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H01J2237/04926

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/04926combined

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multiple particle beam system while altering...
- Patent number 12,057,290
- Issue date Aug 6, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for real time stereo imaging using multiple ele...
- Patent number 11,942,303
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Yan Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,705,304
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 11,527,379
- Issue date Dec 13, 2022
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,062,877
- Issue date Jul 13, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam quality control using a movable mass resolving device
- Patent number 11,049,691
- Issue date Jun 29, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflector for multiple electron beams and multiple beam image acqui...
- Patent number 10,937,623
- Issue date Mar 2, 2021
- NuFlare Technology, Inc.
- John Hartley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 10,622,184
- Issue date Apr 14, 2020
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,586,681
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,541,110
- Issue date Jan 21, 2020
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 10,354,831
- Issue date Jul 16, 2019
- Carl Zeiss Microscopy GmbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,020,164
- Issue date Jul 10, 2018
- Hermes Microvision Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 9,922,799
- Issue date Mar 20, 2018
- Hermes-Microvision, Inc.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-column detector for particle-optical column
- Patent number 9,362,086
- Issue date Jun 7, 2016
- FEI Company
- Lubomír Tůma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,362,087
- Issue date Jun 7, 2016
- Hermes-Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-beam column corrected for both chromatic and spherical abe...
- Patent number 9,275,817
- Issue date Mar 1, 2016
- Frederick Wight Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,190,241
- Issue date Nov 17, 2015
- Hermes-Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact arrangement for dual-beam low energy electron microscope
- Patent number 8,258,474
- Issue date Sep 4, 2012
- Electron Optica, Inc.
- Marian Mankos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle-optical systems, methods and components
- Patent number 8,039,813
- Issue date Oct 18, 2011
- Carl Zeiss SMT GmbH
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam lithography apparatus and device manufacturin...
- Patent number 7,960,703
- Issue date Jun 14, 2011
- Canon Kabushiki Kaisha
- Susumu Goto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
High resolution charged particle projection lens array using magnet...
- Patent number 7,569,834
- Issue date Aug 4, 2009
- KLA-Tencor Technologies Corporation
- Neil Richardson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle analyzer
- Patent number 5,506,414
- Issue date Apr 9, 1996
- Fisons plc
- Peter Coxon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle analyser
- Patent number 5,451,783
- Issue date Sep 19, 1995
- Fisons plc
- Peter Coxon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chromatically compensated particle-beam column
- Patent number 5,369,279
- Issue date Nov 29, 1994
- Frederick W. Martin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
- Publication number 20240347316
- Publication date Oct 17, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240242921
- Publication date Jul 18, 2024
- ASML NETHERLANDS B.V.
- Mans Johan Bertil OSTERBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
- Publication number 20230290609
- Publication date Sep 14, 2023
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...
- Publication number 20230154723
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Yan REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...
- Publication number 20220139665
- Publication date May 5, 2022
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200251305
- Publication date Aug 6, 2020
- ASML NETHERLANDS B.V.
- Zhongwei CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20200243296
- Publication date Jul 30, 2020
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR GENERATING A MULTIPLICITY OF PARTICLE BEAMS, AND MULT...
- Publication number 20200211810
- Publication date Jul 2, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFLECTOR FOR MULTIPLE ELECTRON BEAMS AND MULTIPLE BEAM IMAGE ACQUI...
- Publication number 20190378676
- Publication date Dec 12, 2019
- NuFlare Technology, Inc.
- John Hartley
- G01 - MEASURING TESTING
Information Patent Application
Ion Beam Quality Control Using A Movable Mass Resolving Device
- Publication number 20190198292
- Publication date Jun 27, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20180350555
- Publication date Dec 6, 2018
- HERMES MICROVISION, INC.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20160181054
- Publication date Jun 23, 2016
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF APPLYING SMALL-ANGLE ELECTRON SCATTERING TO...
- Publication number 20150340201
- Publication date Nov 26, 2015
- Industrial Technology Research Institute
- Wen-Li Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20150155133
- Publication date Jun 4, 2015
- Hermes Microvision Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20140291510
- Publication date Oct 2, 2014
- Hermes-Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN
- Publication number 20140097341
- Publication date Apr 10, 2014
- FEI Company
- Lubomir Tuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE-BEAM COLUMN CORRECTED FOR BOTH CHROMATIC AND SPHERICAL ABE...
- Publication number 20130264477
- Publication date Oct 10, 2013
- Frederick Wight Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN
- Publication number 20120273677
- Publication date Nov 1, 2012
- FEI Company
- Lubomir Tuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Inspection Method and Charged Particle System
- Publication number 20090256075
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Component
- Publication number 20090159810
- Publication date Jun 25, 2009
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Component
- Publication number 20090114818
- Publication date May 7, 2009
- Carl Zeiss SMT AG
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURIN...
- Publication number 20090057571
- Publication date Mar 5, 2009
- Canon Kabushiki Kaisha
- Susumu Goto
- B82 - NANO-TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle beam system and the use thereof for flexibly setting the c...

Method for operating a multiple particle beam system while altering...

Systems and methods for real time stereo imaging using multiple ele...

Apparatus of plural charged-particle beams

Objective lens arrangement usable in particle-optical systems

Apparatus of plural charged-particle beams

Ion beam quality control using a movable mass resolving device

Deflector for multiple electron beams and multiple beam image acqui...

Objective lens arrangement usable in particle-optical systems

Charged particle beam apparatus

Apparatus of plural charged-particle beams

Charged particle inspection method and charged particle system

Charged particle beam apparatus

Apparatus of plural charged-particle beams

In-column detector for particle-optical column

Charged particle beam apparatus

Particle-beam column corrected for both chromatic and spherical abe...

Charged particle beam apparatus

Compact arrangement for dual-beam low energy electron microscope

Charged particle-optical systems, methods and components

Charged-particle beam lithography apparatus and device manufacturin...

High resolution charged particle projection lens array using magnet...

Charged-particle analyzer

Charged-particle analyser

Chromatically compensated particle-beam column

Patents Applicationslast 30 patents

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...

CHARGED PARTICLE APPARATUS AND METHOD

OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...

SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...

PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...

CHARGED PARTICLE BEAM APPARATUS

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

APPARATUS FOR GENERATING A MULTIPLICITY OF PARTICLE BEAMS, AND MULT...

DEFLECTOR FOR MULTIPLE ELECTRON BEAMS AND MULTIPLE BEAM IMAGE ACQUI...

Ion Beam Quality Control Using A Movable Mass Resolving Device

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

APPARATUS AND METHOD OF APPLYING SMALL-ANGLE ELECTRON SCATTERING TO...

Charged Particle Beam Apparatus

Charged Particle Beam Apparatus

IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN

PARTICLE-BEAM COLUMN CORRECTED FOR BOTH CHROMATIC AND SPHERICAL ABE...

IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN

Charged Particle Inspection Method and Charged Particle System

Particle-Optical Component

Particle-Optical Component

CHARGED-PARTICLE BEAM LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURIN...