Coils

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CPC
H01J2237/141

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/141Coils

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Particle beam system
- Patent number 12,293,896
- Issue date May 6, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method for using plasma processing...
- Patent number 12,165,845
- Issue date Dec 10, 2024
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Shogo Okita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for electron beam focusing in electron beam add...
- Patent number 12,148,592
- Issue date Nov 19, 2024
- General Electric Company
- John Scott Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear accelerator coil including multiple fluid channels
- Patent number 11,985,756
- Issue date May 14, 2024
- Applied Materials, Inc.
- Robert B. Vopat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam application apparatus
- Patent number 11,915,903
- Issue date Feb 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope device and electron beam inspection ap...
- Patent number 11,908,657
- Issue date Feb 20, 2024
- Zhongke Jingyuan Electron Limited
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for electron beam focusing in electron beam add...
- Patent number 11,837,428
- Issue date Dec 5, 2023
- General Electric Company
- John Scott Price
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Axial alignment assembly, and charged particle microscope comprisin...
- Patent number 11,773,905
- Issue date Oct 3, 2023
- FEI Company
- Pleun Dona
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multipole unit and charged particle beam device
- Patent number 11,769,649
- Issue date Sep 26, 2023
- HITACHI HIGH-TECH CORPORATION
- Masanori Mita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam manipulation device and method for manipulati...
- Patent number 11,705,301
- Issue date Jul 18, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,640,897
- Issue date May 2, 2023
- Hitachi High-Technologies Corporation
- Ryo Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and control method of charged parti...
- Patent number 11,640,894
- Issue date May 2, 2023
- Jeol Ltd.
- Toshikatsu Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Current source apparatus and method
- Patent number 11,562,884
- Issue date Jan 24, 2023
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 11,527,379
- Issue date Dec 13, 2022
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,456,150
- Issue date Sep 27, 2022
- HITACHI HIGH-TECH CORPORATION
- Kaori Bizen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field free sample plane for charged particle microscope
- Patent number 11,450,505
- Issue date Sep 20, 2022
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,430,630
- Issue date Aug 30, 2022
- Hitachi High-Technologies Corporation
- Ryo Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam system for inspection and review of 3D devices
- Patent number 11,335,608
- Issue date May 17, 2022
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam optical system, exposure apparatus, exposure...
- Patent number 11,276,546
- Issue date Mar 15, 2022
- Nikon Corporation
- Takehisa Yahiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflector and charged particle beam system
- Patent number 11,251,013
- Issue date Feb 15, 2022
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning magnet design with enhanced efficiency
- Patent number 11,114,270
- Issue date Sep 7, 2021
- Axcelis Technologies, Inc.
- Bo Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical apparatus and particle beam system
- Patent number 11,087,949
- Issue date Aug 10, 2021
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source
- Patent number 11,075,053
- Issue date Jul 27, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic lens and exciting current control method
- Patent number 10,923,312
- Issue date Feb 16, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Wei He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam axial alignment device, charged particle beam...
- Patent number 10,903,038
- Issue date Jan 26, 2021
- Shimadzu Corporation
- Takehiro Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,886,101
- Issue date Jan 5, 2021
- HITACHI HIGH-TECH CORPORATION
- Ryo Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical apparatus and particle beam system
- Patent number 10,755,889
- Issue date Aug 25, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 10,622,184
- Issue date Apr 14, 2020
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for adjusting imaging co...
- Patent number 10,566,172
- Issue date Feb 18, 2020
- Hitachi High-Technologies Corporation
- Tomohito Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and charged particle beam writ...
- Patent number 10,504,686
- Issue date Dec 10, 2019
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS
- Publication number 20250046563
- Publication date Feb 6, 2025
- Axcelis Technologies, Inc.
- Wilhelm Peter Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE...
- Publication number 20250006453
- Publication date Jan 2, 2025
- FEI Company
- Jan Stopka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC VECTOR POTENTIAL-BASED LENS
- Publication number 20240429016
- Publication date Dec 26, 2024
- OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Makoto Tokoro SCHREIBER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPOLE ELEMENT, IMAGE ERROR CORRECTOR AND PARTICLE BEAM SYSTEM
- Publication number 20240371597
- Publication date Nov 7, 2024
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM MICROSCOPE
- Publication number 20240304410
- Publication date Sep 12, 2024
- CARL ZEISS MICROSCOPY GMBH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR DEMAGNETIZING MAGNETIC...
- Publication number 20240274395
- Publication date Aug 15, 2024
- Hitachi High-Tech Corporatiom
- Shingo HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LENS FOR A CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM A...
- Publication number 20240212968
- Publication date Jun 27, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable Permanent Magnetic Lens Having Thermal Control Device
- Publication number 20240021403
- Publication date Jan 18, 2024
- IMS Nanofabrication GmbH
- Dietmar Puchberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable Permanent Magnetic Lens Having Shunting Device
- Publication number 20230360878
- Publication date Nov 9, 2023
- IMS Nanofabrication GmbH
- Dietmar Puchberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR USING PLASMA PROCESSING...
- Publication number 20230170186
- Publication date Jun 1, 2023
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Shogo OKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR ACCELERATOR COIL INCLUDING MULTIPLE FLUID CHANNELS
- Publication number 20230119010
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Robert B. Vopat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
- Publication number 20230005704
- Publication date Jan 5, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION APPARATUS
- Publication number 20220319798
- Publication date Oct 6, 2022
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multipole Unit and Charged Particle Beam Device
- Publication number 20220270844
- Publication date Aug 25, 2022
- HITACHI HIGH-TECH CORPORATION
- Masanori MITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM MANIPULATION DEVICE AND METHOD FOR MANIPULATI...
- Publication number 20220230836
- Publication date Jul 21, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODOLUMINESCENCE ELECTRON MICROSCOPE
- Publication number 20220216028
- Publication date Jul 7, 2022
- ATTOLIGHT AG
- BERNEY Jean
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA JET SOLID ABLATION-BASED DIRECT ANALYSIS APPARATUS
- Publication number 20220208522
- Publication date Jun 30, 2022
- CHENGDU ALIEBN SCIENCE AND TECHNOLOGY CO., LTD
- Yanting YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE
- Publication number 20220199353
- Publication date Jun 23, 2022
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20220068589
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES
- Publication number 20210327770
- Publication date Oct 21, 2021
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210313140
- Publication date Oct 7, 2021
- Kaori BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle Beam System
- Publication number 20210142980
- Publication date May 13, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE-OPTICAL APPARATUS AND PARTICLE BEAM SYSTEM
- Publication number 20200381206
- Publication date Dec 3, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CURRENT SOURCE APPARATUS AND METHOD
- Publication number 20200335298
- Publication date Oct 22, 2020
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20200251304
- Publication date Aug 6, 2020
- Hitachi High-Technologies Corporation
- Ryo HIRANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deflector and Charged Particle Beam System
- Publication number 20200243297
- Publication date Jul 30, 2020
- JEOL Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20200243296
- Publication date Jul 30, 2020
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20200219697
- Publication date Jul 9, 2020
- Hitachi High-Technologies Corporation
- Ryo HIRANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Control Method of Charged Parti...
- Publication number 20200168431
- Publication date May 28, 2020
- JEOL Ltd.
- Toshikatsu Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20200126753
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle beam system

