computer-controlled

Industry

CPC
H01J2237/20285

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/20285computer-controlled

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus, semiconductor device and man...
- Patent number 12,183,538
- Issue date Dec 31, 2024
- Kioxia Corporation
- Takayuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of hysteresis compensation
- Patent number 12,183,537
- Issue date Dec 31, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and method for controlling vacuum proce...
- Patent number 12,080,523
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,664,199
- Issue date May 30, 2023
- ASM IP Holding B.V.
- JaeMin Roh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods of hysteresis compensation
- Patent number 11,538,652
- Issue date Dec 27, 2022
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment system and seal for positional alignment
- Patent number 11,538,657
- Issue date Dec 27, 2022
- HITACHI HIGH-TECH CORPORATION
- Yaku Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system
- Patent number 11,495,480
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Suguru Motegi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, semiconductor device and method
- Patent number 11,469,108
- Issue date Oct 11, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei Han Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-precision linear actuator
- Patent number 11,458,581
- Issue date Oct 4, 2022
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Albert Dekker
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle beam device
- Patent number 11,387,072
- Issue date Jul 12, 2022
- HITACHI HIGH-TECH CORPORATION
- Takahiro Usui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam inspection apparatus and charged particle bea...
- Patent number 11,342,157
- Issue date May 24, 2022
- NuFlare Technology, Inc.
- Hidekazu Takekoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
E-beam apparatus
- Patent number 11,315,752
- Issue date Apr 26, 2022
- ASML Netherlands B.V.
- Peter Paul Hempenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multibeamlet charged particle device and method
- Patent number 11,309,163
- Issue date Apr 19, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam system and method of measuring sample using s...
- Patent number 11,217,422
- Issue date Jan 4, 2022
- Jeol Ltd.
- Yoshikazu Nemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for dynamically compensating position errors of a sample
- Patent number 11,127,618
- Issue date Sep 21, 2021
- ASML Netherlands B.V.
- Fangfu Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam device
- Patent number 11,056,310
- Issue date Jul 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuta Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support, substrate processing apparatus, substrate proces...
- Patent number 11,037,767
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Takehiro Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tomography-assisted TEM prep with requested intervention automation...
- Patent number 11,004,651
- Issue date May 11, 2021
- FEI Company
- Roger Louis Alvis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
E-beam apparatus
- Patent number 10,867,770
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Peter Paul Hempenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spatial atomic layer deposition chamber with plasma pulsing to prev...
- Patent number 10,854,428
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Tsutomu Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle beam device
- Patent number 10,832,890
- Issue date Nov 10, 2020
- Hitachi High-Tech Science Corporation
- Masato Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actuator-assisted positioning systems and methods
- Patent number 10,825,646
- Issue date Nov 3, 2020
- FEI Company
- Graham LeGrove
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Observation method and specimen observation apparatus
- Patent number 10,809,515
- Issue date Oct 20, 2020
- Jeol Ltd.
- Katsuyuki Suzuki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Planetary gear assembly for sputtering multiple balloon catheter di...
- Patent number 10,758,716
- Issue date Sep 1, 2020
- BIOSENSE WEBSTER (ISRAEL) LTD.
- Assaf Govari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,755,890
- Issue date Aug 25, 2020
- HITACHI HIGH-TECH CORPORATION
- Shinya Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross section processing observation method and charged particle be...
- Patent number 10,692,695
- Issue date Jun 23, 2020
- Hitachi High-Tech Science Corporation
- Xin Man
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,629,411
- Issue date Apr 21, 2020
- Hitachi High-Tech Science Corporation
- Satoshi Tomimatsu
- G01 - MEASURING TESTING
Information Patent Grant
Specimen preparation and inspection in a dual-beam charged particle...
- Patent number 10,629,409
- Issue date Apr 21, 2020
- FEI Company
- Frantisek Vaske
- G01 - MEASURING TESTING
Information Patent Grant
Sample manipulation for nondestructive sample imaging
- Patent number 10,535,495
- Issue date Jan 14, 2020
- BAE Systems Information and Electronic Systems Integration Inc.
- Chris L. Willis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charge control for imaging floating metal str...
- Patent number 10,460,903
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Arjun Hegde
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Charged Particle Microscope and Stage
- Publication number 20240120169
- Publication date Apr 11, 2024
- Hitachi High-Tech Corporation
- Kazuki ISHIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope and Specimen Orientation Alignment Method
- Publication number 20240087840
- Publication date Mar 14, 2024
- JEOL Ltd.
- Motofumi Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20240030008
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Eiki KAMATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED...
- Publication number 20230420217
- Publication date Dec 28, 2023
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
- Publication number 20230257869
- Publication date Aug 17, 2023
- QORVO BIOTECHNOLOGIES, LLC
- Derya Deniz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...
- Publication number 20230178406
- Publication date Jun 8, 2023
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER FOR EMITTING CHARGED PARTICLES
- Publication number 20230154725
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Jurgen VAN SOEST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION
- Publication number 20230101676
- Publication date Mar 30, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...
- Publication number 20230069666
- Publication date Mar 2, 2023
- KIOXIA Corporation
- Takayuki ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...
- Publication number 20230023396
- Publication date Jan 26, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230015560
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Suguru MOTEGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER AND SUBSTRATE TREATING SYSTEM
- Publication number 20220384160
- Publication date Dec 1, 2022
- SEMES CO., LTD.
- Chung Woo LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, Semiconductor Device and Method
- Publication number 20220359204
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei Han Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220208530
- Publication date Jun 30, 2022
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS
- Publication number 20220068590
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Ying LUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND METHOD FOR CONTROLLING VACUUM PROCE...
- Publication number 20220051876
- Publication date Feb 17, 2022
- TOKYO ELECTRON LIMITED
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20220037108
- Publication date Feb 3, 2022
- Hitachi High-Tech Corporation
- Takahiro USUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Alignment System and Seal for Positional Alignment
- Publication number 20210407761
- Publication date Dec 30, 2021
- Hitachi High-Tech Corporation
- Yaku MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM INSPECTION APPARATUS AND CHARGED PARTICLE BEA...
- Publication number 20210202206
- Publication date Jul 1, 2021
- NuFlare Technology, Inc.
- Hidekazu Takekoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION
- Publication number 20210151277
- Publication date May 20, 2021
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM APPARATUS
- Publication number 20210151282
- Publication date May 20, 2021
- Peter Paul HEMPENIUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIBEAMLET CHARGED PARTICLE DEVICE AND METHOD
- Publication number 20210142976
- Publication date May 13, 2021
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20210057243
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Suguru MOTEGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT SYSTEM
- Publication number 20210043432
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- John MAZZOCCO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTUATOR-ASSISTED POSITIONING SYSTEMS AND METHODS
- Publication number 20200312605
- Publication date Oct 1, 2020
- FEI Company
- Graham LeGrove
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF MEASURING SAMPLE USING S...
- Publication number 20200251302
- Publication date Aug 6, 2020
- JEOL Ltd.
- Yoshikazu Nemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCES...
- Publication number 20200185204
- Publication date Jun 11, 2020
- TOKYO ELECTRON LIMITED
- Takehiro Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200126771
- Publication date Apr 23, 2020
- ASM IP HOLDING B.V.
- JaeMin Roh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System, Semiconductor Device and Method
- Publication number 20200075337
- Publication date Mar 5, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei Han Huang
- H01 - BASIC ELECTRIC ELEMENTS

computer-controlled

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus, semiconductor device and man...

Systems and methods of hysteresis compensation

Vacuum processing apparatus and method for controlling vacuum proce...

Substrate processing apparatus and substrate processing method

Systems and methods of hysteresis compensation

Alignment system and seal for positional alignment

Substrate processing system

System, semiconductor device and method

High-precision linear actuator

Charged particle beam device

Charged particle beam inspection apparatus and charged particle bea...

E-beam apparatus

Multibeamlet charged particle device and method

Charged particle beam system and method of measuring sample using s...

System for dynamically compensating position errors of a sample

Charged-particle beam device

Substrate support, substrate processing apparatus, substrate proces...

Tomography-assisted TEM prep with requested intervention automation...

E-beam apparatus

Spatial atomic layer deposition chamber with plasma pulsing to prev...

Charged particle beam device

Actuator-assisted positioning systems and methods

Observation method and specimen observation apparatus

Planetary gear assembly for sputtering multiple balloon catheter di...

Charged particle beam apparatus

Cross section processing observation method and charged particle be...

Charged particle beam apparatus

Specimen preparation and inspection in a dual-beam charged particle...

Sample manipulation for nondestructive sample imaging

Method and system for charge control for imaging floating metal str...

Patents Applicationslast 30 patents

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

Charged Particle Microscope and Stage

Electron Microscope and Specimen Orientation Alignment Method

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED...

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...

METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...

EMITTER FOR EMITTING CHARGED PARTICLES

SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION

SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...

TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...

SUBSTRATE PROCESSING SYSTEM

CONTAINER AND SUBSTRATE TREATING SYSTEM

System, Semiconductor Device and Method

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS

VACUUM PROCESSING APPARATUS AND METHOD FOR CONTROLLING VACUUM PROCE...

Charged Particle Beam Device

Alignment System and Seal for Positional Alignment

CHARGED PARTICLE BEAM INSPECTION APPARATUS AND CHARGED PARTICLE BEA...

SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION

E-BEAM APPARATUS

MULTIBEAMLET CHARGED PARTICLE DEVICE AND METHOD

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE SUPPORT SYSTEM

ACTUATOR-ASSISTED POSITIONING SYSTEMS AND METHODS

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF MEASURING SAMPLE USING S...

SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCES...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

System, Semiconductor Device and Method