Cleaning of reaction chamber

Industry

CPC
Y10S438/905

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

Current Industry

Y10S438/905Cleaning of reaction chamber

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Method and system for supplying a cleaning gas into a process chamber
- Patent number 10,094,486
- Issue date Oct 9, 2018
- Applied Materials, Inc.
- Ramprakash Sankarakrishnan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Hydrogen plasma based cleaning process for etch hardware
- Patent number 10,026,597
- Issue date Jul 17, 2018
- Applied Materials, Inc.
- Chirantha Rodrigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for in-situ chamber clean utilized in an etching processing...
- Patent number 9,533,332
- Issue date Jan 3, 2017
- Applied Materials, Inc.
- Noel Sun
- B08 - CLEANING
Information Patent Grant
Method and system for supplying a cleaning gas into a process chamber
- Patent number 9,206,511
- Issue date Dec 8, 2015
- Applied Materials, Inc.
- Ramprakash Sankarakrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for inducing turbulent flow of a processing ch...
- Patent number 8,910,644
- Issue date Dec 16, 2014
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to pre-heat and stabilize etching chamber condition and impr...
- Patent number 8,911,559
- Issue date Dec 16, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu Chao Lin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 8,895,457
- Issue date Nov 25, 2014
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of recovering ammonia and method of recycling ammonia by usi...
- Patent number 8,889,090
- Issue date Nov 18, 2014
- Japan Pionics Co., Ltd.
- Kansei Izaki
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Floating slit valve for transfer chamber interface
- Patent number 8,877,553
- Issue date Nov 4, 2014
- Applied Materials, Inc.
- John M. White
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and system for supplying a cleaning gas into a process chamber
- Patent number 8,591,699
- Issue date Nov 26, 2013
- Applied Materials, Inc.
- Ramprakash Sankarakrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device...
- Patent number 8,536,699
- Issue date Sep 17, 2013
- Kabushiki Kaisha Toshiba
- Kenichiro Toratani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic light emitting diode display with improved crystallinity of...
- Patent number 8,519,386
- Issue date Aug 27, 2013
- Samsung Display Co., Ltd.
- Kyu-Sik Cho
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods of finishing quartz glass surfaces and components made by t...
- Patent number 8,318,035
- Issue date Nov 27, 2012
- Lam Research Corporation
- Mark W. Kiehlbauch
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,304,350
- Issue date Nov 6, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insitu post atomic layer deposition destruction of active species
- Patent number 8,257,497
- Issue date Sep 4, 2012
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Component cleaning method and storage medium
- Patent number 8,236,109
- Issue date Aug 7, 2012
- Tokyo Electron Limited
- Tsuyoshi Moriya
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Diffusion furnaces employing ultra low mass transport systems and m...
- Patent number 8,236,596
- Issue date Aug 7, 2012
- TP Solar, Inc.
- Richard W. Parks
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Organic light emitting diode display with improved on-current, and...
- Patent number 8,232,123
- Issue date Jul 31, 2012
- Samsung Electronics Co., Ltd.
- Kyu-Sik Cho
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus
- Patent number 8,231,731
- Issue date Jul 31, 2012
- Hitachi Kokusai Electric, Inc.
- Kenichi Suzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System, method and apparatus for self-cleaning dry etch
- Patent number 8,211,238
- Issue date Jul 3, 2012
- Lam Research Corporation
- Andrew D. Bailey, III
- B08 - CLEANING
Information Patent Grant
Method of cleaning a CVD device
- Patent number 8,105,440
- Issue date Jan 31, 2012
- Canon Anelva Corporation
- Hiroshi Nogami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method for using the same
- Patent number 8,080,109
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device...
- Patent number 8,071,483
- Issue date Dec 6, 2011
- Kabushiki Kaisha Toshiba
- Kenichiro Toratani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning substrate processing chamber, storage medium, an...
- Patent number 8,057,603
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Masanobu Honda
- B08 - CLEANING
Information Patent Grant
Self cleaning large scale method and furnace system for selenizatio...
- Patent number 8,053,274
- Issue date Nov 8, 2011
- Stion Corporation
- Robert D. Wieting
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and control method thereof
- Patent number 8,048,327
- Issue date Nov 1, 2011
- Tokyo Electron Limited
- Akira Koshiishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Diffusion furnaces employing ultra low mass transport systems and m...
- Patent number 8,039,289
- Issue date Oct 18, 2011
- TP Solar, Inc.
- Richard W. Parks
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cleaning method and plasma processing method
- Patent number 8,034,183
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Shingo Furui
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 8,025,739
- Issue date Sep 27, 2011
- Hitachi Kokusai Electric, Inc.
- Kiyohisa Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method for using the same
