Controlling environment of sample

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CPC
H01J2237/2002

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2002Controlling environment of sample

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Deposition apparatus and method with EM radiation
- Patent number 12,110,587
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tze-Liang Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,094,694
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sample loading method and charged particle beam apparatus
- Patent number 11,705,303
- Issue date Jul 18, 2023
- Jeol Ltd.
- Tomoyuki Naganuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample support and method of fabricating same
- Patent number 11,658,000
- Issue date May 23, 2023
- Jeol Ltd.
- Yuji Konyuba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample attachment device
- Patent number 11,521,823
- Issue date Dec 6, 2022
- Jeol Ltd.
- Takahisa Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope provided with at least one ballist...
- Patent number 11,239,049
- Issue date Feb 1, 2022
- Centre National de la Recherche Scientifique
- Jean-Christophe Harmand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS frame heating platform for electron imagable fluid reservoirs...
- Patent number 11,170,968
- Issue date Nov 9, 2021
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam inspection tool and method of controlling heat load
- Patent number 11,158,484
- Issue date Oct 26, 2021
- ASML Netherlands B.V.
- Dennis Herman Caspar Van Banning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus having an aperture unit and method for sett...
- Patent number 11,139,140
- Issue date Oct 5, 2021
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Portable vacuum antioxidant bag
- Patent number 11,127,559
- Issue date Sep 21, 2021
- Korea Institute of Science and Technology
- So Hee Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum cooling apparatus and ion milling apparatus
- Patent number 11,043,355
- Issue date Jun 22, 2021
- Jeol Ltd.
- Tsutomu Negishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryogenic transmission electron microscopy sample preparation
- Patent number 11,035,766
- Issue date Jun 15, 2021
- NANOSOFT, LLC.
- Michael Godfrin
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,872,744
- Issue date Dec 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Munekazu Koyanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen observation method
- Patent number 10,852,253
- Issue date Dec 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Kiyotaka Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Microscope sample preparation device
- Patent number 10,788,404
- Issue date Sep 29, 2020
- The Florida State University Research Foundation, Inc.
- Michael G. Roper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMs frame heating platform for electron imagable fluid reservoirs...
- Patent number 10,777,380
- Issue date Sep 15, 2020
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor workpiece temperature measurement system
- Patent number 10,739,208
- Issue date Aug 11, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Grant
Method of cleaning electrostatic chuck
- Patent number 10,699,876
- Issue date Jun 30, 2020
- Advanced Ion Beam Technology, Inc.
- Yu-Ho Ni
- B08 - CLEANING
Information Patent Grant
Cryostation system
- Patent number 10,658,150
- Issue date May 19, 2020
- Hitachi High-Technologies Corporation
- Yasuhira Nagakubo
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Cryogenic cell for mounting a specimen in a charged particle micros...
- Patent number 10,651,007
- Issue date May 12, 2020
- FEI Company
- Gerbert Jeroen Van De Water
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum compatible fluid sampler
- Patent number 10,639,634
- Issue date May 5, 2020
- GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY O...
- J. Alexander Liddle
- G01 - MEASURING TESTING
Information Patent Grant
Equipment protecting enclosures
- Patent number 10,589,251
- Issue date Mar 17, 2020
- Xyleco, Inc.
- Marshall Medhoff
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Ion milling device and processing method using the ion milling device
- Patent number 10,515,777
- Issue date Dec 24, 2019
- Hitachi High-Technologies Corporation
- Atsushi Kamino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for safe control of gas delivery to an electron microscope s...
- Patent number 10,503,127
- Issue date Dec 10, 2019
- PROTOCHIPS, INC.
- Daniel S. Gardiner
- G01 - MEASURING TESTING
Information Patent Grant
Processing biomass
- Patent number 10,500,561
- Issue date Dec 10, 2019
- Xyleco, Inc.
- Marshall Medoff
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method for monitoring environmental states of a microscope sample w...
- Patent number 10,460,906
- Issue date Oct 29, 2019
- PROTOCHIPS, INC.
- Daniel Stephen Gardiner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMs frame heating platform for electron imagable fluid reservoirs...
- Patent number 10,446,363
- Issue date Oct 15, 2019
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam inspection apparatus, and multi charged...
- Patent number 10,373,798
- Issue date Aug 6, 2019
- NUFLARE TECHNOLOGY, INC.
- Hidekazu Takekoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-contamination trap, and vacuum application device
- Patent number 10,269,533
- Issue date Apr 23, 2019
- Hitachi High-Technologies Corporation
- Takashi Mizuo
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Specimen holder
- Patent number 10,242,841
- Issue date Mar 26, 2019
- Mel-Build Corporation
- Hiroya Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SAMPLE HOLDER, ELECTRON MICROSCOPE SYSTEM AND SAMPLE OBSERVATION ME...
- Publication number 20240429020
- Publication date Dec 26, 2024
- Hitachi, Ltd
- Akira SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PREPARING ELECTRON MICROSCOPY SAMPLES AND METHODS OF...
- Publication number 20240412942
- Publication date Dec 12, 2024
- The Regents of the University of California
- Maxim Armstrong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS AND METHOD WITH EM RADIATION
- Publication number 20240384409
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tze-Liang Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPROVED TEMPERATURE CONTROL IN LIQUID PHASE TRANSMISSION ELECTRON...
- Publication number 20240290573
- Publication date Aug 29, 2024
- Danmarks Tekniske Universitet
- Murat Nulati YESIBOLATI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AN IMAGING SYSTEM
- Publication number 20240186104
- Publication date Jun 6, 2024
- Frederick A. Flitsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition Apparatus and Method with EM Radiation
- Publication number 20230383403
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co, LTD.
- Tze-Liang Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SAMPLE HOLDER FOR DETECTION OF HYDROGEN PERMEATION AND HYDROGEN PER...
- Publication number 20230333032
- Publication date Oct 19, 2023
- National Institute for Materials Science
- Akiko Nakamura
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
- Publication number 20230257869
- Publication date Aug 17, 2023
- QORVO BIOTECHNOLOGIES, LLC
- Derya Deniz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR
- Publication number 20230260759
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANALYSIS SYSTEM, ANALYSIS METHOD, COMPUTER PROGRAM PRODUCT AND SAMP...
- Publication number 20230178333
- Publication date Jun 8, 2023
- CARL ZEISS MICROSCOPY GMBH
- Bruno Linn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition Apparatus and Method
- Publication number 20230151489
- Publication date May 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tze-Liang Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...
- Publication number 20230103943
- Publication date Apr 6, 2023
- Xiamen Chip-Nova Technology Co., Ltd.
- Honggang Liao
- G01 - MEASURING TESTING
Information Patent Application
TRANSMISSION ELECTRON MICROSCOPE PROVIDED WITH AT LEAST ONE BALLIST...
- Publication number 20210241994
- Publication date Aug 5, 2021
- Centre National de la Recherche Scientifique
- Jean-Christophe HARMAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210225618
- Publication date Jul 22, 2021
- TOKYO ELECTRON LIMITED
- Sumi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Attachment Device
- Publication number 20210098225
- Publication date Apr 1, 2021
- JEOL Ltd.
- Takahisa Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PORTABLE VACUUM ANTIOXIDANT BAG
- Publication number 20210090847
- Publication date Mar 25, 2021
- Korea Institute of Science and Technology
- So Hee KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Support and Method of Fabricating Same
- Publication number 20210005418
- Publication date Jan 7, 2021
- JEOL Ltd.
- Yuji Konyuba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS...
- Publication number 20200411277
- Publication date Dec 31, 2020
- PROTOCHIPS, INC.
- Franklin Stampley WALDEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOGENIC TRANSMISSION ELECTRON MICROSCOPY SAMPLE PREPARATION
- Publication number 20200264079
- Publication date Aug 20, 2020
- NANOSOFT, LLC.
- Michael Godfrin
- G01 - MEASURING TESTING
Information Patent Application
Vacuum Cooling Apparatus and Ion Milling Apparatus
- Publication number 20200185187
- Publication date Jun 11, 2020
- JEOL Ltd.
- Tsutomu Negishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING BIOMASS
- Publication number 20200070120
- Publication date Mar 5, 2020
- Xyleco, Inc.
- Marshall MEDOFF
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS...
- Publication number 20200043697
- Publication date Feb 6, 2020
- PROTOCHIPS, INC.
- Franklin Stampley WALDEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Workpiece Temperature Measurement System
- Publication number 20190170591
- Publication date Jun 6, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20190148105
- Publication date May 16, 2019
- Hitachi High-Technologies Corporation
- Munekazu KOYANAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING BIOMASS
- Publication number 20190139660
- Publication date May 9, 2019
- Xyleco, Inc.
- Marshall MEDOFF
- C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information Patent Application
Electron-Beam Inspection Systems with optimized throughput
- Publication number 20190088442
- Publication date Mar 21, 2019
- DONGFANG JINGYUAN ELECTRON LIMITED
- Weimin Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS...
- Publication number 20190080882
- Publication date Mar 14, 2019
- PROTOCHIPS, INC.
- Franklin Stampley WALDEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN OBSERVATION METHOD
- Publication number 20190051489
- Publication date Feb 14, 2019
- Hitachi High-Technologies Corporation
- Kiyotaka Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPE SAMPLE PREPARATION DEVICE
- Publication number 20180209880
- Publication date Jul 26, 2018
- Michael G. Roper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SAFE CONTROL OF GAS DELIVERY TO AN ELECTRON MICROSCOPE S...
- Publication number 20180203423
- Publication date Jul 19, 2018
- PROTOCHIPS, INC.
- Daniel S. Gardiner
- G05 - CONTROLLING REGULATING

