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H01J2237/2815

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2815Depth profile

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Pattern measurement device and pattern measurement method
- Patent number 12,174,551
- Issue date Dec 24, 2024
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lateral recess measurement in a semiconductor specimen
- Patent number 11,921,063
- Issue date Mar 5, 2024
- Applied Materials Israel Ltd.
- Michael Chemama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and setting assisting method
- Patent number 11,574,795
- Issue date Feb 7, 2023
- Jeol Ltd.
- Kazutaka Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evaluating an intermediate product related to a three-dimensional N...
- Patent number 11,476,081
- Issue date Oct 18, 2022
- Applied Materials Israel Ltd.
- Roman Kris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measurement device and pattern measurement method
- Patent number 11,353,798
- Issue date Jun 7, 2022
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slice depth reconstruction of charged particle images using model s...
- Patent number 11,282,670
- Issue date Mar 22, 2022
- FEI Company
- Pavel Potocek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-resolution three-dimensional profiling of features in advanced...
- Patent number 11,139,142
- Issue date Oct 5, 2021
- Applied Materials, Inc.
- Ofer Yuli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tomography-assisted TEM prep with requested intervention automation...
- Patent number 11,004,651
- Issue date May 11, 2021
- FEI Company
- Roger Louis Alvis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross sectional depth composition generation utilizing scanning ele...
- Patent number 10,830,715
- Issue date Nov 10, 2020
- International Business Machines Corporation
- Eric J. Campbell
- G01 - MEASURING TESTING
Information Patent Grant
Cross sectional depth composition generation utilizing scanning ele...
- Patent number 10,763,075
- Issue date Sep 1, 2020
- International Business Machines Corporation
- Eric J. Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image analysis apparatus and charged particle beam apparatus
- Patent number 10,724,856
- Issue date Jul 28, 2020
- HITACHI HIGH-TECH CORPORATION
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for measuring patterns
- Patent number 10,692,693
- Issue date Jun 23, 2020
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing tomographic imaging in a charged-particle micr...
- Patent number 10,573,488
- Issue date Feb 25, 2020
- FEI Company
- Ivan Lazic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tomography-assisted TEM prep with requested intervention automation...
- Patent number 10,453,646
- Issue date Oct 22, 2019
- FEI Company
- Roger Louis Alvis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing tomographic imaging in a charged-particle micr...
- Patent number 10,403,469
- Issue date Sep 3, 2019
- FEI Company
- Ivan Lazic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,020,160
- Issue date Jul 10, 2018
- Hitachi High-Technologies Corporation
- Koichi Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross sectional depth composition generation utilizing scanning ele...
- Patent number 9,928,990
- Issue date Mar 27, 2018
- International Business Machines Corporation
- Eric J. Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope system, pattern measurement method usi...
- Patent number 9,852,881
- Issue date Dec 26, 2017
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for generating parameter pattern, ion implantation method an...
- Patent number 9,697,989
- Issue date Jul 4, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample observation device
- Patent number 9,536,700
- Issue date Jan 3, 2017
- Hitachi High-Technologies Corporation
- Yasunori Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 9,472,376
- Issue date Oct 18, 2016
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- G01 - MEASURING TESTING
Information Patent Grant
Determining a state of a high aspect ratio hole using measurement r...
- Patent number 9,448,253
- Issue date Sep 20, 2016
- Applied Materials Israel Ltd.
- Konstantin Chirko
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle microscope device and method for inspecting sample...
- Patent number 9,341,584
- Issue date May 17, 2016
- Hitachi High-Technologies Corporation
- Kenji Nakahira
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional semiconductor image reconstruction apparatus and...
- Patent number 9,324,178
- Issue date Apr 26, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam system and method of operating thereof
- Patent number 9,305,740
- Issue date Apr 5, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection method and device therefor
- Patent number 9,148,631
- Issue date Sep 29, 2015
- Hitachi High-Technologies Corporation
- Makoto Ono
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Three-dimensional semiconductor image reconstruction apparatus and...
- Patent number 8,901,492
- Issue date Dec 2, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to measure step height of device using scannin...
- Patent number 8,759,763
- Issue date Jun 24, 2014
- Samsung Electronics Co., Ltd.
- Young-Hoon Sohn
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope and sample observation method
- Patent number 8,519,334
- Issue date Aug 27, 2013
- Hitachi High-Technologies Corporation
- Satoshi Tadaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combination laser and charged particle beam system
- Patent number 8,314,410
- Issue date Nov 20, 2012
- FEI Company
- Marcus Straw
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
- Publication number 20240339289
- Publication date Oct 10, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Adar Sonn-Segev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PRECISION IN STEREOSCOPIC MEASUREMENTS USING A PRE-DEPOSITION LAYER
- Publication number 20240153738
- Publication date May 9, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
- Publication number 20240094150
- Publication date Mar 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Dror Shemesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION...
- Publication number 20230298851
- Publication date Sep 21, 2023
- ASML NETHERLANDS B.V.
- Chih-Yu JEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LATERAL RECESS MEASUREMENT IN A SEMICONDUCTOR SPECIMEN
- Publication number 20230023363
- Publication date Jan 26, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Michael CHEMAMA
- G01 - MEASURING TESTING
Information Patent Application
Pattern Measurement Device and Pattern Measurement Method
- Publication number 20220260930
- Publication date Aug 18, 2022
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Apparatus and Setting Assisting Method
- Publication number 20220028654
- Publication date Jan 27, 2022
- JEOL Ltd.
- Kazutaka Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Measurement Method, Measurement System, and Computer-Readab...
- Publication number 20210404801
- Publication date Dec 30, 2021
- Ayumi DOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVALUATING AN INTERMEDIATE PRODUCT RELATED TO A THREE-DIMENSIONAL N...
- Publication number 20210066026
- Publication date Mar 4, 2021
- APPLIED MATERIALS ISRAEL LTD.
- Roman Kris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-RESOLUTION THREE-DIMENSIONAL PROFILING OF FEATURES IN ADVANCED...
- Publication number 20200373120
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Ofer YULI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Measurement Device and Pattern Measurement Method
- Publication number 20200278615
- Publication date Sep 3, 2020
- Hitachi High-Technologies Corporation
- Takuma YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOMOGRAPHY-ASSISTED TEM PREP WITH REQUESTED INTERVENTION AUTOMATION...
- Publication number 20200027692
- Publication date Jan 23, 2020
- FEI Company
- Roger Louis Alvis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PERFORMING TOMOGRAPHIC IMAGING IN A CHARGED-PARTICLE MICR...
- Publication number 20190348254
- Publication date Nov 14, 2019
- FEI Company
- Ivan Lazic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOMOGRAPHY-ASSISTED TEM PREP WITH REQUESTED INTERVENTION AUTOMATION...
- Publication number 20190139735
- Publication date May 9, 2019
- FEI Company
- Roger Louis Alvis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CROSS SECTIONAL DEPTH COMPOSITION GENERATION UTILIZING SCANNING ELE...
- Publication number 20180158649
- Publication date Jun 7, 2018
- International Business Machines Corporation
- Eric J. Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20170221672
- Publication date Aug 3, 2017
- Hitachi High-Technologies Corporation
- Koichi KURODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CROSS SECTIONAL DEPTH COMPOSITION GENERATION UTILIZING SCANNING ELE...
- Publication number 20170200583
- Publication date Jul 13, 2017
- International Business Machines Corporation
- Eric J. Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope System, Pattern Measurement Method Usi...
- Publication number 20160379798
- Publication date Dec 29, 2016
- Hitachi High-Technologies Corporation
- Chie SHISHIDO
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20150008322
- Publication date Jan 8, 2015
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THEREOF
- Publication number 20140367586
- Publication date Dec 18, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE THEREFOR
- Publication number 20130235182
- Publication date Sep 12, 2013
- Makoto Ono
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS TO MEASURE STEP HEIGHT OF DEVICE USING SCANNIN...
- Publication number 20130234021
- Publication date Sep 12, 2013
- Samsung Electronics Co., Ltd.
- Young-Hoon Sohn
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
- Publication number 20130037716
- Publication date Feb 14, 2013
- Hitachi High-Technologies Corporation
- Satoshi Tadaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE MICROSCOPE DEVICE AND METHOD FOR INSPECTING SAMPLE...
- Publication number 20120098952
- Publication date Apr 26, 2012
- Kenji Nakahira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Combination Laser and Charged Particle Beam System
- Publication number 20110248164
- Publication date Oct 13, 2011
- FEI Company
- Marcus Straw
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20090001279
- Publication date Jan 1, 2009
- Atsushi KOBARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Its System for Calibrating Measured Data Between Differe...
- Publication number 20080319696
- Publication date Dec 25, 2008
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20080116376
- Publication date May 22, 2008
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTACT OPENING METROLOGY
- Publication number 20070257191
- Publication date Nov 8, 2007
- Alexander Kadyshevitch
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20070023657
- Publication date Feb 1, 2007
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING

Depth profile

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Pattern measurement device and pattern measurement method

Lateral recess measurement in a semiconductor specimen

Charged particle beam apparatus and setting assisting method

Evaluating an intermediate product related to a three-dimensional N...

Pattern measurement device and pattern measurement method

Slice depth reconstruction of charged particle images using model s...

High-resolution three-dimensional profiling of features in advanced...

Tomography-assisted TEM prep with requested intervention automation...

Cross sectional depth composition generation utilizing scanning ele...

Cross sectional depth composition generation utilizing scanning ele...

Image analysis apparatus and charged particle beam apparatus

System and method for measuring patterns

Method of performing tomographic imaging in a charged-particle micr...

Tomography-assisted TEM prep with requested intervention automation...

Method of performing tomographic imaging in a charged-particle micr...

Charged particle beam device

Cross sectional depth composition generation utilizing scanning ele...

Scanning electron microscope system, pattern measurement method usi...

Method for generating parameter pattern, ion implantation method an...

Sample observation device

Scanning electron microscope

Determining a state of a high aspect ratio hole using measurement r...

Charged-particle microscope device and method for inspecting sample...

Three-dimensional semiconductor image reconstruction apparatus and...

Charged particle beam system and method of operating thereof

Defect inspection method and device therefor

Three-dimensional semiconductor image reconstruction apparatus and...

Method and apparatus to measure step height of device using scannin...

Scanning electron microscope and sample observation method

Combination laser and charged particle beam system

Patents Applicationslast 30 patents

FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS

PRECISION IN STEREOSCOPIC MEASUREMENTS USING A PRE-DEPOSITION LAYER

NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION...

LATERAL RECESS MEASUREMENT IN A SEMICONDUCTOR SPECIMEN

Pattern Measurement Device and Pattern Measurement Method

Charged Particle Beam Apparatus and Setting Assisting Method

Pattern Measurement Method, Measurement System, and Computer-Readab...

EVALUATING AN INTERMEDIATE PRODUCT RELATED TO A THREE-DIMENSIONAL N...

HIGH-RESOLUTION THREE-DIMENSIONAL PROFILING OF FEATURES IN ADVANCED...

Pattern Measurement Device and Pattern Measurement Method

TOMOGRAPHY-ASSISTED TEM PREP WITH REQUESTED INTERVENTION AUTOMATION...

METHOD OF PERFORMING TOMOGRAPHIC IMAGING IN A CHARGED-PARTICLE MICR...

TOMOGRAPHY-ASSISTED TEM PREP WITH REQUESTED INTERVENTION AUTOMATION...

CROSS SECTIONAL DEPTH COMPOSITION GENERATION UTILIZING SCANNING ELE...

Charged Particle Beam Device

CROSS SECTIONAL DEPTH COMPOSITION GENERATION UTILIZING SCANNING ELE...

Scanning Electron Microscope System, Pattern Measurement Method Usi...

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THEREOF

DEFECT INSPECTION METHOD AND DEVICE THEREFOR

METHOD AND APPARATUS TO MEASURE STEP HEIGHT OF DEVICE USING SCANNIN...

SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD

CHARGED-PARTICLE MICROSCOPE DEVICE AND METHOD FOR INSPECTING SAMPLE...

Combination Laser and Charged Particle Beam System

CHARGED PARTICLE BEAM APPARATUS

Method and Its System for Calibrating Measured Data Between Differe...

Charged particle beam apparatus

CONTACT OPENING METROLOGY

Charged particle beam apparatus