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CPC
H01J2237/1405

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1405Constructional details

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Joint electron-optical columns for flood-charging and image-forming...
- Patent number 12,165,838
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 11,527,379
- Issue date Dec 13, 2022
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam irradiation device
- Patent number 11,239,042
- Issue date Feb 1, 2022
- HITACHI HIGH-TECH CORPORATION
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam irradiation device
- Patent number 10,832,886
- Issue date Nov 10, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam irradiation apparatus, charged particle beam...
- Patent number 10,790,110
- Issue date Sep 29, 2020
- NUFLARE TECHNOLOGY, INC.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and electron microscope
- Patent number 10,720,301
- Issue date Jul 21, 2020
- Jeol Ltd.
- Hidetaka Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite beam apparatus
- Patent number 10,636,615
- Issue date Apr 28, 2020
- Hitachi High-Tech Science Corporation
- Tatsuya Asahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 10,622,184
- Issue date Apr 14, 2020
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,586,681
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High performance inspection scanning electron microscope device and...
- Patent number 10,504,684
- Issue date Dec 10, 2019
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction method, aberration correction system, and cha...
- Patent number 10,446,361
- Issue date Oct 15, 2019
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens and transmission electron microscope
- Patent number 10,224,173
- Issue date Mar 5, 2019
- Jeol Ltd.
- Tatsuo Naruse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite beam apparatus
- Patent number 10,204,759
- Issue date Feb 12, 2019
- Hitachi High-Tech Science Corporation
- Tatsuya Asahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,020,164
- Issue date Jul 10, 2018
- Hermes Microvision Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
User interface for an electron microscope
- Patent number 9,865,427
- Issue date Jan 9, 2018
- FEI Company
- Martinus Petrus Maria Bierhoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for optimizing diffusion section of electron beam
- Patent number 9,767,985
- Issue date Sep 19, 2017
- Huazhong University of Science & Technology
- Jiang Huang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Notched magnetic lens for improved sample access in an SEM
- Patent number 9,443,693
- Issue date Sep 13, 2016
- KLA-Tencor Corporation
- Christopher M. Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tubular permanent magnet used in a multi-electron beam device
- Patent number 9,418,815
- Issue date Aug 16, 2016
- Param Corporation
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus having a magnetic lens configured to diverge an electron...
- Patent number 9,390,882
- Issue date Jul 12, 2016
- Micron Technology, Inc.
- Shixin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,362,087
- Issue date Jun 7, 2016
- Hermes-Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,312,091
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,190,241
- Issue date Nov 17, 2015
- Hermes-Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent magnet based high performance multi-axis immersion electr...
- Patent number 9,165,745
- Issue date Oct 20, 2015
- Maglen Pte Ltd
- Tao Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Notched magnetic lens for improved sample access in an SEM
- Patent number 9,082,580
- Issue date Jul 14, 2015
- KLA-Tencor Corporation
- Christopher M. Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
User interface for an electron microscope
- Patent number 9,025,018
- Issue date May 5, 2015
- FEI Company
- Martinus Petrus Maria Bierhoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controlling charge-up in an electron beam app...
- Patent number 9,000,369
- Issue date Apr 7, 2015
- Hermes Microvision Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromagnetic lens for electron beam exposure apparatus
- Patent number 8,957,389
- Issue date Feb 17, 2015
- Advantest Corp.
- Akio Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chromatic aberration corrector and electron microscope
- Patent number 8,785,880
- Issue date Jul 22, 2014
- Jeol Ltd.
- Hidetaka Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent magnet lens array
- Patent number 8,698,094
- Issue date Apr 15, 2014
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system of performing three-dimensional imaging using an...
- Patent number 8,642,959
- Issue date Feb 4, 2014
- Micron Technology, Inc.
- Shixin Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MINIATURE HYBRID ELECTRON BEAM COLUMN
- Publication number 20230326704
- Publication date Oct 12, 2023
- KLA Corporation
- Lawrence Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PA...
- Publication number 20230113759
- Publication date Apr 13, 2023