- Patent number 7,993,705
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Nobutake Nodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER
- Publication number 20140076236
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Ramprakash SANKARAKRISHNAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF RECOVERING AMMONIA AND METHOD OF RECYCLING AMMONIA BY USI...
- Publication number 20130312456
- Publication date Nov 28, 2013
- JAPAN PIONICS CO., LTD.
- Kansei IZAKI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER
- Publication number 20130213574
- Publication date Aug 22, 2013
- Ramprakash Sankarakrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR IN-SITU CHAMBER CLEAN UTILIZED IN AN ETCHING PROCESSING...
- Publication number 20130087174
- Publication date Apr 11, 2013
- Applied Materials, Inc.
- Noel Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20130017685
- Publication date Jan 17, 2013
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC LIGHT EMITTING DIODE DISPLAY AND METHOD FOR MANUFACTURING T...
- Publication number 20120262433
- Publication date Oct 18, 2012
- Samsung Electronics Co., Ltd.
- Kyu-Sik CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF CLEANING LARGE SCALE METHOD AND FURNACE SYSTEM FOR SELENIZATIO...
- Publication number 20120094432
- Publication date Apr 19, 2012
- Stion Corporation
- Robert D. Wieting
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20120031331
- Publication date Feb 9, 2012
- Kabushiki Kaisha Toshiba
- Kenichiro Toratani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CH...
- Publication number 20110308551
- Publication date Dec 22, 2011
- Applied Materials, Inc.
- Hua Chung
- B08 - CLEANING
Information Patent Application
Diffusion Furnaces Employing Ultra Low Mass Transport Systems and M...
- Publication number 20110306160
- Publication date Dec 15, 2011
- TP SOLAR, INC.
- Richard W. Parks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE
- Publication number 20110287374
- Publication date Nov 24, 2011
- John M. White
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...
- Publication number 20110239936
- Publication date Oct 6, 2011
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20110226418
- Publication date Sep 22, 2011
- Kiyohisa ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF CLEANING LARGE SCALE METHOD AND FURNACE SYSTEM FOR SELENIZATIO...
- Publication number 20110223745
- Publication date Sep 15, 2011
- Stion Corporation
- Robert D. Wieting
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Diffusion Furnaces Employing Ultra Low Mass Transport Systems and M...
- Publication number 20100267188
- Publication date Oct 21, 2010
- TP SOLAR, INC.
- Richard W. Parks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT CLEANING METHOD AND STORAGE MEDIUM
- Publication number 20100154821
- Publication date Jun 24, 2010
- TOKYO ELECTRON LIMITED
- TSUYOSHI MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD AND A MANUFACTURING METHO...
- Publication number 20100144077
- Publication date Jun 10, 2010
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20100112822
- Publication date May 6, 2010
- Kenichiro Toratani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20100087068
- Publication date Apr 8, 2010
- Hitachi Kokusai Electric Inc.
- Kiyohisa Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO PRE-HEAT AND STABILIZE ETCHING CHAMBER CONDITION AND IMPR...
- Publication number 20100071719
- Publication date Mar 25, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu Chao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Supplying a Cleaning Gas Into a Process Chamber
- Publication number 20100012273
- Publication date Jan 21, 2010
- Applied Materials, Inc.
- Ramprakash Sankarakrishnan
- B08 - CLEANING
Information Patent Application
Process And Apparatus For Depositing Semiconductor Layers Using Two...
- Publication number 20100012034
- Publication date Jan 21, 2010
- Gerhard Karl Strauch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER
- Publication number 20090314309
- Publication date Dec 24, 2009
- APPLIED MATERIALS, INC.
- Ramprakash Sankarakrishnan
- B08 - CLEANING
Information Patent Application
ORGANIC LIGHT EMITTING DIODE DISPLAY AND METHOD FOR MANUFACTURING T...
- Publication number 20090302319
- Publication date Dec 10, 2009
- Samsung Electronics Co., Ltd.
- Kyu-Sik CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD
- Publication number 20090288603
- Publication date Nov 26, 2009
- Neal R. Rueger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIALLY COATED SILICON WAFER AND METHOD FOR PRODUCING EPITAXIAL...
- Publication number 20090261456
- Publication date Oct 22, 2009
- Siltronic AG
- Reinhard Schauer
- C30 - CRYSTAL GROWTH
Information Patent Application
PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...
- Publication number 20090239386
- Publication date Sep 24, 2009
- Kenichi SUZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS FOR SEMICONDUCTOR PROCESS AND METHOD FOR U...
- Publication number 20090233454
- Publication date Sep 17, 2009
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR USING FILM FORMATION APPARATUS
- Publication number 20090090300
- Publication date Apr 9, 2009
- Naotaka Noro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method and a manufacturing metho...
- Publication number 20090029509
- Publication date Jan 29, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Cleaning of reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for supplying a cleaning gas into a process chamber

