Charge control of objects or beams

Industry

CPC
H01J2237/004

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/004Charge control of objects or beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System for inspecting and grounding a mask in a charged particle sy...
- Patent number 12,142,451
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Tianming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface charge and power feedback and control using a switch mode b...
- Patent number 12,125,674
- Issue date Oct 22, 2024
- Advanced Energy Industries, Inc.
- Daniel Carter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
- Patent number 12,125,669
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Ning Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 12,106,936
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image contrast enhancement in sample inspection
- Patent number 12,087,542
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, apparatus, and system for wafer grounding
- Patent number 12,051,562
- Issue date Jul 30, 2024
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus, ion implantation apparatus, and ion i...
- Patent number 11,961,695
- Issue date Apr 16, 2024
- Semes Co., Ltd.
- Doyeon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 11,929,232
- Issue date Mar 12, 2024
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for metal contamination control in an ion impl...
- Patent number 11,923,169
- Issue date Mar 5, 2024
- Axcelis Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems including pulsed dual-beam charge neutralization
- Patent number 11,915,901
- Issue date Feb 27, 2024
- ULVAC-PHI, INCORPORATED
- Scott R. Bryan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-voltage electron beam control of conductive state at a complex-...
- Patent number 11,894,162
- Issue date Feb 6, 2024
- University of Pittsburgh—Of the Commonwealth System, of Higher Education
- Jeremy Levy
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
- Patent number 11,728,131
- Issue date Aug 15, 2023
- ASML Netherlands B.V.
- Ning Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for reducing the charging effect in a transmissio...
- Patent number 11,715,618
- Issue date Aug 1, 2023
- FEI Company
- Yuchen Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 11,715,621
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for modifying the wettability and/or other biocompatibility...
- Patent number 11,698,582
- Issue date Jul 11, 2023
- Exogenesis Corporation
- Joseph B. Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample pre-charging methods and apparatuses for charged particle be...
- Patent number 11,676,792
- Issue date Jun 13, 2023
- ASML Netherlands, B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for inspecting an EUV mask
- Patent number 11,662,323
- Issue date May 30, 2023
- ASML Netherlands B.V.
- Guochong Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,501,976
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an advanced charged controller for wafer i...
- Patent number 11,482,399
- Issue date Oct 25, 2022
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam inspection of ungrounded samples
- Patent number 11,448,607
- Issue date Sep 20, 2022
- ASML Netherlands B.V.
- Chiyan Kuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,424,099
- Issue date Aug 23, 2022
- HITACHI HIGH-TECH CORPORATION
- Hiroki Kannami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection and review using transmissive current image of ch...
- Patent number 11,410,830
- Issue date Aug 9, 2022
- KLA Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic material and electrostatic chuck device
- Patent number 11,387,132
- Issue date Jul 12, 2022
- Sumitomo Osaka Cement Co., Ltd.
- Yoshiki Yoshioka
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,315,767
- Issue date Apr 26, 2022
- Toyota Jidosha Kabushiki Kaisha
- Noriyuki Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing device with embedded fluid conduits
- Patent number 11,213,891
- Issue date Jan 4, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Joshua M. Abeshaus
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,199,769
- Issue date Dec 14, 2021
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and devices for examining an electrically charged specimen...
- Patent number 11,170,970
- Issue date Nov 9, 2021
- Carl Zeiss SMT GmbH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Grant
Image contrast enhancement in sample inspection
- Patent number 11,164,719
- Issue date Nov 2, 2021
- ASML Netherlands B.V.
- Yixiang Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 11,120,969
- Issue date Sep 14, 2021
- KLA Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,048,162
- Issue date Jun 29, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LOW-VOLTAGE ELECTRON BEAM CONTROL OF CONDUCTIVE STATE AT A COMPLEX-...
- Publication number 20240412889
- Publication date Dec 12, 2024
- University of Pittsburgh of the Commonwealth System of Higher Education
- Jeremy Levy
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20240379325
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING
- Publication number 20240371599
- Publication date Nov 7, 2024
- ASML Netheriands B. V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE STAGE FOR ELECTRON ENHANCED MATERIAL PROCESSING
- Publication number 20240347323
- Publication date Oct 17, 2024
- VELVETCH LLC
- David Irwin Margolese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20240321543
- Publication date Sep 26, 2024
- Hitachi High-Tech Corporation
- Hideyuki Kotsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGING AN ELECTROSTATIC CHUCK LOCATED WITHIN A VACUUM CHAMBER
- Publication number 20240234078
- Publication date Jul 11, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Adam Faust
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fiber Fabry-Perot Cavity Laser Phase Plate For Charged Particle Mic...
- Publication number 20240222066
- Publication date Jul 4, 2024
- FEI Company
- Afric Meijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
- Publication number 20240153732
- Publication date May 9, 2024
- ASML NETHERLANDS B.V.
- Datong ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON-INVASIVE SEMICONDUCTOR TECHNIQUE FOR M...
- Publication number 20240071710
- Publication date Feb 29, 2024
- FemtoMetrix, Inc.
- Timothy M. Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...
- Publication number 20230395352
- Publication date Dec 7, 2023
- ASML NETHERLANDS B.V.
- Ning YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...
- Publication number 20230360877
- Publication date Nov 9, 2023
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
- Publication number 20230335375
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS INCLUDING PULSED DUAL-BEAM CHARGE NEUTRALIZATION
- Publication number 20230245848
- Publication date Aug 3, 2023
- ULVAC-PHI, INCORPORATED
- Scott R. Bryan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION MET...
- Publication number 20230197402
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- YUJIN CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE ENHANCEMENT BASED ON CHARGE ACCUMULATION REDUCTION IN CHARGED...
- Publication number 20230162944
- Publication date May 25, 2023
- ASML NETHERLANDS B.V.
- Xiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-VOLTAGE ELECTRON BEAM CONTROL OF CONDUCTIVE STATE AT A COMPLEX-...
- Publication number 20230154639
- Publication date May 18, 2023
- University of Pittsburgh of the Commonwealth System of Higher Education
- Jeremy Levy
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SUBSTRATE TEST APPARATUS AND METHOD FOR MEASURING DECHUCKING FORCE...
- Publication number 20230140544
- Publication date May 4, 2023
- SEMES CO., LTD.
- Jong Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DIGITAL CONTROL OF ION ENERGY DISTRIBUTION...
- Publication number 20230071168
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Kartik RAMASWAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR REDUCING THE CHARGING EFFECT IN A TRANSMISSIO...
- Publication number 20230040558
- Publication date Feb 9, 2023
- FEI Company
- Yuchen Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
- Publication number 20220375712
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM MANIPULATION OF ADVANCED CHARGE CONTROLLER MODULE IN A CHARGED...
- Publication number 20220351932
- Publication date Nov 3, 2022
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING
- Publication number 20220277926
- Publication date Sep 1, 2022
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTO-ELECTRICAL EVOLUTION DEFECT INSPECTION
- Publication number 20220270849
- Publication date Aug 25, 2022
- ASML NETHERLANDS B.V.
- Jun JIANG
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...
- Publication number 20220254600
- Publication date Aug 11, 2022
- Carl Zeiss MultiSEM GmbH
- Gregor Frank Dellemann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...
- Publication number 20220189733
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Ning YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION
- Publication number 20220122803
- Publication date Apr 21, 2022
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS, ION IMPLANTATION APPARATUS, AND ION I...
- Publication number 20220059309
- Publication date Feb 24, 2022
- SEMES CO., LTD.
- DOYEON KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS
- Publication number 20210405523
- Publication date Dec 30, 2021
- Exogenesis Corporation
- Joseph Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE CHARGE AND POWER FEEDBACK AND CONTROL USING A SWITCH MODE B...
- Publication number 20210351007
- Publication date Nov 11, 2021
- Advanced Energy Industries, Inc.
- Daniel Carter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, SEMICONDUCTIVE MEMBER, AND SEMICONDUCT...
- Publication number 20210280397
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Yoichi KUROSAWA
- H01 - BASIC ELECTRIC ELEMENTS

Charge control of objects or beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System for inspecting and grounding a mask in a charged particle sy...

