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comprising at least one lithography chamber
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H01L21/67225
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67225
comprising at least one lithography chamber
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Patents Grants
last 30 patents
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Patent Grant
Development processing apparatus and development processing method
Patent number
11,923,218
Issue date
Mar 5, 2024
Tokyo Electron Limited
Kouichirou Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate including process chamb...
Patent number
11,923,216
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Seung Min Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
Patent number
11,809,076
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Wu-Hung Ko
B08 - CLEANING
Information
Patent Grant
Treatment condition setting method, storage medium, and substrate t...
Patent number
11,726,438
Issue date
Aug 15, 2023
Tokyo Electron Limited
Takuya Mori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and re...
Patent number
11,664,249
Issue date
May 30, 2023
Tokyo Electron Limited
Seiichi Kure
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Platform and method of operating for integrated end-to-end fully se...
Patent number
11,594,451
Issue date
Feb 28, 2023
Tokyo Electron Limited
Robert Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,545,377
Issue date
Jan 3, 2023
Tokyo Electron Limited
Seiji Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platform and method of operating for integrated end-to-end fully se...
Patent number
11,456,212
Issue date
Sep 27, 2022
Tokyo Electron Limited
Robert Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate treating apparatus and substrate transporting method
Patent number
11,443,968
Issue date
Sep 13, 2022
SCREEN Holdings Co., Ltd.
Joji Kuwahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer device, transfer method and photolithography app...
Patent number
11,367,636
Issue date
Jun 21, 2022
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Fulong Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
Patent number
11,347,143
Issue date
May 31, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Wu-Hung Ko
B08 - CLEANING
Information
Patent Grant
Substrate processing capable of suppressing a decrease in throughpu...
Patent number
11,287,798
Issue date
Mar 29, 2022
Tokyo Electron Limited
Teruhiko Kodama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating substrate
Patent number
11,282,720
Issue date
Mar 22, 2022
Semes Co., Ltd.
Jong Seok Seo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for UV flowable dielectric
Patent number
11,270,896
Issue date
Mar 8, 2022
Lam Research Corporation
Jonathan D. Mohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Article transporter in semiconductor fabrication
Patent number
11,251,063
Issue date
Feb 15, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Jheng-Si Su
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for transferring a substrate in a lithography system
Patent number
RE48903
Issue date
Jan 25, 2022
ASML Netherlands B.V.
Vincent Sylvester Kuiper
Information
Patent Grant
Semiconductor fabrication system embedded with effective baking module
Patent number
11,222,794
Issue date
Jan 11, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Han-Yu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Side opening unified pod
Patent number
11,201,070
Issue date
Dec 14, 2021
Brooks Automation, Inc.
Daniel Babbs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor apparatus and method for baking coating layer
Patent number
11,181,824
Issue date
Nov 23, 2021
Taiwan Semiconductor Manufacturing Company Ltd.
Yung-Yao Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus and substrate treating method
Patent number
11,152,233
Issue date
Oct 19, 2021
SCREEN Holdings Co., Ltd.
Yukihiko Inagaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus and method for controlling substrate t...
Patent number
11,152,242
Issue date
Oct 19, 2021
SCREEN Holdings Co., Ltd.
Joji Kuwahara
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Techniques for thermal treatment of electronic devices
Patent number
11,107,712
Issue date
Aug 31, 2021
Kateeva, Inc.
Conor F. Madigan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aware and correcting heterogenous platform incorporating integ...
Patent number
11,101,173
Issue date
Aug 24, 2021
Tokyo Electron Limited
Robert Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal treatment apparatus, thermal treatment method, and non-tran...
Patent number
11,087,983
Issue date
Aug 10, 2021
Tokyo Electron Limited
Eiichi Sekimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing apparatus and coating and developing method
Patent number
11,079,691
Issue date
Aug 3, 2021
Tokyo Electron Limited
Tsuyoshi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating semiconductor device, vacuum processing appar...
Patent number
11,056,349
Issue date
Jul 6, 2021
Tokyo Electron Limited
Koichi Yatsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reticle transfer system and method
Patent number
10,991,607
Issue date
Apr 27, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Jung Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser chamber with metal damper member
Patent number
10,965,085
Issue date
Mar 30, 2021
Gigaphoton Inc.
Hisakazu Katsuumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate alignment apparatus, substrate processing apparatus, and...
Patent number
10,930,538
Issue date
Feb 23, 2021
Semes Co., Ltd.
