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H01J2237/2801

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2801Details

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Stage anti-fretting mechanism for roller bearing lifetime improvement
- Patent number 12,249,481
- Issue date Mar 11, 2025
- ASML Netherlands B.V.
- Mark Henricus Wilhelmus Van Gerven
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene based substrates for imaging
- Patent number 12,217,931
- Issue date Feb 4, 2025
- University of Kansas
- Eduardo Rosa-Molinar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detachable column unit of scanning electron microscope, and method...
- Patent number 12,217,933
- Issue date Feb 4, 2025
- COXEM CO., LTD
- Jun Hee Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for preparing a microscopic sample from a volume...
- Patent number 12,198,895
- Issue date Jan 14, 2025
- Carl Zeiss Microscopy GmbH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope having detachable column, and image ac...
- Patent number 11,978,610
- Issue date May 7, 2024
- COXEM CO., LTD
- Jun Hee Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for preparing a microscopic sample from a volume...
- Patent number 11,935,723
- Issue date Mar 19, 2024
- Carl Zeiss Microscopy GmbH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray detection apparatus and method
- Patent number 11,699,567
- Issue date Jul 11, 2023
- Jeol Ltd.
- Takanori Murano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
- Patent number 11,676,795
- Issue date Jun 13, 2023
- FEI Company
- Pavel Stejskal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Super-resolution microscopy
- Patent number 11,676,794
- Issue date Jun 13, 2023
- United Kingdom Research and Innovation
- Lin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-section observation device, and control method
- Patent number 11,600,463
- Issue date Mar 7, 2023
- Hitachi High-Tech Science Corporation
- Xin Man
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Rapid and automatic virus imaging and analysis system as well as me...
- Patent number 11,593,938
- Issue date Feb 28, 2023
- BORRIRS PTE. LTD.
- Zhongwei Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam system
- Patent number 11,562,881
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image generation method, non-transitory computer-readable medium, a...
- Patent number 11,443,917
- Issue date Sep 13, 2022
- HITACHI HIGH-TECH CORPORATION
- Chikako Abe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Imaging device capturing images of a sample including a plurality o...
- Patent number 11,417,499
- Issue date Aug 16, 2022
- HITACHI HIGH-TECH CORPORATION
- Maasa Yano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for component analysis of spectral data
- Patent number 11,373,839
- Issue date Jun 28, 2022
- FEI Company
- Petr Hlavenka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field curvature correction for multi-beam inspection systems
- Patent number 11,302,511
- Issue date Apr 12, 2022
- KLA Corporation
- Alan Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting method and detecting equipment therefor
- Patent number 11,237,414
- Issue date Feb 1, 2022
- HKC CORPORATION LIMITED
- Chung-Kuang Chien
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for determining irradiation conditions for charged particle...
- Patent number 11,232,929
- Issue date Jan 25, 2022
- HITACHI HIGH-TECH CORPORATION
- Heita Kimizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 11,164,715
- Issue date Nov 2, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam detection element, electron microscope, and transmiss...
- Patent number 11,164,718
- Issue date Nov 2, 2021
- Canon Kabushiki Kaisha
- Yukihiro Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for implementing a CD-SEM characterisation technique
- Patent number 11,055,842
- Issue date Jul 6, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Patrick Quemere
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Particle beam system and method for operating a particle beam system
- Patent number 10,984,977
- Issue date Apr 20, 2021
- Carl Zeiss Microscopy GmbH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system, image processing device and inspection method
- Patent number 10,943,762
- Issue date Mar 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Takeyoshi Ohashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Primary beam scanning apparatus and signal processing method
- Patent number 10,923,316
- Issue date Feb 16, 2021
- Jeol Ltd.
- Takanori Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 10,811,215
- Issue date Oct 20, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for operating a charged particle device with mult...
- Patent number 10,748,743
- Issue date Aug 18, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Learning based approach for aligning images acquired with different...
- Patent number 10,733,744
- Issue date Aug 4, 2020
- KLA-Tencor Corp.
- Thanh Huy Ha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,586,681
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Secondary particle detection system of scanning electron microscope
- Patent number 10,515,778
- Issue date Dec 24, 2019
- NGR Inc.
- Sumio Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object preparation device and particle beam device having an object...
