Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements

Industry

CPC
C23C14/0042

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0042Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements

Industries

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus and method for manufacturing part having fil...
- Patent number 11,919,032
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Takayuki Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive particles supply system
- Patent number 11,810,765
- Issue date Nov 7, 2023
- Applied Materials Israel Ltd.
- Asaf Gutman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating control using forward parameter correction and adapted reve...
- Patent number 11,692,263
- Issue date Jul 4, 2023
- Viavi Solutions Inc.
- Zhao Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated articles with optical coatings having residual compressive s...
- Patent number 11,618,711
- Issue date Apr 4, 2023
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolayer-by-monolayer growth of MgO layers using mg sublimation an...
- Patent number 11,597,993
- Issue date Mar 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sahil Patel
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Al—Cr-based ceramic coatings with increased thermal stability
- Patent number 11,560,618
- Issue date Jan 24, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Robert Raab
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for film deposition on a substrate with non-uniform overlap...
- Patent number 11,447,854
- Issue date Sep 20, 2022
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated articles with optical coatings having residual compressive s...
- Patent number 11,242,280
- Issue date Feb 8, 2022
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum pump system
- Patent number 11,162,499
- Issue date Nov 2, 2021
- Shimadzu Corporation
- Hiroaki Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decorative HIPIMS hard material layers
- Patent number 11,060,181
- Issue date Jul 13, 2021
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried Krassnitzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolayer-by-monolayer growth of MgO layers using Mg sublimation an...
- Patent number 11,001,919
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sahil Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated body and method for production of the body
- Patent number 10,982,313
- Issue date Apr 20, 2021
- Kennametal Inc.
- Volker Derflinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming internal stress control film
- Patent number 10,975,465
- Issue date Apr 13, 2021
- Ulvac, Inc.
- Katsuaki Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 10,896,841
- Issue date Jan 19, 2021
- Shibaura Mechatronics Corporation
- Daisuke Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High mobility doped metal oxide thin films and reactive physical va...
- Patent number 10,741,649
- Issue date Aug 11, 2020
- North Carolina State University
- Edward Sachet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolayer-by-monolayer growth of MgO layers using Mg sublimation an...
- Patent number 10,648,069
- Issue date May 12, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sahil Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for producing coated steel components
- Patent number 10,648,086
- Issue date May 12, 2020
- Magna International Inc.
- Ralph Domnick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extensible barrier films, articles employing same and methods of ma...
- Patent number 10,563,030
- Issue date Feb 18, 2020
- 3M Innovative Properties Company
- Kevin W. Gotrik
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thin film forming method
- Patent number 10,494,709
- Issue date Dec 3, 2019
- Murata Manufacturing Co., Ltd.
- Munehito Chatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum nitride piezoelectric thin film, piezoelectric material, p...
- Patent number 10,475,984
- Issue date Nov 12, 2019
- MURATA MANUFACTURING CO., LTD.
- Keiichi Umeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for balancing consumption of targets in pulsed dual magnetro...
- Patent number 10,332,730
- Issue date Jun 25, 2019
- AES Global Holdings, PTE. LTD
- David Christie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling a gas supply to a process chamber, controlle...
- Patent number 10,174,415
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Frank Schnappenberger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transparent conductive film
- Patent number 10,173,400
- Issue date Jan 8, 2019
- NANCHANG O-FILM DISPLAY TECHNOLOGY CO., LTD.
- Shuang Du
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for controlling semiconductor deposition operation
- Patent number 10,113,228
- Issue date Oct 30, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chung-Liang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for graded anti-reflective coatings by physical vapor deposi...
- Patent number 10,096,725
- Issue date Oct 9, 2018
- Applied Materials, Inc.
- Yong Cao
- G02 - OPTICS
Information Patent Grant
Multilayer thin film, method of manufacturing the same, and electro...
- Patent number 9,999,139
- Issue date Jun 12, 2018
- Samsung Electronics Co., Ltd.
- Jin Hyun Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target age compensation method for performing stable reactive sputt...
- Patent number 9,957,600
- Issue date May 1, 2018
- Oerlikon Surface Solutions AG, Präffikon
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 9,951,415
- Issue date Apr 24, 2018
- Canon Tokki Corporation
- Yasuo Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing cubic zirconia layers
- Patent number 9,945,024
- Issue date Apr 17, 2018
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Jürgen Ramm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming electrode active materials
- Patent number 9,905,847
- Issue date Feb 27, 2018
- GM Global Technology Operations LLC
- Gayatri V. Dadheech
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
- Publication number 20240133025
- Publication date Apr 25, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230397303
- Publication date Dec 7, 2023
- Kokusai Electric Corporation
- Hiroyuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED ARTICLES WITH OPTICAL COATINGS HAVING RESIDUAL COMPRESSIVE S...
- Publication number 20230212063
- Publication date Jul 6, 2023
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220403503
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NORMAL PULSE PROFILE MODIFICATION IN A FILM DEPOSITION PROCESS
- Publication number 20220403497
- Publication date Dec 22, 2022
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM
- Publication number 20220316049
- Publication date Oct 6, 2022
- Sumitomo Metal Mining Co., Ltd.
- Hideharu OKAMI
- G02 - OPTICS
Information Patent Application
PIEZOELECTRIC COATING AND DEPOSITION PROCESS
- Publication number 20220263009
- Publication date Aug 18, 2022
- Evatec AG
- Andrea Mazzalai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATED ARTICLES WITH OPTICAL COATINGS HAVING RESIDUAL COMPRESSIVE S...
- Publication number 20220242781
- Publication date Aug 4, 2022
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, DEVICES, AND CODE FOR CONTROLLING A COATING PROCESS
- Publication number 20220090254
- Publication date Mar 24, 2022
- VON ARDENNE Asset GmbH & Co. KG
- Martin LANGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Monolayer-By-Monolayer Growth of MgO Layers Using Mg Sublimation an...
- Publication number 20210262078
- Publication date Aug 26, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sahil Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210235546
- Publication date Jul 29, 2021
- Kokusai Electric Corporation
- Hiroyuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Normal pulse profile modification in a film deposition process
- Publication number 20210123128
- Publication date Apr 29, 2021
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Al-Cr-Based Ceramic Coatings with Increased Thermal Stability
- Publication number 20200299823
- Publication date Sep 24, 2020
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Robert Raab
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Monolayer-By-Monolayer Growth of MgO Layers Using Mg Sublimation an...
- Publication number 20200270737
- Publication date Aug 27, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sahil Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Monolayer-By-Monolayer Growth of MgO Layers using Mg Sublimation an...
- Publication number 20200115788
- Publication date Apr 16, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sahil Patel
- C01 - INORGANIC CHEMISTRY
Information Patent Application
COATED ARTICLES WITH OPTICAL COATINGS HAVING RESIDUAL COMPRESSIVE S...
- Publication number 20190337841
- Publication date Nov 7, 2019
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMATION APPARATUS, SPUTTERING CATHODE, AND METHOD OF FO...
- Publication number 20190284685
- Publication date Sep 19, 2019
- Shincron Co., LTD
- Mitsuhiro Miyauchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED BODY AND METHOD FOR PRODUCTION OF THE BODY
- Publication number 20190226075
- Publication date Jul 25, 2019
- Kennametal Inc.
- Volker DERFLINGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING FILM
- Publication number 20190153582
- Publication date May 23, 2019
- Canon Kabushiki Kaisha
- Soya Todo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM OF ADJUSTING PROCESS GAS FLOW OF VACUUM COATING E...
- Publication number 20190127837
- Publication date May 2, 2019
- Beijing Juntailnnovation Technology Co., Ltd.
- Zheng Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR GRADED ANTI-REFLECTIVE COATINGS BY PHYSICAL VAPOR DEPOSI...
- Publication number 20190051768
- Publication date Feb 14, 2019
- Applied Materials, Inc.
- Yong CAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING FOR OPTICAL AND ELECTRONIC APPLICATIONS
- Publication number 20190040520
- Publication date Feb 7, 2019
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Anna KRAMMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTENSIBLE BARRIER FILMS, ARTICLES EMPLOYING SAME AND METHODS OF MA...
- Publication number 20190002660
- Publication date Jan 3, 2019
- 3M Innovative Properties Company
- Kevin W. Gotrik
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
REACTIVE SPUTTERING APPARATUS AND REACTIVE SPUTTERING METHOD
- Publication number 20180265961
- Publication date Sep 20, 2018
- Canon Kabushiki Kaisha
- Tamayo Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR
- Publication number 20180211823
- Publication date Jul 26, 2018
- Applied Materials, Inc.
- Daniel SEVERIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPARENT CONDUCTIVE FILM
- Publication number 20180170016
- Publication date Jun 21, 2018
- NANCHANG O-FILM DISPLAY TECHNOLOGY CO., LTD.
- Shuang DU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENGINEERING THE OPTICAL PROPERTIES OF AN INTEGRATED COMPUTATIONAL E...
- Publication number 20180151368
- Publication date May 31, 2018
- Halliburton Energy Services, Inc.
- James M. Price
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING A GAS SUPPLY TO A PROCESS CHAMBER, CONTROLLE...
- Publication number 20180135160
- Publication date May 17, 2018
- Applied Materials, Inc.
- Frank SCHNAPPENBERGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION
- Publication number 20170330796
- Publication date Nov 16, 2017
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR BALANCING CONSUMPTION OF TARGETS IN PULSED DUAL MAGNETRO...
- Publication number 20170271133
- Publication date Sep 21, 2017
- Advanced Energy Industries, Inc.
- David Christie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film forming apparatus and method for manufacturing part having fil...

Reactive particles supply system

Coating control using forward parameter correction and adapted reve...

Coated articles with optical coatings having residual compressive s...

Monolayer-by-monolayer growth of MgO layers using mg sublimation an...

Al—Cr-based ceramic coatings with increased thermal stability

Process for film deposition on a substrate with non-uniform overlap...

Coated articles with optical coatings having residual compressive s...

Vacuum pump system

Decorative HIPIMS hard material layers

Monolayer-by-monolayer growth of MgO layers using Mg sublimation an...

Coated body and method for production of the body

Method of forming internal stress control film

Film formation apparatus

High mobility doped metal oxide thin films and reactive physical va...

Monolayer-by-monolayer growth of MgO layers using Mg sublimation an...

Method and system for producing coated steel components

Extensible barrier films, articles employing same and methods of ma...

Thin film forming method

Aluminum nitride piezoelectric thin film, piezoelectric material, p...

Method for balancing consumption of targets in pulsed dual magnetro...

Method for controlling a gas supply to a process chamber, controlle...

Transparent conductive film

Method for controlling semiconductor deposition operation

Method for graded anti-reflective coatings by physical vapor deposi...

Multilayer thin film, method of manufacturing the same, and electro...

Target age compensation method for performing stable reactive sputt...

Film deposition apparatus and film deposition method

Method for producing cubic zirconia layers

Forming electrode active materials

Patents Applicationslast 30 patents

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

COATED ARTICLES WITH OPTICAL COATINGS HAVING RESIDUAL COMPRESSIVE S...

FILM FORMING APPARATUS AND FILM FORMING METHOD

NORMAL PULSE PROFILE MODIFICATION IN A FILM DEPOSITION PROCESS

OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM

PIEZOELECTRIC COATING AND DEPOSITION PROCESS

COATED ARTICLES WITH OPTICAL COATINGS HAVING RESIDUAL COMPRESSIVE S...

METHODS, DEVICES, AND CODE FOR CONTROLLING A COATING PROCESS

Monolayer-By-Monolayer Growth of MgO Layers Using Mg Sublimation an...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Normal pulse profile modification in a film deposition process

Al-Cr-Based Ceramic Coatings with Increased Thermal Stability

Monolayer-By-Monolayer Growth of MgO Layers Using Mg Sublimation an...

Monolayer-By-Monolayer Growth of MgO Layers using Mg Sublimation an...

COATED ARTICLES WITH OPTICAL COATINGS HAVING RESIDUAL COMPRESSIVE S...

THIN FILM FORMATION APPARATUS, SPUTTERING CATHODE, AND METHOD OF FO...

COATED BODY AND METHOD FOR PRODUCTION OF THE BODY

SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING FILM

METHOD AND SYSTEM OF ADJUSTING PROCESS GAS FLOW OF VACUUM COATING E...

METHOD FOR GRADED ANTI-REFLECTIVE COATINGS BY PHYSICAL VAPOR DEPOSI...

COATING FOR OPTICAL AND ELECTRONIC APPLICATIONS

EXTENSIBLE BARRIER FILMS, ARTICLES EMPLOYING SAME AND METHODS OF MA...

REACTIVE SPUTTERING APPARATUS AND REACTIVE SPUTTERING METHOD

APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR

TRANSPARENT CONDUCTIVE FILM

ENGINEERING THE OPTICAL PROPERTIES OF AN INTEGRATED COMPUTATIONAL E...

METHOD FOR CONTROLLING A GAS SUPPLY TO A PROCESS CHAMBER, CONTROLLE...

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

METHOD FOR BALANCING CONSUMPTION OF TARGETS IN PULSED DUAL MAGNETRO...