TREA

Coaxial inlets for each gas

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  • CPC
  • C23C16/45576
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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45576Coaxial inlets for each gas
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CUTTING TOOL AND METHOD FOR MANUFACTURING THE SAME
    • Publication number 20230234141
    • Publication date Jul 27, 2023
    • Sumitomo Electric Industries, Ltd.
    • Haruko HARADA
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER WITH WAFER CHUCK HAVIN...
    • Publication number 20230197421
    • Publication date Jun 22, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Sheng-Chun YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
    • Publication number 20230160067
    • Publication date May 25, 2023
    • Starfire Industires, LLC
    • Brian Edward Jurczyk
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND APPARATUS
    • Publication number 20230040728
    • Publication date Feb 9, 2023
    • ASM IP HOLDING B.V.
    • Akinori Nakano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS INLET DEVICE FOR A CVD REACTOR
    • Publication number 20230002902
    • Publication date Jan 5, 2023
    • AIXTRON SE
    • Martin EICKELKAMP
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WALL-COOLED GAS-INLET ELEMENT FOR A CVD REACTOR
    • Publication number 20220396877
    • Publication date Dec 15, 2022
    • AIXTRON SE
    • Marcel KOLLBERG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER WITH WAFER CHUCK HAVIN...
    • Publication number 20220384239
    • Publication date Dec 1, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Sheng-Chun YANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MANIFOLDS FOR UNIFORM VAPOR DEPOSITION
    • Publication number 20220349060
    • Publication date Nov 3, 2022
    • ASM IP HOLDING B.V.
    • David Marquardt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MANIFOLDS FOR UNIFORM VAPOR DEPOSITION
    • Publication number 20200248308
    • Publication date Aug 6, 2020
    • ASM IP HOLDING B.V.
    • David Marquardt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MONOLITHIC CERAMIC GAS DISTRIBUTION PLATE
    • Publication number 20190032211
    • Publication date Jan 31, 2019
    • LAM RESEARCH CORPORATION
    • Jeremy Tucker
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS DISTRIBUTING INJECTOR APPLIED IN MOCVD REACTOR
    • Publication number 20170314131
    • Publication date Nov 2, 2017
    • HERMES-EPITEK CORPORATION
    • Po-Jung Lin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESS CHAMBER FOR DIELECTRIC GAPFILL
    • Publication number 20170226637
    • Publication date Aug 10, 2017
    • Applied Materials, Inc.
    • Dmitry Lubomirsky
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    STACKABLE MULTI-PORT GAS NOZZLES
    • Publication number 20150176127
    • Publication date Jun 25, 2015
    • SILEVO, INC.
    • Steve Poppe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SILICON CARBIDE CRYSTAL GROWTH IN A CVD REACTOR USING CHLORINATED C...
    • Publication number 20150013595
    • Publication date Jan 15, 2015
    • Erik Janzén
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    PROCESS CHAMBER FOR DIELECTRIC GAPFILL
    • Publication number 20140083362
    • Publication date Mar 27, 2014
    • Applied Materials, Inc.
    • Dmitry Lubomirsky
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Thin film processing equipment and the processing method thereof
    • Publication number 20130071567
    • Publication date Mar 21, 2013
    • Ying-Shih HSIAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTI-GAS CENTRALLY COOLED SHOWERHEAD DESIGN
    • Publication number 20130052804
    • Publication date Feb 28, 2013
    • Applied Materials, Imn,
    • Eddy J. Song
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    DEPOSITION SOURCE ASSEMBLY, ORGANIC LAYER DEPOSITION APPARATUS, AND...
    • Publication number 20130032829
    • Publication date Feb 7, 2013
    • Un-Cheol Sung
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FLUID BED REACTOR
    • Publication number 20120263874
    • Publication date Oct 18, 2012
    • E. Wayne Osborne
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTRODE HAVING GAS DISCHARGE FUNCTION AND PLASMA PROCESSING APPAR...
    • Publication number 20120247673
    • Publication date Oct 4, 2012
    • TOKYO ELECTRON LIMITED
    • Daisuke HAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus and Process for Atomic Layer Deposition
    • Publication number 20120225203
    • Publication date Sep 6, 2012
    • Applied Materials, Inc.
    • Joseph Yudovsky
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus And Process For Atomic Layer Deposition
    • Publication number 20120225219
    • Publication date Sep 6, 2012
    • Applied Materials, Inc.
    • Joseph Yudovsky
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20120180727
    • Publication date Jul 19, 2012
    • TOKYO ELECTRON LIMITED
    • Harunari HASEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING AN ALUMINUM NITRIDE THIN FILM
    • Publication number 20120100698
    • Publication date Apr 26, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Koji Kato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESS CHAMBER FOR DIELECTRIC GAPFILL
    • Publication number 20120073501
    • Publication date Mar 29, 2012
    • Applied Materials, Inc.
    • Dmitry Lubomirsky
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD FOR FILM DEPOSITING VACUUM EQUIPMENT
    • Publication number 20120067971
    • Publication date Mar 22, 2012
    • Korea Institute of Industrial Tedhnology
    • Chulsoo Byun
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTIPLE SECTION SHOWERHEAD ASSEMBLY
    • Publication number 20120064698
    • Publication date Mar 15, 2012
    • Applied Materials, Inc.
    • Donald J.K. Olgado
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma Processing Chamber with Dual Axial Gas Injection and Exhaust
    • Publication number 20120034786
    • Publication date Feb 9, 2012
    • LAM RESEARCH CORPORATION
    • Rajinder Dhindsa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR ENHANCED PROCESSING CHAMBER CLEANING
    • Publication number 20120000490
    • Publication date Jan 5, 2012
    • Applied Materials, Inc.
    • HUA CHUNG
    • B08 - CLEANING
  • Information Patent Application

    FLUID BED REACTOR
    • Publication number 20110117729
    • Publication date May 19, 2011
    • REC Silicon Inc.
    • E. Wayne Osborne
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...