Deposition of conductive or insulating materials for electrodes

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CPC
H01L21/441

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/441Deposition of conductive or insulating materials for electrodes

Industries

Patents Grantslast 30 patents

Information Patent Grant
High voltage, low pressure plasma enhanced atomic layer deposition
- Patent number 11,935,759
- Issue date Mar 19, 2024
- Lotus Applied Technology, LLC
- Eric R. Dickey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 11,929,416
- Issue date Mar 12, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 11,923,203
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Piao Chuu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and fabricating method thereof
- Patent number 11,764,267
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices including vertical transistors, and related methods and ele...
- Patent number 11,658,246
- Issue date May 23, 2023
- Micron Technology, Inc.
- Kamal M. Karda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 11,430,666
- Issue date Aug 30, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Piao Chuu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dense redistribution layers in semiconductor packages and methods o...
- Patent number 11,417,604
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 11,393,918
- Issue date Jul 19, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical stacks of light emitting diodes and control transistors an...
- Patent number 11,362,134
- Issue date Jun 14, 2022
- Nanosys, Inc.
- Zhen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display substrate and method for preparing the same, and display de...
- Patent number 11,315,963
- Issue date Apr 26, 2022
- BOE Technology Group Co., Ltd.
- Zhen Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices having a semiconductor material that is semimetal in bulk a...
- Patent number 11,302,804
- Issue date Apr 12, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jean-Pierre Colinge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor, array substrate, display apparatus, and metho...
- Patent number 11,244,970
- Issue date Feb 8, 2022
- BOE Technology Group Co., Ltd.
- Zhonghao Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Schottky barrier diode
- Patent number 11,043,602
- Issue date Jun 22, 2021
- Tamura Corporation
- Kohei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor, array substrate, display panel and method for...
- Patent number 11,018,236
- Issue date May 25, 2021
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Tongshang Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Schottky barrier diode
- Patent number 11,011,653
- Issue date May 18, 2021
- Tamura Corporation
- Kohei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active matrix substrate, optical shutter substrate, display device,...
- Patent number 10,991,729
- Issue date Apr 27, 2021
- SHARP KABUSHIKI KAISHA
- Tohru Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide semiconductor device and method of manufacturing oxide semico...
- Patent number 10,971,634
- Issue date Apr 6, 2021
- Mitsubishi Electric Corporation
- Yohei Yuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor with multi-metal gate
- Patent number 10,910,480
- Issue date Feb 2, 2021
- Mitsubishi Electric Research Laboratories, Inc.
- Koon Hoo Teo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Copper plasma etching method and manufacturing method of display panel
- Patent number 10,910,232
- Issue date Feb 2, 2021
- Samsung Display Co., Ltd.
- Sang Gab Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor with multi-metal gate
- Patent number 10,879,368
- Issue date Dec 29, 2020
- Mitsubishi Electric Research Laboratories, Inc.
- Koon Hoo Teo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 10,879,274
- Issue date Dec 29, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and fabricating method thereof
- Patent number 10,872,955
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low resistance contact interlayer for semiconductor devices
- Patent number 10,833,187
- Issue date Nov 10, 2020
- International Business Machines Corporation
- Jeehwan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and fabricating method thereof
- Patent number 10,825,899
- Issue date Nov 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices having a semiconductor material that is semimetal in bulk a...
- Patent number 10,818,780
- Issue date Oct 27, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jean-Pierre Colinge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 10,811,521
- Issue date Oct 20, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Array substrate and display device
- Patent number 10,804,298
- Issue date Oct 13, 2020
- BOE Technology Group Co., Ltd.
- Xiaodi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin-film transistor substrate, liquid crystal display device inclu...
- Patent number 10,804,406
- Issue date Oct 13, 2020
- SHARP KABUSHIKI KAISHA
- Katsunori Misaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field effect transistor, method for manufacturing same, display ele...
- Patent number 10,748,784
- Issue date Aug 18, 2020
- Ricoh Company, Ltd.
- Sadanori Arae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor array panel and conducting structure
- Patent number 10,727,309
- Issue date Jul 28, 2020
- HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD.
- Yi-Chun Kao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING SUFFRAGE TREATME...
- Publication number 20240006190
- Publication date Jan 4, 2024
- Samsung Electronics Co., Ltd.
- Jin-Hong PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220367207
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Piao CHUU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dense Redistribution Layers in Semiconductor Packages and Methods o...
- Publication number 20220352086
- Publication date Nov 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Devices Having a Semiconductor Material That Is Semimetal in Bulk a...
- Publication number 20220238704
- Publication date Jul 28, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jean-Pierre Colinge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210328037
- Publication date Oct 21, 2021
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210202265
- Publication date Jul 1, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Piao CHUU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210184021
- Publication date Jun 17, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
- Publication number 20210074812
- Publication date Mar 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Devices Having a Semiconductor Material That Is Semimetal in Bulk a...
- Publication number 20210043756
- Publication date Feb 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jean-Pierre Colinge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY SUBSTRATE AND METHOD FOR PREPARING THE SAME, AND DISPLAY DE...
- Publication number 20210005644
- Publication date Jan 7, 2021
- BOE TECHNOLOGY GROUP CO., LTD.
- Zhen SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL STACKS OF LIGHT EMITTING DIODES AND CONTROL TRANSISTORS AN...
- Publication number 20200373349
- Publication date Nov 26, 2020
- GLO AB
- Zhen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH VOLTAGE, LOW PRESSURE PLASMA ENHANCED ATOMIC LAYER DEPOSITION
- Publication number 20200350179
- Publication date Nov 5, 2020
- Lotus Applied Technology, LLC
- Eric R. Dickey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE MATRIX SUBSTRATE, OPTICAL SHUTTER SUBSTRATE, DISPLAY DEVICE,...
- Publication number 20200328235
- Publication date Oct 15, 2020
- SHARP KABUSHIKI KAISHA
- Tohru OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microfluidic chip and manufacturing method thereof and integrated m...
- Publication number 20200319135
- Publication date Oct 8, 2020
- Shih-Kang Fan
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Transistor with Multi-Metal Gate
- Publication number 20200321443
- Publication date Oct 8, 2020
- Mitsubishi Electric Research Laboratories, Inc.
- Koon Hoo Teo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING OXIDE SEMICO...
- Publication number 20200185541
- Publication date Jun 11, 2020
- Mitsubishi Electric Corporation
- Yohei YUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20200185426
- Publication date Jun 11, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN-FILM TRANSISTOR SUBSTRATE, LIQUID CRYSTAL DISPLAY DEVICE INCLU...
- Publication number 20200135933
- Publication date Apr 30, 2020
- Sharp Kabushiki Kaisha
- Katsunori Misaki
- G02 - OPTICS
Information Patent Application
Array Substrate and Display Device
- Publication number 20200127018
- Publication date Apr 23, 2020
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaodi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES INCLUDING VERTICAL TRANSISTORS, AND RELATED METHODS AND ELE...
- Publication number 20200111919
- Publication date Apr 9, 2020
- Micron Technology, Inc.
- Kamal M. Karda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
- Publication number 20200098865
- Publication date Mar 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
- Publication number 20200098866
- Publication date Mar 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM TRANSISTOR, ARRAY SUBSTRATE, DISPLAY PANEL AND METHOD FOR...
- Publication number 20200013867
- Publication date Jan 9, 2020
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Tongshang SU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Devices Having a Semiconductor Material That Is Semimetal in Bulk a...
- Publication number 20200006535
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jean-Pierre Colinge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCHOTTKY BARRIER DIODE
- Publication number 20190363197
- Publication date Nov 28, 2019
- TAMURA CORPORATION
- Kohei SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190333758
- Publication date Oct 31, 2019
- JOLED INC.
- Motohiro TOYOTA
- B08 - CLEANING
Information Patent Application
GRAPHENE THERMAL PASTE AND MANUFACTURING METHOD THEREOF
- Publication number 20190218101
- Publication date Jul 18, 2019
- TUNGNAN UNIVERSITY
- Jen-Ching Huang
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ARRAY SUBSTRATE AND FABRICATING METHOD THEREOF
- Publication number 20190198677
- Publication date Jun 27, 2019
- Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Wei WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
- Publication number 20190165103
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH GATE SPACER HAVING PROTRUDING B...
- Publication number 20190139839
- Publication date May 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Tsun LIU
- H01 - BASIC ELECTRIC ELEMENTS

