Detecting or avoiding eroding through

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CPC
H01J37/3482

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3482Detecting or avoiding eroding through

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and program
- Patent number 12,094,700
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for detecting abnormality of thin-film deposition...
- Patent number 11,965,237
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Hao Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interchangeable magnet pack
- Patent number 11,043,365
- Issue date Jun 22, 2021
- Seagate Technology LLC
- Toon Hai Foo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interchangeable magnet pack
- Patent number 10,573,500
- Issue date Feb 25, 2020
- Seagate Technology LLC
- Toon Hai Foo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotary magnetron magnet bar and apparatus containing the same for h...
- Patent number 10,273,570
- Issue date Apr 30, 2019
- General Plasma, Inc.
- John E. Madocks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Backing plate for a sputter target, sputter target, and sputter device
- Patent number 10,060,023
- Issue date Aug 28, 2018
- Infineon Technologies AG
- Markus Fischer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 9,928,998
- Issue date Mar 27, 2018
- Canon Anelva Corporation
- Yohsuke Shibuya
- B08 - CLEANING
Information Patent Grant
Sputtering apparatus
- Patent number RE46599
- Issue date Nov 7, 2017
- SPUTTERING COMPONENTS INC.
- Daniel Theodore Crowley
Information Patent Grant
Sputtering target with reverse erosion profile surface and sputteri...
- Patent number 9,127,356
- Issue date Sep 8, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Liang Chueh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Prediction and compensation of erosion in a magnetron sputtering ta...
- Patent number 8,764,949
- Issue date Jul 1, 2014
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 8,679,306
- Issue date Mar 25, 2014
- Ulvac, Inc.
- Satoru Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for predicting and compensating erosion in a magnetron sputt...
- Patent number 8,518,220
- Issue date Aug 27, 2013
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD target with end of service life detection capability
- Patent number 8,276,648
- Issue date Oct 2, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Prediction and compensation of erosion in a magnetron sputtering ta...
- Patent number 8,133,360
- Issue date Mar 13, 2012
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD target with end of service life detection capability
- Patent number 7,891,536
- Issue date Feb 22, 2011
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and apparatus for real-time monitoring and control of sputte...
- Patent number 7,566,384
- Issue date Jul 28, 2009
- Praxair Technology, Inc.
- Cetin Cetinkaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and components thereof, and method for...
- Patent number 7,487,738
- Issue date Feb 10, 2009
- Tokyo Electron Limited
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for target lifetime
- Patent number 7,282,122
- Issue date Oct 16, 2007
- Taiwan Semiconductor Manufacturing Company
- Hui Wen Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High purity sputter targets with target end-of-life indication and...
- Patent number 7,063,773
- Issue date Jun 20, 2006
- Tosoh SMD, Inc.
- Eugene Y. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, method and system for monitoring chamber parameters asso...
- Patent number 6,974,524
- Issue date Dec 13, 2005
- Micron Technology, Inc.
- Mark A. Jaso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target and method of optimizing target profile
- Patent number 6,872,284
- Issue date Mar 29, 2005
- Tosoh SMD, Inc.
- Eugene Y. Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for measuring the profile of a metal film sputter deposition...
- Patent number 6,811,657
- Issue date Nov 2, 2004
- Micron Technology, Inc.
- Mark A. Jaso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and means for enhancing utilization of sputtering targets
- Patent number 6,702,930
- Issue date Mar 9, 2004
- Seagate Technology LLC
- Yuanda Randy Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of monitoring target/component consumption for dual use tita...
- Patent number 6,179,975
- Issue date Jan 30, 2001
- National Semiconductor Corporation
- Charles A. Dark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220178014
- Publication date Jun 9, 2022
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR DETECTING ABNORMALITY OF THIN-FILM DEPOSITION...
- Publication number 20220154330
- Publication date May 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERCHANGEABLE MAGNET PACK
- Publication number 20200234934
- Publication date Jul 23, 2020
- SEAGATE TECHNOLOGY LLC
- Toon Hai FOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTARY MAGNETRON MAGNET BAR AND APPARATUS CONTAINING THE SAME FOR H...
- Publication number 20160289820
- Publication date Oct 6, 2016
- General Plasma INc.
- JOHN E. MADOCKS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERCHANGEABLE MAGNET PACK
- Publication number 20160163521
- Publication date Jun 9, 2016
- SEAGATE TECHNOLOGY LLC
- Toon Hai Foo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In Situ Sputtering Target Measurement
- Publication number 20140183036
- Publication date Jul 3, 2014
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Prediction and compensation of erosion in a magnetron sputtering ta...
- Publication number 20130313107
- Publication date Nov 28, 2013
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20130277213
- Publication date Oct 24, 2013
- Yohsuke SHIBUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET WITH REVERSE EROSION PROFILE SURFACE AND SPUTTERI...
- Publication number 20130043120
- Publication date Feb 21, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Chia-Liang CHUEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20120175251
- Publication date Jul 12, 2012
- SPUTTERING COMPONENTS, INC.
- Daniel Theodore Crowley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Publication number 20120131784
- Publication date May 31, 2012
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Predicting and Compensating Erosion in a Magnetron Sputt...
- Publication number 20120132518
- Publication date May 31, 2012
- Applied Materials, Inc.
- KEITH A. MILLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Publication number 20110126397
- Publication date Jun 2, 2011
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC FIELD GENERATION CONTROL UNIT AND MAGNETRON SPUTTERING APP...
- Publication number 20100006423
- Publication date Jan 14, 2010
- Samsung Mobile Display Co. Ltd.
- Yun-Mo CHUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREDICTION AND COMPENSATION OF EROSION IN A MAGNETRON SPUTTERING TA...
- Publication number 20090159428
- Publication date Jun 25, 2009
- Applied Materials, Inc.
- KEITH A. MILLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering apparatus
- Publication number 20080210556
- Publication date Sep 4, 2008
- ULVAC, Inc.
- Satoru Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Publication number 20070068804
- Publication date Mar 29, 2007
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF USING A TARGET HAVING END OF SERVICE LIFE DETECTION CAPAB...
- Publication number 20070068796
- Publication date Mar 29, 2007
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Publication number 20070068803
- Publication date Mar 29, 2007
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and apparatus for real-time monitoring and control of sputte...
- Publication number 20070017800
- Publication date Jan 25, 2007
- Cetin Cetinkaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus and components thereof, and method for...
- Publication number 20060180074
- Publication date Aug 17, 2006
- TOKYO ELECTRON LIMITED
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus, method and system for monitoring chamber parameters asso...
- Publication number 20060054497
- Publication date Mar 16, 2006
- Mark A. Jaso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputter target monitoring system
- Publication number 20050236266
- Publication date Oct 27, 2005
- John E Poole
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for target lifetime
- Publication number 20050211549
- Publication date Sep 29, 2005
- Hui Wen Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for measuring the profile of a metal film sputter deposition...
- Publication number 20050023132
- Publication date Feb 3, 2005
- Mark A. Jaso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR MEASURING THE PROFILE OF A METAL FILM SPUTTER DEPOSITION...
- Publication number 20040144638
- Publication date Jul 29, 2004
- Mark A. Jaso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High purity sputter targets with target end-of-life indication and...
- Publication number 20040020769
- Publication date Feb 5, 2004
- Eugene Y Ivannov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Target and method of optimizing target profile
- Publication number 20030183506
- Publication date Oct 2, 2003
- Eugene Y Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Planar magnetron targets having target material affixed to non-plan...
- Publication number 20030178301
- Publication date Sep 25, 2003
- David Mark Lynn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Detecting or avoiding eroding through

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film forming apparatus and film forming method

Film forming method, film forming apparatus, and program

System and method for detecting abnormality of thin-film deposition...

Interchangeable magnet pack

Interchangeable magnet pack

Rotary magnetron magnet bar and apparatus containing the same for h...

Backing plate for a sputter target, sputter target, and sputter device

Sputtering apparatus

Sputtering apparatus

Sputtering target with reverse erosion profile surface and sputteri...

Prediction and compensation of erosion in a magnetron sputtering ta...

Sputtering apparatus

Method for predicting and compensating erosion in a magnetron sputt...

PVD target with end of service life detection capability

Prediction and compensation of erosion in a magnetron sputtering ta...

PVD target with end of service life detection capability

System and apparatus for real-time monitoring and control of sputte...

Plasma processing apparatus and components thereof, and method for...

Method and system for target lifetime

High purity sputter targets with target end-of-life indication and...

Apparatus, method and system for monitoring chamber parameters asso...

Target and method of optimizing target profile

Device for measuring the profile of a metal film sputter deposition...

Method and means for enhancing utilization of sputtering targets

Method of monitoring target/component consumption for dual use tita...

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND FILM FORMING METHOD

SYSTEM AND METHOD FOR DETECTING ABNORMALITY OF THIN-FILM DEPOSITION...

INTERCHANGEABLE MAGNET PACK

ROTARY MAGNETRON MAGNET BAR AND APPARATUS CONTAINING THE SAME FOR H...

INTERCHANGEABLE MAGNET PACK

In Situ Sputtering Target Measurement

Prediction and compensation of erosion in a magnetron sputtering ta...

SPUTTERING APPARATUS

SPUTTERING TARGET WITH REVERSE EROSION PROFILE SURFACE AND SPUTTERI...

SPUTTERING APPARATUS

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

Method for Predicting and Compensating Erosion in a Magnetron Sputt...

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

MAGNETIC FIELD GENERATION CONTROL UNIT AND MAGNETRON SPUTTERING APP...

PREDICTION AND COMPENSATION OF EROSION IN A MAGNETRON SPUTTERING TA...

Sputtering apparatus

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

METHOD OF USING A TARGET HAVING END OF SERVICE LIFE DETECTION CAPAB...

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

System and apparatus for real-time monitoring and control of sputte...

Plasma processing apparatus and components thereof, and method for...

Apparatus, method and system for monitoring chamber parameters asso...

Sputter target monitoring system

Method and system for target lifetime

Device for measuring the profile of a metal film sputter deposition...

DEVICE FOR MEASURING THE PROFILE OF A METAL FILM SPUTTER DEPOSITION...

High purity sputter targets with target end-of-life indication and...

Target and method of optimizing target profile

Planar magnetron targets having target material affixed to non-plan...