Compensation corrected by second servo independent from main servo

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G05B2219/41165

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/41165Compensation corrected by second servo independent from main servo

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Patents Grantslast 30 patents

Information Patent Grant
Stage device capable of applying a damping force to a movable member
- Patent number 5,714,860
- Issue date Feb 3, 1998
- Nikon Corporation
- Susumu Makinouchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus for compensating for the thermal displacement of the main...
- Patent number 4,919,575
- Issue date Apr 24, 1990
- Toyoda Koki Kabushiki Kaisha
- Takani Yoshimi
- G05 - CONTROLLING REGULATING