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Compensation corrected by second servo independent from main servo
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CPC
G05B2219/41165
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G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/41165
Compensation corrected by second servo independent from main servo
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Patents Grants
last 30 patents
Information
Patent Grant
Stage device capable of applying a damping force to a movable member
Patent number
5,714,860
Issue date
Feb 3, 1998
Nikon Corporation
Susumu Makinouchi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus for compensating for the thermal displacement of the main...
Patent number
4,919,575
Issue date
Apr 24, 1990
Toyoda Koki Kabushiki Kaisha
Takani Yoshimi
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents