comprising at least one lithography chamber

Industry

CPC
H01L21/67225

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67225comprising at least one lithography chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Integrated dry processes for patterning radiation photoresist patte...
- Patent number 12,278,125
- Issue date Apr 15, 2025
- Lam Research Corporation
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus with parallel first and second parts o...
- Patent number 12,217,986
- Issue date Feb 4, 2025
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,716
- Issue date Jan 28, 2025
- Semes Co., Ltd.
- Jaeseong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool and method of using an embedded chamber
- Patent number 12,191,174
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated dry processes for patterning radiation photoresist patte...
- Patent number 12,183,604
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 12,153,341
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing line edge roughness and mitigating defects by wafer freezing
- Patent number 12,087,601
- Issue date Sep 10, 2024
- International Business Machines Corporation
- Karen E. Petrillo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method of bi-layer pixel isolation in advanced LCOS b...
- Patent number 12,055,821
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Lan Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for thermal treatment of electronic devices
- Patent number 12,040,203
- Issue date Jul 16, 2024
- Kateeva, Inc.
- Conor F. Madigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication system embedded with effective baking module
- Patent number 12,033,863
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 11,977,332
- Issue date May 7, 2024
- Semes Co., Ltd.
- Hae-Won Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Development processing apparatus and development processing method
- Patent number 11,923,218
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Kouichirou Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate including process chamb...
- Patent number 11,923,216
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Seung Min Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 11,809,076
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- B08 - CLEANING
Information Patent Grant
Treatment condition setting method, storage medium, and substrate t...
- Patent number 11,726,438
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Takuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method, and re...
- Patent number 11,664,249
- Issue date May 30, 2023
- Tokyo Electron Limited
- Seiichi Kure
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Platform and method of operating for integrated end-to-end fully se...
- Patent number 11,594,451
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Robert Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,545,377
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platform and method of operating for integrated end-to-end fully se...
- Patent number 11,456,212
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Robert Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 11,443,968
- Issue date Sep 13, 2022
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, transfer method and photolithography app...
- Patent number 11,367,636
- Issue date Jun 21, 2022
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Fulong Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 11,347,143
- Issue date May 31, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- B08 - CLEANING
Information Patent Grant
Substrate processing capable of suppressing a decrease in throughpu...
- Patent number 11,287,798
- Issue date Mar 29, 2022
- Tokyo Electron Limited
- Teruhiko Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate
- Patent number 11,282,720
- Issue date Mar 22, 2022
- Semes Co., Ltd.
- Jong Seok Seo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for UV flowable dielectric
- Patent number 11,270,896
- Issue date Mar 8, 2022
- Lam Research Corporation
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Article transporter in semiconductor fabrication
- Patent number 11,251,063
- Issue date Feb 15, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jheng-Si Su
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for transferring a substrate in a lithography system
- Patent number RE48903
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Vincent Sylvester Kuiper
Information Patent Grant
Semiconductor fabrication system embedded with effective baking module
- Patent number 11,222,794
- Issue date Jan 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side opening unified pod
- Patent number 11,201,070
- Issue date Dec 14, 2021
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus and method for baking coating layer
- Patent number 11,181,824
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COATING AND DEVELOPING DEVICE
- Publication number 20250130511
- Publication date Apr 24, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Mark Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240393705
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Sang Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER
- Publication number 20240395581
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
- Publication number 20240385512
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- WU-HUNG KO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240355644
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE
- Publication number 20240347345
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240249964
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240242985
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND...
- Publication number 20240242994
- Publication date Jul 18, 2024
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUI...
- Publication number 20240222163
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Ju Won KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240222165
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Hee Man AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20240213059
- Publication date Jun 27, 2024
- Semes Co., Ltd.
- Hee Man AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240213048
- Publication date Jun 27, 2024
- SEMES CO., LTD.
- Jongwha Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COATING APPARATUS
- Publication number 20240213055
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Heeyun CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPM...
- Publication number 20240203773
- Publication date Jun 20, 2024
- SEMES CO., LTD.
- Jong Seok SEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
- Publication number 20240145272
- Publication date May 2, 2024
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...
- Publication number 20240112933
- Publication date Apr 4, 2024
- Samsung Electronics Co., Ltd.
- Jeonghee Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEED-FORWARD DEVICE FABRICATION
- Publication number 20240047277
- Publication date Feb 8, 2024
- Google LLC
- Brian James Burkett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO OPTIMIZE POST DEPOSITION BAKING CONDITION OF PHOTO RESIST...
- Publication number 20240012325
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- LUISA BOZANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
- Publication number 20240006205
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
- Publication number 20230367206
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- WU-HUNG KO
- B08 - CLEANING
Information Patent Application
TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...
- Publication number 20230333531
- Publication date Oct 19, 2023
- TOKYO ELECTRON LIMITED
- Takuya MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SHAPE CONTROL FOR W2W BONDING
- Publication number 20230326767
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Anthony R. SCHEPIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
- Publication number 20230290657
- Publication date Sep 14, 2023
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF
- Publication number 20230229133
- Publication date Jul 20, 2023
- TENGXI TECHNOLOGY CO. LTD.
- WEI-HAN LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230197481
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- Seung Min SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
- Publication number 20230045336
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOLITHOGRAPHY APPARATUS AND METHOD FOR FORMING PHOTORESIST PATTERN
- Publication number 20230024754
- Publication date Jan 26, 2023
- SAMSUNG DISPLAY CO., LTD.
- Yong Hwan RYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20230007843
- Publication date Jan 12, 2023
- SEMES CO., LTD.
- Sang Eun NOH
- B08 - CLEANING

comprising at least one lithography chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Integrated dry processes for patterning radiation photoresist patte...

Substrate treating apparatus with parallel first and second parts o...

Substrate processing apparatus and substrate processing method

Semiconductor processing tool and method of using an embedded chamber

Integrated dry processes for patterning radiation photoresist patte...

Cleaning method, method for forming semiconductor structure and sys...

Reducing line edge roughness and mitigating defects by wafer freezing

Structure and method of bi-layer pixel isolation in advanced LCOS b...

Techniques for thermal treatment of electronic devices

Semiconductor fabrication system embedded with effective baking module

Substrate treating apparatus and substrate treating method

Development processing apparatus and development processing method

Apparatus and method for treating substrate including process chamb...

Cleaning method, method for forming semiconductor structure and sys...

Treatment condition setting method, storage medium, and substrate t...

Substrate processing apparatus, substrate processing method, and re...

Platform and method of operating for integrated end-to-end fully se...

Substrate processing apparatus, substrate processing method and rec...

Platform and method of operating for integrated end-to-end fully se...

Substrate treating apparatus and substrate transporting method

Substrate transfer device, transfer method and photolithography app...

Cleaning method, method for forming semiconductor structure and sys...

Substrate processing capable of suppressing a decrease in throughpu...

Apparatus for treating substrate

Apparatus for UV flowable dielectric

Article transporter in semiconductor fabrication

Apparatus for transferring a substrate in a lithography system

Semiconductor fabrication system embedded with effective baking module

Side opening unified pod

Semiconductor apparatus and method for baking coating layer

Patents Applicationslast 30 patents

COATING AND DEVELOPING DEVICE

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUI...

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE PROCESSING APPARATUS

PHOTORESIST COATING APPARATUS

SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPM...

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...

FEED-FORWARD DEVICE FABRICATION

METHOD TO OPTIMIZE POST DEPOSITION BAKING CONDITION OF PHOTO RESIST...

SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...

TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...

WAFER SHAPE CONTROL FOR W2W BONDING

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...

SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF

APPARATUS AND METHOD FOR TREATING SUBSTRATE

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...

PHOTOLITHOGRAPHY APPARATUS AND METHOD FOR FORMING PHOTORESIST PATTERN

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE