Components associated with the control of the tube

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H01J2237/248

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/248Components associated with the control of the tube

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron gun, electron beam applicator, and method for controlling...
- Patent number 12,198,889
- Issue date Jan 14, 2025
- Photo electron Soul Inc.
- Atsushi Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of profiling charged-particle beams
- Patent number 12,165,836
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Maikel Robert Goosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-differential confocal tilt sensor for measuring level variatio...
- Patent number 12,142,456
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Jinmei Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,131,882
- Issue date Oct 29, 2024
- HITACHI HIGH-TECH CORPORATION
- Shuntaro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for projecting an array of multiple charged pa...
- Patent number 12,123,841
- Issue date Oct 22, 2024
- DELMIC IP B.V.
- Andries Pieter Johan Effting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual reverse pulse sputtering system
- Patent number 12,112,931
- Issue date Oct 8, 2024
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scanning charged-particle-beam microscopy with energy-dispersive x-...
- Patent number 12,094,684
- Issue date Sep 17, 2024
- Mochii, Inc.
- Christopher Su-Yan Own
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stationary intraoral tomosynthesis imaging systems, methods, and co...
- Patent number 12,016,716
- Issue date Jun 25, 2024
- Surround Medical Systems, Inc.
- Jianping Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of controlling the same, and...
- Patent number 12,001,194
- Issue date Jun 4, 2024
- Semes Co., Ltd.
- Seung Yeon Kim
- G05 - CONTROLLING REGULATING
Information Patent Grant
Use of optical polarization states to control a ponderomotive phase...
- Patent number 11,990,313
- Issue date May 21, 2024
- The Regents of the University of California
- Jeremy J. Axelrod
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Estimation model generation method and electron microscope
- Patent number 11,842,880
- Issue date Dec 12, 2023
- Jeol Ltd.
- Ryusuke Sagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 11,823,877
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Koichi Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle beam device and power supply device
- Patent number 11,810,752
- Issue date Nov 7, 2023
- HITACHI HIGH-TECH CORPORATION
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,749,494
- Issue date Sep 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling dynamically controllable ultrawide-amplitude...
- Patent number 11,658,005
- Issue date May 23, 2023
- NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY, PEOPLE'S LIBERATION ARMY OF CHINA
- Ye Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of generating a waveform
- Patent number 11,658,007
- Issue date May 23, 2023
- Eagle Harbor Technologies, Inc.
- Timothy M. Ziemba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,658,011
- Issue date May 23, 2023
- HITACHI HIGH-TECH CORPORATION
- Yoshiharu Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device defect detection method using a charged particle beam
- Patent number 11,631,568
- Issue date Apr 18, 2023
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High voltage resistive output stage circuit
- Patent number 11,631,573
- Issue date Apr 18, 2023
- Eagle Harbor Technologies, Inc.
- Timothy M. Ziemba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical height detection system
- Patent number 11,521,826
- Issue date Dec 6, 2022
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a particle beam device
- Patent number 11,501,948
- Issue date Nov 15, 2022
- Carl Zeiss Microscopy GmbH
- Luyang Han
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,398,366
- Issue date Jul 26, 2022
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of generating a waveform
- Patent number 11,387,076
- Issue date Jul 12, 2022
- Eagle Harbor Technologies, Inc.
- Timothy M. Ziemba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,355,308
- Issue date Jun 7, 2022
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 11,251,011
- Issue date Feb 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple working distance height sensor using multiple wavelengths
- Patent number 11,170,971
- Issue date Nov 9, 2021
- KLA Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
Laser-based phase plate image contrast manipulation
- Patent number 11,101,101
- Issue date Aug 24, 2021
- FEI Company
- Bart Buijsse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 11,087,947
- Issue date Aug 10, 2021
- HITACHI HIGH-TECH CORPORATION
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stationary intraoral tomosynthesis imaging systems, methods, and co...
- Patent number 11,051,771
- Issue date Jul 6, 2021
- Jianping Lu
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Rate enhanced pulsed DC sputtering system
- Patent number 11,049,702
- Issue date Jun 29, 2021
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...
- Publication number 20250037966
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Jinmei YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DIAGNOSTIC APPARATUS, AND APPARATUS FOR FABRICATING SEMICOND...
- Publication number 20250006477
- Publication date Jan 2, 2025
- Samsung Electronics Co., Ltd.
- Haewook PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Magnetron Sputtering
- Publication number 20240404806
- Publication date Dec 5, 2024
- Melec GmbH
- Günter Mark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
- Publication number 20240395499
- Publication date Nov 28, 2024
- RINKEN
- Takahiro SHIMOJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING AN ELECTRON BEAM SYSTEM
- Publication number 20240379326
- Publication date Nov 14, 2024
- CARL ZEISS MICROSCOPY GMBH
- Bjoern Gamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Measuring Method and Plasma Processing Apparatus
- Publication number 20240290589
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Mitsutoshi Ashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...
- Publication number 20240282549
- Publication date Aug 22, 2024
- The Regents of the University of California
- Jeremy J. Axelrod
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER ADJUSTMENT METHOD OF UPPER ELECTRODE POWER SUPPLY AND SEMICON...
- Publication number 20240194441
- Publication date Jun 13, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jing WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
- Publication number 20240071716
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method of Generating a Waveform
- Publication number 20240055227
- Publication date Feb 15, 2024
- Eagle Harbor Technologies, Inc.
- Timothy M. Ziemba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED-LOOP CONTROL OF PLASMA SOURCE VIA FEEDBACK FROM LASER ABSORP...
- Publication number 20230411129
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Abdullah Zafar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...
- Publication number 20230335374
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Gun, Electron Beam Applicator, and Method for Controlling...
- Publication number 20230131413
- Publication date Apr 27, 2023
- PHOTO ELECTRON SOUL INC.
- Atsushi KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LEVELING SENSOR IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20230096657
- Publication date Mar 30, 2023
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Blended energy ion implantation
- Publication number 20230038392
- Publication date Feb 9, 2023
- Axcelis Technologies, Inc.
- James S. DeLuca
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PROJECTING AN ARRAY OF MULTIPLE CHARGED PA...
- Publication number 20230038465
- Publication date Feb 9, 2023
- DELMIC IP B.V.
- Andries Pieter Johan EFFTING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method of Generating a Waveform
- Publication number 20220399188
- Publication date Dec 15, 2022
- Eagle Harbor Technologies, Inc.
- Timothy M. Ziemba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF PROFILING CHARGED-PARTICLE BEAMS
- Publication number 20220392741
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Maikel Robert GOOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONTROLLING DYNAMICALLY CONTROLLABLE ULTRAWIDE-AMPLITUDE...
- Publication number 20220384141
- Publication date Dec 1, 2022
- National University of Defense Technology, People's Liberation Army of China
- Ye TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A PARTICLE BEAM DEVICE, COMPUTER PROGRAM PRODU...
- Publication number 20220384140
- Publication date Dec 1, 2022
- CARL ZEISS MICROSCOPY GMBH
- Bjoern Gamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...
- Publication number 20220328283
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Jinmei YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...
- Publication number 20220319803
- Publication date Oct 6, 2022
- The Regents of the University of California
- Jeremy J. Axelrod
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Estimation Model Generation Method and Electron Microscope
- Publication number 20220262595
- Publication date Aug 18, 2022
- JEOL Ltd.
- Ryusuke Sagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20220230840
- Publication date Jul 21, 2022
- Hitachi High-Tech Corporation
- Shuntaro ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220130642
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Katsumasa KAWASAKI
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20220102108
- Publication date Mar 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND POWER SUPPLY DEVICE
- Publication number 20220068595
- Publication date Mar 3, 2022
- HITACHI HIGH-TECH CORPORATION
- Wen Li
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE
- Publication number 20210375701
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Ramesh GOPALAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20210305029
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Koichi MIYASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual Reverse Pulse Sputtering System
- Publication number 20210287888
- Publication date Sep 16, 2021
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Components associated with the control of the tube

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron gun, electron beam applicator, and method for controlling...

Systems and methods of profiling charged-particle beams

Self-differential confocal tilt sensor for measuring level variatio...

Charged particle beam device

Apparatus and method for projecting an array of multiple charged pa...

Dual reverse pulse sputtering system

Scanning charged-particle-beam microscopy with energy-dispersive x-...

Stationary intraoral tomosynthesis imaging systems, methods, and co...

Substrate processing apparatus, method of controlling the same, and...

Use of optical polarization states to control a ponderomotive phase...

Estimation model generation method and electron microscope

Substrate processing system, substrate processing method, and contr...

Charged particle beam device and power supply device

Charged particle beam apparatus

Method for controlling dynamically controllable ultrawide-amplitude...

Apparatus and method of generating a waveform

Plasma processing apparatus

Device defect detection method using a charged particle beam

High voltage resistive output stage circuit

Optical height detection system

Operating a particle beam device

Charged particle beam apparatus

Apparatus and method of generating a waveform

Charged particle beam device

Electron microscope

Multiple working distance height sensor using multiple wavelengths

Laser-based phase plate image contrast manipulation

Electron microscope

Stationary intraoral tomosynthesis imaging systems, methods, and co...

Rate enhanced pulsed DC sputtering system

Patents Applicationslast 30 patents

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...

PLASMA DIAGNOSTIC APPARATUS, AND APPARATUS FOR FABRICATING SEMICOND...

Method for Magnetron Sputtering

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

METHOD FOR OPERATING AN ELECTRON BEAM SYSTEM

Plasma Measuring Method and Plasma Processing Apparatus

USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...

POWER ADJUSTMENT METHOD OF UPPER ELECTRODE POWER SUPPLY AND SEMICON...

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

Apparatus and Method of Generating a Waveform

CLOSED-LOOP CONTROL OF PLASMA SOURCE VIA FEEDBACK FROM LASER ABSORP...

SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...

Electron Gun, Electron Beam Applicator, and Method for Controlling...

LEVELING SENSOR IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

Blended energy ion implantation

APPARATUS AND METHOD FOR PROJECTING AN ARRAY OF MULTIPLE CHARGED PA...

Apparatus and Method of Generating a Waveform

SYSTEMS AND METHODS OF PROFILING CHARGED-PARTICLE BEAMS

METHOD FOR CONTROLLING DYNAMICALLY CONTROLLABLE ULTRAWIDE-AMPLITUDE...

METHOD FOR OPERATING A PARTICLE BEAM DEVICE, COMPUTER PROGRAM PRODU...

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...

USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...

Estimation Model Generation Method and Electron Microscope

Charged Particle Beam Device

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM DEVICE AND POWER SUPPLY DEVICE

METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...

Dual Reverse Pulse Sputtering System