Constructional details of particle beam apparatus not otherwise provided for

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H01J2237/3173

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/3173Constructional details of particle beam apparatus not otherwise provided for

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Plasma micronozzle adapter
- Patent number 11,993,011
- Issue date May 28, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Eric Langlois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Depositive shielding for fiducial protection from redeposition
- Patent number 11,817,395
- Issue date Nov 14, 2023
- FEI Company
- Sean Morgan-Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanofabrication using a new class of electron beam induced surface...
- Patent number 11,377,740
- Issue date Jul 5, 2022
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low keV ion beam image restoration by machine learning for object l...
- Patent number 11,355,305
- Issue date Jun 7, 2022
- FEI Company
- Remco Johannes Petrus Geurts
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for preparing a TEM sample
- Patent number 11,315,755
- Issue date Apr 26, 2022
- Shanghai Huali Integrated Circuit Corporation
- Qiang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for repairing a photolithographic mask
- Patent number 11,256,168
- Issue date Feb 22, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization chamber chip for a nano-aperture ion source, method of f...
- Patent number 11,056,315
- Issue date Jul 6, 2021
- National University of Singapore
- Jeroen Anton Van Kan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating arrangement and method
- Patent number 11,021,787
- Issue date Jun 1, 2021
- VON ARDENNE Asset GmbH & Co. KG
- Carsten Deus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for plasma deposition and treatment
- Patent number 10,861,669
- Issue date Dec 8, 2020
- Peter F. Vandermeulen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle device and wiring method
- Patent number 10,808,312
- Issue date Oct 20, 2020
- HITACHI HIGH-TECH CORPORATION
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Attachment of nano-objects to beam-deposited structures
- Patent number 10,501,851
- Issue date Dec 10, 2019
- FEI Company
- Mehran Kianinia
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Adaptive beam current for high throughput patterning
- Patent number 10,415,133
- Issue date Sep 17, 2019
- FEI Company
- Aurelien Philippe Jean Maclou Botman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam-induced etching
- Patent number 10,304,658
- Issue date May 28, 2019
- FEI Company
- Aiden Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Negative ribbon ion beams from pulsed plasmas
- Patent number 10,290,470
- Issue date May 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Daniel Distaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method and control program for focused ion beam device
- Patent number 10,276,341
- Issue date Apr 30, 2019
- Hitachi, Ltd.
- Keiji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite charged particle beam apparatus and control method thereof
- Patent number 10,249,471
- Issue date Apr 2, 2019
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle device and wiring method
- Patent number 9,963,776
- Issue date May 8, 2018
- Hitachi High-Technologies Corporation
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for structuring an object and associated particle beam system
- Patent number 9,960,012
- Issue date May 1, 2018
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for in situ substrate temperature monitoring...
- Patent number 9,945,736
- Issue date Apr 17, 2018
- Lam Research Corporation
- Enrico Magni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method and focused ion beam system
- Patent number 9,824,856
- Issue date Nov 21, 2017
- Jeol Ltd.
- Misumi Kadoi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process gas enhancement for beam treatment of a substrate
- Patent number 9,735,019
- Issue date Aug 15, 2017
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing a substrate with a focused part...
- Patent number 9,721,754
- Issue date Aug 1, 2017
- Carl Zeiss SMT GmbH
- Tristan Bret
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for electron beam lithography
- Patent number 9,646,802
- Issue date May 9, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chi Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CAD-assisted TEM prep recipe creation
- Patent number 9,576,772
- Issue date Feb 21, 2017
- FEI Company
- Jason Arjavac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,556,521
- Issue date Jan 31, 2017
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arrangement for transporting radicals
- Patent number 9,484,187
- Issue date Nov 1, 2016
- Mapper Lithography IP B.V.
- Pieter Kruit
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,453,281
- Issue date Sep 27, 2016
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron sensitive glass and optical circuits, microstructures form...
- Patent number 9,440,876
- Issue date Sep 13, 2016
- Lu Han
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Bulk deposition for tilted mill protection
- Patent number 9,412,560
- Issue date Aug 9, 2016
- FEI Company
- Stacey Stone
