Deposition of sub-layers

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CPC
C23C16/0272

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/0272Deposition of sub-layers

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Patents Grantslast 30 patents

Information Patent Grant
Surfaces for contacting a hydrocarbon fluid and methods for prepari...
- Patent number 12,116,678
- Issue date Oct 15, 2024
- General Electric Company
- Lawrence B. Kool
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Superconductor flux pinning without columnar defects
- Patent number 12,120,964
- Issue date Oct 15, 2024
- MetOx International, Inc.
- Mikhail Novozhilov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for sub-austenite transformation temperature deposition of...
- Patent number 12,110,597
- Issue date Oct 8, 2024
- Corning Incorporated
- Thomas William Brew
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Grant
Method for forming film and processing apparatus
- Patent number 12,112,943
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Keita Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of crystallizing amorphous silicon film and deposition appar...
- Patent number 12,112,947
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated cutting tool
- Patent number 12,109,627
- Issue date Oct 8, 2024
- Tungaloy Corporation
- Cangyu Fan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing method
- Patent number 12,100,578
- Issue date Sep 24, 2024
- Tokyo Electron Limited
- Sho Kumakura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Three-dimensional nano-patterns
- Patent number 12,091,745
- Issue date Sep 17, 2024
- Technion Research & Development Foundation Limited
- Tamar Segal-Peretz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microstructure control of conducting materials through surface coat...
- Patent number 12,084,763
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Marc Shull
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface-coated cutting tool
- Patent number 12,064,817
- Issue date Aug 20, 2024
- Mitsubishi Materials Corporation
- Eiji Nakamura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Metal component and method for producing same
- Patent number 12,065,729
- Issue date Aug 20, 2024
- Iwis Motorsysteme GmbH & Co. KG
- Bernd Watzinger
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Cutting tool
- Patent number 12,049,693
- Issue date Jul 30, 2024
- Sumitomo Electric Hardmetal Corp.
- Daiji Tabayashi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of forming a diamond film
- Patent number 12,037,679
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Yttrium fluoride films and methods of preparing and using yttrium f...
- Patent number 12,031,212
- Issue date Jul 9, 2024
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated tool and cutting tool
- Patent number 12,023,742
- Issue date Jul 2, 2024
- Kyocera Corporation
- Tadashi Katsuma
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Part coated with a hydrogenated amorphous carbon coating on an unde...
- Patent number 12,012,657
- Issue date Jun 18, 2024
- HYDROMECANIQUE ET FROTTEMENT
- Laurent Bombillon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chromium-enriched diffused aluminide coating
- Patent number 11,987,877
- Issue date May 21, 2024
- RTX Corporation
- Mark A. Livings
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a protective coating on processing chamber surf...
- Patent number 11,976,357
- Issue date May 7, 2024
- Applied Materials, Inc.
- Geetika Bajaj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for chemical vapour deposition
- Patent number 11,970,765
- Issue date Apr 30, 2024
- Ionautics AB
- Henrik Pedersen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor structure
- Patent number 11,942,320
- Issue date Mar 26, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Kun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated product and production method
- Patent number 11,932,937
- Issue date Mar 19, 2024
- Schunk Kohlenstofftechnik GmbH
- Karl Brennfleck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,908,736
- Issue date Feb 20, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond coating on the cone for expandable tubulars
- Patent number 11,898,422
- Issue date Feb 13, 2024
- Saudi Arabian Oil Company
- Jianhui Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a polycrystalline molybdenum film over a surfac...
- Patent number 11,898,242
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing nitride semiconductor substrate and nitrid...
- Patent number 11,873,578
- Issue date Jan 16, 2024
- Sumitomo Chemical Company, Limited
- Takehiro Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to improve adhesion and defects for tungsten carbide film
- Patent number 11,859,275
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Vivek Bharat Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimicrobial coatings
- Patent number 11,846,021
- Issue date Dec 19, 2023
- UChicago Argonne, LLC
- Anil U. Mane
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Doped or undoped silicon carbide deposition and remote hydrogen pla...
- Patent number 11,848,199
- Issue date Dec 19, 2023
- Lam Research Corporation
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck, method for producing the same, and exposure apparatus
- Patent number 11,842,918
- Issue date Dec 12, 2023
- Canon Kabushiki Kaisha
- Keiji Hirabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...
- Publication number 20240417882
- Publication date Dec 19, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIFUNCTIONAL COATING, METHOD OF MANUFACTURING THEREOF, RELATED C...
- Publication number 20240410052
- Publication date Dec 12, 2024
- Picosun Oy
- Jesse KALLIOMÄKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...
- Publication number 20240376595
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Marc Shull
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240379349
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Steven C. H. HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMATION METHOD
- Publication number 20240376601
- Publication date Nov 14, 2024
- Jusung Engineering Co., Ltd.
- Jeong HEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE MATERIAL AND METHOD OF PRODUCING THIN-FILM
- Publication number 20240360558
- Publication date Oct 31, 2024
- ADEKA CORPORATION
- Masaki ENZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CUTTING TOOL
- Publication number 20240351113
- Publication date Oct 24, 2024
- WALTER AG
- Thorsten MANNS
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND COMPOSITIONS FOR SURFACE FUNCTIONALIZATION OF OPTICAL S...
- Publication number 20240335832
- Publication date Oct 10, 2024
- InSilixa, Inc.
- Andrea Cuppoletti
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND...
- Publication number 20240327976
- Publication date Oct 3, 2024
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON S...
- Publication number 20240295020
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A TUNGSTEN CONTAINING LAYER
- Publication number 20240258109
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Xi CEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240247367
- Publication date Jul 25, 2024
- Kodusai Electric Corporation
- Koei KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFILTRATION BONDED CVD DIAMOND TO REACTION BONDED DIAMOND + SIC CO...
- Publication number 20240247366
- Publication date Jul 25, 2024
- II-VI Delaware, Inc.
- Andrew Marshall
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CUTTING TOOL
- Publication number 20240238875
- Publication date Jul 18, 2024
- AB SANDVIK COROMANT
- Linus VON FIEANDT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CUTTING TOOL
- Publication number 20240227028
- Publication date Jul 11, 2024
- AB SANDVIK COROMANT
- Linus VON FIEANDT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COATED CUTTING TOOL
- Publication number 20240217001
- Publication date Jul 4, 2024
- AB SANDVIK COROMANT
- Linus VON FIEANDT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...
- Publication number 20240222114
- Publication date Jul 4, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Claudia Fafard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION COATED PHARMACEUTICAL PACKAGING AND IMPROVE...
- Publication number 20240189184
- Publication date Jun 13, 2024
- SiO2 Medical Products, Inc.
- Ahmad Taha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AREA SELECTIVE DEPOSITION THROUGH SURFACE SILYLATION
- Publication number 20240183035
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Xinke Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYMERIC FILMS AS AN ADHESIVE PROMOTION/BUFFER LAYER AT GLASS-DIEL...
- Publication number 20240186136
- Publication date Jun 6, 2024
- Intel Corporation
- Mahdi Mohammadighaleni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIALS ENGINEERING FOR ANTI-COKING COATING STACKS
- Publication number 20240175119
- Publication date May 30, 2024
- Applied Materials, Inc.
- Sukti CHATTERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALN-BASED HARD MATERIAL LAYER ON BODIES OF METAL, HARD METAL, CERME...
- Publication number 20240158909
- Publication date May 16, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Mandy HÖHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20240153817
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...
- Publication number 20240145232
- Publication date May 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS
- Publication number 20240117490
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Amir H. TAVAKOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING ANTI-COKING PROTECTIVE COATINGS ON AEROSPACE...
- Publication number 20240076776
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Sukti CHATTERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS
- Publication number 20240071807
- Publication date Feb 29, 2024
- Canon Kabushiki Kaisha
- Keiji Hirabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS
- Publication number 20240071817
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...
- Publication number 20240068092
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Eric Christopher Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
- Publication number 20240063015
- Publication date Feb 22, 2024
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Deposition of sub-layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Surfaces for contacting a hydrocarbon fluid and methods for prepari...

Superconductor flux pinning without columnar defects

Methods for sub-austenite transformation temperature deposition of...

Method for forming film and processing apparatus

Method of crystallizing amorphous silicon film and deposition appar...

Coated cutting tool

Substrate processing method

Three-dimensional nano-patterns

Microstructure control of conducting materials through surface coat...

Surface-coated cutting tool

Metal component and method for producing same

Cutting tool

Method of forming a diamond film

Yttrium fluoride films and methods of preparing and using yttrium f...

Coated tool and cutting tool

Part coated with a hydrogenated amorphous carbon coating on an unde...

Chromium-enriched diffused aluminide coating

Methods for forming a protective coating on processing chamber surf...

Method and apparatus for chemical vapour deposition

Method of manufacturing semiconductor structure

Coated product and production method

Methods for depositing a molybdenum metal film over a dielectric su...

Diamond coating on the cone for expandable tubulars

Methods for forming a polycrystalline molybdenum film over a surfac...

Methods for depositing fluorine/carbon-free conformal tungsten

Method for manufacturing nitride semiconductor substrate and nitrid...

Techniques to improve adhesion and defects for tungsten carbide film

Antimicrobial coatings

Doped or undoped silicon carbide deposition and remote hydrogen pla...

Wafer chuck, method for producing the same, and exposure apparatus

Patents Applicationslast 30 patents

SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...

MULTIFUNCTIONAL COATING, METHOD OF MANUFACTURING THEREOF, RELATED C...

MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

THIN FILM FORMATION METHOD

REACTIVE MATERIAL AND METHOD OF PRODUCING THIN-FILM

COATED CUTTING TOOL

METHODS AND COMPOSITIONS FOR SURFACE FUNCTIONALIZATION OF OPTICAL S...

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND...

METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON S...

METHOD OF DEPOSITING A TUNGSTEN CONTAINING LAYER

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

INFILTRATION BONDED CVD DIAMOND TO REACTION BONDED DIAMOND + SIC CO...

COATED CUTTING TOOL

CUTTING TOOL

COATED CUTTING TOOL

METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...

ATOMIC LAYER DEPOSITION COATED PHARMACEUTICAL PACKAGING AND IMPROVE...

AREA SELECTIVE DEPOSITION THROUGH SURFACE SILYLATION

POLYMERIC FILMS AS AN ADHESIVE PROMOTION/BUFFER LAYER AT GLASS-DIEL...

MATERIALS ENGINEERING FOR ANTI-COKING COATING STACKS

ALN-BASED HARD MATERIAL LAYER ON BODIES OF METAL, HARD METAL, CERME...

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...

BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...

HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS

METHODS FOR DEPOSITING ANTI-COKING PROTECTIVE COATINGS ON AEROSPACE...

WAFER CHUCK, METHOD FOR PRODUCING THE SAME, AND EXPOSURE APPARATUS

ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...

DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...