Continuous wave laser beam

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CPC
H01L21/02683

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02683Continuous wave laser beam

Industries

Patents Grantslast 30 patents

Information Patent Grant
Thin film transistor including crystallized semiconductor, display...
- Patent number 12,176,353
- Issue date Dec 24, 2024
- ADRC. CO. KR
- Youngbin Do
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing method, laser annealing device, and crystallized si...
- Patent number 12,148,616
- Issue date Nov 19, 2024
- V. Technology Co., Ltd.
- Jun Gotoh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for forming polycrystalline channel on dielectric films wit...
- Patent number 12,057,321
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for spot beam crystallization
- Patent number 11,942,321
- Issue date Mar 26, 2024
- The Trustees of Columbia University in City of New York
- James S. Im
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation method and laser irradiation apparatus
- Patent number 11,854,804
- Issue date Dec 26, 2023
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming polycrystalline channel on dielectric films wit...
- Patent number 11,742,213
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crystallization of two-dimensional structures comprising multiple t...
- Patent number 11,621,163
- Issue date Apr 4, 2023
- The Regents of the University of California
- Nobuhiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor including crystallized semiconductor, display...
- Patent number 11,587,952
- Issue date Feb 21, 2023
- ADRC. CO. KR
- Youngbin Do
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for spot beam crystallization
- Patent number 11,437,236
- Issue date Sep 6, 2022
- THE TRUSTEES OF COLUMBIA UNIVERSITY IN THF CITY OF NEW YORK
- James S. Im
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation method and laser irradiation apparatus
- Patent number 11,227,764
- Issue date Jan 18, 2022
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming polycrystalline channel on dielectric films wit...
- Patent number 10,879,080
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,879,272
- Issue date Dec 29, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and device for manufacturing low temperature poly-silicon, a...
- Patent number 10,707,077
- Issue date Jul 7, 2020
- BOE Technology Group Co., Ltd.
- Tao Gao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing apparatus and laser annealing method for substrate
- Patent number 10,665,454
- Issue date May 26, 2020
- BOE Technology Group Co., Ltd.
- Jingshuai Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing device
- Patent number 10,651,049
- Issue date May 12, 2020
- Kyushu University, National University Corporation
- Hiroshi Ikenoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 10,541,337
- Issue date Jan 21, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Tomoaki Moriwaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,515,983
- Issue date Dec 24, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of laser irradiation, laser irradiation apparatus, and metho...
- Patent number 10,488,671
- Issue date Nov 26, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,361,222
- Issue date Jul 23, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming a virtual germanium substrate using a laser
- Patent number 10,115,854
- Issue date Oct 30, 2018
- Newsouth Innovations Pty Limited
- Xiaojing Hao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 10,032,919
- Issue date Jul 24, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Tomoaki Moriwaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing device, production process of polycrystalline silic...
- Patent number 10,020,194
- Issue date Jul 10, 2018
- BOE Technology Group Co., Ltd.
- Xueyan Tian
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor photo-receiving device
- Patent number 9,842,736
- Issue date Dec 12, 2017
- Kabushiki Kaisha Toshiba
- Haruhiko Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of crystallizing active layer of thin film...
- Patent number 9,620,361
- Issue date Apr 11, 2017
- Samsung Display Co., Ltd.
- Byoung-Kwon Choo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser thermal annealing of deep doped region using structured antir...
- Patent number 9,558,948
- Issue date Jan 31, 2017
- Infineon Technologies Austria AG
- Alexander Breymesser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser spike annealing using fiber lasers
- Patent number 9,343,307
- Issue date May 17, 2016
- Ultratech, Inc.
- Serguei Anikitchev
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Crystallization of amorphous films and grain growth using combinati...
- Patent number 9,263,265
- Issue date Feb 16, 2016
- Applied Materials, Inc.
- Shashank Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing substrate having thin film thereabove, meth...
- Patent number 9,236,487
- Issue date Jan 12, 2016
- Joled Inc
- Tomohiko Oda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate having thin film and method of thin film formation
- Patent number 9,236,254
- Issue date Jan 12, 2016
- Joled Inc
- Kenichirou Nishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming crystalline thin-film and method for manufacturi...
- Patent number 9,218,968
- Issue date Dec 22, 2015
- Joled Inc
- Kenichirou Nishida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR FORMING POLYCRYSTALLINE CHANNEL ON DIELECTRIC FILMS WIT...
- Publication number 20230386856
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Hsien WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM TRANSISTOR INCLUDING CRYSTALLIZED SEMICONDUCTOR, DISPLAY...