Surface charge and power feedback and control using a switch mode b...

Thermal-aided inspection by advanced charge controller module in a...

Scanned angled etching apparatus and techniques providing separate...

Image contrast enhancement in sample inspection

Method, apparatus, and system for wafer grounding

Substrate treating apparatus, ion implantation apparatus, and ion i...

Systems and methods for charged particle flooding to enhance voltag...

Apparatus and method for metal contamination control in an ion impl...

Methods and systems including pulsed dual-beam charge neutralization

Low-voltage electron beam control of conductive state at a complex-...

Thermal-aided inspection by advanced charge controller module in a...

System and method for reducing the charging effect in a transmissio...

Scanned angled etching apparatus and techniques providing separate...

Method for modifying the wettability and/or other biocompatibility...

Sample pre-charging methods and apparatuses for charged particle be...

Method and system for inspecting an EUV mask

Substrate processing method and substrate processing apparatus

Method and apparatus for an advanced charged controller for wafer i...

Charged particle beam inspection of ungrounded samples

Charged particle beam device

Defect inspection and review using transmissive current image of ch...

Ceramic material and electrostatic chuck device

Plasma processing apparatus

Semiconductor manufacturing device with embedded fluid conduits

Method and apparatus for neutral beam processing based on gas clust...

Methods and devices for examining an electrically charged specimen...

Image contrast enhancement in sample inspection

Method and system for charged particle microscopy with improved ima...

Method and apparatus for neutral beam processing based on gas clust...

Patents Applicationslast 30 patents

LOW-VOLTAGE ELECTRON BEAM CONTROL OF CONDUCTIVE STATE AT A COMPLEX-...

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING

COMPOSITE STAGE FOR ELECTRON ENHANCED MATERIAL PROCESSING

Charged Particle Beam Device

DISCHARGING AN ELECTROSTATIC CHUCK LOCATED WITHIN A VACUUM CHAMBER

Fiber Fabry-Perot Cavity Laser Phase Plate For Charged Particle Mic...

SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...

METHOD AND APPARATUS FOR NON-INVASIVE SEMICONDUCTOR TECHNIQUE FOR M...

THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...

SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...

SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...

METHODS AND SYSTEMS INCLUDING PULSED DUAL-BEAM CHARGE NEUTRALIZATION

SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION MET...

IMAGE ENHANCEMENT BASED ON CHARGE ACCUMULATION REDUCTION IN CHARGED...

LOW-VOLTAGE ELECTRON BEAM CONTROL OF CONDUCTIVE STATE AT A COMPLEX-...

SUBSTRATE TEST APPARATUS AND METHOD FOR MEASURING DECHUCKING FORCE...

METHOD AND APPARATUS FOR DIGITAL CONTROL OF ION ENERGY DISTRIBUTION...

SYSTEM AND METHOD FOR REDUCING THE CHARGING EFFECT IN A TRANSMISSIO...

SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION

BEAM MANIPULATION OF ADVANCED CHARGE CONTROLLER MODULE IN A CHARGED...

METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING

PHOTO-ELECTRICAL EVOLUTION DEFECT INSPECTION

METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...

THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...

IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION

SUBSTRATE TREATING APPARATUS, ION IMPLANTATION APPARATUS, AND ION I...

INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS

SURFACE CHARGE AND POWER FEEDBACK AND CONTROL USING A SWITCH MODE B...

PLASMA PROCESSING APPARATUS, SEMICONDUCTIVE MEMBER, AND SEMICONDUCT...