Combinations of electrostatic and magnetic lenses

Industry

CPC
H01J37/145

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/145Combinations of electrostatic and magnetic lenses

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus with multiple detectors and methods...
- Patent number 12,142,455
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multiple particle beam system while altering...
- Patent number 12,057,290
- Issue date Aug 6, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and axis adjustment method thereof
- Patent number 12,027,342
- Issue date Jul 2, 2024
- HITACHI HIGH-TECH CORPORATION
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a gas feed device for a particle beam apparatus
- Patent number 12,002,656
- Issue date Jun 4, 2024
- Carl Zeiss Microscopy GmbH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for real time stereo imaging using multiple ele...
- Patent number 11,942,303
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Yan Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number RE49784
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Weiming Ren
Information Patent Grant
Multiple charged-particle beam apparatus and methods
- Patent number 11,854,765
- Issue date Dec 26, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens system for fast scanning large FOV
- Patent number 11,837,431
- Issue date Dec 5, 2023
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron optical module for providing an off-axial electron beam wi...
- Patent number 11,804,357
- Issue date Oct 31, 2023
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and axis adjustment method thereof
- Patent number 11,764,028
- Issue date Sep 19, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a gas supply device for a particle beam device
- Patent number 11,764,036
- Issue date Sep 19, 2023
- Carl Zeiss Microscopy GmbH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Examining, analyzing and/or processing an object using an object re...
- Patent number 11,721,518
- Issue date Aug 8, 2023
- Carl Zeiss Microscopy GmbH
- Andreas Schertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam manipulation device and method for manipulati...
- Patent number 11,705,301
- Issue date Jul 18, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam image acquisition apparatus and multi-beam image acquisi...
- Patent number 11,694,868
- Issue date Jul 4, 2023
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged particle beams
- Patent number 11,676,793
- Issue date Jun 13, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and method of adjusting focus of electron micro...
- Patent number 11,670,479
- Issue date Jun 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Takeyoshi Ohashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-beam inspection apparatus with single-beam mode
- Patent number 11,594,396
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 11,527,379
- Issue date Dec 13, 2022
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration reduction in multipass electron microscopy
- Patent number 11,456,148
- Issue date Sep 27, 2022
- The Board of Trustees of the Leland Stanford Junior University
- Mark A. Kasevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Counter pole with permanent magnets
- Patent number 11,417,493
- Issue date Aug 16, 2022
- FEI Company
- Lubomír Tůma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a particle beam generator for a particle beam device
- Patent number 11,380,519
- Issue date Jul 5, 2022
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and method for adjusting position of d...
- Patent number 11,342,155
- Issue date May 24, 2022
- HITACHI HIGH-TECH CORPORATION
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle optical apparatus for through-the-lens detection o...
- Patent number 11,276,547
- Issue date Mar 15, 2022
- Carl Zeiss Microscopy GmbH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement
- Patent number 11,264,198
- Issue date Mar 1, 2022
- Applied Materials Israel Ltd.
- Igor Petrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and method for inspecting and/or imagi...
- Patent number 11,239,043
- Issue date Feb 1, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for correcting two-fold, fifth-order parasitic ab...
- Patent number 11,239,045
- Issue date Feb 1, 2022
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method
- Patent number 11,239,053
- Issue date Feb 1, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for simultaneous phase contrast imaging and elect...
- Patent number 11,211,223
- Issue date Dec 28, 2021
- FEI Company
- Ivan Lazić
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,164,716
- Issue date Nov 2, 2021
- HITACHI HIGH-TECH CORPORATION
- Shunichi Motomura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
- Publication number 20240347316
- Publication date Oct 17, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...
- Publication number 20240290571
- Publication date Aug 29, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...
- Publication number 20240258065
- Publication date Aug 1, 2024
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242933
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242919
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242920
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242922
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240234081
- Publication date Jul 11, 2024
- ASML NETHERLANDS B.V.
- Erwin SLOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE APPARATUS
- Publication number 20240212969
- Publication date Jun 27, 2024
- Nikon Corporation
- Takakuni GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable Magnetic Lens Having Permanent-Magnetic and Electromagne...
- Publication number 20240212970
- Publication date Jun 27, 2024
- IMS Nanofabrication GmbH
- Christoph Spengler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LENS FOR A CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM A...
- Publication number 20240212968
- Publication date Jun 27, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240145208
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Erwin SLOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS SYSTEM FOR FAST SCANNING LARGE FOV
- Publication number 20240145209
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
- Publication number 20240145214
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240136147
- Publication date Apr 25, 2024
- ASML NETHERLANDS B.V.
- Erwin SLOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...
- Publication number 20240079200
- Publication date Mar 7, 2024
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE
- Publication number 20230420224
- Publication date Dec 28, 2023
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Axis Adjustment Method Thereof
- Publication number 20230377829
- Publication date Nov 23, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RE...
- Publication number 20230326707
- Publication date Oct 12, 2023
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUC...
- Publication number 20230260744
- Publication date Aug 17, 2023
- CARL ZEISS MICROSCOPY GMBH
- Heiko Stegmann
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST A...
- Publication number 20230245852
- Publication date Aug 3, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20230170182
- Publication date Jun 1, 2023
- Hitachi High-Tech Corporation
- Kazufumi YACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...
- Publication number 20230154723
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Yan REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON OPTICAL MODULE FOR PROVIDING AN OFF-AXIAL ELECTRON BEAM WI...
- Publication number 20230101108
- Publication date Mar 30, 2023
- FEI Company
- Ali MOHAMMADI-GHEIDARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM COLUMN
- Publication number 20230065039
- Publication date Mar 2, 2023
- CARL ZEISS MICROSCOPY GMBH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electromagnetic Lens
- Publication number 20230015805
- Publication date Jan 19, 2023
- IMS Nanofabrication GmbH
- Christoph Spengler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS
- Publication number 20230005706
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Albertus Victor Gerardus MANGNUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM IMAGE ACQUISITION APPARATUS AND MULTI-BEAM IMAGE ACQUISI...
- Publication number 20220230837
- Publication date Jul 21, 2022
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM MANIPULATION DEVICE AND METHOD FOR MANIPULATI...
- Publication number 20220230836
- Publication date Jul 21, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...
- Publication number 20220139665
- Publication date May 5, 2022
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS

Combinations of electrostatic and magnetic lenses

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam apparatus with multiple detectors and methods...

Particle beam system and the use thereof for flexibly setting the c...

Method for operating a multiple particle beam system while altering...

Charged particle beam device and axis adjustment method thereof

Operating a gas feed device for a particle beam apparatus

Systems and methods for real time stereo imaging using multiple ele...

Apparatus of plural charged-particle beams

Multiple charged-particle beam apparatus and methods

Objective lens system for fast scanning large FOV

Electron optical module for providing an off-axial electron beam wi...

Charged particle beam device and axis adjustment method thereof

Operating a gas supply device for a particle beam device

Examining, analyzing and/or processing an object using an object re...

Charged particle beam manipulation device and method for manipulati...

Multi-beam image acquisition apparatus and multi-beam image acquisi...

Apparatus of plural charged particle beams

Electron microscope and method of adjusting focus of electron micro...

Multi-beam inspection apparatus with single-beam mode

Objective lens arrangement usable in particle-optical systems

Aberration reduction in multipass electron microscopy

Counter pole with permanent magnets

Operating a particle beam generator for a particle beam device

Charged particle beam device and method for adjusting position of d...

Charged particle optical apparatus for through-the-lens detection o...

Objective lens arrangement

Charged particle beam device and method for inspecting and/or imagi...

Method and system for correcting two-fold, fifth-order parasitic ab...

Charged particle beam system and method

System and method for simultaneous phase contrast imaging and elect...

Charged particle beam device

Patents Applicationslast 30 patents

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...

CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...

METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD

CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE APPARATUS

Adjustable Magnetic Lens Having Permanent-Magnetic and Electromagne...

LENS FOR A CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM A...

CHARGED PARTICLE APPARATUS AND METHOD

OBJECTIVE LENS SYSTEM FOR FAST SCANNING LARGE FOV

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS

CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD

MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...

OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE

Charged Particle Beam Device and Axis Adjustment Method Thereof

EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RE...

METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUC...

MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST A...

Charged Particle Beam Apparatus

SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...

ELECTRON OPTICAL MODULE FOR PROVIDING AN OFF-AXIAL ELECTRON BEAM WI...

PARTICLE BEAM COLUMN

Electromagnetic Lens

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

MULTI-BEAM IMAGE ACQUISITION APPARATUS AND MULTI-BEAM IMAGE ACQUISI...

CHARGED PARTICLE BEAM MANIPULATION DEVICE AND METHOD FOR MANIPULATI...

PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...