Deposition of carbon doped silicon oxide

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CPC
H01L21/31633

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/31633Deposition of carbon doped silicon oxide

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Patents Grantslast 30 patents

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Patents Applicationslast 30 patents

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Deposition of carbon doped silicon oxide

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing semiconductor device using the same

Low k porous SiCOH dielectric and integration with post film format...

CVD precursors

Fabrication of porogen residues free low-k materials with improved...

Process for producing silicon and oxide films from organoaminosilan...

Low temperature deposition of silicon-containing films

Hybrid dielectric material for thin film transistors

Method of forming a porous insulation film

Silicon oxycarbide, growth method of silicon oxycarbide layer, semi...

CVD precursors

Method for fabrication of semiconductor device

Method to improve mechanical strength of low-K dielectric film usin...

Airgap-containing interconnect structure with improved patternable...

Semiconductor device having silicon-diffused metal wiring layer and...

Formation of a masking layer on a dielectric region to facilitate f...

Methods of modifying interlayer adhesion

Method of fabricating semiconductor device

Semiconductor device and method for manufacturing the same

Process for producing silicon and oxide films from organoaminosilan...

Semiconductor device having insulating film with surface modificati...

Methods to mitigate plasma damage in organosilicate dielectrics

Barrier film and laminated material, container for wrapping and ima...

Methods to mitigate plasma damage in organosilicate dielectrics

Method for wet etching while forming interconnect trench in insulat...

Cancer treatment method

Method to minimize wet etch undercuts and provide pore sealing of e...

Process for manufacturing permeable dielectric films

Polymer and process for producing the same, composition for forming...

Air gap integration scheme

Semiconductor device and method of fabricating the same

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

CVD PRECURSORS

Process for Producing Silicon and Oxide Films from Organoaminosilan...

SILICON OXYCARBIDE, GROWTH METHOD OF SILICON OXYCARBIDE LAYER, SEMI...

APPARATUS FOR WET ETCHING WHILE FORMING INTERCONNECT TRENCH IN INSU...

ADHESION IMPROVEMENT FOR LOW K DIELECTRICS TO CONDUCTIVE MATERIALS

Low Temperature Deposition of Silicon-Containing Films

Formation of a Masking Layer on a Dielectric Region to Facilitate F...

LOW k POROUS SiCOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMAT...

METHODS TO MITIGATE PLASMA DAMAGE IN ORGANOSILICATE DIELECTRICS

Formation of a Masking Layer on a Dielectric Region to Facilitate F...

SILICON OXYCARBIDE, GROWTH METHOD OF SILICON OXYCARBIDE LAYER, SEMI...

METHOD OF FABRICATING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE HAVING SILICON-DIFFUSED METAL WIRING LAYER AND...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE HAVING INSULATING FILM WITH SURFACE MODIFICATI...

CANCER TREATMENT METHOD

FABRICATION OF POROGEN RESIDUES FREE LOW-K MATERIALS WITH IMPROVED...

SEMICONDUCTOR DEVICE

Cancer Treatment Method

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

METHOD FOR FORMING A DIELECTRIC FILM AND NOVEL PRECURSORS FOR IMPLE...

Process for Producing Silicon and Oxide Films from Organoaminosilan...

METHODS OF MODIFYING INTERLAYER ADHESION

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...

CVD Precursors

Hybrid Dielectric Material for Thin Film Transistors

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE