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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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Discharge tubes exposing object to beam
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H01J2237/153
Correcting image defects
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Patents Grants
last 30 patents
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Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,961,709
Issue date
Apr 16, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam application apparatus
Patent number
11,915,903
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Momoyo Enyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conduction inspection method for multipole aberration corrector, an...
Patent number
11,915,902
Issue date
Feb 27, 2024
NuFlare Technology, Inc.
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduction of thermal magnetic field noise in TEM corrector systems
Patent number
11,915,904
Issue date
Feb 27, 2024
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,887,807
Issue date
Jan 30, 2024
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Estimation model generation method and electron microscope
Patent number
11,842,880
Issue date
Dec 12, 2023
Jeol Ltd.
Ryusuke Sagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma flood gun for charged particle apparatus
Patent number
11,830,705
Issue date
Nov 28, 2023
Ximan Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, device and system for reducing off-axial aberration in elec...
Patent number
11,817,290
Issue date
Nov 14, 2023
FEI Company
Maarten Bischoff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,817,289
Issue date
Nov 14, 2023
HITACHI HIGH-TECH CORPORATION
Tsunenori Nomaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron optical module for providing an off-axial electron beam wi...
Patent number
11,804,357
Issue date
Oct 31, 2023
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,798,783
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,791,124
Issue date
Oct 17, 2023
Hitachi High-Technologies Corporation
Yuta Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Axially progressive lens for transporting charged particles
Patent number
11,791,149
Issue date
Oct 17, 2023
Agilent Technologies, Inc.
Tong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector
Patent number
11,791,125
Issue date
Oct 17, 2023
NuFlare Technology, Inc.
Yuichi Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,784,023
Issue date
Oct 10, 2023
Hitachi High-Technologies Corporation
Yuta Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multistage-connected multipole, multistage multipole unit, and char...
Patent number
11,769,650
Issue date
Sep 26, 2023
HITACHI HIGH-TECH CORPORATION
Hideto Dohi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multipole unit and charged particle beam device
Patent number
11,769,649
Issue date
Sep 26, 2023
HITACHI HIGH-TECH CORPORATION
Masanori Mita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring aberration and electron microscope
Patent number
11,764,029
Issue date
Sep 19, 2023
Jeol Ltd.
Shigeyuki Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wien filter and charged particle beam imaging apparatus
Patent number
11,756,761
Issue date
Sep 12, 2023
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and method of adjusti...
Patent number
11,740,546
Issue date
Aug 29, 2023
NuFlare Technology, Inc.
Tsubasa Nanao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma flood gun for charged particle apparatus
Patent number
11,735,398
Issue date
Aug 22, 2023
Ximan Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection tool and method of determining a distortion of an inspec...
Patent number
11,728,129
Issue date
Aug 15, 2023
ASML Netherlands B.V.
Peter Christianus Johannes Maria De Loijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,688,580
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Xuedong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,670,477
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam steering correction for attenuating the degradation of positio...
Patent number
11,664,187
Issue date
May 30, 2023
Intel Corporation
Amir Raveh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spatially phase-modulated electron wave generation device
Patent number
11,651,930
Issue date
May 16, 2023
HITACHI HIGH-TECH CORPORATION
Makoto Kuwahara
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
Patent number
11,605,523
Issue date
Mar 14, 2023
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,587,758
Issue date
Feb 21, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Electron Microscope, Multipole Element for Use Therein, and Control...
Publication number
20240145210
Publication date
May 2, 2024
JEOL Ltd.
Shigeyuki Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Adjusting Charged Particle Optical System and Charged Par...
Publication number
20240145211
Publication date
May 2, 2024
JEOL Ltd.
Shigeyuki Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20240128044
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
Publication number
20240128051
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF COMPENSATING FOR AN EFFECT OF ELECTRODE DISTORTION, ASSES...
Publication number
20240105416
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
Publication number
20240096586
Publication date
Mar 21, 2024
KLA Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM
Publication number
20240096587
Publication date
Mar 21, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC MULTIPOLE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND MET...
Publication number
20240087837
Publication date
Mar 14, 2024
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Benjamin Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Simple Spherical Aberration Corrector for SEM
Publication number
20240047170
Publication date
Feb 8, 2024
FEI Company
Ali MOHAMMADI-GHEIDARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Simple Spherical Aberration Corrector for SEM
Publication number
20240047169
Publication date
Feb 8, 2024
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle optics components and their fabrication
Publication number
20240047171
Publication date
Feb 8, 2024
FEI Company
Ali MOHAMMADI-GHEIDARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES
Publication number
20240038521
Publication date
Feb 1, 2024
Agilent Technologies, Inc.
Tong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...
Publication number
20240029993
Publication date
Jan 25, 2024
FEI Company
Maarten BISCHOFF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mechanism for Adjusting Angle of Incidence on Charged Particle Beam...
Publication number
20240029992
Publication date
Jan 25, 2024
Hitachi High-Tech Corporation
Shunichi MOTOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABERRATION CORRECTOR AND ELECTRON MICROSCOPE
Publication number
20240006148
Publication date
Jan 4, 2024
HITACHI HIGH-TECH CORPORATION
Hirokazu TAMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...
Publication number
20240006149
Publication date
Jan 4, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUSED ION BEAM SYSTEM AND METHOD
Publication number
20230420213
Publication date
Dec 28, 2023
FEI Company
Alexander HENSTRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
Publication number
20230411110
Publication date
Dec 21, 2023
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, AND...
Publication number
20230352268
Publication date
Nov 2, 2023
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Dominik Ehberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A...
Publication number
20230326706
Publication date
Oct 12, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR ALIGNING A MULTI-BEAM SYSTEM
Publication number
20230317405
Publication date
Oct 5, 2023
FEI Company
Jan STOPKA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION METHOD AND INSPECTION TOOL
Publication number
20230298850
Publication date
Sep 21, 2023
ASML NETHERLANDS B.V.
Marijke SCOTUZZI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
Publication number
20230290609
Publication date
Sep 14, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20230282441
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASUREMENT AND CORRECTION OF OPTICAL ABERRATIONS IN CHARGED PARTIC...
Publication number
20230274908
Publication date
Aug 31, 2023
FEI Company
Erik Franken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Scan Waveform Generation Method
Publication number
20230260739
Publication date
Aug 17, 2023
Hitachi High-Tech Corporation
Keisuke TANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Aberration Corrector and Electron Microscope
Publication number
20230253181
Publication date
Aug 10, 2023
JEOL Ltd.
Shigeyuki Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST A...
Publication number
20230245852
Publication date
Aug 3, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE MULTI-BEAM COLUMN, CHARGED-PARTICLE MULTI-BEAM COL...
Publication number
20230238215
Publication date
Jul 27, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...
Publication number
20230223231
Publication date
Jul 13, 2023
FEI Company
Maarten BISCHOFF
H01 - BASIC ELECTRIC ELEMENTS