Conveying cassettes, containers or carriers

Industry

CPC
H01L21/6773

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6773Conveying cassettes, containers or carriers

Industries

Patents Grantslast 30 patents

Information Patent Grant
FOUP transfer device
- Patent number 12,327,746
- Issue date Jun 10, 2025
- Rorze Corporation
- Yoshiyuki Fujishiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus
- Patent number 12,327,745
- Issue date Jun 10, 2025
- Semes Co., Ltd.
- Jae Ik Cho
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Apparatus and method for automated wafer carrier handling
- Patent number 12,322,628
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate, substrate processing apparatus, met...
- Patent number 12,320,778
- Issue date Jun 3, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 12,315,751
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and transfer schedule creation method
- Patent number 12,315,752
- Issue date May 27, 2025
- Tokyo Electron Limited
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication system and method
- Patent number 12,308,268
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing system and method
- Patent number 12,308,271
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Hung Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer frame sorter and stocker
- Patent number 12,300,532
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of automatically setting purge mode of STB and system for ma...
- Patent number 12,293,927
- Issue date May 6, 2025
- Semes Co., Ltd.
- Young Woo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overhead transport system
- Patent number 12,286,306
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chieh Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus with a rotatable table
- Patent number 12,288,710
- Issue date Apr 29, 2025
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for controlling overhead hoist transfer vehicle
- Patent number 12,280,961
- Issue date Apr 22, 2025
- Semes Co., Ltd.
- Jun Beom Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port and methods of operation
- Patent number 12,272,573
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overhead conveyance system
- Patent number 12,272,582
- Issue date Apr 8, 2025
- Murata Machinery, Ltd.
- Yasuhisa Ito
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Steering devices for OHT
- Patent number 12,272,581
- Issue date Apr 8, 2025
- Samsung Electronics Co., Ltd.
- Sangjune Bae
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,266,562
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Hajime Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple semiconductor die container load port
- Patent number 12,261,069
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 12,249,527
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Isamu Taoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting container and system for storing contain...
- Patent number 12,240,701
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- Jun Sang Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-inlet module and gas-inlet nozzle
- Patent number 12,237,193
- Issue date Feb 25, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Yi-Jun Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage devices configured to measure physical properties of...
- Patent number 12,237,189
- Issue date Feb 25, 2025
- Micron Technology, Inc.
- Nagasubramaniyan Chandrasekaran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Track-guided cart system
- Patent number 12,227,110
- Issue date Feb 18, 2025
- Murata Machinery, Ltd.
- Mitsuya Tokumoto
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Article transport vehicle, rail assembly, and article transport sys...
- Patent number 12,227,373
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Wan Hee Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Portable robotic semiconductor pod loader
- Patent number 12,217,991
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Kuo Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etching for smoothing of arbitrary surfaces
- Patent number 12,217,968
- Issue date Feb 4, 2025
- California Institute of Technology
- Harold Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for improving transfer efficiency of an automat...
- Patent number 12,217,992
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems of optical inspection of electronic device manu...
- Patent number 12,215,966
- Issue date Feb 4, 2025
- Applied Materials, Inc.
- Mohsin Waqar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for moving an object into a processing station, c...
- Patent number 12,205,838
- Issue date Jan 21, 2025
- Atotech Deutschland GmbH
- Rüdiger Pretscher
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Airborne contaminant management method and system
- Patent number 12,202,015
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Ming Tsao
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
DISTANCE MEASUREMENT METHOD, DISTANCE MEASUREMENT SYSTEM, AND SUBST...
- Publication number 20250180381
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Tomohiro YAMANOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIN SEALING DEVICE AND RESIN SEALING METHOD
- Publication number 20250167016
- Publication date May 22, 2025
- Apic Yamada Corporation
- Shusaku Tagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANU...
- Publication number 20250155234
- Publication date May 15, 2025
- Applied Materials, Inc.
- Mohsin Waqar
- G01 - MEASURING TESTING
Information Patent Application
TRANSPORT SYSTEM
- Publication number 20250157840
- Publication date May 15, 2025
- MURATA MACHINERY, LTD.
- Toma MIYAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER
- Publication number 20250149360
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS
- Publication number 20250149362
- Publication date May 8, 2025
- Micron Technology, Inc.
- Nagasubramaniyan Chandrasekaran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIT HANGING APPARATUS, OVERHEAD HOIST TRANSPORT, AND OVERHEAD HOIS...
- Publication number 20250149365
- Publication date May 8, 2025
- Jong Hyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOVOLTAIC ROBOT
- Publication number 20250140589
- Publication date May 1, 2025
- SUZHOU JUNION INTELLIGENT TECHNOLOGY CO., LTD.
- Linxiao FU
- B60 - VEHICLES IN GENERAL
Information Patent Application
OVERHEAD TRANSPORT VEHICLE SYSTEM
- Publication number 20250128745
- Publication date Apr 24, 2025
- MURATA MACHINERY, LTD.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING FOR SMOOTHING OF ARBITRARY SURFACES
- Publication number 20250125153
- Publication date Apr 17, 2025
- California Institute of Technology
- Harold Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER
- Publication number 20250125176
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Kuo CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRIPPING DEVICE AND TRANSPORT APPARATUS INCLUDING THE SAME
- Publication number 20250122022
- Publication date Apr 17, 2025
- SEMES CO., LTD.
- Dong Won YUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Improving Transfer Efficiency of an Automat...
- Publication number 20250125177
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY SYSTEM WITH TWIN PLANAR MOTOR STAGE
- Publication number 20250118602
- Publication date Apr 10, 2025
- KLA Corporation
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Positional Relationship Detection System
- Publication number 20250118581
- Publication date Apr 10, 2025
- DAIFUKU CO., LTD.
- Tomotaka Kinugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM
- Publication number 20250108417
- Publication date Apr 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Ming TSAO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
- Publication number 20250100161
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jen-Ti WANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Transport Vehicle
- Publication number 20250105042
- Publication date Mar 27, 2025
- DAIFUKU CO., LTD.
- Tadashi Nishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT ENCLOSURE SYSTEM
- Publication number 20250087524
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...
- Publication number 20250079210
- Publication date Mar 6, 2025
- Kokusai Electric Corporation
- Shinichiro MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR MONITORING WAFER CARRIER AND METHOD OF MANUFACTURING SEM...
- Publication number 20250076230
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- HSU TUNG YEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY SEMICONDUCTOR STORAGE SYSTEM
- Publication number 20250079212
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Rong Syuan FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STOCKER SYSTEM FOR WAFER CASSETTE
- Publication number 20250079218
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Guancyun LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JUNCTION PASSAGE CONTROL SYSTEM BASED ON LOCATION OF OHT USING POWE...
- Publication number 20250046638
- Publication date Feb 6, 2025
- CANTOPS CO., LTD.
- Hak Seo OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER AND SUBSTRATE TREATING APPARATUS
- Publication number 20250038023
- Publication date Jan 30, 2025
- SEMES CO., LTD.
- DUKHYUN SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM
- Publication number 20250029861
- Publication date Jan 23, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20250029854
- Publication date Jan 23, 2025
- Lavorro, Inc.
- Akshay OBEROI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Facility
- Publication number 20250022734
- Publication date Jan 16, 2025
- DAIFUKU CO., LTD.
- Daichi Tomida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERHEAD CONVEYING VEHICLE
- Publication number 20250022735
- Publication date Jan 16, 2025
- MURATA MACHINERY, LTD.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat Detection Device
- Publication number 20250020520
- Publication date Jan 16, 2025
- DAIFUKU CO., LTD.
- Hiroumi Murai
- G01 - MEASURING TESTING