- Publication number 20230154929
- Publication date May 18, 2023
- ADRC. CO. KR
- Youngbin DO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF INCREASING SENSITIVITY AND LIMITS OF DETECTION AND CONTRO...
- Publication number 20230045818
- Publication date Feb 16, 2023
- Nicholas R. Glavin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR SPOT BEAM CRYSTALLIZATION
- Publication number 20220359198
- Publication date Nov 10, 2022
- THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- James S. IM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS
- Publication number 20220115233
- Publication date Apr 14, 2022
- SAMSUNG DISPLAY CO., LTD.
- Hiroshi OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING METHOD, LASER ANNEALING DEVICE, AND CRYSTALLIZED SI...
- Publication number 20220005692
- Publication date Jan 6, 2022
- V TECHNOLOGY CO., LTD.
- Jun GOTOH
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
THIN FILM TRANSISTOR INCLUDING CRYSTALLIZED SEMICONDUCTOR, DISPLAY...
- Publication number 20210272986
- Publication date Sep 2, 2021
- ADRC. CO. KR
- Youngbin DO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20210118916
- Publication date Apr 22, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CRYSTALLIZATION OF TWO-DIMENSIONAL STRUCTURES COMPRISING MULTIPLE T...
- Publication number 20210043451
- Publication date Feb 11, 2021
- The Regents of the University of California
- Nobuhiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS
- Publication number 20200185222
- Publication date Jun 11, 2020
- SAMSUNG DISPLAY CO., LTD.
- Hiroshi OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20200135770
- Publication date Apr 30, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20190341404
- Publication date Nov 7, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND DEVICE FOR MANUFACTURING LOW TEMPERATURE POLY-SILICON, A...
- Publication number 20190304782
- Publication date Oct 3, 2019
- BOE TECHNOLOGY GROUP CO., LTD.
- Tao Gao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD FOR SUBSTRATE
- Publication number 20190057869
- Publication date Feb 21, 2019
- BOE TECHNOLOGY GROUP CO., LTD.
- Jingshuai WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20180308985
- Publication date Oct 25, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Tomoaki MORIWAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD FOR FORMING A VIRTUAL GERMANIUM SUBSTRATE USING A LASER
- Publication number 20170244005
- Publication date Aug 24, 2017
- NewSouth Innovations Pty Limited
- Xiaojing Hao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20160005611
- Publication date Jan 7, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Tomoaki MORIWAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF CRYSTALLIZING ACTIVE LAYER OF THIN FILM...
- Publication number 20150348782
- Publication date Dec 3, 2015
- SAMSUNG DISPLAY CO., LTD.
- Byoung-Kwon CHOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser spike annealing using fiber lasers
- Publication number 20150179449
- Publication date Jun 25, 2015
- ULTRATECH, INC.
- Serguei Anikitchev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTALLIZATION OF AMORPHOUS FILMS AND GRAIN GROWTH USING COMBINATI...
- Publication number 20150064933
- Publication date Mar 5, 2015
- Applied Materials, Inc.
- Shashank SHARMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING CRYSTALLINE THIN-FILM AND METHOD FOR MANUFACTURI...
- Publication number 20140308804
- Publication date Oct 16, 2014
- PANASONIC CORPORATION
- Kenichirou NISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HAVING THIN FILM AND METHOD OF THIN FILM FORMATION
- Publication number 20140231812
- Publication date Aug 21, 2014
- PANASONIC CORPORATION
- Kenichirou NISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN-FILM DEVICE, THIN-FILM DEVICE ARRAY, AND METHOD OF MANUFACTURI...
- Publication number 20140231813
- Publication date Aug 21, 2014
- PANASONIC CORPORATION
- Tomohiko ODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN-FILM TRANSISTOR DEVICE
- Publication number 20140209911
- Publication date Jul 31, 2014
- PANASONIC CORPORATION
- Takahiro KAWASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SUBSTRATE HAVING THIN FILM THEREABOVE, METH...
- Publication number 20140167049
- Publication date Jun 19, 2014
- PANASONIC CORPORATION
- Tomohiko ODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PROCESSING A FILM, AND THIN FILMS
- Publication number 20140045347
- Publication date Feb 13, 2014
- THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- James S. IM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD FOR THIN FILM SEMICONDUCTOR DEVICE, MANUFACTUR...
- Publication number 20120309140
- Publication date Dec 6, 2012
- PANASONIC CORPORATION
- Tomohiko ODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN-FILM TRANSISTOR ARRAY DEVICE MANUFACTURING METHOD
- Publication number 20120231589
- Publication date Sep 13, 2012
- PANASONIC CORPORATION
- Toru SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CRYSTALLIZING THIN FILM, METHOD FOR MANUFACTURING THIN F...
- Publication number 20120196395
- Publication date Aug 2, 2012
- SONY CORPORATION
- Nobuhiko Umezu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK FOR CRYSTALLIZING A SEMICONDUCTOR LAYER AND METHOD OF CRYSTALL...
- Publication number 20120184112
- Publication date Jul 19, 2012
- Cheol-Ho Park
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Continuous wave laser beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Thin film transistor including crystallized semiconductor, display...

