Depositing thin layers on selected microareas

Industry

CPC
H01J2237/31732

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31732Depositing thin layers on selected microareas

Industries

Patents Grantslast 30 patents

Information Patent Grant
Plasma micronozzle adapter
- Patent number 11,993,011
- Issue date May 28, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Eric Langlois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Depositive shielding for fiducial protection from redeposition
- Patent number 11,817,395
- Issue date Nov 14, 2023
- FEI Company
- Sean Morgan-Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanofabrication using a new class of electron beam induced surface...
- Patent number 11,377,740
- Issue date Jul 5, 2022
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing a TEM sample
- Patent number 11,315,755
- Issue date Apr 26, 2022
- Shanghai Huali Integrated Circuit Corporation
- Qiang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for repairing a photolithographic mask
- Patent number 11,256,168
- Issue date Feb 22, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating arrangement and method
- Patent number 11,021,787
- Issue date Jun 1, 2021
- VON ARDENNE Asset GmbH & Co. KG
- Carsten Deus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for plasma deposition and treatment
- Patent number 10,861,669
- Issue date Dec 8, 2020
- Peter F. Vandermeulen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle device and wiring method
- Patent number 10,808,312
- Issue date Oct 20, 2020
- HITACHI HIGH-TECH CORPORATION
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Attachment of nano-objects to beam-deposited structures
- Patent number 10,501,851
- Issue date Dec 10, 2019
- FEI Company
- Mehran Kianinia
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Adaptive beam current for high throughput patterning
- Patent number 10,415,133
- Issue date Sep 17, 2019
- FEI Company
- Aurelien Philippe Jean Maclou Botman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam-induced etching
- Patent number 10,304,658
- Issue date May 28, 2019
- FEI Company
- Aiden Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Negative ribbon ion beams from pulsed plasmas
- Patent number 10,290,470
- Issue date May 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Daniel Distaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite charged particle beam apparatus and control method thereof
- Patent number 10,249,471
- Issue date Apr 2, 2019
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle device and wiring method
- Patent number 9,963,776
- Issue date May 8, 2018
- Hitachi High-Technologies Corporation
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for structuring an object and associated particle beam system
- Patent number 9,960,012
- Issue date May 1, 2018
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for in situ substrate temperature monitoring...
- Patent number 9,945,736
- Issue date Apr 17, 2018
- Lam Research Corporation
- Enrico Magni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method and focused ion beam system
- Patent number 9,824,856
- Issue date Nov 21, 2017
- Jeol Ltd.
- Misumi Kadoi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process gas enhancement for beam treatment of a substrate
- Patent number 9,735,019
- Issue date Aug 15, 2017
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CAD-assisted TEM prep recipe creation
- Patent number 9,576,772
- Issue date Feb 21, 2017
- FEI Company
- Jason Arjavac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,556,521
- Issue date Jan 31, 2017
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,453,281
- Issue date Sep 27, 2016
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bulk deposition for tilted mill protection
- Patent number 9,412,560
- Issue date Aug 9, 2016
- FEI Company
- Stacey Stone
- G01 - MEASURING TESTING
Information Patent Grant
Low energy ion milling or deposition
- Patent number 9,206,504
- Issue date Dec 8, 2015
- FEI Company
- Johannes Jacobus Lambertus Mulders
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam-induced etching
- Patent number 9,123,506
- Issue date Sep 1, 2015
- FEI Company
- Aiden Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Beam-induced deposition of low-resistivity material
- Patent number 9,090,973
- Issue date Jul 28, 2015
- FEI Company
- Steven Randolph
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating electron beams
- Patent number 9,064,671
- Issue date Jun 23, 2015
- Arcam AB
- Ulric Ljungblad
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
High pressure charged particle beam system
- Patent number 8,921,811
- Issue date Dec 30, 2014
- FEI Company
- Milos Toth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle-beam processing using a cluster source
- Patent number 8,835,880
- Issue date Sep 16, 2014
- FEI Company
- Clive Chandler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron induced chemical etching and deposition for local circuit...
- Patent number 8,821,682
- Issue date Sep 2, 2014
- Micron Technology, Inc.
- Mark J. Williamson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...
- Publication number 20230023396
- Publication date Jan 26, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREPARING A TEM SAMPLE
- Publication number 20220068600
- Publication date Mar 3, 2022
- Shanghai Huali Integrated Circuit Corporation
- Qiang CHEN
- G01 - MEASURING TESTING
Information Patent Application
NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...
- Publication number 20200190669
- Publication date Jun 18, 2020
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coating arrangement and method
- Publication number 20200017953
- Publication date Jan 16, 2020
- VON ARDENNE Asset GmbH & Co. KG
- Carsten DEUS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGED PARTICLE DEVICE AND WIRING METHOD
- Publication number 20180216223
- Publication date Aug 2, 2018
- Hitachi High-Technologies Corporation
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20170330722
- Publication date Nov 16, 2017
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAD-ASSISTED TEM PREP RECIPE CREATION
- Publication number 20170062178
- Publication date Mar 2, 2017
- FEI Company
- Jason Arjavac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System of Creating a Symmetrical FIB Deposition
- Publication number 20150369710
- Publication date Dec 24, 2015
- FEI Company
- Scott Edward Fuller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING LAYERS
- Publication number 20150348753
- Publication date Dec 3, 2015
- SEAGATE TECHNOLOGY LLC
- Philip George Pitcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR IN SITU SUBSTRATE TEMPERATURE MONITORING...
- Publication number 20140360977
- Publication date Dec 11, 2014
- Enrico Magni
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam-Induced Etching
- Publication number 20140363978
- Publication date Dec 11, 2014
- Aiden Martin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatuses for Specimen Lift-Out and Circuit Edit Usin...
- Publication number 20140338076
- Publication date Nov 13, 2014
- NaugaNeedles, LLC
- Mehdi M. Yazdanpanah
- B82 - NANO-TECHNOLOGY
Information Patent Application
Low Energy Ion Milling or Deposition
- Publication number 20140302252
- Publication date Oct 9, 2014
- FEI Company
- Johannes Jacobus Lambertus Mulders
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR ION-ASSISTED PROCESSING
- Publication number 20140202633
- Publication date Jul 24, 2014
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR ION-ASSISTED PROCESSING
- Publication number 20140038393
- Publication date Feb 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Three Dimensional Fiducial
- Publication number 20130344292
- Publication date Dec 26, 2013
- FEI Company
- Cliff Bugge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR GENERATING ELECTRON BEAMS
- Publication number 20130300286
- Publication date Nov 14, 2013
- ARCAM AB
- Ulric Ljungblad
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Methods and Apparatuses of Using Metal Needle Arrays for Specimen L...
- Publication number 20130199034
- Publication date Aug 8, 2013
- Mehdi M. Yazdanpanah
- G01 - MEASURING TESTING
Information Patent Application
METHODS OF FORMING LAYERS
- Publication number 20130202809
- Publication date Aug 8, 2013
- SEAGATE TECHNOLOGY LLC
- Philip George Pitcher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM
- Publication number 20130134328
- Publication date May 30, 2013
- CARL ZEISS MICROSCOPY GMBH
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam-Induced Deposition of Low-Resistivity Material
- Publication number 20120308740
- Publication date Dec 6, 2012
- FEI Company
- Steven Randolph
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20120112323
- Publication date May 10, 2012
- NEXGEN SEMI HOLDING, INC.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESSING SYSTEM
- Publication number 20120091363
- Publication date Apr 19, 2012
- CARL ZEISS NTS GMBH
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR SPECIMEN FABRICATION
- Publication number 20120085924
- Publication date Apr 12, 2012
- Satoshi Tomimatsu
- G01 - MEASURING TESTING
Information Patent Application
GAS FIELD ION MICROSCOPES HAVING MULTIPLE OPERATION MODES
- Publication number 20120068067
- Publication date Mar 22, 2012
- CARL ZEISS NTS, LLC.
- Lawrence Scipioni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Beam Induced Processing Using Liquid Reactants
- Publication number 20110293847
- Publication date Dec 1, 2011
- Jeffrey Todd Hastings
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PR...
- Publication number 20110266466
- Publication date Nov 3, 2011
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PERFORMING CIRCUIT EDIT OPERATIONS WITH LOW LANDING ENE...
- Publication number 20110204263
- Publication date Aug 25, 2011
- FIBICS INCORPORATED
- Michael William Phaneuf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING SYSTEM, OBJECT MOUNT AND LASER PROCESSING METHOD
- Publication number 20110198326
- Publication date Aug 18, 2011
- CARL ZEISS NTS GMBH
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR SURFACE MODIFICATION USING CHARGED PARTICL...
- Publication number 20110186719
- Publication date Aug 4, 2011
- FIBICS INCORPORATED
- Michael William Phaneuf
- H01 - BASIC ELECTRIC ELEMENTS

Depositing thin layers on selected microareas

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma micronozzle adapter

Depositive shielding for fiducial protection from redeposition

Nanofabrication using a new class of electron beam induced surface...

Method for preparing a TEM sample

Apparatus and method for repairing a photolithographic mask

Coating arrangement and method

Methods and systems for plasma deposition and treatment

Charged particle device and wiring method

Patterned atomic layer etching and deposition using miniature-colum...

Attachment of nano-objects to beam-deposited structures

Adaptive beam current for high throughput patterning

Electron beam-induced etching

Negative ribbon ion beams from pulsed plasmas

Composite charged particle beam apparatus and control method thereof

Charged particle device and wiring method

Method for structuring an object and associated particle beam system

Methods and apparatus for in situ substrate temperature monitoring...

Deposition method and focused ion beam system

Process gas enhancement for beam treatment of a substrate

CAD-assisted TEM prep recipe creation

Precision deposition using miniature-column charged particle beam a...

Precision deposition using miniature-column charged particle beam a...

Bulk deposition for tilted mill protection

Low energy ion milling or deposition

Electron beam-induced etching

Beam-induced deposition of low-resistivity material

Method and apparatus for generating electron beams

High pressure charged particle beam system

Charged particle-beam processing using a cluster source

Electron induced chemical etching and deposition for local circuit...

Patents Applicationslast 30 patents

TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...

METHOD FOR PREPARING A TEM SAMPLE

NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...

Coating arrangement and method

CHARGED PARTICLE DEVICE AND WIRING METHOD

COMPOSITE CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF

CAD-ASSISTED TEM PREP RECIPE CREATION

Method and System of Creating a Symmetrical FIB Deposition

METHODS OF FORMING LAYERS

METHODS AND APPARATUS FOR IN SITU SUBSTRATE TEMPERATURE MONITORING...

Electron Beam-Induced Etching

Methods and Apparatuses for Specimen Lift-Out and Circuit Edit Usin...

Low Energy Ion Milling or Deposition

METHOD AND SYSTEM FOR ION-ASSISTED PROCESSING

METHOD AND SYSTEM FOR ION-ASSISTED PROCESSING

Three Dimensional Fiducial

METHOD AND APPARATUS FOR GENERATING ELECTRON BEAMS

Methods and Apparatuses of Using Metal Needle Arrays for Specimen L...

METHODS OF FORMING LAYERS

PROCESSING SYSTEM

Beam-Induced Deposition of Low-Resistivity Material

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

PROCESSING SYSTEM

METHOD AND APPARATUS FOR SPECIMEN FABRICATION

GAS FIELD ION MICROSCOPES HAVING MULTIPLE OPERATION MODES

Particle-Beam Induced Processing Using Liquid Reactants

METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PR...

METHODS FOR PERFORMING CIRCUIT EDIT OPERATIONS WITH LOW LANDING ENE...

LASER PROCESSING SYSTEM, OBJECT MOUNT AND LASER PROCESSING METHOD

APPARATUS AND METHOD FOR SURFACE MODIFICATION USING CHARGED PARTICL...