TREA

Detecting exhaustion of target material

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Industry

  • CPC
  • H01J37/3479
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3479Detecting exhaustion of target material
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    BIAS MAGNETIC FIELD CONTROL METHOD, CONTROL DEVICE, AND SEMICONDUCT...
    • Publication number 20240191340
    • Publication date Jun 13, 2024
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Yujie GENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PHYSICAL VAPOR DEPOSITION PROCESS APPARATUS AND METHOD OF OPTIMIZIN...
    • Publication number 20230067466
    • Publication date Mar 2, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chen-Hung LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHO...
    • Publication number 20230026807
    • Publication date Jan 26, 2023
    • TOKYO ELECTRON LIMITED
    • Toshiharu HIRATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20210407779
    • Publication date Dec 30, 2021
    • TOKYO ELECTRON LIMITED
    • Atsushi TAKEUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SMART CHAMBER AND SMART CHAMBER COMPONENTS
    • Publication number 20190096643
    • Publication date Mar 28, 2019
    • Applied Materials, Inc.
    • Simon Nicholas BINNS
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MAGNETRON SPUTTERING DEVICE, MAGNETRON SPUTTERING APPARATUS AND MAG...
    • Publication number 20180277344
    • Publication date Sep 27, 2018
    • BOE TECHNOLOGY GROUP CO., LTD.
    • Zhongpeng TIAN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR BALANCING CONSUMPTION OF TARGETS IN PULSED DUAL MAGNETRO...
    • Publication number 20170271133
    • Publication date Sep 21, 2017
    • Advanced Energy Industries, Inc.
    • David Christie
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Multi-Magnetron Arrangement
    • Publication number 20160237555
    • Publication date Aug 18, 2016
    • Joachim Mai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20160225591
    • Publication date Aug 4, 2016
    • SPUTTERING COMPONENTS, INC.
    • Daniel Theodore Crowley
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SMART CHAMBER AND SMART CHAMBER COMPONENTS
    • Publication number 20150262798
    • Publication date Sep 17, 2015
    • Applied Materials, Inc.
    • Simon Nicholas BINNS
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20140246310
    • Publication date Sep 4, 2014
    • SPUTTERING COMPONENTS, INC.
    • Daniel Theodore Crowley
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20140246312
    • Publication date Sep 4, 2014
    • SPUTTERING COMPONENTS, INC.
    • Daniel Theodore Crowley
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    In Situ Sputtering Target Measurement
    • Publication number 20140183036
    • Publication date Jul 3, 2014
    • Intermolecular, Inc.
    • ShouQian Shao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTER GUN
    • Publication number 20130017316
    • Publication date Jan 17, 2013
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
    • Publication number 20120131784
    • Publication date May 31, 2012
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Yi-Li Hsiao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
    • Publication number 20110126397
    • Publication date Jun 2, 2011
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Yi-Li Hsiao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
    • Publication number 20070068804
    • Publication date Mar 29, 2007
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Yi-Li Hsiao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF USING A TARGET HAVING END OF SERVICE LIFE DETECTION CAPAB...
    • Publication number 20070068796
    • Publication date Mar 29, 2007
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Yi-Li Hsiao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
    • Publication number 20070068803
    • Publication date Mar 29, 2007
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Yi-Li Hsiao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...