Plasma processing apparatus and method for using plasma processing...

Systems and methods for electron beam focusing in electron beam add...

Linear accelerator coil including multiple fluid channels

Electron beam application apparatus

Scanning electron microscope device and electron beam inspection ap...

Systems and methods for electron beam focusing in electron beam add...

Axial alignment assembly, and charged particle microscope comprisin...

Multipole unit and charged particle beam device

Charged particle beam manipulation device and method for manipulati...

Charged particle beam device

Charged particle beam apparatus and control method of charged parti...

Current source apparatus and method

Objective lens arrangement usable in particle-optical systems

Charged particle beam device

Magnetic field free sample plane for charged particle microscope

Charged particle beam apparatus

Electron beam system for inspection and review of 3D devices

Charged particle beam optical system, exposure apparatus, exposure...

Deflector and charged particle beam system

Scanning magnet design with enhanced efficiency

Particle-optical apparatus and particle beam system

Charged particle source

Magnetic lens and exciting current control method

Charged particle beam axial alignment device, charged particle beam...

Charged particle beam device

Particle-optical apparatus and particle beam system

Objective lens arrangement usable in particle-optical systems

Charged particle beam apparatus and method for adjusting imaging co...

Charged particle beam writing method and charged particle beam writ...

Patents Applicationslast 30 patents

MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS

MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE...

MAGNETIC VECTOR POTENTIAL-BASED LENS

MULTIPOLE ELEMENT, IMAGE ERROR CORRECTOR AND PARTICLE BEAM SYSTEM

ELECTRON BEAM MICROSCOPE

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR DEMAGNETIZING MAGNETIC...

LENS FOR A CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM A...

Adjustable Permanent Magnetic Lens Having Thermal Control Device

Adjustable Permanent Magnetic Lens Having Shunting Device

PLASMA PROCESSING APPARATUS AND METHOD FOR USING PLASMA PROCESSING...

LINEAR ACCELERATOR COIL INCLUDING MULTIPLE FLUID CHANNELS

SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...

ELECTRON BEAM APPLICATION APPARATUS

Multipole Unit and Charged Particle Beam Device

CHARGED PARTICLE BEAM MANIPULATION DEVICE AND METHOD FOR MANIPULATI...

CATHODOLUMINESCENCE ELECTRON MICROSCOPE

PLASMA JET SOLID ABLATION-BASED DIRECT ANALYSIS APPARATUS

MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE

CHARGED PARTICLE SOURCE

ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES

Charged Particle Beam Device

Particle Beam System

PARTICLE-OPTICAL APPARATUS AND PARTICLE BEAM SYSTEM

CURRENT SOURCE APPARATUS AND METHOD

Charged Particle Beam Device

Deflector and Charged Particle Beam System

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

Charged Particle Beam Apparatus

Charged Particle Beam Apparatus and Control Method of Charged Parti...

CHARGED PARTICLE SOURCE