Confinement of gases to vicinity of substrate

Industry

CPC
C23C16/45517

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45517Confinement of gases to vicinity of substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Treatment unit for a facility for treating the surface of a substra...
- Patent number 12,165,847
- Issue date Dec 10, 2024
- Coating Plasma Innovation
- Julien Vallade
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system and method of delivering a reactant gas
- Patent number 12,139,790
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for making a fabric based substrate bearing a carbon based...
- Patent number 12,134,820
- Issue date Nov 5, 2024
- AGC Glass Europe
- Grégory Arnoult
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber and exhaust liner system therefor
- Patent number 12,110,585
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Naman Apurva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 12,068,139
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Shin Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nozzle exit contours for pattern composition
- Patent number 11,981,987
- Issue date May 14, 2024
- Universal Display Corporation
- Edwin van den Tillaart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric injection for better wafer uniformity
- Patent number 11,959,169
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mitigating pyrophoric deposits during SiC CVI/CVD processes by intr...
- Patent number 11,713,281
- Issue date Aug 1, 2023
- Goodrich Corporation
- Ying She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus
- Patent number 11,680,316
- Issue date Jun 20, 2023
- Industrial Technology Research Institute
- Kuan-Chou Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 11,574,831
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing display apparatus
- Patent number 11,534,790
- Issue date Dec 27, 2022
- Samsung Display Co., Ltd.
- Sangjin Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Asymmetric injection for better wafer uniformity
- Patent number 11,486,038
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,488,845
- Issue date Nov 1, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine-free tungsten deposition process employing in-situ oxidati...
- Patent number 11,377,733
- Issue date Jul 5, 2022
- SanDisk Technologies LLC
- Fei Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mitigating pyrophoric deposits in exhaust piping during SIC CVI/CVD...
- Patent number 11,236,021
- Issue date Feb 1, 2022
- Goodrich Corporation
- Ying She
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Diamond-like coating for piston ring surfaces, piston ring and proc...
- Patent number 11,215,283
- Issue date Jan 4, 2022
- ASIMCO Shuanghuan Piston Ring(YIZheng) Co., Ltd.
- Yingxue Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nozzle exit contours for pattern composition
- Patent number 11,168,391
- Issue date Nov 9, 2021
- Universal Display Corporation
- Edwin van den Tillaart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for treating a surface
- Patent number 11,161,139
- Issue date Nov 2, 2021
- MOSSHYDRO AS
- Aage Bjorn Andersen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for chemical vapor deposition process for semi...
- Patent number 11,149,351
- Issue date Oct 19, 2021
- Infineon Technologies AG
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling station with integrated isolation valves
- Patent number 11,127,606
- Issue date Sep 21, 2021
- Seagate Technology LLC
- Samuel Lewis Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and cover member
- Patent number 11,104,991
- Issue date Aug 31, 2021
- Tokyo Electron Limited
- Takashi Kamio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature vapor delivery system and method
- Patent number 10,954,594
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Viachslav Babayan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,720,312
- Issue date Jul 21, 2020
- Tokyo Electron Limited
- Hiromi Nitadori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical system with vacuum pre-loaded deposition head
- Patent number 10,584,413
- Issue date Mar 10, 2020
- Eastman Kodak Company
- Todd Mathew Spath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,580,625
- Issue date Mar 3, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,580,624
- Issue date Mar 3, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,529,544
- Issue date Jan 7, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,483,093
- Issue date Nov 19, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction system for growing a thin film
- Patent number 10,468,291
- Issue date Nov 5, 2019
- ASM America, Inc.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for substrate transfer and radical confinement
- Patent number 10,468,282
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240371609
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Shin MATSUURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLENUM DRIVEN HYDROXYL COMBUSTION OXIDATION
- Publication number 20240360559
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION HEAD FOR TUBULAR/NON-PLANAR COATINGS
- Publication number 20240360556
- Publication date Oct 31, 2024
- Centre National de la Recherche Scientifique
- David MUNOZ ROJAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FURNACE TUBE STRUCTURE, FURNACE REAR SEALING DEVICE, AND FURNACE
- Publication number 20240328714
- Publication date Oct 3, 2024
- LAPLACE RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Tairong Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC ELECTROLUMINESCENT DEVICES
- Publication number 20240279789
- Publication date Aug 22, 2024
- UNIVERSAL DISPLAY CORPORATION
- Edwin van den Tillaart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
- Publication number 20240249951
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Kosuke YOSHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID
- Publication number 20240247373
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI OVERLAPPING DISK AND RING
- Publication number 20240141487
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230392258
- Publication date Dec 7, 2023
- Tokyo Electron Limited
- Toshio HASEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A GALLIUM OXIDE SEMICONDUCTOR FILM AND A FILM...
- Publication number 20230257880
- Publication date Aug 17, 2023
- Shin-Etsu Chemical Co., Ltd.
- Takenori WATABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASYMMETRIC INJECTION FOR BETTER WAFER UNIFORMITY
- Publication number 20230028054
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM AND METHOD OF DELIVERING A REACTANT GAS
- Publication number 20220411927
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20220403514
- Publication date Dec 22, 2022
- Picosun Oy
- Timo VÄHÄ-OJALA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRIC SUBSTRATE BEARING A CARBON BASED COATING AND PROCESS FOR MAK...
- Publication number 20220275503
- Publication date Sep 1, 2022
- AGC Glass Europe
- Grégory ARNOULT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220154341
- Publication date May 19, 2022
- Kokusai Electric Corp.
- Satoshi TAKANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MITIGATING PYROPHORIC DEPOSITS DURING SiC CVI/CVD PROCESSES BY INTR...
- Publication number 20220112134
- Publication date Apr 14, 2022
- GOODRICH CORPORATION
- YING SHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20220064799
- Publication date Mar 3, 2022
- ULVAC, Inc.
- Takehisa MIYAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOZZLE EXIT CONTOURS FOR PATTERN COMPOSITION
- Publication number 20220042165
- Publication date Feb 10, 2022
- UNIVERSAL DISPLAY CORPORATION
- Edwin van den Tillaart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUORINE-FREE TUNGSTEN DEPOSITION PROCESS EMPLOYING IN-SITU OXIDATI...
- Publication number 20220042171
- Publication date Feb 10, 2022
- SANDISK TECHNOLOGIES LLC
- Fei ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20200411350
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASYMMETRIC INJECTION FOR BETTER WAFER UNIFORMITY
- Publication number 20200240014
- Publication date Jul 30, 2020
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20200066563
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT UNIT FOR A FACILITY FOR TREATING THE SURFACE OF A SUBSTRA...
- Publication number 20190287767
- Publication date Sep 19, 2019
- COATING PLASMA INNOVATION
- Julien Vallade
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mitigating Pyrophoric Deposits In Exhaust Piping During SIC CVI/CVD...
- Publication number 20190194806
- Publication date Jun 27, 2019
- GOODRICH CORPORATION
- YING SHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH TYPE PROCESSING APPARATUS
- Publication number 20180327903
- Publication date Nov 15, 2018
- TOKYO ELECTRON LIMITED
- Tsutomu SATOYOSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION DEVICE
- Publication number 20180320266
- Publication date Nov 8, 2018
- KOBUS SAS
- Patrice Nal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20180251896
- Publication date Sep 6, 2018
- BENEQ OY
- Mika Jauhiainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
- Publication number 20180247850
- Publication date Aug 30, 2018
- Applied Materials, Inc.
- Jared Ahmad LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMMON DEPOSITION PLATFORM, PROCESSING STATION, AND METHOD OF OPERA...
- Publication number 20180100236
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Neil Morrison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION DEVICE HAVING SCAN-TYPE REACTOR AND METHOD...
- Publication number 20160251759
- Publication date Sep 1, 2016
- KORNIC ENC CO., LTD.
- Choon Soo LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Confinement of gases to vicinity of substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Treatment unit for a facility for treating the surface of a substra...

Processing system and method of delivering a reactant gas

Process for making a fabric based substrate bearing a carbon based...

Process chamber and exhaust liner system therefor

Plasma processing apparatus

Nozzle exit contours for pattern composition

Asymmetric injection for better wafer uniformity

Mitigating pyrophoric deposits during SiC CVI/CVD processes by intr...

Deposition apparatus

Method and apparatus for substrate transfer and radical confinement

Apparatus and method of manufacturing display apparatus

Asymmetric injection for better wafer uniformity

Substrate processing apparatus

Fluorine-free tungsten deposition process employing in-situ oxidati...

Mitigating pyrophoric deposits in exhaust piping during SIC CVI/CVD...

Diamond-like coating for piston ring surfaces, piston ring and proc...

Nozzle exit contours for pattern composition

Method and system for treating a surface

Apparatus and method for chemical vapor deposition process for semi...

Cooling station with integrated isolation valves

Processing apparatus and cover member

High temperature vapor delivery system and method

Substrate processing apparatus

Vertical system with vacuum pre-loaded deposition head

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Reaction system for growing a thin film

Method and apparatus for substrate transfer and radical confinement

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

PLENUM DRIVEN HYDROXYL COMBUSTION OXIDATION

DEPOSITION HEAD FOR TUBULAR/NON-PLANAR COATINGS

FURNACE TUBE STRUCTURE, FURNACE REAR SEALING DEVICE, AND FURNACE

ORGANIC ELECTROLUMINESCENT DEVICES

SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...

ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID

EPI OVERLAPPING DISK AND RING

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD FOR PRODUCING A GALLIUM OXIDE SEMICONDUCTOR FILM AND A FILM...

ASYMMETRIC INJECTION FOR BETTER WAFER UNIFORMITY

PROCESSING SYSTEM AND METHOD OF DELIVERING A REACTANT GAS

SUBSTRATE PROCESSING APPARATUS AND METHOD

FABRIC SUBSTRATE BEARING A CARBON BASED COATING AND PROCESS FOR MAK...

SUBSTRATE PROCESSING APPARATUS

MITIGATING PYROPHORIC DEPOSITS DURING SiC CVI/CVD PROCESSES BY INTR...

VACUUM PROCESSING APPARATUS

NOZZLE EXIT CONTOURS FOR PATTERN COMPOSITION

FLUORINE-FREE TUNGSTEN DEPOSITION PROCESS EMPLOYING IN-SITU OXIDATI...

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

ASYMMETRIC INJECTION FOR BETTER WAFER UNIFORMITY

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

TREATMENT UNIT FOR A FACILITY FOR TREATING THE SURFACE OF A SUBSTRA...

Mitigating Pyrophoric Deposits In Exhaust Piping During SIC CVI/CVD...

BATCH TYPE PROCESSING APPARATUS

CHEMICAL VAPOR DEPOSITION DEVICE

APPARATUS FOR PROCESSING SUBSTRATE

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

COMMON DEPOSITION PLATFORM, PROCESSING STATION, AND METHOD OF OPERA...

ATOMIC LAYER DEPOSITION DEVICE HAVING SCAN-TYPE REACTOR AND METHOD...