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H01L21/4892

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/4892Cleaning

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Patents Grantslast 30 patents

Information Patent Grant
Ruthenium-etching solution, method for manufacturing ruthenium-etch...
- Patent number 11,898,081
- Issue date Feb 13, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Takuya Ohhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing ruthenium wiring
- Patent number 11,686,002
- Issue date Jun 27, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fault isolation within an inner lead bond region of a .mu.BGA (micr...
- Patent number 6,165,806
- Issue date Dec 26, 2000
- Advanced Micro Devices, Inc.
- Siew Hor Kuan
- G01 - MEASURING TESTING
Information Patent Grant
Flux-removing aqueous cleaning composition and method of use
- Patent number 5,958,144
- Issue date Sep 28, 1999
- Church & Dwight
- Francis R. Cala
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
RUTHENIUM-ETCHING SOLUTION, METHOD FOR MANUFACTURING RUTHENIUM-ETCH...
- Publication number 20210155851
- Publication date May 27, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Takuya OHHASHI
- H01 - BASIC ELECTRIC ELEMENTS