Laser annealing method, laser annealing device, and crystallized si...

Methods for forming polycrystalline channel on dielectric films wit...

Methods and systems for spot beam crystallization

Laser irradiation method and laser irradiation apparatus

Methods for forming polycrystalline channel on dielectric films wit...

Crystallization of two-dimensional structures comprising multiple t...

Thin film transistor including crystallized semiconductor, display...

Methods and systems for spot beam crystallization

Laser irradiation method and laser irradiation apparatus

Methods for forming polycrystalline channel on dielectric films wit...

Semiconductor device and semiconductor device production system

Method and device for manufacturing low temperature poly-silicon, a...

Laser annealing apparatus and laser annealing method for substrate

Laser annealing device

Method for manufacturing semiconductor device

Semiconductor device and semiconductor device production system

Method of laser irradiation, laser irradiation apparatus, and metho...

Semiconductor device and semiconductor device production system

Method for forming a virtual germanium substrate using a laser

Method for manufacturing semiconductor device

Laser annealing device, production process of polycrystalline silic...

Semiconductor photo-receiving device

Apparatus for and method of crystallizing active layer of thin film...

Laser thermal annealing of deep doped region using structured antir...

Laser spike annealing using fiber lasers

Crystallization of amorphous films and grain growth using combinati...

Method of manufacturing substrate having thin film thereabove, meth...

Substrate having thin film and method of thin film formation

Method for forming crystalline thin-film and method for manufacturi...

Patents Applicationslast 30 patents

METHODS FOR FORMING POLYCRYSTALLINE CHANNEL ON DIELECTRIC FILMS WIT...

THIN FILM TRANSISTOR INCLUDING CRYSTALLIZED SEMICONDUCTOR, DISPLAY...

METHOD OF INCREASING SENSITIVITY AND LIMITS OF DETECTION AND CONTRO...

METHODS AND SYSTEMS FOR SPOT BEAM CRYSTALLIZATION

LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS

LASER ANNEALING METHOD, LASER ANNEALING DEVICE, AND CRYSTALLIZED SI...

THIN FILM TRANSISTOR INCLUDING CRYSTALLIZED SEMICONDUCTOR, DISPLAY...

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

CRYSTALLIZATION OF TWO-DIMENSIONAL STRUCTURES COMPRISING MULTIPLE T...

LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

METHOD AND DEVICE FOR MANUFACTURING LOW TEMPERATURE POLY-SILICON, A...

LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD FOR SUBSTRATE

Method for manufacturing semiconductor device

A METHOD FOR FORMING A VIRTUAL GERMANIUM SUBSTRATE USING A LASER

Method for manufacturing semiconductor device

APPARATUS FOR AND METHOD OF CRYSTALLIZING ACTIVE LAYER OF THIN FILM...

Laser spike annealing using fiber lasers

CRYSTALLIZATION OF AMORPHOUS FILMS AND GRAIN GROWTH USING COMBINATI...

METHOD FOR FORMING CRYSTALLINE THIN-FILM AND METHOD FOR MANUFACTURI...

SUBSTRATE HAVING THIN FILM AND METHOD OF THIN FILM FORMATION

THIN-FILM DEVICE, THIN-FILM DEVICE ARRAY, AND METHOD OF MANUFACTURI...

THIN-FILM TRANSISTOR DEVICE

METHOD OF MANUFACTURING SUBSTRATE HAVING THIN FILM THEREABOVE, METH...

SYSTEMS AND METHODS FOR PROCESSING A FILM, AND THIN FILMS

MANUFACTURING METHOD FOR THIN FILM SEMICONDUCTOR DEVICE, MANUFACTUR...

THIN-FILM TRANSISTOR ARRAY DEVICE MANUFACTURING METHOD

METHOD FOR CRYSTALLIZING THIN FILM, METHOD FOR MANUFACTURING THIN F...

MASK FOR CRYSTALLIZING A SEMICONDUCTOR LAYER AND METHOD OF CRYSTALL...