Conveying cassettes, containers or carriers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

FOUP transfer device

Transport apparatus

Apparatus and method for automated wafer carrier handling

Method of processing substrate, substrate processing apparatus, met...

System for a semiconductor fabrication facility and method for oper...

Substrate treatment apparatus and transfer schedule creation method

Semiconductor fabrication system and method

Semiconductor wafer processing system and method

Wafer frame sorter and stocker

Method of automatically setting purge mode of STB and system for ma...

Overhead transport system

Wafer processing apparatus with a rotatable table

Method and device for controlling overhead hoist transfer vehicle

Load port and methods of operation

Overhead conveyance system

Steering devices for OHT

Substrate processing method and substrate processing apparatus

Multiple semiconductor die container load port

Substrate transport apparatus and substrate transport method

Apparatus for transporting container and system for storing contain...

Gas-inlet module and gas-inlet nozzle

Wafer storage devices configured to measure physical properties of...

Track-guided cart system

Article transport vehicle, rail assembly, and article transport sys...

Portable robotic semiconductor pod loader

Atomic layer etching for smoothing of arbitrary surfaces

Methods and systems for improving transfer efficiency of an automat...

Methods and systems of optical inspection of electronic device manu...

Device and method for moving an object into a processing station, c...

Airborne contaminant management method and system

Patents Applicationslast 30 patents

DISTANCE MEASUREMENT METHOD, DISTANCE MEASUREMENT SYSTEM, AND SUBST...

RESIN SEALING DEVICE AND RESIN SEALING METHOD

METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANU...

TRANSPORT SYSTEM

SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER

WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS

UNIT HANGING APPARATUS, OVERHEAD HOIST TRANSPORT, AND OVERHEAD HOIS...

PHOTOVOLTAIC ROBOT

OVERHEAD TRANSPORT VEHICLE SYSTEM

ATOMIC LAYER ETCHING FOR SMOOTHING OF ARBITRARY SURFACES

PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER

GRIPPING DEVICE AND TRANSPORT APPARATUS INCLUDING THE SAME

Methods and Systems for Improving Transfer Efficiency of an Automat...

METROLOGY SYSTEM WITH TWIN PLANAR MOTOR STAGE

Positional Relationship Detection System

AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

Transport Vehicle

PROCESS KIT ENCLOSURE SYSTEM

DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...

SYSTEM FOR MONITORING WAFER CARRIER AND METHOD OF MANUFACTURING SEM...

HIGH DENSITY SEMICONDUCTOR STORAGE SYSTEM

STOCKER SYSTEM FOR WAFER CASSETTE

JUNCTION PASSAGE CONTROL SYSTEM BASED ON LOCATION OF OHT USING POWE...

CONTAINER AND SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATMENT SYSTEM

AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT

Transport Facility

OVERHEAD CONVEYING VEHICLE

Heat Detection Device