Deposition types

Industry

CPC
H01L21/02617

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02617Deposition types

Industries

Patents Grantslast 30 patents

Information Patent Grant
Memory device including multiple decks of memory cells and pillars...
- Patent number 12,167,599
- Issue date Dec 10, 2024
- Darwin A. Clampitt
- G11 - INFORMATION STORAGE
Information Patent Grant
Self-assembled borophene/graphene nanoribbon mixed-dimensional hete...
- Patent number 12,116,279
- Issue date Oct 15, 2024
- Northwestern University
- Mark C. Hersam
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Single crystal semiconductor structure and method of fabricating th...
- Patent number 11,916,111
- Issue date Feb 27, 2024
- Samsung Electronics Co., Ltd.
- Junhee Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halogen free syntheses of aminosilanes by catalytic dehydrogenative...
- Patent number 11,780,859
- Issue date Oct 10, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing of semiconductor films with reduced evaporati...
- Patent number 11,735,419
- Issue date Aug 22, 2023
- The Regents of the University of California
- Christian J. Zollner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma enhanced deposition of silicon-containing films at low tempe...
- Patent number 11,640,905
- Issue date May 2, 2023
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene LHFETS (lateral heterostructure field effect transistors)...
- Patent number 11,569,367
- Issue date Jan 31, 2023
- HRL Laboratories, LLC
- Kyung-Ah Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Memory device including multiple decks of memory cells and pillars...
- Patent number 11,532,638
- Issue date Dec 20, 2022
- Micron Technology, Inc.
- Darwin A. Clampitt
- G11 - INFORMATION STORAGE
Information Patent Grant
Method semiconductor device fabrication with improved epitaxial sou...
- Patent number 11,532,728
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fu-Tsun Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single crystal semiconductor structure and method of fabricating th...
- Patent number 11,508,820
- Issue date Nov 22, 2022
- Samsung Electronics Co., Ltd.
- Junhee Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate film forming machine table and usage method
- Patent number 11,466,363
- Issue date Oct 11, 2022
- HKC CORPORATION LIMITED
- Chengliang Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Three-dimensional memory device including multi-tier moat isolation...
- Patent number 11,404,427
- Issue date Aug 2, 2022
- SanDisk Technologies LLC
- Yoshitaka Otsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halogen free syntheses of aminosilanes by catalytic dehydrogenative...
- Patent number 11,274,112
- Issue date Mar 15, 2022
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming III nitride alloys
- Patent number 11,264,238
- Issue date Mar 1, 2022
- King Abdullah University of Science and Technology
- Xiaohang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
HEMT device structure and manufacturing method thereof
- Patent number 11,222,968
- Issue date Jan 11, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Po-Chih Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of wrap-around and conducting metal oxide contacts for...
- Patent number 11,189,700
- Issue date Nov 30, 2021
- Intel Corporation
- Van H. Le
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a semiconductor chip and semiconductor chip
- Patent number 11,004,876
- Issue date May 11, 2021
- OSRAM OLED GmbH
- Christoph Eichler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods for manufacturing the same
- Patent number 10,943,790
- Issue date Mar 9, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
III-V compound semiconductors in isolation regions and method formi...
- Patent number 10,879,065
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hsin Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic device
- Patent number 10,860,129
- Issue date Dec 8, 2020
- Samsung Display Co., Ltd.
- Jaeik Lim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for semiconductor device fabrication with improved epitaxial...
- Patent number 10,804,378
- Issue date Oct 13, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fu-Tsun Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density nanotubes and nanotube devices
- Patent number 10,770,546
- Issue date Sep 8, 2020
- International Business Machines Corporation
- Choonghyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing resistivity standard sample and method for...
- Patent number 10,720,366
- Issue date Jul 21, 2020
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- G01 - MEASURING TESTING
Information Patent Grant
Two-step process for gapfilling high aspect ratio trenches with amo...
- Patent number 10,699,903
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Pramit Manna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor chip packaging structure without soldering wire, and...
- Patent number 10,665,563
- Issue date May 26, 2020
- SHENZHEN JIEJIANDA INNOVATION TECHNOLOGY CO., LTD.
- Bo Tu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light-emitting semiconductor chip and method for producing a semico...
- Patent number 10,637,211
- Issue date Apr 28, 2020
- OSRAM OLED GmbH
- Christoph Eichler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 10,522,671
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Po-Chih Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Amine substituted trisilylamine and tridisilylamine compounds and s...
- Patent number 10,501,484
- Issue date Dec 10, 2019
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Halogen free syntheses of aminosilanes by catalytic dehydrogenative...
- Patent number 10,494,387
- Issue date Dec 3, 2019
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Two-step process for gapfilling high aspect ratio trenches with amo...
- Patent number 10,460,933
- Issue date Oct 29, 2019
- Applied Materials, Inc.
- Pramit Manna
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC SUBSTRATE STRUCTURES AND METHODS OF FORMING THE SAME
- Publication number 20240339320
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Ming CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEPPED ISOLATION REGIONS
- Publication number 20240282636
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui Hung Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE CRYSTAL SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING TH...
- Publication number 20240154000
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Junhee CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER, TRANSISTOR DEVICES, POWER DEVICES, AND METHOD FOR MANUFACTU...
- Publication number 20240079233
- Publication date Mar 7, 2024
- Huawei Technologies Co., Ltd
- Gilberto Curatola
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY DEVICE INCLUDING MULTIPLE DECKS OF MEMORY CELLS AND PILLARS...
- Publication number 20230117100
- Publication date Apr 20, 2023
- Micron Technology, Inc.
- Darwin A. Clampitt
- G11 - INFORMATION STORAGE
Information Patent Application
SINGLE CRYSTAL SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING TH...
- Publication number 20230052686
- Publication date Feb 16, 2023
- Samsung Electronics Co., Ltd.
- Junhee CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ASSEMBLED BOROPHENE/GRAPHENE NANORIBBON MIXED-DIMENSIONAL HETE...
- Publication number 20230008590
- Publication date Jan 12, 2023
- Northwestern University
- Mark C. Hersam
- B82 - NANO-TECHNOLOGY
Information Patent Application
THERMOREFLECTANCE ENHANCEMENT COATINGS AND METHODS OF MAKING AND US...
- Publication number 20220404204
- Publication date Dec 22, 2022
- Georgia Tech Research Corporation
- Riley Hanus
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
LASER INDUCED FORWARD TRANSFER OF 2D MATERIALS
- Publication number 20220380901
- Publication date Dec 1, 2022
- Ioanna Zergioti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED DEPOSITION OF SILICON-CONTAINING FILMS AT LOW TEMPE...
- Publication number 20220199404
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON CVD DEPOSITION METHODS TO MITIGATE STRESS INDUCED DEFECTS
- Publication number 20220178026
- Publication date Jun 9, 2022
- Applied Materials, Inc.
- Vinayak Vishwanath HASSAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOGEN FREE SYNTHESES OF AMINOSILANES BY CATALYTIC DEHYDROGENATIVE...
- Publication number 20220153762
- Publication date May 19, 2022
- L'Air Liquide, Société Anonyme pour l'Edude et l'Exploitation des Procédés Ge...
- Antonio SANCHEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PLACING MEANS AND SUBSTRATE TREATING DEVICE
- Publication number 20210162562
- Publication date Jun 3, 2021
- Jusung Engineering Co., Ltd.
- Jong Sik KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE CRYSTAL SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING TH...
- Publication number 20210159314
- Publication date May 27, 2021
- Samsung Electronics Co., Ltd.
- Junhee CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICALLY CONDUCTIVE MATERIAL
- Publication number 20210048750
- Publication date Feb 18, 2021
- UNIVERSITY OF EXETER
- Monica Craciun
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FORMING III NITRIDE ALLOYS
- Publication number 20200402791
- Publication date Dec 24, 2020
- King Abdullah University of Science and Technology
- Xiaohang LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING OF SEMICONDUCTOR FILMS WITH REDUCED EVAPORATI...
- Publication number 20200243334
- Publication date Jul 30, 2020
- The Regents of the University of California
- Christian J. Zollner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20200144408
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- PO-CHIH CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY NANOTUBES AND NANOTUBE DEVICES
- Publication number 20200098861
- Publication date Mar 26, 2020
- International Business Machines Corporation
- Choonghyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Semiconductor Device Fabrication with Improved Epitaxial Sou...
- Publication number 20200098896
- Publication date Mar 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Fu-Tsun Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHIP PACKAGING STRUCTURE WITHOUT SOLDERING WIRE, AND...
- Publication number 20200091106
- Publication date Mar 19, 2020
- SHENZHEN JIEJIANDA INNOVATION TECHNOLOGY CO., LTD.
- BO TU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO-STEP PROCESS FOR GAPFILLING HIGH ASPECT RATIO TRENCHES WITH AMO...
- Publication number 20200051815
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- Pramit MANNA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALOGEN FREE SYNTHESES OF AMINOSILANES BY CATALYTIC DEHYDROGENATIVE...
- Publication number 20200040013
- Publication date Feb 6, 2020
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Antonio Sanchez
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD FOR PRODUCING A SEMICONDUCTOR CHIP AND SEMICONDUCTOR CHIP
- Publication number 20190355768
- Publication date Nov 21, 2019
- Osram Opto Semiconductors GmbH
- Christoph EICHLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING RESISTIVITY STANDARD SAMPLE AND METHOD FOR...
- Publication number 20190326184
- Publication date Oct 24, 2019
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka KUME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH GROWTH RATE DEPOSITION FOR GROUP III/V MATERIALS
- Publication number 20190272994
- Publication date Sep 5, 2019
- Alta Devices, Inc.
- Nikhil JAIN
- C30 - CRYSTAL GROWTH
Information Patent Application
Semiconductor Devices and Methods for Manufacturing the Same
- Publication number 20190252201
- Publication date Aug 15, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Semiconductor Device Fabrication with Improved Epitaxial...
- Publication number 20190165138
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Tsun Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Crystalline Semiconductor Growth On Amorphous And Poly-Crystalline...
- Publication number 20190051517
- Publication date Feb 14, 2019
- Tivra Corporation
- Francisco Machuca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20180374945
- Publication date Dec 27, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- PO-CHIH CHEN
- H01 - BASIC ELECTRIC ELEMENTS

Deposition types

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Memory device including multiple decks of memory cells and pillars...

Self-assembled borophene/graphene nanoribbon mixed-dimensional hete...

Single crystal semiconductor structure and method of fabricating th...

Halogen free syntheses of aminosilanes by catalytic dehydrogenative...

Method for processing of semiconductor films with reduced evaporati...

Plasma enhanced deposition of silicon-containing films at low tempe...

Graphene LHFETS (lateral heterostructure field effect transistors)...

Memory device including multiple decks of memory cells and pillars...

Method semiconductor device fabrication with improved epitaxial sou...

Single crystal semiconductor structure and method of fabricating th...

Substrate film forming machine table and usage method

Three-dimensional memory device including multi-tier moat isolation...

Halogen free syntheses of aminosilanes by catalytic dehydrogenative...

Forming III nitride alloys

HEMT device structure and manufacturing method thereof

Fabrication of wrap-around and conducting metal oxide contacts for...

Method for producing a semiconductor chip and semiconductor chip

Semiconductor devices and methods for manufacturing the same

III-V compound semiconductors in isolation regions and method formi...

Electronic device

Method for semiconductor device fabrication with improved epitaxial...

High density nanotubes and nanotube devices

Method for manufacturing resistivity standard sample and method for...

Two-step process for gapfilling high aspect ratio trenches with amo...

Semiconductor chip packaging structure without soldering wire, and...

Light-emitting semiconductor chip and method for producing a semico...

Semiconductor structure and manufacturing method thereof

Amine substituted trisilylamine and tridisilylamine compounds and s...

Halogen free syntheses of aminosilanes by catalytic dehydrogenative...

Two-step process for gapfilling high aspect ratio trenches with amo...

Patents Applicationslast 30 patents

CERAMIC SUBSTRATE STRUCTURES AND METHODS OF FORMING THE SAME

STEPPED ISOLATION REGIONS

SINGLE CRYSTAL SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING TH...

MEMBER, TRANSISTOR DEVICES, POWER DEVICES, AND METHOD FOR MANUFACTU...

MEMORY DEVICE INCLUDING MULTIPLE DECKS OF MEMORY CELLS AND PILLARS...

SINGLE CRYSTAL SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING TH...

SELF-ASSEMBLED BOROPHENE/GRAPHENE NANORIBBON MIXED-DIMENSIONAL HETE...

THERMOREFLECTANCE ENHANCEMENT COATINGS AND METHODS OF MAKING AND US...

LASER INDUCED FORWARD TRANSFER OF 2D MATERIALS

PLASMA ENHANCED DEPOSITION OF SILICON-CONTAINING FILMS AT LOW TEMPE...

CARBON CVD DEPOSITION METHODS TO MITIGATE STRESS INDUCED DEFECTS

HALOGEN FREE SYNTHESES OF AMINOSILANES BY CATALYTIC DEHYDROGENATIVE...

SUBSTRATE PLACING MEANS AND SUBSTRATE TREATING DEVICE

SINGLE CRYSTAL SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING TH...

ELECTRICALLY CONDUCTIVE MATERIAL

FORMING III NITRIDE ALLOYS

METHOD FOR PROCESSING OF SEMICONDUCTOR FILMS WITH REDUCED EVAPORATI...

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

HIGH DENSITY NANOTUBES AND NANOTUBE DEVICES

Method Semiconductor Device Fabrication with Improved Epitaxial Sou...

SEMICONDUCTOR CHIP PACKAGING STRUCTURE WITHOUT SOLDERING WIRE, AND...

TWO-STEP PROCESS FOR GAPFILLING HIGH ASPECT RATIO TRENCHES WITH AMO...

HALOGEN FREE SYNTHESES OF AMINOSILANES BY CATALYTIC DEHYDROGENATIVE...

METHOD FOR PRODUCING A SEMICONDUCTOR CHIP AND SEMICONDUCTOR CHIP

METHOD FOR MANUFACTURING RESISTIVITY STANDARD SAMPLE AND METHOD FOR...

HIGH GROWTH RATE DEPOSITION FOR GROUP III/V MATERIALS

Semiconductor Devices and Methods for Manufacturing the Same

Method for Semiconductor Device Fabrication with Improved Epitaxial...

Crystalline Semiconductor Growth On Amorphous And Poly-Crystalline...

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF