deposition by thermal evaporation

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CPC
H01L21/02269

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02269deposition by thermal evaporation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Barrier-free approach for forming contact plugs
- Patent number 11,901,229
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ching-Yi Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method, and film forming m...
- Patent number 11,784,070
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 11,610,981
- Issue date Mar 21, 2023
- Shanghai Huali Integrated Circuit Corporation
- Changhung Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping techniques
- Patent number 11,443,948
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Wolfgang Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing high electron mobility transistor and high...
- Patent number 11,430,653
- Issue date Aug 30, 2022
- Sumitomo Electric Industries, Ltd.
- Takuji Yamamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Display panel, evaporation method of luminous material and equipment
- Patent number 11,349,076
- Issue date May 31, 2022
- Wuhan China Star Optoelectronics Technology Co., Ltd.
- Wei Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier-free approach for forming contact plugs
- Patent number 11,342,225
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ching-Yi Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for loading or unloading substrate with evaporator planet
- Patent number 11,114,329
- Issue date Sep 7, 2021
- Semiconductor Components Industries, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus with overlapping deep trench and shallow trench and metho...
- Patent number 10,879,106
- Issue date Dec 29, 2020
- Texas Instruments Incorporated
- Thomas Edward Lillibridge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doped rare earth nitride materials and devices comprising same
- Patent number 10,415,153
- Issue date Sep 17, 2019
- Franck Natali
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 10,153,210
- Issue date Dec 11, 2018
- United Microelectronics Corp.
- Chun-Hao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric layer and manufacturing method of dielectric layer, and...
- Patent number 9,876,067
- Issue date Jan 23, 2018
- Japan Science and Technology Agency
- Tatsuya Shimoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal oxide TFT with improved stability and mobility
- Patent number 9,773,918
- Issue date Sep 26, 2017
- CBRITE Inc.
- Gang Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating transient semiconductor based on single-wall...
- Patent number 9,564,319
- Issue date Feb 7, 2017
- Incheon University Industry Academic Cooperation Foundation
- Sung-Hun Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen-free amorphous dielectric insulating thin films with no tu...
- Patent number 9,530,535
- Issue date Dec 27, 2016
- The United States of America, as represented by the Secretary of the Navy
- Xiao Liu
- C21 - METALLURGY OF IRON
Information Patent Grant
Processes for rapid microfabrication using thermoplastics and devic...
- Patent number 9,522,820
- Issue date Dec 20, 2016
- The Regents of the University of California
- Michelle Khine
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate processing method, substrate processing apparatus, method...
- Patent number 9,502,239
- Issue date Nov 22, 2016
- Hitachi Kokusai Electric Inc.
- Masahisa Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor substrate, eletronic device and method for manufactur...
- Patent number 9,460,965
- Issue date Oct 4, 2016
- Napra Co., Ltd
- Shigenobu Sekine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate, electronic device and method for manufactu...
- Patent number 9,230,860
- Issue date Jan 5, 2016
- Napra Co., Ltd
- Shigenobu Sekine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-step bake apparatus and method for directed self-assembly lit...
- Patent number 9,209,014
- Issue date Dec 8, 2015
- Tokyo Electron Limited
- Benjamen M. Rathsack
- B82 - NANO-TECHNOLOGY
Information Patent Grant
NH3 containing plasma nitridation of a layer of a three dimensional...
- Patent number 9,177,787
- Issue date Nov 3, 2015
- Applied Materials, Inc.
- Theresa Kramer Guarini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step bake apparatus and method for directed self-assembly lit...
- Patent number 9,136,110
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Benjamen M. Rathsack
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Enhanced electron mobility at the interface between GD2O3(100)/N-SI...
- Patent number 9,000,432
- Issue date Apr 7, 2015
- The University of North Carolina at Charlotte
- Raphael Tsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-K heterostructure
- Patent number 8,994,109
- Issue date Mar 31, 2015
- STMicroelectronics S.A.
- Clément Merckling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced electron mobility at the interface between Gd2O3(100)/N-Si...
- Patent number 8,846,506
- Issue date Sep 30, 2014
- The University of North Carolina at Charlotte
- Raphael Tsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth of single crystalline MgO on germanium
- Patent number 8,766,341
- Issue date Jul 1, 2014
- The Regents of the University of California
- Wei Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polymerized film forming method and polymerized film forming apparatus
- Patent number 8,691,338
- Issue date Apr 8, 2014
- Tokyo Electron Limited
- Yumiko Kawano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
High-k heterostructure
- Patent number 8,426,261
- Issue date Apr 23, 2013
- STMicroelectronics S.A.
- Clément Merckling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field effect transistors, methods of fabricating a carbon-insulatin...
- Patent number 8,310,014
- Issue date Nov 13, 2012
- Samsung Electronics Co., Ltd.
- David Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field effect transistors, methods of fabricating a carbon-insulatin...
- Patent number 8,084,371
- Issue date Dec 27, 2011
- Samsung Electronics Co., Ltd.
- David Seo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Barrier-Free Approach for Forming Contact Plugs
- Publication number 20240136227
- Publication date Apr 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Yi Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doping Techniques
- Publication number 20220375753
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Wolfgang Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Barrier-Free Approach for Forming Contact Plugs
- Publication number 20220277997
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Yi Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20220005712
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Keita Ichimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20220005685
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Manufacturing Semiconductor Device
- Publication number 20210408268
- Publication date Dec 30, 2021
- Shanghai Huali Integrated Circuit Corporation
- Changhung Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING HIGH ELECTRON MOBILITY TRANSISTOR AND HIGH...
- Publication number 20210104395
- Publication date Apr 8, 2021
- Sumitomo Electric Industries, Ltd.
- Takuji YAMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS WITH OVERLAPPING DEEP TRENCH AND SHALLOW TRENCH AND METHO...
- Publication number 20210090941
- Publication date Mar 25, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Thomas Edward Lillibridge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Barrier-Free Approach For Forming Contact Plugs
- Publication number 20210035861
- Publication date Feb 4, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Yi Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS WITH OVERLAPPING DEEP TRENCH AND SHALLOW TRENCH AND METHO...
- Publication number 20190259651
- Publication date Aug 22, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Thomas Edward Lillibridge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20190067118
- Publication date Feb 28, 2019
- UNITED MICROELECTRONICS CORP.
- Chun-Hao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20180358266
- Publication date Dec 13, 2018
- UNITED MICROELECTRONICS CORP.
- Chun-Hao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING TRANSIENT SEMICONDUCTOR BASED ON SINGLE-WALL...
- Publication number 20160365247
- Publication date Dec 15, 2016
- INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
- Sung-Hun JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC LAYER AND MANUFACTURING METHOD OF DIELECTRIC LAYER, AND...
- Publication number 20160284790
- Publication date Sep 29, 2016
- Tatsuya SHIMODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL OXIDE TFT WITH IMPROVED STABILITY AND MOBILITY
- Publication number 20150303311
- Publication date Oct 22, 2015
- Gang Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD...
- Publication number 20150262817
- Publication date Sep 17, 2015
- Hitachi Kokusai Electric Inc.
- Masahisa OKUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device And Method For Producing A Glass-Like Layer
- Publication number 20150014866
- Publication date Jan 15, 2015
- Simon Maus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED ELECTRON MOBILITY AT THE INTERFACE BETWEEN GD2O3(100)/N-SI...
- Publication number 20140306315
- Publication date Oct 16, 2014
- The University of North Carolina at Charlotte
- Raphael TSU
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTI-STEP BAKE APPARATUS AND METHOD FOR DIRECTED SELF-ASSEMBLY LIT...
- Publication number 20140273522
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Benjamen M. Rathsack
- B82 - NANO-TECHNOLOGY
Information Patent Application
NH3 CONTAINING PLASMA NITRIDATION OF A LAYER OF A THREE DIMENSIONAL...
- Publication number 20140273517
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- THERESA KRAMER GUARINI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STEP BAKE APPARATUS AND METHOD FOR DIRECTED SELF-ASSEMBLY LIT...
- Publication number 20140273523
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Benjamen M. Rathsack
- B82 - NANO-TECHNOLOGY
Information Patent Application
DIELECTRIC FOR CARBON-BASED NANO-DEVICES
- Publication number 20140113416
- Publication date Apr 24, 2014
- International Business Machines Corporation
- Nestor A. BOJARCZUK
- B82 - NANO-TECHNOLOGY
Information Patent Application
DIELECTRIC FOR CARBON-BASED NANO-DEVICES
- Publication number 20140001440
- Publication date Jan 2, 2014
- International Business Machines Corporation
- Nestor A. BOJARCZUK
- B82 - NANO-TECHNOLOGY
Information Patent Application
ENHANCED ELECTRON MOBILITY AT THE INTERFACE BETWEEN GD2O3(100)/N-SI...
- Publication number 20130285048
- Publication date Oct 31, 2013
- The University of North Carolina at Charlotte
- Raphael TSU
- C30 - CRYSTAL GROWTH
Information Patent Application
HIGH-K HETEROSTRUCTURE
- Publication number 20130200440
- Publication date Aug 8, 2013
- STMicroelectronics S.A.
- Clement Merckling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE, ELETRONIC DEVICE AND METHOD FOR MANUFACTUR...
- Publication number 20130075930
- Publication date Mar 28, 2013
- NAPRA CO., LTD.
- Shigenobu Sekine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Field effect transistors, methods of fabricating a carbon-insulatin...
- Publication number 20120043625
- Publication date Feb 23, 2012
- David Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLYMERIZED FILM FORMING METHOD AND POLYMERIZED FILM FORMING APPARATUS
- Publication number 20110171384
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Yumiko Kawano
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Field effect transistors, methods of fabricating a carbon-insulatin...
- Publication number 20110121409
- Publication date May 26, 2011
- SAMSUNG ELECTRONICS CO., LTD.
- David Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSES FOR RAPID MICROFABRICATION USING THERMOPLASTICS AND DEVIC...
- Publication number 20110122406
- Publication date May 26, 2011
- The Regents of the University of California.
- Michelle Khine
- B81 - MICRO-STRUCTURAL TECHNOLOGY

deposition by thermal evaporation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Barrier-free approach for forming contact plugs

Heat treatment apparatus, heat treatment method, and film forming m...

Method for manufacturing semiconductor device

Doping techniques

Method of manufacturing high electron mobility transistor and high...

Display panel, evaporation method of luminous material and equipment

Barrier-free approach for forming contact plugs

Methods for loading or unloading substrate with evaporator planet

Apparatus with overlapping deep trench and shallow trench and metho...

Doped rare earth nitride materials and devices comprising same

Semiconductor device and method for fabricating the same

Dielectric layer and manufacturing method of dielectric layer, and...

Metal oxide TFT with improved stability and mobility

Method of fabricating transient semiconductor based on single-wall...

Hydrogen-free amorphous dielectric insulating thin films with no tu...

Processes for rapid microfabrication using thermoplastics and devic...

Substrate processing method, substrate processing apparatus, method...

Semiconductor substrate, eletronic device and method for manufactur...

Semiconductor substrate, electronic device and method for manufactu...

Multi-step bake apparatus and method for directed self-assembly lit...

NH3 containing plasma nitridation of a layer of a three dimensional...

Multi-step bake apparatus and method for directed self-assembly lit...

Enhanced electron mobility at the interface between GD2O3(100)/N-SI...

High-K heterostructure

Enhanced electron mobility at the interface between Gd2O3(100)/N-Si...

Epitaxial growth of single crystalline MgO on germanium

Polymerized film forming method and polymerized film forming apparatus

High-k heterostructure

Field effect transistors, methods of fabricating a carbon-insulatin...

Field effect transistors, methods of fabricating a carbon-insulatin...

Patents Applicationslast 30 patents

Barrier-Free Approach for Forming Contact Plugs

Doping Techniques

Barrier-Free Approach for Forming Contact Plugs

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

Method for Manufacturing Semiconductor Device

METHOD OF MANUFACTURING HIGH ELECTRON MOBILITY TRANSISTOR AND HIGH...

APPARATUS WITH OVERLAPPING DEEP TRENCH AND SHALLOW TRENCH AND METHO...

Barrier-Free Approach For Forming Contact Plugs

APPARATUS WITH OVERLAPPING DEEP TRENCH AND SHALLOW TRENCH AND METHO...

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

METHOD OF FABRICATING TRANSIENT SEMICONDUCTOR BASED ON SINGLE-WALL...

DIELECTRIC LAYER AND MANUFACTURING METHOD OF DIELECTRIC LAYER, AND...

METAL OXIDE TFT WITH IMPROVED STABILITY AND MOBILITY

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD...

Semiconductor Device And Method For Producing A Glass-Like Layer

ENHANCED ELECTRON MOBILITY AT THE INTERFACE BETWEEN GD2O3(100)/N-SI...

MULTI-STEP BAKE APPARATUS AND METHOD FOR DIRECTED SELF-ASSEMBLY LIT...

NH3 CONTAINING PLASMA NITRIDATION OF A LAYER OF A THREE DIMENSIONAL...

MULTI-STEP BAKE APPARATUS AND METHOD FOR DIRECTED SELF-ASSEMBLY LIT...

DIELECTRIC FOR CARBON-BASED NANO-DEVICES

DIELECTRIC FOR CARBON-BASED NANO-DEVICES

ENHANCED ELECTRON MOBILITY AT THE INTERFACE BETWEEN GD2O3(100)/N-SI...

HIGH-K HETEROSTRUCTURE

SEMICONDUCTOR SUBSTRATE, ELETRONIC DEVICE AND METHOD FOR MANUFACTUR...

Field effect transistors, methods of fabricating a carbon-insulatin...

POLYMERIZED FILM FORMING METHOD AND POLYMERIZED FILM FORMING APPARATUS

Field effect transistors, methods of fabricating a carbon-insulatin...

PROCESSES FOR RAPID MICROFABRICATION USING THERMOPLASTICS AND DEVIC...