Controlling environment of sample

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Deposition apparatus and method with EM radiation

Substrate processing apparatus and substrate processing method

Sample loading method and charged particle beam apparatus

Sample support and method of fabricating same

Sample attachment device

Transmission electron microscope provided with at least one ballist...

MEMS frame heating platform for electron imagable fluid reservoirs...

Electron beam inspection tool and method of controlling heat load

Particle beam apparatus having an aperture unit and method for sett...

Portable vacuum antioxidant bag

Vacuum cooling apparatus and ion milling apparatus

Cryogenic transmission electron microscopy sample preparation

Charged particle beam apparatus

Specimen observation method

Microscope sample preparation device

MEMs frame heating platform for electron imagable fluid reservoirs...

Semiconductor workpiece temperature measurement system

Method of cleaning electrostatic chuck

Cryostation system

Cryogenic cell for mounting a specimen in a charged particle micros...

Vacuum compatible fluid sampler

Equipment protecting enclosures

Ion milling device and processing method using the ion milling device

Method for safe control of gas delivery to an electron microscope s...

Processing biomass

Method for monitoring environmental states of a microscope sample w...

MEMs frame heating platform for electron imagable fluid reservoirs...

Multi charged particle beam inspection apparatus, and multi charged...

Anti-contamination trap, and vacuum application device

Specimen holder

Patents Applicationslast 30 patents

SAMPLE HOLDER, ELECTRON MICROSCOPE SYSTEM AND SAMPLE OBSERVATION ME...

APPARATUS FOR PREPARING ELECTRON MICROSCOPY SAMPLES AND METHODS OF...

DEPOSITION APPARATUS AND METHOD WITH EM RADIATION

IMPROVED TEMPERATURE CONTROL IN LIQUID PHASE TRANSMISSION ELECTRON...

METHOD AND APPARATUS FOR AN IMAGING SYSTEM

Deposition Apparatus and Method with EM Radiation

SAMPLE HOLDER FOR DETECTION OF HYDROGEN PERMEATION AND HYDROGEN PER...

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...

INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR

ANALYSIS SYSTEM, ANALYSIS METHOD, COMPUTER PROGRAM PRODUCT AND SAMP...

Deposition Apparatus and Method

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...

TRANSMISSION ELECTRON MICROSCOPE PROVIDED WITH AT LEAST ONE BALLIST...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Sample Attachment Device

PORTABLE VACUUM ANTIOXIDANT BAG

Sample Support and Method of Fabricating Same

MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS...

CRYOGENIC TRANSMISSION ELECTRON MICROSCOPY SAMPLE PREPARATION

Vacuum Cooling Apparatus and Ion Milling Apparatus

PROCESSING BIOMASS

MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS...

Semiconductor Workpiece Temperature Measurement System

Charged Particle Beam Apparatus

PROCESSING BIOMASS

Electron-Beam Inspection Systems with optimized throughput

MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS...

SPECIMEN OBSERVATION METHOD

MICROSCOPE SAMPLE PREPARATION DEVICE

METHOD FOR SAFE CONTROL OF GAS DELIVERY TO AN ELECTRON MICROSCOPE S...