Charging arrangements

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CPC
H01J2237/0048

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0048Charging arrangements

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
Sample pre-charging methods and apparatuses for charged particle be...
- Patent number 12,191,109
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image contrast enhancement in sample inspection
- Patent number 12,087,542
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 11,929,232
- Issue date Mar 12, 2024
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for metal contamination control in an ion impl...
- Patent number 11,923,169
- Issue date Mar 5, 2024
- Axcelis Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample pre-charging methods and apparatuses for charged particle be...
- Patent number 11,676,792
- Issue date Jun 13, 2023
- ASML Netherlands, B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an advanced charged controller for wafer i...
- Patent number 11,482,399
- Issue date Oct 25, 2022
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam inspection of ungrounded samples
- Patent number 11,448,607
- Issue date Sep 20, 2022
- ASML Netherlands B.V.
- Chiyan Kuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and devices for examining an electrically charged specimen...
- Patent number 11,170,970
- Issue date Nov 9, 2021
- Carl Zeiss SMT GmbH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Grant
Image contrast enhancement in sample inspection
- Patent number 11,164,719
- Issue date Nov 2, 2021
- ASML Netherlands B.V.
- Yixiang Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 11,120,969
- Issue date Sep 14, 2021
- KLA Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 10,784,077
- Issue date Sep 22, 2020
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 10,643,819
- Issue date May 5, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Grant
Method of operating a charged particle beam specimen inspection system
- Patent number 10,522,327
- Issue date Dec 31, 2019
- Applied Materials Israel Ltd.
- Gilad Erel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope with charge density control
- Patent number 10,297,419
- Issue date May 21, 2019
- Hitachi High-Technologies Corporation
- Shahedul Hoque
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam specimen inspection system and method for ope...
- Patent number 10,056,228
- Issue date Aug 21, 2018
- Applied Materials Israel Ltd.
- Gilad Erel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam microscope and method for operating a particle beam m...
- Patent number 9,859,092
- Issue date Jan 2, 2018
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for charging and imaging an object
- Patent number 9,666,412
- Issue date May 30, 2017
- Applied Materials Israel Ltd.
- Alon Litman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam irradiation method and scanning electron microscope
- Patent number 9,640,366
- Issue date May 2, 2017
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam imaging assembly and imaging method thereof
- Patent number 8,884,224
- Issue date Nov 11, 2014
- Hermes-Microvision, Inc.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle sticking prevention apparatus and plasma processing apparatus
- Patent number 8,608,422
- Issue date Dec 17, 2013
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern observation method
- Patent number 8,530,866
- Issue date Sep 10, 2013
- Kabushiki Kaisha Toshiba
- Hideaki Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 8,497,476
- Issue date Jul 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting and measuring sample and scanning electron mi...
- Patent number 8,481,934
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Ion beam irradiation device and method for suppressing ion beam div...
- Patent number 8,461,548
- Issue date Jun 11, 2013
- Nissin ION Equipment Co., Ltd.
- Dan Nicolaescu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern check device and pattern check method
- Patent number 8,421,008
- Issue date Apr 16, 2013
- Hitachi High-Technologies Corporation
- Mari Nozoe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for reducing substrate edge effect during insp...
- Patent number 8,294,094
- Issue date Oct 23, 2012
- Hermes Microvision Inc.
- Yan Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Electrode unit and charged particle beam device
- Patent number 8,153,966
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Noriaki Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for increasing beam current above a maximum energ...
- Patent number 8,035,080
- Issue date Oct 11, 2011
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20240379325
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
- Publication number 20240153732
- Publication date May 9, 2024
- ASML NETHERLANDS B.V.
- Datong ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON-INVASIVE SEMICONDUCTOR TECHNIQUE FOR M...
- Publication number 20240071710
- Publication date Feb 29, 2024
- FemtoMetrix, Inc.
- Timothy M. Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...
- Publication number 20230360877
- Publication date Nov 9, 2023
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION MET...
- Publication number 20230197402
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- YUJIN CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEST APPARATUS AND METHOD FOR MEASURING DECHUCKING FORCE...
- Publication number 20230140544
- Publication date May 4, 2023
- SEMES CO., LTD.
- Jong Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DIGITAL CONTROL OF ION ENERGY DISTRIBUTION...
- Publication number 20230071168
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Kartik RAMASWAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
- Publication number 20220375712
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTO-ELECTRICAL EVOLUTION DEFECT INSPECTION
- Publication number 20220270849
- Publication date Aug 25, 2022
- ASML NETHERLANDS B.V.
- Jun JIANG
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...
- Publication number 20220254600
- Publication date Aug 11, 2022
- Carl Zeiss MultiSEM GmbH
- Gregor Frank Dellemann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION
- Publication number 20220122803
- Publication date Apr 21, 2022
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPL...
- Publication number 20210249222
- Publication date Aug 12, 2021
- Axcelis Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20210142979
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGE STRIPPING FOR ION IMPLANTATION SYSTEMS
- Publication number 20200381209
- Publication date Dec 3, 2020
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AN ADVANCED CHARGED CONTROLLER FOR WAFER I...
- Publication number 20200273662
- Publication date Aug 27, 2020
- ASML Netherlands B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...
- Publication number 20200266023
- Publication date Aug 20, 2020
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION
- Publication number 20200234915
- Publication date Jul 23, 2020
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Charged Particle Microscopy with Improved Ima...
- Publication number 20200227232
- Publication date Jul 16, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF OPERATING A CHARGED PARTICLE BEAM SPECIMEN INSPECTION SYSTEM
- Publication number 20180330919
- Publication date Nov 15, 2018
- Applied Materials Isarael Ltd.
- Gilad Erel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...
- Publication number 20140001359
- Publication date Jan 2, 2014
- Hitachi High-Technologies Corporation
- Makoto EZUMI
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20130306866
- Publication date Nov 21, 2013
- Hitachi High-Technologies Corporation
- Shahedul Hoque
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE OBSERVATION METHOD USING ELECTRON BEAMS AND ELECTRON MICROSCOPE
- Publication number 20120292506
- Publication date Nov 22, 2012
- Hitachi High-Technologies Corporation
- Natsuki Tsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20120235036
- Publication date Sep 20, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
ION BEAM IRRADIATION DEVICE AND METHOD FOR SUPPRESSING ION BEAM DIV...
- Publication number 20120085918
- Publication date Apr 12, 2012
- KYOTO UNIVERSITY
- Dan Nicolaescu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...
- Publication number 20120004879
- Publication date Jan 5, 2012
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN CHECK DEVICE AND PATTERN CHECK METHOD
- Publication number 20110278452
- Publication date Nov 17, 2011
- Mari Nozoe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...
- Publication number 20110215243
- Publication date Sep 8, 2011
- Hitachi High-Technologies Corporation
- Makoto EZUMI
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR INCREASING BEAM CURRENT ABOVE A MAXIMUM ENERG...
- Publication number 20110101213
- Publication date May 5, 2011
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE UNIT AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20110068265
- Publication date Mar 24, 2011
- Noriaki Arai
- H01 - BASIC ELECTRIC ELEMENTS

Charging arrangements

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for voltage contrast defect detection

Sample pre-charging methods and apparatuses for charged particle be...

Image contrast enhancement in sample inspection

Systems and methods for charged particle flooding to enhance voltag...

Apparatus and method for metal contamination control in an ion impl...

Sample pre-charging methods and apparatuses for charged particle be...

Method and apparatus for an advanced charged controller for wafer i...

Charged particle beam inspection of ungrounded samples

Methods and devices for examining an electrically charged specimen...

Image contrast enhancement in sample inspection

Method and system for charged particle microscopy with improved ima...

Systems and methods for charged particle flooding to enhance voltag...

Method and system for charged particle microscopy with improved ima...

Method of operating a charged particle beam specimen inspection system

Scanning electron microscope with charge density control

Inspection device

Charged particle beam specimen inspection system and method for ope...

Particle beam microscope and method for operating a particle beam m...

Method for charging and imaging an object

Electron beam irradiation method and scanning electron microscope

Charged particle beam imaging assembly and imaging method thereof

Particle sticking prevention apparatus and plasma processing apparatus

Pattern observation method

Inspection device

Method for inspecting and measuring sample and scanning electron mi...

Ion beam irradiation device and method for suppressing ion beam div...

Pattern check device and pattern check method

Method and apparatus for reducing substrate edge effect during insp...

Electrode unit and charged particle beam device

Method and system for increasing beam current above a maximum energ...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...

METHOD AND APPARATUS FOR NON-INVASIVE SEMICONDUCTOR TECHNIQUE FOR M...

SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...

SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION MET...

SUBSTRATE TEST APPARATUS AND METHOD FOR MEASURING DECHUCKING FORCE...

METHOD AND APPARATUS FOR DIGITAL CONTROL OF ION ENERGY DISTRIBUTION...

SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION

PHOTO-ELECTRICAL EVOLUTION DEFECT INSPECTION

METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...

IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION

APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPL...

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

CHARGE STRIPPING FOR ION IMPLANTATION SYSTEMS

METHOD AND APPARATUS FOR AN ADVANCED CHARGED CONTROLLER FOR WAFER I...

SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...

IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION

Method and System for Charged Particle Microscopy with Improved Ima...

METHOD OF OPERATING A CHARGED PARTICLE BEAM SPECIMEN INSPECTION SYSTEM

INSPECTION DEVICE

METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...

SCANNING ELECTRON MICROSCOPE

SAMPLE OBSERVATION METHOD USING ELECTRON BEAMS AND ELECTRON MICROSCOPE

INSPECTION DEVICE

ION BEAM IRRADIATION DEVICE AND METHOD FOR SUPPRESSING ION BEAM DIV...

CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...

PATTERN CHECK DEVICE AND PATTERN CHECK METHOD

METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...

METHOD AND SYSTEM FOR INCREASING BEAM CURRENT ABOVE A MAXIMUM ENERG...

ELECTRODE UNIT AND CHARGED PARTICLE BEAM DEVICE