Kisang Eum
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Platform and method of operating for integrated end-to-end fully se...
Patent number
10,923,394
Issue date
Feb 16, 2021
Tokyo Electron Limited
Robert Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20240145272
Publication date
May 2, 2024
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...
Publication number
20240112933
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Jeonghee Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FEED-FORWARD DEVICE FABRICATION
Publication number
20240047277
Publication date
Feb 8, 2024
Google LLC
Brian James Burkett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO OPTIMIZE POST DEPOSITION BAKING CONDITION OF PHOTO RESIST...
Publication number
20240012325
Publication date
Jan 11, 2024
Applied Materials, Inc.
LUISA BOZANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
Publication number
20240006205
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Kenichirou Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
Publication number
20230367206
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
WU-HUNG KO
B08 - CLEANING
Information
Patent Application
TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...
Publication number
20230333531
Publication date
Oct 19, 2023
TOKYO ELECTRON LIMITED
Takuya MORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER SHAPE CONTROL FOR W2W BONDING
Publication number
20230326767
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Anthony R. SCHEPIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20230290657
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF
Publication number
20230229133
Publication date
Jul 20, 2023
TENGXI TECHNOLOGY CO. LTD.
WEI-HAN LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20230197481
Publication date
Jun 22, 2023
Samsung Electronics Co., Ltd.
Seung Min SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20230045336
Publication date
Feb 9, 2023
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOLITHOGRAPHY APPARATUS AND METHOD FOR FORMING PHOTORESIST PATTERN
Publication number
20230024754
Publication date
Jan 26, 2023
SAMSUNG DISPLAY CO., LTD.
Yong Hwan RYU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20230007843
Publication date
Jan 12, 2023
SEMES CO., LTD.
Sang Eun NOH
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220415680
Publication date
Dec 29, 2022
SEMES CO., LTD.
Jaeseong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER
Publication number
20220406629
Publication date
Dec 22, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
Publication number
20220291580
Publication date
Sep 15, 2022
Taiwan Semiconductor Manufacturing company Ltd.
WU-HUNG KO
B08 - CLEANING
Information
Patent Application
Semiconductor Fabrication System Embedded with Effective Baking Module
Publication number
20220130693
Publication date
Apr 28, 2022
Taiwan Semiconductor Manufacturing Co., LTD
Han-Yu Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MOVABLE ELECTRODE FOR PROCESS CHAMBER
Publication number
20220093436
Publication date
Mar 24, 2022
Applied Materials, Inc.
Rick KUSTRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
Publication number
20210358783
Publication date
Nov 18, 2021
Kateeva, Inc.
Conor F. Madigan
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
DEVELOPMENT PROCESSING APPARATUS AND DEVELOPMENT PROCESSING METHOD
Publication number
20210272826
Publication date
Sep 2, 2021
TOKYO ELECTRON LIMITED
Kouichirou TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR APPARATUS AND METHOD FOR BAKING COATING LAYER
Publication number
20210200096
Publication date
Jul 1, 2021
Taiwan Semiconductor Manufacturing company Ltd.
YUNG-YAO LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINE...
Publication number
20210134626
Publication date
May 6, 2021
SCREEN Semiconductor Solutions Co., Ltd.
Hiroyuki Ogura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
PLATFORM AND METHOD OF OPERATING FOR INTEGRATED END-TO-END FULLY SE...
Publication number
20210125863
Publication date
Apr 29, 2021
TOKYO ELECTRON LIMITED
Robert CLARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20210118711
Publication date
Apr 22, 2021
TOKYO ELECTRON LIMITED
Seiji Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLATFORM AND METHOD OF OPERATING FOR INTEGRATED END-TO-END FULLY SE...
Publication number
20210118730
Publication date
Apr 22, 2021
TOKYO ELECTRON LIMITED
Robert CLARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
Publication number
20210096460
Publication date
Apr 1, 2021
Taiwan Semiconductor Manufacturing company Ltd.
WU-HUNG KO
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20210072644
Publication date
Mar 11, 2021
SEMES CO., LTD.
Hae-Won CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...
Publication number
20210039221
Publication date
Feb 11, 2021
Tokyo Electron Limited
Nozomu KANETAKE
B24 - GRINDING POLISHING
Information
Patent Application
ARTICLE TRANSPORTER IN SEMICONDUCTOR FABRICATION
Publication number
20210028049
Publication date
Jan 28, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Jheng-Si SU
H01 - BASIC ELECTRIC ELEMENTS