- Patent number 10,483,084
- Issue date Nov 19, 2019
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS
- Publication number 20250022681
- Publication date Jan 16, 2025
- INFINEON TECHNOLOGIES AG
- Maximilian Alexander MOSER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS
- Publication number 20240404784
- Publication date Dec 5, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Itamar Shani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240242921
- Publication date Jul 18, 2024
- ASML NETHERLANDS B.V.
- Mans Johan Bertil OSTERBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...
- Publication number 20240234086
- Publication date Jul 11, 2024
- CARL ZEISS MICROSCOPY GMBH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETACHABLE COLUMN UNIT OF SCANNING ELECTRON MICROSCOPE, AND METHOD...
- Publication number 20240212978
- Publication date Jun 27, 2024
- COXEM CO.,LTD
- Jun Hee LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STROBOSCOPIC ELECTRON-BEAM SIGNAL IMAGE MAPPING
- Publication number 20230317408
- Publication date Oct 5, 2023
- Intel Corporation
- Xianghong Tong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR RECONSTRUCTING ATOMIC SPATIAL DISTRIBUTION...
- Publication number 20230317409
- Publication date Oct 5, 2023
- TSINGHUA UNIVERSITY
- Rong YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY DEVICE, PARTICLE BEAM APPARATUS HAVING A GAS SUPPLY DEVI...
- Publication number 20230215688
- Publication date Jul 6, 2023
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR AREA-WISE INSPECTING A SAMPLE VIA A MULTI-BEAM PARTICLE...
- Publication number 20230005708
- Publication date Jan 5, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE HAVING DETACHABLE COLUMN, AND IMAGE AC...
- Publication number 20220189732
- Publication date Jun 16, 2022
- COXEM CO.,LTD
- Jun Hee LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-Ray Detection Apparatus and Method
- Publication number 20220172923
- Publication date Jun 2, 2022
- JEOL Ltd.
- Takanori Murano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...
- Publication number 20220157560
- Publication date May 19, 2022
- CARL ZEISS MICROSCOPY GMBH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20220108864
- Publication date Apr 7, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RAPID AND AUTOMATIC VIRUS IMAGING AND ANALYSIS SYSTEM AS WELL AS ME...
- Publication number 20220108443
- Publication date Apr 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
STAGE ANTI-FRETTING MECHANISM FOR ROLLER BEARING LIFETIME IMPROVEMENT
- Publication number 20220084781
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Mark Henricus Wilhelmus VAN GERVEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRAPHENE BASED SUBSTRATES FOR IMAGING
- Publication number 20220068596
- Publication date Mar 3, 2022
- The University of Kansas
- Eduardo ROSA-MOLINAR
- G01 - MEASURING TESTING
Information Patent Application
SUPER-RESOLUTION MICROSCOPY
- Publication number 20210366688
- Publication date Nov 25, 2021
- UNITED KINGDOM RESEARCH AND INNOVATION
- Lin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Imaging Device
- Publication number 20210351000
- Publication date Nov 11, 2021
- Hitachi High-Tech Corporation
- Maasa YANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...
- Publication number 20210296088
- Publication date Sep 23, 2021
- FEI Company
- Pavel Stejskal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image Generation Method, Non-Transitory Computer-Readable Medium, a...
- Publication number 20210043418
- Publication date Feb 11, 2021
- HITACHI HIGH-TECH CORPORATION
- Chikako ABE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for Determining Irradiation Conditions for Charged Particle...
- Publication number 20210027981
- Publication date Jan 28, 2021
- Hitachi High-Tech Corporation
- Heita KIMIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20200411274
- Publication date Dec 31, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR OPERATING A CHARGED PARTICLE DEVICE WITH MULT...
- Publication number 20200258714
- Publication date Aug 13, 2020
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200251305
- Publication date Aug 6, 2020
- ASML NETHERLANDS B.V.
- Zhongwei CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE BEAM SYSTEM
- Publication number 20200185185
- Publication date Jun 11, 2020
- CARL ZEISS MICROSCOPY GMBH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CROSS-SECTION OBSERVATION DEVICE, AND CONTROL METHOD
- Publication number 20200111639
- Publication date Apr 9, 2020
- Hitachi High-Tech Science Corporation
- XIN MAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Primary Beam Scanning Apparatus and Signal Processing Method
- Publication number 20200090902
- Publication date Mar 19, 2020
- JEOL Ltd.
- Takanori Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20190355545
- Publication date Nov 21, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR IMPLEMENTING A CD-SEM CHARACTERISATION TECHNIQUE
- Publication number 20190318472
- Publication date Oct 17, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Patrick QUEMERE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION SYSTEM, IMAGE PROCESSING DEVICE AND INSPECTION METHOD
- Publication number 20190244783
- Publication date Aug 8, 2019
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- G06 - COMPUTING CALCULATING COUNTING

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Stage anti-fretting mechanism for roller bearing lifetime improvement

Graphene based substrates for imaging

Detachable column unit of scanning electron microscope, and method...

Method and device for preparing a microscopic sample from a volume...

Scanning electron microscope having detachable column, and image ac...

Method and device for preparing a microscopic sample from a volume...

X-ray detection apparatus and method

Charged particle beam device for inspection of a specimen with a pl...

Super-resolution microscopy

Cross-section observation device, and control method

Rapid and automatic virus imaging and analysis system as well as me...

Charged particle beam system

Image generation method, non-transitory computer-readable medium, a...

Imaging device capturing images of a sample including a plurality o...

Method and system for component analysis of spectral data

Field curvature correction for multi-beam inspection systems

Detecting method and detecting equipment therefor

Method for determining irradiation conditions for charged particle...

Charged particle beam system

Electron beam detection element, electron microscope, and transmiss...

Method for implementing a CD-SEM characterisation technique

Particle beam system and method for operating a particle beam system

Inspection system, image processing device and inspection method

Primary beam scanning apparatus and signal processing method

Charged particle beam system

Device and method for operating a charged particle device with mult...

Learning based approach for aligning images acquired with different...

Charged particle beam apparatus

Secondary particle detection system of scanning electron microscope

Object preparation device and particle beam device having an object...

Patents Applicationslast 30 patents

SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS

SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS

CHARGED PARTICLE APPARATUS AND METHOD

METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...

DETACHABLE COLUMN UNIT OF SCANNING ELECTRON MICROSCOPE, AND METHOD...

STROBOSCOPIC ELECTRON-BEAM SIGNAL IMAGE MAPPING

METHOD AND APPARATUS FOR RECONSTRUCTING ATOMIC SPATIAL DISTRIBUTION...

GAS SUPPLY DEVICE, PARTICLE BEAM APPARATUS HAVING A GAS SUPPLY DEVI...

METHOD FOR AREA-WISE INSPECTING A SAMPLE VIA A MULTI-BEAM PARTICLE...

SCANNING ELECTRON MICROSCOPE HAVING DETACHABLE COLUMN, AND IMAGE AC...

X-Ray Detection Apparatus and Method

METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...

Charged Particle Beam System

RAPID AND AUTOMATIC VIRUS IMAGING AND ANALYSIS SYSTEM AS WELL AS ME...

STAGE ANTI-FRETTING MECHANISM FOR ROLLER BEARING LIFETIME IMPROVEMENT

GRAPHENE BASED SUBSTRATES FOR IMAGING

SUPER-RESOLUTION MICROSCOPY

Imaging Device

CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...

Image Generation Method, Non-Transitory Computer-Readable Medium, a...

Method for Determining Irradiation Conditions for Charged Particle...

CHARGED PARTICLE BEAM SYSTEM

DEVICE AND METHOD FOR OPERATING A CHARGED PARTICLE DEVICE WITH MULT...

CHARGED PARTICLE BEAM APPARATUS

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE BEAM SYSTEM

CROSS-SECTION OBSERVATION DEVICE, AND CONTROL METHOD

Primary Beam Scanning Apparatus and Signal Processing Method

CHARGED PARTICLE BEAM SYSTEM

METHOD FOR IMPLEMENTING A CD-SEM CHARACTERISATION TECHNIQUE

INSPECTION SYSTEM, IMAGE PROCESSING DEVICE AND INSPECTION METHOD