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H01J2237/3156
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/3156
Curing
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Patents Grants
last 30 patents
Information
Patent Grant
Elastic fiber containing an anti-tack additive
Patent number
10,039,855
Issue date
Aug 7, 2018
INVISTA North America S.a.r.l.
James Michael Lambert
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Charging-free electron beam cure of dielectric material
Patent number
8,741,782
Issue date
Jun 3, 2014
International Business Machines Corporation
Christos D. Dimitrakopoulos
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Charging-free electron beam cure of dielectric material
Patent number
8,525,123
Issue date
Sep 3, 2013
International Business Machines Corporation
Christos D. Dimitrakopoulos
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Electron beam annealing apparatus and annealing methods using the same
Patent number
8,445,366
Issue date
May 21, 2013
Samsung Electronics Co., Ltd.
Jung-hyun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and cleaning method of the same
Patent number
8,053,747
Issue date
Nov 8, 2011
Canon Anelva Corporation
Einstein Noel Abarra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum reaction chamber with x-lamp heater
Patent number
7,777,197
Issue date
Aug 17, 2010
Applied Materials, Inc.
Amir Al-Bayati
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Structure and method to prevent charge damage from e-beam curing pr...
Patent number
7,678,586
Issue date
Mar 16, 2010
Chartered Semiconductor Manufacturing, Ltd.
Huang Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Change rate prediction method, storage medium, and substrate proces...
Patent number
7,473,567
Issue date
Jan 6, 2009
Tokyo Electron Limited
Kazuyuki Mitsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for irradiating electron beam
Patent number
7,282,726
Issue date
Oct 16, 2007
TDK Corporation
Mamoru Usami
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Electron beam irradiation apparatus, electron beam irradiation meth...
Patent number
7,205,558
Issue date
Apr 17, 2007
TDK Corporation
Kenji Yoneyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film processing method and system
Patent number
7,195,936
Issue date
Mar 27, 2007
Tokyo Electron Limited
Tadashi Onishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface processing apparatus
Patent number
7,005,660
Issue date
Feb 28, 2006
Tokyo Electron Limited
Minoru Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film-processing method and film-processing apparatus
Patent number
6,903,800
Issue date
Jun 7, 2005
Tokyo Electron Limited
Tadashi Onishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam system for treating filamentary workpiece, and method...
Patent number
6,774,381
Issue date
Aug 10, 2004
Shin-Etsu Chemical Co., Ltd.
Nobuo Kawada
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
METHODS OF POST-CURING ADDITIVE MANUFACTURING PARTS USING ELECTRON...
Publication number
20210331394
Publication date
Oct 28, 2021
FORD GLOBAL TECHNOLOGIES, L.L.C.
Christopher Michael Seubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGING-FREE ELECTRON BEAM CURE OF DIELECTRIC MATERIAL
Publication number
20120302011
Publication date
Nov 29, 2012
International Business Machines Corporation
Christos D. Dimitrakopoulos
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
ELASTIC FIBER CONTAINING AN ANTI-TACK ADDITIVE
Publication number
20110152810
Publication date
Jun 23, 2011
INVISTA NORTH AMERICA S.A.R.L.
James Michael LAMBERT
D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information
Patent Application
Electron beam annealing apparatuses and annealing methods using the...
Publication number
20100147807
Publication date
Jun 17, 2010
SAMSUNG ELECTRONICS CO., LTD.
Jung-hyun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD OF THE SAME
Publication number
20100096568
Publication date
Apr 22, 2010
Canon ANELVA Corporation
Einstein Noel ABARRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGING-FREE ELECTRON BEAM CURE OF DIELECTRIC MATERIAL
Publication number
20090181534
Publication date
Jul 16, 2009
International Business Machines Corporation
Christos D. Dimitrakopoulos
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
CHANGE RATE PREDICTION METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCES...
Publication number
20070231459
Publication date
Oct 4, 2007
TOKYO ELECTRON LIMITED
Kazuyuki MITSUOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Structure and method to prevent charge damage from e-beam curing pr...
Publication number
20070134941
Publication date
Jun 14, 2007
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
Huang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM REACTION CHAMBER WITH X-LAMP HEATER
Publication number
20060272772
Publication date
Dec 7, 2006
APPLIED MATERIALS, INC.
Amir Al-Bayati
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electron beam irradiation apparatus, electron beam irradiation meth...
Publication number
20060124869
Publication date
Jun 15, 2006
TDK Corporation
Kenji Yoneyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Film-processing method and film-processing apparatus
Publication number
20050196712
Publication date
Sep 8, 2005
Tadashi Onishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for irradiating electron beam
Publication number
20050180877
Publication date
Aug 18, 2005
Toyo Ink Mfg., Co., Ltd.
Mamoru Usami
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Electron beam irradiation apparatus, electron beam irradiation meth...
Publication number
20050161599
Publication date
Jul 28, 2005
TDK Corporation
Kenji Yoneyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Surface processing apparatus
Publication number
20040222388
Publication date
Nov 11, 2004
TOKYO ELECTRON LIMITED
Minoru Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thin film processing method and system
Publication number
20040137760
Publication date
Jul 15, 2004
TOKYO ELECTRON LIMITED
Tadashi Onishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film-processing method and film-processing apparatus
Publication number
20040131351
Publication date
Jul 8, 2004
Tadashi Onishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam system for treating filamentary workpiece, and method...
Publication number
20020008213
Publication date
Jan 24, 2002
Nobuo Kawada
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING