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composed of oxides or glassy oxides or oxide based glass
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H01L21/473
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ELECTRICITY
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Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/473
composed of oxides or glassy oxides or oxide based glass
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor device and display device including the same
Patent number
11,862,454
Issue date
Jan 2, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method of semiconductor device
Patent number
11,342,463
Issue date
May 24, 2022
Japan Display Inc.
Tatsuya Toda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposition and etch for reducing roughness
Patent number
11,170,997
Issue date
Nov 9, 2021
Lam Research Corporation
Xiang Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and display device including the same
Patent number
11,158,745
Issue date
Oct 26, 2021
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film transistor and method of fabricating the same, array subs...
Patent number
11,081,501
Issue date
Aug 3, 2021
Hefei Xinsheng Optoelectronics Technology Co., Ltd.
Wei Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposition and etch for reducing roughness
Patent number
10,658,174
Issue date
May 19, 2020
Lam Research Corporation
Xiang Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and display device including the same
Patent number
10,529,864
Issue date
Jan 7, 2020
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
10,497,572
Issue date
Dec 3, 2019
Kabushiki Kaisha Toshiba
Tatsuo Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Display device
Patent number
10,317,763
Issue date
Jun 11, 2019
Japan Display Inc.
Hajime Watakabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating a metal oxide thin film transistor
Patent number
9,991,135
Issue date
Jun 5, 2018
SHENZHEN GRADUATE SCHOOL, PEKING UNIVERSITY
Shengdong Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film transistor (TFT) array substrate and fabrication method t...
Patent number
9,991,398
Issue date
Jun 5, 2018
BOE Technology Group Co., Ltd.
Dini Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing insulating film on recessed portion having hi...
Patent number
9,818,604
Issue date
Nov 14, 2017
EUGENE TECHNOLOGY CO., LTD.
Hai-Won Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and display device including the same
Patent number
9,704,704
Issue date
Jul 11, 2017
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film transistor and display device using the same
Patent number
9,620,526
Issue date
Apr 11, 2017
Japan Display Inc.
Isao Suzumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
9,583,601
Issue date
Feb 28, 2017
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Array substrate, method of manufacturing array substrate and displa...
Patent number
9,508,762
Issue date
Nov 29, 2016
BOE Technology Group Co., Ltd.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device comprising electron t...
Patent number
9,449,853
Issue date
Sep 20, 2016
Semiconductor Energy Laboratory Co., Ltd.
Yoshitaka Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor device with steps of heat tre...
Patent number
9,373,707
Issue date
Jun 21, 2016
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lateral oxidation process flows
Patent number
9,343,309
Issue date
May 17, 2016
Applied Materials, Inc.
Mangesh Bangar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor laser device with ridge structure
Patent number
6,266,354
Issue date
Jul 24, 2001
Matsushita Electric Industrial Co., Ltd.
Toyoji Chino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching a compound semiconductor, a semiconductor laser...
Patent number
6,127,201
Issue date
Oct 3, 2000
Matsushita Electric Industrial Co., Ltd.
Toyoji Chino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching a compound semiconductor, a semi-conductor laser...
Patent number
5,968,845
Issue date
Oct 19, 1999
Matsushita Electric Industrial Co., Ltd.
Toyoji Chino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preferentially etching a semiconductor substrate with res...
Patent number
5,756,403
Issue date
May 26, 1998
Philips Electronics North America
Rudolf P. Tijburg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for bonding pad protection from damage
Patent number
5,719,087
Issue date
Feb 17, 1998
Taiwan Semiconductor Manufacturing Company, Ltd.
Sen Fu Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-temperature oxidation at surfaces using ozone decomposition pro...
Patent number
5,443,863
Issue date
Aug 22, 1995
Auburn University
William C. Neely
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High quality oxide films on substrates
Patent number
5,282,903
Issue date
Feb 1, 1994
Associated Universities, Inc.
Mark W. Ruckman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming an oxide-filled trench in silicon carbide
Patent number
5,270,244
Issue date
Dec 14, 1993
North Carolina State University at Raleigh
Bantval J. Baliga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing high quality oxide films on substrates
Patent number
5,264,394
Issue date
Nov 23, 1993
Associated Universities, Inc.
Mark W. Ruckman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Passivation oxide conversion wherein an anodically grown oxide is c...
Patent number
5,188,988
Issue date
Feb 23, 1993
Texas Instruments Incorporated
Towfik H. Teherani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photo-anodic oxide surface passivation for semiconductors
Patent number
5,086,328
Issue date
Feb 4, 1992
Santa Barbara Research Center
Ichiro Kasai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME
Publication number
20240154041
Publication date
May 9, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME
Publication number
20210343870
Publication date
Nov 4, 2021
Semiconductor Energy Laboratory Co., Ltd.
Shunpei YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20210119055
Publication date
Apr 22, 2021
Japan Display Inc.
Tatsuya TODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER DEPOSITION AND ETCH FOR REDUCING ROUGHNESS
Publication number
20200243326
Publication date
Jul 30, 2020
LAM RESEARCH CORPORATION
Xiang Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME
Publication number
20200144424
Publication date
May 7, 2020
Semiconductor Energy Laboratory Co., Ltd.
Shunpei YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER DEPOSITION AND ETCH FOR REDUCING ROUGHNESS
Publication number
20190157066
Publication date
May 23, 2019
LAM RESEARCH CORPORATION
Xiang Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISPLAY DEVICE
Publication number
20180122835
Publication date
May 3, 2018
Japan Display Inc.
Hajime Watakabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING METALLIC OXIDE THIN FILM TRANSISTOR
Publication number
20170316953
Publication date
Nov 2, 2017
SHENZHEN GRADUATE SCHOOL, PEKING UNIVERSITY
Shengdong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM TRANSISTOR (TFT) ARRAY SUBSTRATE AND FABRICATION METHOD T...
Publication number
20170263734
Publication date
Sep 14, 2017
BOE TECHNOLOGY GROUP CO., LTD.
Dini XIE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING ELECTRODE AND SEMICONDUCTOR DEVICE
Publication number
20160307777
Publication date
Oct 20, 2016
Semiconductor Energy Laboratory Co., Ltd.
Motomu KURATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Array Substrate, Method of Manufacturing Array Substrate and Displa...
Publication number
20160300869
Publication date
Oct 13, 2016
BOE TECHNOLOGY GROUP CO., LTD.
Wei LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20160141397
Publication date
May 19, 2016
Semiconductor Energy Laboratory Co., Ltd.
Shunpei YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM TRANSISTOR AND DISPLAY DEVICE USING THE SAME
Publication number
20150179812
Publication date
Jun 25, 2015
Japan Display Inc.
Isao SUZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20140370656
Publication date
Dec 18, 2014
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20140151686
Publication date
Jun 5, 2014
Semiconductor Energy Laboratory Co., Ltd.
Shunpei YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOFR
Publication number
20110260171
Publication date
Oct 27, 2011
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS