Coarse scanning or positioning

Industry

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Parent Industries

GPHYSICS G01Measuring instruments G01QSCANNING-PROBE TECHNIQUES OR APPARATUS APPLICATIONS OF SCANNING-PROBE TECHNIQUES G01Q10/00Scanning or positioning arrangements

Current Industry

G01Q10/02Coarse scanning or positioning

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and device for measuring dimension of semiconductor structure
- Patent number 11,656,245
- Issue date May 23, 2023
- Changxin Memory Technologies, Inc.
- Zheng Li
- G01 - MEASURING TESTING
Information Patent Grant
Surface analysis device
- Patent number 11,499,989
- Issue date Nov 15, 2022
- Shimadzu Corporation
- Kanji Kobayashi
- G01 - MEASURING TESTING
Information Patent Grant
Modular scanning probe microscope head
- Patent number 11,474,127
- Issue date Oct 18, 2022
- Rutgers, The State University of New Jersey
- Angela Coe
- G01 - MEASURING TESTING
Information Patent Grant
Feedback correction in sub-resonant tapping mode of an atomic force...
- Patent number 11,099,210
- Issue date Aug 24, 2021
- Trustees of Tufts College
- Piers Echols-Jones
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for measuring and/or modifying surface features o...
- Patent number 10,908,179
- Issue date Feb 2, 2021
- NEDERLANDSK ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Hamed Sadeghian Marnani
- G01 - MEASURING TESTING
Information Patent Grant
Scanner and scanning probe microscope
- Patent number 10,884,022
- Issue date Jan 5, 2021
- Osaka University
- Hayato Yamashita
- G01 - MEASURING TESTING
Information Patent Grant
Coupled multiscale positioning of arrays of parallel, independently...
- Patent number 10,649,003
- Issue date May 12, 2020
- Board of Regents, The University of Texas System
- Michael A. Cullinan
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional fine movement device
- Patent number 10,161,958
- Issue date Dec 25, 2018
- Hitachi High-Tech Science Corporation
- Masatsugu Shigeno
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and probe contact detection method
- Patent number 10,151,773
- Issue date Dec 11, 2018
- Hitachi High-Tech Science Corporation
- Masatsugu Shigeno
- G01 - MEASURING TESTING
Information Patent Grant
Precise probe placement in automated scanning probe microscopy systems
- Patent number 9,995,763
- Issue date Jun 12, 2018
- Bruker Nano, Inc.
- Jason Osborne
- G01 - MEASURING TESTING
Information Patent Grant
AM/FM measurements using multiple frequency of atomic force microscopy
- Patent number 9,841,436
- Issue date Dec 12, 2017
- Oxford Instruments Asylum Research Inc
- Roger Proksch
- G01 - MEASURING TESTING
Information Patent Grant
Scanning ion conductance microscopy using surface roughness for pro...
- Patent number 9,709,598
- Issue date Jul 18, 2017
- Imperial Innovations Limited
- Pavel Novak
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System and method for non-contact microscopy for three-dimensional...
- Patent number 9,506,947
- Issue date Nov 29, 2016
- DCG Systems, Inc.
- Vladimir A. Ukraintsev
- G01 - MEASURING TESTING
Information Patent Grant
Probe assembly for a scanning probe microscope
- Patent number 9,052,340
- Issue date Jun 9, 2015
- INFINITESIMA LTD
- Andrew Humphris
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscopy inspection and modification system
- Patent number 8,499,621
- Issue date Aug 6, 2013
- Victor B. Kley
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Fast-scanning SPM scanner and method of operating same
- Patent number 8,443,459
- Issue date May 14, 2013
- Bruker Nano, Inc.
- Nghi Phan
- G01 - MEASURING TESTING
Information Patent Grant
Metrology probe and method of configuring a metrology probe
- Patent number 8,397,311
- Issue date Mar 12, 2013
- The Research Foundation of State University of New York
- Harsh Deep Chopra
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Modular atomic force microscope
- Patent number 8,370,960
- Issue date Feb 5, 2013
- Asylum Research Corporation
- Roger Proksch
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope and a measuring method using the same
- Patent number 8,353,060
- Issue date Jan 8, 2013
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Positioning apparatus and method
- Patent number 8,179,019
- Issue date May 15, 2012
- Nanomobile Ltd.
- Andrii Volkov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Fast-scanning SPM scanner and method of operating same
- Patent number 8,166,567
- Issue date Apr 24, 2012
- Bruker Nano, Inc.
- Nghi Phan
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe apparatus and drive stage therefor
- Patent number 7,631,547
- Issue date Dec 15, 2009
- Canon Kabushiki Kaisha
- Nobuki Yoshimatsu
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscopy inspection and modification system
- Patent number 7,485,856
- Issue date Feb 3, 2009
- General Nanotechnology LLP
- Victor B. Kley
- G11 - INFORMATION STORAGE
Information Patent Grant
Scanning mechanism for scanning probe microscope and scanning probe...
- Patent number 7,348,571
- Issue date Mar 25, 2008
- Olympus Corporation
- Yoshihiro Ue
- G12 - INSTRUMENT DETAILS
Information Patent Grant
Method and apparatus of manipulating a sample
- Patent number 7,334,460
- Issue date Feb 26, 2008
- Veeco Instruments, Inc.
- Ami Chand
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and specimen observation method and semic...
- Patent number 7,323,684
- Issue date Jan 29, 2008
- Hitachi, Ltd.
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Dual stage instrument for scanning a specimen
- Patent number 7,100,430
- Issue date Sep 5, 2006
- KLA-Tencor Corporation
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and specimen observation method
- Patent number 7,067,806
- Issue date Jun 27, 2006
- Hitachi, Ltd.
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscopy inspection and modification system
- Patent number 7,045,780
- Issue date May 16, 2006
- General Nanotechnology, L.L.C.
- Victor B. Kley
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and apparatus for manipulating a sample
- Patent number 7,040,147
- Issue date May 9, 2006
- Veeco Instruments Inc.
- Ami Chand
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND...
- Publication number 20240110939
- Publication date Apr 4, 2024
- Nearfield Instruments B.V.
- Hamed SADEGHIAN MARNANI
- G01 - MEASURING TESTING
Information Patent Application
ATOMIC NANO-POSITIONING DEVICE
- Publication number 20220299544
- Publication date Sep 22, 2022
- National Research Council of Canada
- Robert A. Wolkow
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD AND DEVICE FOR MEASURING DIMENSION OF SEMICONDUCTOR STRUCTURE
- Publication number 20220229087
- Publication date Jul 21, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Zheng LI
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE
- Publication number 20220146548
- Publication date May 12, 2022
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
SURFACE ANALYSIS DEVICE
- Publication number 20210349125
- Publication date Nov 11, 2021
- Shimadzu Corporation
- Kanji KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
MODULAR SCANNING PROBE MICROSCOPE HEAD
- Publication number 20210349127
- Publication date Nov 11, 2021
- Rutgers, The State University of New Jersey
- Angela Coe
- G01 - MEASURING TESTING
Information Patent Application
SCANNER AND SCANNING PROBE MICROSCOPE
- Publication number 20200049733
- Publication date Feb 13, 2020
- OSAKA UNIVERSITY
- Hayato YAMASHITA
- G01 - MEASURING TESTING
Information Patent Application
FEEDBACK CORRECTION IN SUB-RESONANT TAPPING MODE OF AN ATOMIC FORCE...
- Publication number 20190391178
- Publication date Dec 26, 2019
- Piers Echols-Jones
- G01 - MEASURING TESTING
Information Patent Application
COUPLED MULTISCALE POSITIONING OF ARRAYS OF PARALLEL, INDEPENDENTLY...
- Publication number 20180348254
- Publication date Dec 6, 2018
- Board of Regents, The University of Texas System
- Michael A. Cullinan
- G01 - MEASURING TESTING
Information Patent Application
AM/FM MEASUREMENTS USING MULTIPLE FREQUENCY ATOMIC FORCE MICROSCOPY
- Publication number 20180292432
- Publication date Oct 11, 2018
- Oxford Instruments Asylum Research, Inc.
- Roger Proksch
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR MEASURING AND/OR MODIFYING SURFACE FEATURES O...
- Publication number 20180238931
- Publication date Aug 23, 2018
- Nerderlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- Hamed SADEGHIAN MARNANI
- G01 - MEASURING TESTING
Information Patent Application
INFORMATION ACQUIRING METHOD IN ATOMIC FORCE MICROSCOPE
- Publication number 20180074092
- Publication date Mar 15, 2018
- OLYMPUS CORPORATION
- Nobuaki SAKAI
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE AND PROBE CONTACT DETECTION METHOD
- Publication number 20170285067
- Publication date Oct 5, 2017
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Masatsugu Shigeno
- G01 - MEASURING TESTING
Information Patent Application
Modular Atomic Force Microscope
- Publication number 20170254834
- Publication date Sep 7, 2017
- OXFORD INSTRUMENTS PLC
- Roger Proksch
- B82 - NANO-TECHNOLOGY
Information Patent Application
AM/FM Measurements Using Multiple Frequency of Atomic Force Microscopy
- Publication number 20170131322
- Publication date May 11, 2017
- Oxford Instruments Asylum Research, Inc.
- Roger Proksch
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ION CONDUCTANCE MICROSCOPY
- Publication number 20170016933
- Publication date Jan 19, 2017
- OPENIOLABS LTD
- Andrew James Richardson
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL...
- Publication number 20150301078
- Publication date Oct 22, 2015
- DCG SYSTEMS, INC.
- Vladimir A. Ukraintsev
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR AUTOMATED SCANNING PROBE MICROSCOPY
- Publication number 20150241468
- Publication date Aug 27, 2015
- Nuomedis AG
- Robert SUM
- G02 - OPTICS
Information Patent Application
PRECISE PROBE PLACEMENT IN AUTOMATED SCANNING PROBE MICROSCOPY SYSTEMS
- Publication number 20150241469
- Publication date Aug 27, 2015
- Bruker Nano, Inc.
- Jason Osborne
- G01 - MEASURING TESTING
Information Patent Application
Modular Atomic Force Microscope
- Publication number 20140223612
- Publication date Aug 7, 2014
- ASYLUM CORPORATION
- Roger Proksch
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL...
- Publication number 20140143912
- Publication date May 22, 2014
- Vladimir A. Ukraintsev
- G01 - MEASURING TESTING
Information Patent Application
PROBE ASSEMBLY FOR A SCANNING PROBE MICROSCOPE
- Publication number 20130014296
- Publication date Jan 10, 2013
- INFINITESIMA LTD
- Andrew Humphris
- B82 - NANO-TECHNOLOGY
Information Patent Application
FAST-SCANNING SPM SCANNER AND METHOD OF OPERATING SAME
- Publication number 20120204295
- Publication date Aug 9, 2012
- Bruker Nano, Inc.
- Nghi Phan
- G01 - MEASURING TESTING
Information Patent Application
Metrology Probe and Method of Configuring a Metrology Probe
- Publication number 20120110707
- Publication date May 3, 2012
- The Research Foundation of State University of New York
- Harsh Deep Chopra
- G01 - MEASURING TESTING
Information Patent Application
A SCANNING PROBE MICROSCOPE AND A MEASURING METHOD USING THE SAME
- Publication number 20110055982
- Publication date Mar 3, 2011
- Masahiro WATANABE
- G01 - MEASURING TESTING
Information Patent Application
Modular atomic force microscope
- Publication number 20100275334
- Publication date Oct 28, 2010
- Roger Proksch
- G01 - MEASURING TESTING
Information Patent Application
NANOROBOT MODULE, AUTOMATION AND EXCHANGE
- Publication number 20100140473
- Publication date Jun 10, 2010
- Volker Klocke
- G01 - MEASURING TESTING
Information Patent Application
POSITIONING APPARATUS AND METHOD
- Publication number 20100117486
- Publication date May 13, 2010
- UNIVERSITY OF NORTHUMBRIA AT NEWCASTLE
- Andrii Volkov
- G01 - MEASURING TESTING
Information Patent Application
Fast-Scanning SPM Scanner and Method of Operating Same
- Publication number 20080223119
- Publication date Sep 18, 2008
- Veeco Instruments Inc.
- Nghi Phan
- G01 - MEASURING TESTING
Information Patent Application
Scanning Probe Microscopy Inspection and Modification System
- Publication number 20080121028
- Publication date May 29, 2008
- General Nanotechnology LLC
- Victor B. Kley
- G02 - OPTICS

Coarse scanning or positioning

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and device for measuring dimension of semiconductor structure

Surface analysis device

Modular scanning probe microscope head

Feedback correction in sub-resonant tapping mode of an atomic force...

Device and method for measuring and/or modifying surface features o...

Scanner and scanning probe microscope

Coupled multiscale positioning of arrays of parallel, independently...

Three-dimensional fine movement device

Scanning probe microscope and probe contact detection method

Precise probe placement in automated scanning probe microscopy systems

AM/FM measurements using multiple frequency of atomic force microscopy

Scanning ion conductance microscopy using surface roughness for pro...

System and method for non-contact microscopy for three-dimensional...

Probe assembly for a scanning probe microscope

Scanning probe microscopy inspection and modification system

Fast-scanning SPM scanner and method of operating same

Metrology probe and method of configuring a metrology probe

Modular atomic force microscope

Scanning probe microscope and a measuring method using the same

Positioning apparatus and method

Fast-scanning SPM scanner and method of operating same

Scanning probe apparatus and drive stage therefor

Scanning probe microscopy inspection and modification system

Scanning mechanism for scanning probe microscope and scanning probe...

Method and apparatus of manipulating a sample

Scanning probe microscope and specimen observation method and semic...

Dual stage instrument for scanning a specimen

Scanning probe microscope and specimen observation method

Scanning probe microscopy inspection and modification system

Method and apparatus for manipulating a sample

Patents Applicationslast 30 patents

AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND...

ATOMIC NANO-POSITIONING DEVICE

METHOD AND DEVICE FOR MEASURING DIMENSION OF SEMICONDUCTOR STRUCTURE

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

SURFACE ANALYSIS DEVICE

MODULAR SCANNING PROBE MICROSCOPE HEAD

SCANNER AND SCANNING PROBE MICROSCOPE

FEEDBACK CORRECTION IN SUB-RESONANT TAPPING MODE OF AN ATOMIC FORCE...

COUPLED MULTISCALE POSITIONING OF ARRAYS OF PARALLEL, INDEPENDENTLY...

AM/FM MEASUREMENTS USING MULTIPLE FREQUENCY ATOMIC FORCE MICROSCOPY

DEVICE AND METHOD FOR MEASURING AND/OR MODIFYING SURFACE FEATURES O...

INFORMATION ACQUIRING METHOD IN ATOMIC FORCE MICROSCOPE

SCANNING PROBE MICROSCOPE AND PROBE CONTACT DETECTION METHOD

Modular Atomic Force Microscope

AM/FM Measurements Using Multiple Frequency of Atomic Force Microscopy

SCANNING ION CONDUCTANCE MICROSCOPY

SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL...

METHOD AND APPARATUS FOR AUTOMATED SCANNING PROBE MICROSCOPY

PRECISE PROBE PLACEMENT IN AUTOMATED SCANNING PROBE MICROSCOPY SYSTEMS

Modular Atomic Force Microscope

SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL...

PROBE ASSEMBLY FOR A SCANNING PROBE MICROSCOPE

FAST-SCANNING SPM SCANNER AND METHOD OF OPERATING SAME

Metrology Probe and Method of Configuring a Metrology Probe

A SCANNING PROBE MICROSCOPE AND A MEASURING METHOD USING THE SAME

Modular atomic force microscope

NANOROBOT MODULE, AUTOMATION AND EXCHANGE

POSITIONING APPARATUS AND METHOD

Fast-Scanning SPM Scanner and Method of Operating Same

Scanning Probe Microscopy Inspection and Modification System