparatus
- Patent number 12,170,198
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,163,220
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yu Komai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for continuous atomic layer deposition
- Patent number 12,163,221
- Issue date Dec 10, 2024
- UChicago Argonne, LLC
- Jeffrey W. Elam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 12,163,222
- Issue date Dec 10, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,165,846
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Eiki Kamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR FORMING LARGE-AREA ELECTRONIC-GRADE METAL CHA...
- Publication number 20250092511
- Publication date Mar 20, 2025
- The University of Hong Kong
- Lain-Jong Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS
- Publication number 20250092520
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Davide Proserpio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEM FOR MITIGATING CVD FORELINE GROWTH
- Publication number 20250092519
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL SYSTEM, AND CONTROL METHOD
- Publication number 20250092524
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masatoshi SATO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20250087480
- Publication date Mar 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Haifeng QIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250084530
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Yohei MATSUYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF ORGANIC MATERIAL
- Publication number 20250079161
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Adam Vianna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cleaning a reaction chamber
- Publication number 20250075318
- Publication date Mar 6, 2025
- Picosun Oy
- Tom BLOMBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20250066916
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hiroki IRIUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING METAL OXI...
- Publication number 20250059645
- Publication date Feb 20, 2025
- Duck Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250051920
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yudai FUKUSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHDOS AND SYSTEMS FOR FILLING A GAP
- Publication number 20250051925
- Publication date Feb 13, 2025
- ASM IP HOLDING B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION DEVICE WITH ADHERENCE DISRUPTION FEATURE...
- Publication number 20250051913
- Publication date Feb 13, 2025
- VitriVax, Inc.
- Hans Heinrich Funke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPAT...
- Publication number 20250054804
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250043418
- Publication date Feb 6, 2025
- Kokusai Electric Corporation
- Kazuki NONOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION (ALD) WITH IMPROVED PARTICLE PREVENTION MEC...
- Publication number 20250043420
- Publication date Feb 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung Hsien Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR CONCENTRATION SENSORS FOR PROCESS CHAMBERS
- Publication number 20250043423
- Publication date Feb 6, 2025
- William Durand
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE SYSTEMS FOR BALANCING GAS FLOW TO MULTIPLE STATIONS OF A SUBS...
- Publication number 20250043421
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Michael Philip ROBERTS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...
- Publication number 20250034709
- Publication date Jan 30, 2025
- Semsysco GmbH
- Andreas Gleissner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...
- Publication number 20250038003
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- David Joseph Mandia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...
- Publication number 20250034706
- Publication date Jan 30, 2025
- The Regents of the University of Michigan
- Neil P. Dasgupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE
- Publication number 20250034711
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Gaku WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS AND APPARATUS FOR RADICAL ENHANCED VAPOR DEPOSITION
- Publication number 20250029831
- Publication date Jan 23, 2025
- ASM IP HOLDING B.V.
- Tommi Tynell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250022706
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Tomohiko NIIZEKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
- Publication number 20250019825
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL
- Publication number 20250011927
- Publication date Jan 9, 2025
- ASM IP HOLDING B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS
- Publication number 20250014904
- Publication date Jan 9, 2025
- LAM RESEARCH CORPORATION
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250003068
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250003071
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for forming thin film

Substrate supporting assembly and substrate processing apparatus

Heater assembly including cooling apparatus and method of using same

Substrate processing apparatus and method

Vacuum gauge protector for deposition systems

Impurity removal in doped ALD tantalum nitride

Combination CVD/ALD method, source and pulse profile modification

Particle remover and method

Semiconductor processing apparatus and methods for monitoring and c...

Vapor accumulator for corrosive gases with purging

Capacitive sensor for monitoring gas concentration

Apparatus and methods for semiconductor processing

Method of forming an enhanced unexposed photoresist layer

Gas manifold for simultaneous gas property control in deposition sy...

Pedestal thermal profile tuning using multiple heated zones and the...

Systems and methods for pulse width modulated dose control

Silica glass disc having dimples formed thereon

Reactor and related methods

Metal deposition

Substrate processing apparatus with an injector

Apparatus and methods to transfer substrates into and out of a spat...

Loading device, arrangement and method for loading a reaction chamber

Film formation method and film formation device

Vacuum chamber and arrangement for atomic layer deposition

Processing apparatus and processing method

Deposition method and plasma processing apparatus

Deposition method and deposition apparatus

System for continuous atomic layer deposition

Depositing coatings on and within housings, apparatus, or tools uti...

Plasma processing apparatus and plasma processing method

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR FORMING LARGE-AREA ELECTRONIC-GRADE METAL CHA...

SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS

METHODS AND SYSTEM FOR MITIGATING CVD FORELINE GROWTH

SUBSTRATE PROCESSING APPARATUS, CONTROL SYSTEM, AND CONTROL METHOD

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

DEPOSITION OF ORGANIC MATERIAL

Method and apparatus for cleaning a reaction chamber

PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING METAL OXI...

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

METHDOS AND SYSTEMS FOR FILLING A GAP

CHEMICAL VAPOR DEPOSITION DEVICE WITH ADHERENCE DISRUPTION FEATURE...

APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPAT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

ATOMIC LAYER DEPOSITION (ALD) WITH IMPROVED PARTICLE PREVENTION MEC...

VAPOR CONCENTRATION SENSORS FOR PROCESS CHAMBERS

VALVE SYSTEMS FOR BALANCING GAS FLOW TO MULTIPLE STATIONS OF A SUBS...

DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...

LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...

Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE

PROCESS AND APPARATUS FOR RADICAL ENHANCED VAPOR DEPOSITION

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...

METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL

SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...