Detection characterized by the detecting means

Industry

CPC
H01J2237/244

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/244Detection characterized by the detecting means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle detector with gain element
- Patent number 12,230,470
- Issue date Feb 18, 2025
- ASML Netherlands B.V.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,211,668
- Issue date Jan 28, 2025
- HITACHI HIGH-TECH CORPORATION
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 12,205,792
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,205,790
- Issue date Jan 21, 2025
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring device and optical fiber strain measuring jig thereof
- Patent number 12,196,629
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Tong Wu
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for optimizing full horizontal scanned beam dis...
- Patent number 12,191,113
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and overlay misalignment measurement m...
- Patent number 12,183,541
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspecting device
- Patent number 12,176,181
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stroboscopic illumination synchronized electron detection and imaging
- Patent number 12,165,835
- Issue date Dec 10, 2024
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 12,165,834
- Issue date Dec 10, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of profiling charged-particle beams
- Patent number 12,165,836
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Maikel Robert Goosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for performing sample lift-out for highly react...
- Patent number 12,165,832
- Issue date Dec 10, 2024
- FEI Company
- Adam Stokes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Observation method by means of scanning transmission electron micro...
- Patent number 12,154,758
- Issue date Nov 26, 2024
- The University of Tokyo
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device
- Patent number 12,148,593
- Issue date Nov 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and image acquiring method
- Patent number 12,148,594
- Issue date Nov 19, 2024
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,142,457
- Issue date Nov 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus with multiple detectors and methods...
- Patent number 12,142,455
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for ion energy analysis of plasma processes
- Patent number 12,136,542
- Issue date Nov 5, 2024
- IMPEDANS LTD
- Paul Scullin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution light valve detector for detecting x-ray
- Patent number 12,130,392
- Issue date Oct 29, 2024
- Carl Zeiss X-ray Microscopy Inc.
- Xiaochao Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
- Patent number 12,100,574
- Issue date Sep 24, 2024
- KLA Corporation
- Nadav Gutman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy spectrometer with dynamic focus
- Patent number 12,100,585
- Issue date Sep 24, 2024
- FEI Company
- Arthur Reinout Hartong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 12,094,683
- Issue date Sep 17, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 12,094,980
- Issue date Sep 17, 2024
- Japan Display Inc.
- Tatsuya Toda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low open area and coupon endpoint detection
- Patent number 12,080,574
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Varoujan Chakarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
- Patent number 12,080,513
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,074,076
- Issue date Aug 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Soichiro Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 12,068,128
- Issue date Aug 20, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and inspection method
- Patent number 12,057,288
- Issue date Aug 6, 2024
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES
- Publication number 20250054740
- Publication date Feb 13, 2025
- Impedans Ltd
- Paul SCULLIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME
- Publication number 20250046562
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Apparatus and Charged Particle Beam Apparatus
- Publication number 20250046566
- Publication date Feb 6, 2025
- HITACHI HIGH-TECH CORPORATION
- Masao YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE...
- Publication number 20250046568
- Publication date Feb 6, 2025
- FEI Company
- Libor Strakoš
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...
- Publication number 20250037967
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Resolution Light Valve Detector for Detecting X-Ray
- Publication number 20250020818
- Publication date Jan 16, 2025
- Carl Zeiss X-ray Microscopy, Inc.
- Xiaochao Xu
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Determining Properties of a Substrate
- Publication number 20250012743
- Publication date Jan 9, 2025
- Eric Arno Vigen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20250006454
- Publication date Jan 2, 2025
- HITACHI HIGH-TECH CORPORATION
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...
- Publication number 20250006459
- Publication date Jan 2, 2025
- Carl Zeiss MultiSEM GmbH
- Daniel Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20250006456
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LOW OPEN AREA AND COUPON ENDPOINT DETECTION
- Publication number 20240429077
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Varoujan Chakarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRAY SUBSTRATE
- Publication number 20240429320
- Publication date Dec 26, 2024
- Japan Display Inc.
- Tatsuya TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW OPEN AREA AND COUPON ENDPOINT DETECTION
- Publication number 20240420975
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Varoujan Chakarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM MONITORING DEVICE AND ELECTRON BEAM IRRADIATION SYSTEM
- Publication number 20240420918
- Publication date Dec 19, 2024
- Hamamatsu Photonics K.K.
- Shinjiro MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...
- Publication number 20240412939
- Publication date Dec 12, 2024
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INV...
- Publication number 20240404786
- Publication date Dec 5, 2024
- Carl Zeiss SMT GMBH
- Ivo IHRKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORIENTATION TOOL FOR ELECTRON BACKSCATTER DIFFRACTION
- Publication number 20240395498
- Publication date Nov 28, 2024
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Chelsea Edge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE IMAGING SYSTEM AND USE THEREOF
- Publication number 20240382166
- Publication date Nov 21, 2024
- Rodney HERRING
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MULTIPLE ELECTRON BEAM OPTICS
- Publication number 20240387140
- Publication date Nov 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Alon Litman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...
- Publication number 20240379324
- Publication date Nov 14, 2024
- FEI Company
- Wouter Rene J. VAN DEN BROEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM SYSTEM
- Publication number 20240371598
- Publication date Nov 7, 2024
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20240371601
- Publication date Nov 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
- Publication number 20240355581
- Publication date Oct 24, 2024
- Integrated Dynamic Electron Solutions, Inc.
- Bryan Walter REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
- Publication number 20240347314
- Publication date Oct 17, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPA...
- Publication number 20240339291
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Herre Tjerk STEENSTRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE OPTICAL DEVICE
- Publication number 20240321547
- Publication date Sep 26, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20240312759
- Publication date Sep 19, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM MICROSCOPE
- Publication number 20240304412
- Publication date Sep 12, 2024
- CARL ZEISS MICROSCOPY GMBH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM MICROSCOPE
- Publication number 20240304409
- Publication date Sep 12, 2024
- CARL ZEISS MICROSCOPY GMBH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM MICROSCOPE
- Publication number 20240304410
- Publication date Sep 12, 2024
- CARL ZEISS MICROSCOPY GMBH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS

Detection characterized by the detecting means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle detector with gain element

Multiple charged-particle beam apparatus with low crosstalk

Charged particle beam device

Semiconductor charged particle detector for microscopy

Charged particle beam device

Measuring device and optical fiber strain measuring jig thereof

Systems and methods for optimizing full horizontal scanned beam dis...

Charged particle beam system and overlay misalignment measurement m...

Pattern inspecting device

Method and system of image-forming multi-electron beams

Stroboscopic illumination synchronized electron detection and imaging

Method and apparatus for Schottky TFE inspection

Systems and methods of profiling charged-particle beams

Systems and methods for performing sample lift-out for highly react...

Observation method by means of scanning transmission electron micro...

Ion beam device

Charged particle beam apparatus and image acquiring method

Charged particle beam device

Charged particle beam apparatus with multiple detectors and methods...

Apparatus for ion energy analysis of plasma processes

High resolution light valve detector for detecting x-ray

Target and algorithm to measure overlay by modeling back scattering...

Energy spectrometer with dynamic focus

Method for operating a multi-beam particle beam microscope

Semiconductor device

Low open area and coupon endpoint detection

Cross-talk cancellation in multiple charged-particle beam inspection

Plasma processing apparatus and plasma processing method

Charged particle beam system

Charged particle beam device and inspection method

Patents Applicationslast 30 patents

APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES

OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME

Optical Apparatus and Charged Particle Beam Apparatus

SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE...

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...

High Resolution Light Valve Detector for Detecting X-Ray

System and Method for Determining Properties of a Substrate

CHARGED PARTICLE BEAM DEVICE

METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

LOW OPEN AREA AND COUPON ENDPOINT DETECTION

ARRAY SUBSTRATE

LOW OPEN AREA AND COUPON ENDPOINT DETECTION

ELECTRON BEAM MONITORING DEVICE AND ELECTRON BEAM IRRADIATION SYSTEM

ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...

METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INV...

ORIENTATION TOOL FOR ELECTRON BACKSCATTER DIFFRACTION

CHARGED PARTICLE IMAGING SYSTEM AND USE THEREOF

MULTIPLE ELECTRON BEAM OPTICS

METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...

FOCUSED ION BEAM SYSTEM

Charged Particle Beam System

METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY

TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY

DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPA...

CHARGED-PARTICLE OPTICAL DEVICE

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

PARTICLE BEAM MICROSCOPE

PARTICLE BEAM MICROSCOPE

ELECTRON BEAM MICROSCOPE