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
- Publication number 20240310722
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...
- Publication number 20230023396
- Publication date Jan 26, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREPARING A TEM SAMPLE
- Publication number 20220068600
- Publication date Mar 3, 2022
- Shanghai Huali Integrated Circuit Corporation
- Qiang CHEN
- G01 - MEASURING TESTING
Information Patent Application
LOW KEV ION BEAM IMAGE RESTORATION BY MACHINE LEARNING FOR OBJECT L...
- Publication number 20210104375
- Publication date Apr 8, 2021
- FEI Company
- Remco Johannes Petrus Geurts
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD O...
- Publication number 20200211822
- Publication date Jul 2, 2020
- National University of Singapore
- Jeroen Anton VAN KAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...
- Publication number 20200190669
- Publication date Jun 18, 2020
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coating arrangement and method
- Publication number 20200017953
- Publication date Jan 16, 2020
- VON ARDENNE Asset GmbH & Co. KG
- Carsten DEUS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGED PARTICLE DEVICE AND WIRING METHOD
- Publication number 20180216223
- Publication date Aug 2, 2018
- Hitachi High-Technologies Corporation
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20170330722
- Publication date Nov 16, 2017
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAD-ASSISTED TEM PREP RECIPE CREATION
- Publication number 20170062178
- Publication date Mar 2, 2017
- FEI Company
- Jason Arjavac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING SYSTEM FOR MULTI CHARGED PARTICLE BEAMS, AND MULTI CHARGED...
- Publication number 20160141142
- Publication date May 19, 2016
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Electron Beam Lithography
- Publication number 20160141144
- Publication date May 19, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chi Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR STRUCTURING AN OBJECT WITH THE AID OF A PARTICLE BEAM AP...
- Publication number 20160090645
- Publication date Mar 31, 2016
- CARL ZEISS MICROSCOPY GMBH
- Simon Stegmaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OZONE SUPPLYING APPARATUS, OZONE SUPPLYING METHOD, AND CHARGED PART...
- Publication number 20160086768
- Publication date Mar 24, 2016
- NuFlare Technology, Inc.
- Yasuyuki TANEDA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INDIVIDUALLY SWITCHED FIELD EMISSION ARRAYS
- Publication number 20150371810
- Publication date Dec 24, 2015
- Massachusetts Institute of Technology
- Stephen Angelo Guerrera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System of Creating a Symmetrical FIB Deposition
- Publication number 20150369710
- Publication date Dec 24, 2015
- FEI Company
- Scott Edward Fuller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING LAYERS
- Publication number 20150348753
- Publication date Dec 3, 2015
- SEAGATE TECHNOLOGY LLC
- Philip George Pitcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE
- Publication number 20150318145
- Publication date Nov 5, 2015
- Canon Kabushiki Kaisha
- Daisuke Iwase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS
- Publication number 20150311036
- Publication date Oct 29, 2015
- NuFlare Technology, Inc.
- Keita IDENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20150255249
- Publication date Sep 10, 2015
- NuFlare Technology, Inc.
- Munehiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...
- Publication number 20150228455
- Publication date Aug 13, 2015
- NuFlare Technology, Inc.
- Tomoo MOTOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150187540
- Publication date Jul 2, 2015
- Canon Kabushiki Kaisha
- Atsushi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Electron Beam Lithography
- Publication number 20150179392
- Publication date Jun 25, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chi Che
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND TARGET POSITIONING DEVICE
- Publication number 20150162165
- Publication date Jun 11, 2015
- MAPPER LITHOGRAPHY IP BV
- Jerry PEIJSTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRODE STACK ARRANGEMENT
- Publication number 20150137010
- Publication date May 21, 2015
- MAPPER LITHOGRAPHY IP BV
- Willem Henk URBANUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRODE COOLING ARRANGEMENT
- Publication number 20150137009
- Publication date May 21, 2015
- MAPPER LITHOGRAPHY IP BV
- Willem Henk URBANUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arrangement and method for transporting radicals
- Publication number 20150028223
- Publication date Jan 29, 2015
- MAPPER LITHOGRAPHY IP BV
- Pieter Kruit
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
METHODS AND APPARATUS FOR IN SITU SUBSTRATE TEMPERATURE MONITORING...
- Publication number 20140360977
- Publication date Dec 11, 2014
- Enrico Magni
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam-Induced Etching
- Publication number 20140363978
- Publication date Dec 11, 2014
- Aiden Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatuses for Specimen Lift-Out and Circuit Edit Usin...
- Publication number 20140338076
- Publication date Nov 13, 2014
- NaugaNeedles, LLC
- Mehdi M. Yazdanpanah
- B82 - NANO-TECHNOLOGY

Constructional details of particle beam apparatus not otherwise provided for

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma micronozzle adapter

Depositive shielding for fiducial protection from redeposition

Nanofabrication using a new class of electron beam induced surface...

Low keV ion beam image restoration by machine learning for object l...

Method for preparing a TEM sample

Apparatus and method for repairing a photolithographic mask

Ionization chamber chip for a nano-aperture ion source, method of f...

Coating arrangement and method

Methods and systems for plasma deposition and treatment

Charged particle device and wiring method

Patterned atomic layer etching and deposition using miniature-colum...

Attachment of nano-objects to beam-deposited structures

Adaptive beam current for high throughput patterning

Electron beam-induced etching

Negative ribbon ion beams from pulsed plasmas

Control method and control program for focused ion beam device

Composite charged particle beam apparatus and control method thereof

Charged particle device and wiring method

Method for structuring an object and associated particle beam system

Methods and apparatus for in situ substrate temperature monitoring...

Deposition method and focused ion beam system

Process gas enhancement for beam treatment of a substrate

Method and apparatus for processing a substrate with a focused part...

Method and apparatus for electron beam lithography

CAD-assisted TEM prep recipe creation

Precision deposition using miniature-column charged particle beam a...

Arrangement for transporting radicals

Precision deposition using miniature-column charged particle beam a...

Electron sensitive glass and optical circuits, microstructures form...

Bulk deposition for tilted mill protection

Patents Applicationslast 30 patents

METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...

METHOD FOR PREPARING A TEM SAMPLE

LOW KEV ION BEAM IMAGE RESTORATION BY MACHINE LEARNING FOR OBJECT L...

AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD O...

NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...

Coating arrangement and method

CHARGED PARTICLE DEVICE AND WIRING METHOD

COMPOSITE CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF

CAD-ASSISTED TEM PREP RECIPE CREATION

BLANKING SYSTEM FOR MULTI CHARGED PARTICLE BEAMS, AND MULTI CHARGED...

Method and Apparatus for Electron Beam Lithography

METHOD FOR STRUCTURING AN OBJECT WITH THE AID OF A PARTICLE BEAM AP...

OZONE SUPPLYING APPARATUS, OZONE SUPPLYING METHOD, AND CHARGED PART...

INDIVIDUALLY SWITCHED FIELD EMISSION ARRAYS

Method and System of Creating a Symmetrical FIB Deposition

METHODS OF FORMING LAYERS

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

CHARGED PARTICLE BEAM DRAWING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

Method and Apparatus for Electron Beam Lithography

CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND TARGET POSITIONING DEVICE

MULTI-ELECTRODE STACK ARRANGEMENT

MULTI-ELECTRODE COOLING ARRANGEMENT

Arrangement and method for transporting radicals

METHODS AND APPARATUS FOR IN SITU SUBSTRATE TEMPERATURE MONITORING...

Electron Beam-Induced Etching

Methods and Apparatuses for Specimen Lift-Out and Circuit Edit Usin...