- Hitachi High-Tech Corporation
- Shingo HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE SOLENOID MAGNETIC LENS
- Publication number 20220148844
- Publication date May 12, 2022
- IMATREX, INC.
- Roy E. Rand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPOLE LENS, ABERRATION CORRECTOR USING SAME, AND CHARGED PARTIC...
- Publication number 20210249218
- Publication date Aug 12, 2021
- HITACHI HIGH-TECH CORPORATION
- Tomonori NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Irradiation Device
- Publication number 20210027976
- Publication date Jan 28, 2021
- HITACHI HIGH-TECH CORPORATION
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200251305
- Publication date Aug 6, 2020
- ASML NETHERLANDS B.V.
- Zhongwei CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20200243296
- Publication date Jul 30, 2020
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Joint Electron-Optical Columns for Flood-Charging and Image-Forming...
- Publication number 20200194223
- Publication date Jun 18, 2020
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Irradiation Apparatus, Charged Particle Beam...
- Publication number 20190304737
- Publication date Oct 3, 2019
- NUFLARE TECHNOLOGY, INC.
- Munehiro OGASAWARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam Irradiation Device
- Publication number 20190287754
- Publication date Sep 19, 2019
- Hitachi High-Technologies Corporation
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aberration Corrector and Electron Microscope
- Publication number 20190228945
- Publication date Jul 25, 2019
- JEOL Ltd.
- Hidetaka SAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE BEAM APPARATUS
- Publication number 20190189388
- Publication date Jun 20, 2019
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Tatsuya ASAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND M...
- Publication number 20160268098
- Publication date Sep 15, 2016
- AUROS TECHNOLOGY CO., LTD.
- JONG LIP CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOTCHED MAGNETIC LENS FOR IMPROVED SAMPLE ACCESS IN AN SEM
- Publication number 20150279610
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Christopher M. Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20150155133
- Publication date Jun 4, 2015
- Hermes Microvision Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOTCHED MAGNETIC LENS FOR IMPROVED SAMPLE ACCESS IN AN SEM
- Publication number 20150083926
- Publication date Mar 26, 2015
- KLA-Tencor Corporation
- Christopher M. Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Controlling Charge-up in an Electron Beam App...
- Publication number 20150060670
- Publication date Mar 5, 2015
- HERMES MICROVISION INC.
- WEIMING REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Permanent Magnet Based High Performance Multi-Axis Immersion Electr...
- Publication number 20140326895
- Publication date Nov 6, 2014
- Tao Luo
- Tao Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20140291510
- Publication date Oct 2, 2014
- Hermes-Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON LENS AND THE ELECTRON BEAM DEVICE
- Publication number 20140252245
- Publication date Sep 11, 2014
- PARAM CORPORATION
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTROMAGNETIC LENS FOR ELECTRON BEAM EXPOSURE APPARATUS
- Publication number 20140166893
- Publication date Jun 19, 2014
- Advantest Corporation
- Akio Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHROMATIC ABERRATION CORRECTOR AND ELECTRON MICROSCOPE
- Publication number 20140158901
- Publication date Jun 12, 2014
- JEOL Ltd.
- Hidetaka Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Controlling Charge-up in an Electron Beam App...
- Publication number 20140151554
- Publication date Jun 5, 2014
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS HAVING A MAGNETIC LENS CONFIGURED TO DIVERGE AN ELECTRON...
- Publication number 20140145089
- Publication date May 29, 2014
- Micron Technology, Inc.
- Shixin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON LENS AND THE ELECTRON BEAM DEVICE
- Publication number 20130134322
- Publication date May 30, 2013
- PARAM CORPORATION
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Application
Dual Beam System
- Publication number 20110309263
- Publication date Dec 22, 2011
- FEI Company
- Raymond Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-AXIS MAGNETIC LENS
- Publication number 20110139996
- Publication date Jun 16, 2011
- Hermes Microvision, Inc.
- ZHONGWEI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPACT SCANNING ELECTRON MICROSCOPE
- Publication number 20110133083
- Publication date Jun 9, 2011
- FEI Company
- MART PETRUS MARIA BIERHOFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN WITH MAGNETIC IMMERSION DOUBLE CONDENSER LENSES
- Publication number 20110018470
- Publication date Jan 27, 2011
- Hermes-Microvision, Inc.
- Xu Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetic Lens, Method for Focusing Charged Particles and Charged Pa...
- Publication number 20110012018
- Publication date Jan 20, 2011
- Bryan BARNARD
- H01 - BASIC ELECTRIC ELEMENTS

Constructional details

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Joint electron-optical columns for flood-charging and image-forming...

Objective lens arrangement usable in particle-optical systems

Beam irradiation device

Beam irradiation device

Charged particle beam irradiation apparatus, charged particle beam...

Aberration corrector and electron microscope

Composite beam apparatus

Objective lens arrangement usable in particle-optical systems

Charged particle beam apparatus

High performance inspection scanning electron microscope device and...

Aberration correction method, aberration correction system, and cha...

Objective lens and transmission electron microscope

Composite beam apparatus

Charged particle beam apparatus

User interface for an electron microscope

Device and method for optimizing diffusion section of electron beam

Notched magnetic lens for improved sample access in an SEM

Tubular permanent magnet used in a multi-electron beam device

Apparatus having a magnetic lens configured to diverge an electron...

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Permanent magnet based high performance multi-axis immersion electr...

Notched magnetic lens for improved sample access in an SEM

User interface for an electron microscope

System and method for controlling charge-up in an electron beam app...

Electromagnetic lens for electron beam exposure apparatus

Chromatic aberration corrector and electron microscope

Permanent magnet lens array

Method and system of performing three-dimensional imaging using an...

Patents Applicationslast 30 patents

MINIATURE HYBRID ELECTRON BEAM COLUMN

CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PA...

COMPOSITE SOLENOID MAGNETIC LENS

MULTIPOLE LENS, ABERRATION CORRECTOR USING SAME, AND CHARGED PARTIC...

Beam Irradiation Device

CHARGED PARTICLE BEAM APPARATUS

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

Joint Electron-Optical Columns for Flood-Charging and Image-Forming...

Charged Particle Beam Irradiation Apparatus, Charged Particle Beam...

Beam Irradiation Device

Aberration Corrector and Electron Microscope

COMPOSITE BEAM APPARATUS

SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND M...

NOTCHED MAGNETIC LENS FOR IMPROVED SAMPLE ACCESS IN AN SEM

Charged Particle Beam Apparatus

NOTCHED MAGNETIC LENS FOR IMPROVED SAMPLE ACCESS IN AN SEM

System and Method for Controlling Charge-up in an Electron Beam App...

Permanent Magnet Based High Performance Multi-Axis Immersion Electr...

Charged Particle Beam Apparatus

ELECTRON LENS AND THE ELECTRON BEAM DEVICE

ELECTROMAGNETIC LENS FOR ELECTRON BEAM EXPOSURE APPARATUS

CHROMATIC ABERRATION CORRECTOR AND ELECTRON MICROSCOPE

System and Method for Controlling Charge-up in an Electron Beam App...

APPARATUS HAVING A MAGNETIC LENS CONFIGURED TO DIVERGE AN ELECTRON...

ELECTRON LENS AND THE ELECTRON BEAM DEVICE

Dual Beam System

MULTI-AXIS MAGNETIC LENS

COMPACT SCANNING ELECTRON MICROSCOPE

ELECTRON GUN WITH MAGNETIC IMMERSION DOUBLE CONDENSER LENSES

Magnetic Lens, Method for Focusing Charged Particles and Charged Pa...