Cleaning of porous materials

Industry

CPC
H01L21/02093

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02093Cleaning of porous materials

Industries

Patents Grantslast 30 patents

Information Patent Grant
Liquid chemical for forming water repellent protecting film, and pr...
- Patent number 10,077,365
- Issue date Sep 18, 2018
- Central Glass Company, Limited
- Soichi Kumon
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor device, method for manufacturing the same, and rinsin...
- Patent number 9,780,008
- Issue date Oct 3, 2017
- Mitsui Chemicals, Inc.
- Shoko Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid chemical for forming water repellent protecting film, and pr...
- Patent number 9,349,582
- Issue date May 24, 2016
- Central Glass Company, Limited
- Soichi Kumon
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method of stripping organic mask with reduced damage to low-K film
- Patent number 9,040,430
- Issue date May 26, 2015
- Lam Research Corporation
- John M. Nagarah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and composition for restoring dielectric properties of porou...
- Patent number 7,977,121
- Issue date Jul 12, 2011
- Air Products and Chemicals, Inc.
- Dnyanesh Chandrakant Tamboli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning semiconductor substrate
- Patent number 7,503,982
- Issue date Mar 17, 2009
- Kanto Jangaku Kabushiki Kaisha
- Yumiko Abe
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF STRIPPING ORGANIC MASK WITH REDUCED DAMAGE TO LOW-K FILM
- Publication number 20150004797
- Publication date Jan 1, 2015
- LAM RESEARCH CORPORATION
- John M. NAGARAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Chemical for Forming Water Repellent Protecting Film, and Pr...
- Publication number 20120272999
- Publication date Nov 1, 2012
- Central Glass Company, Limited
- Soichi KUMON
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Method and composition for restoring dielectric properties of porou...
- Publication number 20080118995
- Publication date May 22, 2008
- Dnyanesh Chandrakant Tamboli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Using supercritical fluids and/or dense fluids in semiconductor app...
- Publication number 20050191861
- Publication date Sep 1, 2005
- Steven Verhaverbeke
- B08 - CLEANING
Information Patent Application
Cleaning liquid composition for semiconductor substrate
- Publication number 20040204329
- Publication date Oct 14, 2004
- Yumiko Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Using supercritical fluids and/or dense fluids in semiconductor app...
- Publication number 20040198066
- Publication date Oct 7, 2004
- APPLIED MATERIALS, INC.
- Steven Verhaverbeke
- B08 - CLEANING
Information Patent Application
Oxalic acid as a semiaqueous cleaning product for copper and dielec...
- Publication number 20040038840
- Publication date Feb 26, 2004
- Shihying Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Cleaning of porous materials

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Liquid chemical for forming water repellent protecting film, and pr...

Semiconductor device, method for manufacturing the same, and rinsin...

Liquid chemical for forming water repellent protecting film, and pr...

Method of stripping organic mask with reduced damage to low-K film

Method and composition for restoring dielectric properties of porou...

Method for cleaning semiconductor substrate

Patents Applicationslast 30 patents

METHOD OF STRIPPING ORGANIC MASK WITH REDUCED DAMAGE TO LOW-K FILM

Liquid Chemical for Forming Water Repellent Protecting Film, and Pr...

Method and composition for restoring dielectric properties of porou...

Using supercritical fluids and/or dense fluids in semiconductor app...

Cleaning liquid composition for semiconductor substrate

Using supercritical fluids and/or dense fluids in semiconductor app...

Oxalic acid as a semiaqueous cleaning product for copper and dielec...