Dark space shields

Industry

CPC
H01J37/3441

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3441Dark space shields

Industries

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for physical vapor deposition (PVD) dielectri...
- Patent number 12,368,033
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 12,354,856
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shield cooling assembly, reaction chamber and semiconductor process...
- Patent number 12,278,096
- Issue date Apr 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas mixing method to enhance plasma
- Patent number 12,224,159
- Issue date Feb 11, 2025
- SKY TECH INC.
- Ta-Hao Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter disc for a semiconductor processing tool
- Patent number 12,215,414
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Lin Wang
- B08 - CLEANING
Information Patent Grant
Vacuum system and method to deposit a compound layer
- Patent number 12,209,302
- Issue date Jan 28, 2025
- EVATEC AG
- Kai Wenz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus, film formation method, and method for manufac...
- Patent number 12,205,805
- Issue date Jan 21, 2025
- Canon Kabushiki Kaisha
- Kazuya Demura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target and film forming apparatus
- Patent number 12,198,912
- Issue date Jan 14, 2025
- JSW AFTY CORPORATION
- Hironori Torii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming position misalignment correction method and film formi...
- Patent number 12,180,580
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Atsushi Takeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for temperature control in a substrate processing chamber
- Patent number 12,183,559
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection process kit to eliminate arcing and improve uniform g...
- Patent number 12,183,560
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mass airflow sensor and hydrocarbon trap combination
- Patent number 12,140,111
- Issue date Nov 12, 2024
- K & N Engineering, Inc.
- Kevin McClelland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for reducing misalignment between sputtering target and shield
- Patent number 12,136,543
- Issue date Nov 5, 2024
- Honeywell International Inc.
- Bo Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of SIN with CCP plasma or RPS clean
- Patent number 12,027,354
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering apparatus and method of controlling sputtering apparatus
- Patent number 12,002,667
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Masato Shinada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shielding device and thin-film-deposition equipment with the same
- Patent number 11,972,936
- Issue date Apr 30, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shielding device and thin-film-deposition equipment with the same
- Patent number 11,961,724
- Issue date Apr 16, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit having tall deposition ring for PVD chamber
- Patent number 11,961,723
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid sputter target
- Patent number 11,952,654
- Issue date Apr 9, 2024
- EVATEC AG
- Dominik Jaeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD system and collimator
- Patent number 11,952,656
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuan-Lin Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit geometry for particle reduction in PVD processes
- Patent number 11,935,732
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Adolph M. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shielding mechanism and thin-film-deposition equipment using the same
- Patent number 11,929,242
- Issue date Mar 12, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for reducing sputtering of a grounded shield...
- Patent number 11,915,917
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Alan Ritchie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shielding device and thin-film-deposition equipment with the same
- Patent number 11,898,238
- Issue date Feb 13, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus and earth shield
- Patent number 11,887,826
- Issue date Jan 30, 2024
- Kioxia Corporation
- Takashi Izumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for physical vapor deposition (PVD) dielectri...
- Patent number 11,842,890
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and film formation method
- Patent number 11,823,879
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Masato Shinada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,810,770
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DYNAMIC VACUUM SEAL SYSTEM FOR PHYSICAL VAPOR DEPOSITION SPUTTER AP...
- Publication number 20250149303
- Publication date May 8, 2025
- Tosoh SMD, Inc.
- Joseph BUCKFELLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL
- Publication number 20250137114
- Publication date May 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Lin WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20250125132
- Publication date Apr 17, 2025
- TOKYO ELECTRON LIMITED
- Naoki KUBOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mass Airflow Sensor And Hydrocarbon Trap Combination
- Publication number 20250067235
- Publication date Feb 27, 2025
- K&N Engineering, Inc.
- Kevin McClelland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MIXING METHOD TO ENHANCE PLASMA
- Publication number 20250054732
- Publication date Feb 13, 2025
- SKY TECH INC.
- TA-HAO KUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES
- Publication number 20250029820
- Publication date Jan 23, 2025
- INTEVAC, INC.
- Patrick Morse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER
- Publication number 20240242947
- Publication date Jul 18, 2024
- Applied Materials, Inc.
- David GUNTHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD SYSTEM AND COLLIMATOR
- Publication number 20240240306
- Publication date Jul 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuan-Lin Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD...
- Publication number 20240186128
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Alan RITCHIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRI...
- Publication number 20240105433
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jothilingam RAMALINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR REDUCING MISALIGNMENT BETWEEN SPUTTERING TARGET AND SHIELD
- Publication number 20240021422
- Publication date Jan 18, 2024
- Honeywell International Inc.
- Bo Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Deposition of Mental Nitrides
- Publication number 20240003000
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230411131
- Publication date Dec 21, 2023
- TOKYO ELECTRON LIMITED
- Junichi TAKEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TARGET AND FILM FORMING APPARATUS
- Publication number 20230369034
- Publication date Nov 16, 2023
- JSW AFTY CORPORATION
- Hironori TORII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR USE IN GENERATING PLASMA
- Publication number 20230352270
- Publication date Nov 2, 2023
- Dyson Technology Limited
- Sven GAUTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES
- Publication number 20230282466
- Publication date Sep 7, 2023
- SCION PLASMA LLC
- LI QIN ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
- Publication number 20230187191
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE METAL OXY-FLUORIDE COATINGS
- Publication number 20230141782
- Publication date May 11, 2023
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Temperature Control in a Substrate Processing Chamber
- Publication number 20230128611
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION
- Publication number 20230110960
- Publication date Apr 13, 2023
- K&N Engineering, Inc.
- Kevin McClelland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS, FILM FORMATION METHOD, AND METHOD FOR MANUFAC...
- Publication number 20230029343
- Publication date Jan 26, 2023
- Canon Kabushiki Kaisha
- Kazuya Demura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDING DEVICE AND THIN-FILM-DEPOSITION EQUIPMENT WITH THE SAME
- Publication number 20220415632
- Publication date Dec 29, 2022
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415636
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415637
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDING MECHANISM AND THIN-FILM-DEPOSITION EQUIPMENT USING THE SAME
- Publication number 20220415633
- Publication date Dec 29, 2022
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...
- Publication number 20220375734
- Publication date Nov 24, 2022
- Soundarrajan JEMBULINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...
- Publication number 20220375735
- Publication date Nov 24, 2022
- Soundarrajan JEMBULINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING LAYER
- Publication number 20220344133
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- HSIN-LIANG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD CHAMBER SHIELD STRUCTURE INCLUDING IMPROVED COTAING LAYER OR SH...
- Publication number 20220310372
- Publication date Sep 29, 2022
- SK HYNIX INC.
- Gwang Sun JUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Dark space shields

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and apparatus for physical vapor deposition (PVD) dielectri...

Film forming apparatus

Shield cooling assembly, reaction chamber and semiconductor process...

Gas mixing method to enhance plasma

Shutter disc for a semiconductor processing tool

Vacuum system and method to deposit a compound layer

Sputtering apparatus, film formation method, and method for manufac...

Target and film forming apparatus

Film forming position misalignment correction method and film formi...

Apparatus for temperature control in a substrate processing chamber

Gas injection process kit to eliminate arcing and improve uniform g...

Mass airflow sensor and hydrocarbon trap combination

Device for reducing misalignment between sputtering target and shield

Methods and apparatus for controlling ion fraction in physical vapo...

Cleaning of SIN with CCP plasma or RPS clean

Sputtering apparatus and method of controlling sputtering apparatus

Shielding device and thin-film-deposition equipment with the same

Shielding device and thin-film-deposition equipment with the same

Process kit having tall deposition ring for PVD chamber

Liquid sputter target

PVD system and collimator

Process kit geometry for particle reduction in PVD processes

Shielding mechanism and thin-film-deposition equipment using the same

Methods and apparatus for reducing sputtering of a grounded shield...

Cleaning of sin with CCP plasma or RPS clean

Shielding device and thin-film-deposition equipment with the same

Semiconductor manufacturing apparatus and earth shield

Methods and apparatus for physical vapor deposition (PVD) dielectri...

Film formation apparatus and film formation method

Methods and apparatus for controlling ion fraction in physical vapo...

Patents Applicationslast 30 patents

DYNAMIC VACUUM SEAL SYSTEM FOR PHYSICAL VAPOR DEPOSITION SPUTTER AP...

SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL

Substrate Processing Apparatus

Mass Airflow Sensor And Hydrocarbon Trap Combination

GAS MIXING METHOD TO ENHANCE PLASMA

ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES

PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER

PVD SYSTEM AND COLLIMATOR

METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD...

METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRI...

DEVICE FOR REDUCING MISALIGNMENT BETWEEN SPUTTERING TARGET AND SHIELD

Method and Apparatus for Deposition of Mental Nitrides

FILM FORMING APPARATUS

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

TARGET AND FILM FORMING APPARATUS

METHOD AND APPARATUS FOR USE IN GENERATING PLASMA

SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES

GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...

PROTECTIVE METAL OXY-FLUORIDE COATINGS

Apparatus for Temperature Control in a Substrate Processing Chamber

MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION

SPUTTERING APPARATUS, FILM FORMATION METHOD, AND METHOD FOR MANUFAC...

SHIELDING DEVICE AND THIN-FILM-DEPOSITION EQUIPMENT WITH THE SAME

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

SHIELDING MECHANISM AND THIN-FILM-DEPOSITION EQUIPMENT USING THE SAME

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...

METHOD FOR FORMING LAYER

PVD CHAMBER SHIELD STRUCTURE INCLUDING IMPROVED COTAING LAYER OR SH...