characterized by the layout of the process chambers

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H01L21/67161

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67161characterized by the layout of the process chambers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Wafer processing method
- Patent number 12,211,731
- Issue date Jan 28, 2025
- Disco Corporation
- Kazuma Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zone-controlled rare-earth oxide ALD and CVD coatings
- Patent number 12,209,307
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,091,753
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma resistant process chamber lid
- Patent number 12,049,696
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for thermal treatment of electronic devices
- Patent number 12,040,203
- Issue date Jul 16, 2024
- Kateeva, Inc.
- Conor F. Madigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated tool lift
- Patent number 12,027,411
- Issue date Jul 2, 2024
- Lam Research Corporation
- Paul Albert Avanzino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for thin film deposition
- Patent number 12,024,772
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Jun Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for manufacturing a thin film and a method therefor
- Patent number 12,014,922
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsai-Fu Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Operation method of vacuum processing device
- Patent number 12,002,692
- Issue date Jun 4, 2024
- HITACHI HIGH-TECH CORPORATION
- Ryoichi Isomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF signal parameter measurement in an integrated circuit fabricatio...
- Patent number 11,994,542
- Issue date May 28, 2024
- Lam Research Corporation
- Sunil Kapoor
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for substrate transport apparatus position com...
- Patent number 11,972,965
- Issue date Apr 30, 2024
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus for processing substrates or wafers
- Patent number 11,948,810
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chao Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method and comput...
- Patent number 11,929,268
- Issue date Mar 12, 2024
- Tokyo Electron Limited
- Munehisa Kodama
- B24 - GRINDING POLISHING
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,923,188
- Issue date Mar 5, 2024
- Kokusai Electric Corporation
- Takeo Hanashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming device
- Patent number 11,891,692
- Issue date Feb 6, 2024
- Murata Manufacturing Co., Ltd.
- Yasuhiro Chikaishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,856,655
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,851,760
- Issue date Dec 26, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transport apparatus
- Patent number 11,830,749
- Issue date Nov 28, 2023
- BROOKS AUTOMATION US, LLC
- Christopher A. Bussiere
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 11,776,826
- Issue date Oct 3, 2023
- Semes Co., Ltd.
- Junho Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 11,764,086
- Issue date Sep 19, 2023
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-wafer deposition tool for reducing residual deposition on tra...
- Patent number 11,749,554
- Issue date Sep 5, 2023
- SanDisk Technologies LLC
- Makoto Tsutsue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,742,229
- Issue date Aug 29, 2023
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 11,735,445
- Issue date Aug 22, 2023
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,725,283
- Issue date Aug 15, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor system with steam generator and reactor
- Patent number 11,705,345
- Issue date Jul 18, 2023
- Edwards Vacuum LLC
- Imad Mahawili
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport robot and substrate treating apparatus comprising the same
- Patent number 11,702,299
- Issue date Jul 18, 2023
- Semes Co., Ltd.
- Sang-Oh Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid control system
- Patent number 11,682,565
- Issue date Jun 20, 2023
- ICHOR SYSTEMS, INC.
- Philip Ryan Barros
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated teach apparatus for robotic systems and method therefor
- Patent number 11,676,845
- Issue date Jun 13, 2023
- BROOKS AUTOMATION US, LLC
- Justo Graciano
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
ANNEAL CHAMBER
- Publication number 20250118572
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Paul R. McHugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF POWER PATH SYMMETRY
- Publication number 20250112062
- Publication date Apr 3, 2025
- LAM RESEARCH CORPORATION
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...
- Publication number 20250014924
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING C...
- Publication number 20250006514
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Harish Kumar Premakumar
- B08 - CLEANING
Information Patent Application
3D NAND CELLS WITH ENHANCED ERASE SPEED THROUGH DIPOLE ENGINEERING...
- Publication number 20240365551
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Chang Seok Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO IMPROVE INTERCONNECT COEFFICIENT OF THERMAL EXPANSION
- Publication number 20240321636
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Tyler Sherwood
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20240309507
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED TOOL LIFT
- Publication number 20240304490
- Publication date Sep 12, 2024
- LAM RESEARCH CORPORATION
- Paul Albert Avanzino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...
- Publication number 20240272210
- Publication date Aug 15, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240254628
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS
- Publication number 20240249957
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chao YIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240249964
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW CONTROL SYSTEM AND AIRFLOW CONTROL METHOD
- Publication number 20240222148
- Publication date Jul 4, 2024
- Semes Co., Ltd.
- Ickkyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY...
- Publication number 20240222176
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Yoshiyuki Umeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...
- Publication number 20240203711
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20240170276
- Publication date May 23, 2024
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPI...
- Publication number 20240112931
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20240096672
- Publication date Mar 21, 2024
- BROOKS AUTOMATION US, LLC
- Christopher A. BUSSIERE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20230395410
- Publication date Dec 7, 2023
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20230395405
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20230374663
- Publication date Nov 23, 2023
- JUSUNG ENGINEERING CO., LTD.
- Jong Sik KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Teach Apparatus For Robotic Systems And Method Therefor
- Publication number 20230343626
- Publication date Oct 26, 2023
- BROOKS AUTOMATION US, LLC
- Justo GRACIANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID CONTROL SYSTEM
- Publication number 20230317471
- Publication date Oct 5, 2023
- ICHOR SYSTEMS, INC.
- Philip Ryan Barros
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230273516
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230266662
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20230268211
- Publication date Aug 24, 2023
- BROOKS AUTOMATION US, LLC
- Christopher A. BUSSIERE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCLUSION RING FOR SUBSTRATE PROCESSING
- Publication number 20230260814
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Vinayakaraddy Gulabal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the layout of the process chambers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer processing method

Zone-controlled rare-earth oxide ALD and CVD coatings

Substrate processing apparatus for processing substrates

Substrate processing apparatus

Substrate processing apparatus

Plasma resistant process chamber lid

Techniques for thermal treatment of electronic devices

Integrated tool lift

Apparatuses for thin film deposition

Apparatus for manufacturing a thin film and a method therefor

Operation method of vacuum processing device

RF signal parameter measurement in an integrated circuit fabricatio...

Method and apparatus for substrate transport apparatus position com...

Apparatus for processing substrates or wafers

Substrate processing system, substrate processing method and comput...

Method of manufacturing semiconductor device, substrate processing...

Film-forming device

Substrate processing apparatus and substrate processing method

PECVD deposition system for deposition on selective side of the sub...

Substrate transport apparatus

Apparatus and method for treating substrate

Wafer transport assembly with integrated buffers

Multi-wafer deposition tool for reducing residual deposition on tra...

Auto-calibration to a station of a process module that spins a wafer

Substrate processing apparatus for processing substrates

PECVD deposition system for deposition on selective side of the sub...

Semiconductor system with steam generator and reactor

Transport robot and substrate treating apparatus comprising the same

Fluid control system

Automated teach apparatus for robotic systems and method therefor

Patents Applicationslast 30 patents

ANNEAL CHAMBER

RF POWER PATH SYMMETRY

SUBSTRATE PROCESSING APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...

APPARATUSES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING C...

3D NAND CELLS WITH ENHANCED ERASE SPEED THROUGH DIPOLE ENGINEERING...

METHOD TO IMPROVE INTERCONNECT COEFFICIENT OF THERMAL EXPANSION

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

INTEGRATED TOOL LIFT

RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...

SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

AIRFLOW CONTROL SYSTEM AND AIRFLOW CONTROL METHOD

SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY...

RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPI...

SUBSTRATE TRANSPORT APPARATUS

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

Automated Teach Apparatus For Robotic Systems And Method Therefor

FLUID CONTROL SYSTEM

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

SUBSTRATE TRANSPORT APPARATUS

EXCLUSION RING FOR SUBSTRATE PROCESSING