Hydrogen plasma based cleaning process for etch hardware

Methods for in-situ chamber clean utilized in an etching processing...

Method and system for supplying a cleaning gas into a process chamber

Method and apparatus for inducing turbulent flow of a processing ch...

Method to pre-heat and stabilize etching chamber condition and impr...

Method of manufacturing semiconductor device and substrate processi...

Method of recovering ammonia and method of recycling ammonia by usi...

Floating slit valve for transfer chamber interface

Method and system for supplying a cleaning gas into a process chamber

Semiconductor device manufacturing method and semiconductor device...

Organic light emitting diode display with improved crystallinity of...

Methods of finishing quartz glass surfaces and components made by t...

Method of manufacturing a semiconductor device

Insitu post atomic layer deposition destruction of active species

Component cleaning method and storage medium

Diffusion furnaces employing ultra low mass transport systems and m...

Organic light emitting diode display with improved on-current, and...

Substrate processing apparatus

System, method and apparatus for self-cleaning dry etch

Method of cleaning a CVD device

Film formation apparatus and method for using the same

Semiconductor device manufacturing method and semiconductor device...

Method of cleaning substrate processing chamber, storage medium, an...

Self cleaning large scale method and furnace system for selenizatio...

Plasma processing apparatus and control method thereof

Diffusion furnaces employing ultra low mass transport systems and m...

Cleaning method and plasma processing method

Method of manufacturing semiconductor device

Film formation apparatus and method for using the same

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER

METHOD OF RECOVERING AMMONIA AND METHOD OF RECYCLING AMMONIA BY USI...

METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER

METHODS FOR IN-SITU CHAMBER CLEAN UTILIZED IN AN ETCHING PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

ORGANIC LIGHT EMITTING DIODE DISPLAY AND METHOD FOR MANUFACTURING T...

SELF CLEANING LARGE SCALE METHOD AND FURNACE SYSTEM FOR SELENIZATIO...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CH...

Diffusion Furnaces Employing Ultra Low Mass Transport Systems and M...

FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE

PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SELF CLEANING LARGE SCALE METHOD AND FURNACE SYSTEM FOR SELENIZATIO...

Diffusion Furnaces Employing Ultra Low Mass Transport Systems and M...

COMPONENT CLEANING METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS AND METHOD AND A MANUFACTURING METHO...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD TO PRE-HEAT AND STABILIZE ETCHING CHAMBER CONDITION AND IMPR...

Method and System for Supplying a Cleaning Gas Into a Process Chamber

Process And Apparatus For Depositing Semiconductor Layers Using Two...

METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER

ORGANIC LIGHT EMITTING DIODE DISPLAY AND METHOD FOR MANUFACTURING T...

PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD

EPITAXIALLY COATED SILICON WAFER AND METHOD FOR PRODUCING EPITAXIAL...

PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING A...

FILM FORMATION APPARATUS FOR SEMICONDUCTOR PROCESS AND METHOD FOR U...

METHOD FOR USING FILM FORMATION APPARATUS

Substrate processing apparatus and method and a manufacturing metho...