Deposition of conductive or insulating materials for electrodes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

High voltage, low pressure plasma enhanced atomic layer deposition

Semiconductor device and method for manufacturing semiconductor device

Semiconductor device and method of manufacturing semiconductor device

Semiconductor device and fabricating method thereof

Devices including vertical transistors, and related methods and ele...

Semiconductor device and method of manufacturing semiconductor device

Dense redistribution layers in semiconductor packages and methods o...

Semiconductor device and method for manufacturing semiconductor device

Vertical stacks of light emitting diodes and control transistors an...

Display substrate and method for preparing the same, and display de...

Devices having a semiconductor material that is semimetal in bulk a...

Thin film transistor, array substrate, display apparatus, and metho...

Schottky barrier diode

Thin film transistor, array substrate, display panel and method for...

Schottky barrier diode

Active matrix substrate, optical shutter substrate, display device,...

Oxide semiconductor device and method of manufacturing oxide semico...

Transistor with multi-metal gate

Copper plasma etching method and manufacturing method of display panel

Transistor with multi-metal gate

Semiconductor device

Semiconductor device and fabricating method thereof

Low resistance contact interlayer for semiconductor devices

Semiconductor device and fabricating method thereof

Devices having a semiconductor material that is semimetal in bulk a...

Semiconductor device and method for manufacturing semiconductor device

Array substrate and display device

Thin-film transistor substrate, liquid crystal display device inclu...

Field effect transistor, method for manufacturing same, display ele...

Thin film transistor array panel and conducting structure

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING SUFFRAGE TREATME...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Dense Redistribution Layers in Semiconductor Packages and Methods o...

Devices Having a Semiconductor Material That Is Semimetal in Bulk a...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF

Devices Having a Semiconductor Material That Is Semimetal in Bulk a...

DISPLAY SUBSTRATE AND METHOD FOR PREPARING THE SAME, AND DISPLAY DE...

VERTICAL STACKS OF LIGHT EMITTING DIODES AND CONTROL TRANSISTORS AN...

HIGH VOLTAGE, LOW PRESSURE PLASMA ENHANCED ATOMIC LAYER DEPOSITION

ACTIVE MATRIX SUBSTRATE, OPTICAL SHUTTER SUBSTRATE, DISPLAY DEVICE,...

Microfluidic chip and manufacturing method thereof and integrated m...

Transistor with Multi-Metal Gate

OXIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING OXIDE SEMICO...

SEMICONDUCTOR DEVICE

THIN-FILM TRANSISTOR SUBSTRATE, LIQUID CRYSTAL DISPLAY DEVICE INCLU...

Array Substrate and Display Device

DEVICES INCLUDING VERTICAL TRANSISTORS, AND RELATED METHODS AND ELE...

SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF

SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF

THIN FILM TRANSISTOR, ARRAY SUBSTRATE, DISPLAY PANEL AND METHOD FOR...

Devices Having a Semiconductor Material That Is Semimetal in Bulk a...

SCHOTTKY BARRIER DIODE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

GRAPHENE THERMAL PASTE AND MANUFACTURING METHOD THEREOF

ARRAY SUBSTRATE AND FABRICATING METHOD THEREOF

SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF

SEMICONDUCTOR DEVICE STRUCTURE WITH GATE SPACER HAVING PROTRUDING B...