Charging; Manipulation of SC or SC wafers

Industry

CPC
F27D3/0084

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Parent Industries

FMECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS F27Furnaces F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE F27D3/00Charging Discharging Manipulation of charge

Current Industry

F27D3/0084Charging; Manipulation of SC or SC wafers

Industries

Patents Grantslast 30 patents

Information Patent Grant
Wafer boat handling device, vertical batch furnace and method
- Patent number 11,996,309
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch furnace assembly and method of operating a batch furnace asse...
- Patent number 11,971,217
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,967,513
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,915,960
- Issue date Feb 27, 2024
- ASM IP Holding B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion furnace
- Patent number 11,862,490
- Issue date Jan 2, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Pengfei Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-controllable process chambers, electronic device proces...
- Patent number 11,837,478
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Paul Z. Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,804,388
- Issue date Oct 31, 2023
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,798,821
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Yukinobu Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 11,735,445
- Issue date Aug 22, 2023
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,587,815
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,587,814
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Vertical batch furnace assembly comprising a cooling gas supply
- Patent number 11,530,876
- Issue date Dec 20, 2022
- ASM IP Holding B.V.
- Melvin Verbaas
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Wafer boat handling device, vertical batch furnace and method
- Patent number 11,515,188
- Issue date Nov 29, 2022
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 11,393,702
- Issue date Jul 19, 2022
- Tokyo Electron Limited
- Shinsuke Takaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Door opener and substrate processing apparatus provided therewith
- Patent number 11,378,337
- Issue date Jul 5, 2022
- ASM IP Holding B.V.
- Jeroen Fluit
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus and purging method
- Patent number 11,367,642
- Issue date Jun 21, 2022
- Tokyo Electron Limited
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater lift assembly spring damper
- Patent number 11,367,632
- Issue date Jun 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Wen Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 11,302,542
- Issue date Apr 12, 2022
- Tokyo Electron Limited
- Masato Kadobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-controllable process chambers, electronic device proces...
- Patent number 11,107,709
- Issue date Aug 31, 2021
- Applied Materials, Inc.
- Paul Z. Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 11,087,997
- Issue date Aug 10, 2021
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,024,523
- Issue date Jun 1, 2021
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Baking device for a wafer coated with a coating containing a solvent
- Patent number 10,825,701
- Issue date Nov 3, 2020
- Suss MicroTec Lithography GmbH
- Gregory George
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate pre-baking device
- Patent number 10,629,854
- Issue date Apr 21, 2020
- WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Hengzhong He
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Assembly of a liner and a flange for a vertical furnace as well as...
- Patent number 10,605,530
- Issue date Mar 31, 2020
- ASM IP Holding B.V.
- Lucian C. Jdira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for heat treatment of substrates
- Patent number 10,535,538
- Issue date Jan 14, 2020
- Gary Hillman
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Connection structure, magnetic annealing device using same, and con...
- Patent number 10,473,399
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Ian Colgan
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate treatment apparatus
- Patent number 10,229,845
- Issue date Mar 12, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Jun-Jin Hyon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method, and storage medium
- Patent number 10,217,652
- Issue date Feb 26, 2019
- Tokyo Electron Limited
- Masato Mizuta
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate transfer system and heat treatment apparatus using same
- Patent number 9,939,200
- Issue date Apr 10, 2018
- Tokyo Electron Limited
- Koyu Hasegawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Clamp apparatus, substrate carry-in/out apparatus using the same, a...
- Patent number 9,857,124
- Issue date Jan 2, 2018
- Tokyo Electron Limited
- Mitsuru Obara
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE
- Publication number 20240071787
- Publication date Feb 29, 2024
- Viatron Co., Ltd.
- Hyoung June Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20240030049
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Yukinobu OTSUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20230395405
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Magnetic Annealing Equipment and Method
- Publication number 20230304741
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Ian Colgan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION...
- Publication number 20230223284
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL BATCH FURNACE ASSEMBLY COMPRISING A COOLING GAS SUPPLY
- Publication number 20230076060
- Publication date Mar 9, 2023
- ASM IP HOLDINGS B.V.
- MELVIN VERBAAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSION FURNACE
- Publication number 20230031706
- Publication date Feb 2, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Pengfei GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH FURNACE ASSEMBLY AND METHOD OF OPERATING A BATCH FURNACE ASSE...
- Publication number 20220412652
- Publication date Dec 29, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEATER LIFT ASSEMBLY SPRING DAMPER
- Publication number 20220319880
- Publication date Oct 6, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Kai-Wen WU
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220230897
- Publication date Jul 21, 2022
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING EQUIPMENT
- Publication number 20220084847
- Publication date Mar 17, 2022
- SEMES CO., LTD.
- JEE YOUNG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE-CONTROLLABLE PROCESS CHAMBERS, ELECTRONIC DEVICE PROCES...
- Publication number 20210358777
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Paul Z. Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER LIFT ASSEMBLY SPRING DAMPER
- Publication number 20210351048
- Publication date Nov 11, 2021
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Kai-Wen WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL BATCH FURNACE ASSEMBLY COMPRISING A COOLING GAS SUPPLY
- Publication number 20210333049
- Publication date Oct 28, 2021
- ASM IP HOLDING B.V.
- Melvin Verbaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INJECTOR CONFIGURED FOR ARRANGEMENT WITHIN A REACTOR OF A VERTICAL...
- Publication number 20210324518
- Publication date Oct 21, 2021
- ASM IP HOLDING B.V.
- Christianus G.M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20210320020
- Publication date Oct 14, 2021
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20210272821
- Publication date Sep 2, 2021
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20210118707
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Yukinobu OTSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL BATCH FURNACE ASSEMBLY
- Publication number 20210035839
- Publication date Feb 4, 2021
- ASM IP HOLDING B.V.
- Chris G.M. de Ridder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
VERTICAL BATCH FURNACE ASSEMBLY
- Publication number 20210035840
- Publication date Feb 4, 2021
- ASM IP HOLDING B.V.
- Chris G.M. de Ridder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
VERTICAL BATCH FURNACE ASSEMBLY
- Publication number 20210035841
- Publication date Feb 4, 2021
- ASM IP HOLDING B.V.
- Jeroen Fluit
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20210005468
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT HANDLING DEVICE, VERTICAL BATCH FURNACE AND METHOD
- Publication number 20200365433
- Publication date Nov 19, 2020
- ASM IP HOLDING B.V.
- Christianus G.M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT HANDLING DEVICE, VERTICAL BATCH FURNACE AND METHOD
- Publication number 20200365434
- Publication date Nov 19, 2020
- ASM IP HOLDING B.V.
- Christianus G.M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOOR OPENER AND SUBSTRATE PROCESSING APPARATUS PROVIDED THEREWITH
- Publication number 20200309455
- Publication date Oct 1, 2020
- ASM IP HOLDING B.V.
- Jeroen Fluit
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Application
TEMPERATURE-CONTROLLABLE PROCESS CHAMBERS, ELECTRONIC DEVICE PROCES...
- Publication number 20200243354
- Publication date Jul 30, 2020
- Applied Materials, Inc.
- Paul Z. Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20200227293
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Masato KADOBE
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20200135512
- Publication date Apr 30, 2020
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20200083068
- Publication date Mar 12, 2020
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PURGING METHOD
- Publication number 20200083078
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS

Charging; Manipulation of SC or SC wafers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer boat handling device, vertical batch furnace and method

Batch furnace assembly and method of operating a batch furnace asse...

Substrate processing apparatus

Vertical batch furnace assembly

Diffusion furnace

Temperature-controllable process chambers, electronic device proces...

Substrate processing apparatus and method

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus for processing substrates

Vertical batch furnace assembly

Vertical batch furnace assembly

Vertical batch furnace assembly comprising a cooling gas supply

Wafer boat handling device, vertical batch furnace and method

Heat treatment apparatus and heat treatment method

Door opener and substrate processing apparatus provided therewith

Substrate processing apparatus and purging method

Heater lift assembly spring damper

Processing apparatus

Temperature-controllable process chambers, electronic device proces...

Substrate processing apparatus for processing substrates

Substrate processing apparatus and method

Baking device for a wafer coated with a coating containing a solvent

Substrate pre-baking device

Assembly of a liner and a flange for a vertical furnace as well as...

System and method for heat treatment of substrates

Connection structure, magnetic annealing device using same, and con...

Substrate treatment apparatus

Heat treatment apparatus, heat treatment method, and storage medium

Substrate transfer system and heat treatment apparatus using same

Clamp apparatus, substrate carry-in/out apparatus using the same, a...

Patents Applicationslast 30 patents

SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

Magnetic Annealing Equipment and Method

DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION...

VERTICAL BATCH FURNACE ASSEMBLY COMPRISING A COOLING GAS SUPPLY

DIFFUSION FURNACE

BATCH FURNACE ASSEMBLY AND METHOD OF OPERATING A BATCH FURNACE ASSE...

HEATER LIFT ASSEMBLY SPRING DAMPER

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING EQUIPMENT

TEMPERATURE-CONTROLLABLE PROCESS CHAMBERS, ELECTRONIC DEVICE PROCES...

HEATER LIFT ASSEMBLY SPRING DAMPER

VERTICAL BATCH FURNACE ASSEMBLY COMPRISING A COOLING GAS SUPPLY

INJECTOR CONFIGURED FOR ARRANGEMENT WITHIN A REACTOR OF A VERTICAL...

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

VERTICAL BATCH FURNACE ASSEMBLY

VERTICAL BATCH FURNACE ASSEMBLY

VERTICAL BATCH FURNACE ASSEMBLY

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

WAFER BOAT HANDLING DEVICE, VERTICAL BATCH FURNACE AND METHOD

WAFER BOAT HANDLING DEVICE, VERTICAL BATCH FURNACE AND METHOD

DOOR OPENER AND SUBSTRATE PROCESSING APPARATUS PROVIDED THEREWITH

TEMPERATURE-CONTROLLABLE PROCESS CHAMBERS, ELECTRONIC DEVICE PROCES...

PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE PROCESSING APPARATUS AND PURGING METHOD