Detection characterized by the detecting means

Industry

CPC
H01J2237/244

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/244Detection characterized by the detecting means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device and operation method therefor
- Patent number 11,961,701
- Issue date Apr 16, 2024
- HITACHI HIGH-TECH CORPORATION
- Tomoharu Nagashima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 11,955,310
- Issue date Apr 9, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed charged-particle beam system
- Patent number 11,942,302
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Arno Jan Bleeker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field programmable detector array
- Patent number 11,942,304
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
- Patent number 11,939,673
- Issue date Mar 26, 2024
- ASM IP Holding B.V.
- John Kevin Shugrue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and ion implantation method
- Patent number 11,923,167
- Issue date Mar 5, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector for process kit ring wear
- Patent number 11,913,777
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope device and electron beam inspection ap...
- Patent number 11,908,657
- Issue date Feb 20, 2024
- Zhongke Jingyuan Electron Limited
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for ion energy analysis of plasma processes
- Patent number 11,908,668
- Issue date Feb 20, 2024
- IMPEDANS LTD
- Paul Scullin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection and correction of system responses in real-time
- Patent number 11,894,214
- Issue date Feb 6, 2024
- KLA Corporation
- Henning Stoschus
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Device and method for measuring electron beam
- Patent number 11,874,414
- Issue date Jan 16, 2024
- Tsinghua University
- Ke Zhang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Charged particle beam device
- Patent number 11,869,745
- Issue date Jan 9, 2024
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for transferring a focus ring into processing app...
- Patent number 11,869,752
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kippei Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number RE49784
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Weiming Ren
Information Patent Grant
Backscattered electron detector, apparatus of charged-particle beam...
- Patent number 11,854,763
- Issue date Dec 26, 2023
- BORRIES PTE. LTD.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and charged particle beam device calib...
- Patent number 11,848,171
- Issue date Dec 19, 2023
- HITACHI HIGH-TECH CORPORATION
- Akio Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scintillator for charged particle beam apparatus and charged partic...
- Patent number 11,846,736
- Issue date Dec 19, 2023
- HITACHI HIGH-TECH CORPORATION
- Eri Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for event modulated electron microscopy
- Patent number 11,848,173
- Issue date Dec 19, 2023
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Bryan Walter Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement device and signal processing method
- Patent number 11,842,881
- Issue date Dec 12, 2023
- HITACHI HIGH-TECH CORPORATION
- Akio Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor detector and method of fabricating same
- Patent number 11,843,069
- Issue date Dec 12, 2023
- ASML Netherlands B.V.
- Gianpaolo Lorito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Embedded high-Z marker material and process for alignment of multil...
- Patent number 11,823,864
- Issue date Nov 21, 2023
- HRL Laboratories, LLC
- Christopher Bohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass spectrometer detector and system and method using the same
- Patent number 11,823,883
- Issue date Nov 21, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,823,861
- Issue date Nov 21, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Primary charged particle beam current measurement
- Patent number 11,817,292
- Issue date Nov 14, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System using pixelated faraday sensor
- Patent number 11,810,754
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray calibration standard object
- Patent number 11,806,800
- Issue date Nov 7, 2023
- Arcam AB
- Johan Backlund
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Dual-mode silicon photomultiplier based LiDAR
- Patent number 11,796,646
- Issue date Oct 24, 2023
- Motional AD LLC
- Geng Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-cell detector for charged particles
- Patent number 11,784,024
- Issue date Oct 10, 2023
- ASML Netherlands B.V.
- Joe Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for targeted re-examination, inner layer defect a...
- Patent number 11,774,382
- Issue date Oct 3, 2023
- Eric Arno Vigen
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 11,756,763
- Issue date Sep 12, 2023
- HITACHI HIGH-TECH CORPORATION
- Teruo Kohashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATI...
- Publication number 20240153736
- Publication date May 9, 2024
- Japan Science and Technology Agency
- Takumi SANNOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
- Publication number 20240136462
- Publication date Apr 25, 2024
- ASML NETHERLANDS B.V.
- Gianpaolo LORITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240128043
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Jurgen VAN SOEST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
- Publication number 20240128047
- Publication date Apr 18, 2024
- Hitachi High-Tech Corporation
- Masahiro YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
- Publication number 20240120172
- Publication date Apr 11, 2024
- Northwestern University
- Vinayak P. Dravid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM
- Publication number 20240096587
- Publication date Mar 21, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20240096589
- Publication date Mar 21, 2024
- ASML NETHERLANDS B.V.
- Stoyan NIHTIANOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...
- Publication number 20240096590
- Publication date Mar 21, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
- Publication number 20240096591
- Publication date Mar 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Dror Shemesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING...
- Publication number 20240096608
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Satoru TERUUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Emission Spectroscopy for Advanced Process Characterization
- Publication number 20240094056
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
- Publication number 20240087838
- Publication date Mar 14, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope and Map Display Method for Absorption...
- Publication number 20240085357
- Publication date Mar 14, 2024
- JEOL Ltd.
- Hideyuki Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...
- Publication number 20240071719
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-USE READ-OUT CIRCUITRY IN CHARGED PARTICLE DETECTION SYSTEM
- Publication number 20240055221
- Publication date Feb 15, 2024
- ASML NETHERLANDS B.V.
- Jan Louis SUNDERMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR EQUIPMENT MONITORING APPARATUS, AND SEMICONDUCTOR EQU...
- Publication number 20240055243
- Publication date Feb 15, 2024
- Samsung Electronics Co., Ltd.
- Taekjin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC DETECTOR
- Publication number 20240047173
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Matthias OBERST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection System
- Publication number 20240029994
- Publication date Jan 25, 2024
- Hitachi High-Tech Corporation
- Natsuki TSUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALYSIS DEVICE, ANALYSIS METHOD, AND ANALYSIS PROGRAM
- Publication number 20240030013
- Publication date Jan 25, 2024
- Horiba Stec, Co., Ltd.
- Miyako HADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20240014002
- Publication date Jan 11, 2024
- HITACHI HIGH-TECH CORPORATION
- Takayasu IWATSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND IMAGING METHOD
- Publication number 20230420215
- Publication date Dec 28, 2023
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
- Publication number 20230411109
- Publication date Dec 21, 2023
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Spectrometer and Analytical Method
- Publication number 20230411113
- Publication date Dec 21, 2023
- JEOL Ltd.
- Tatsuya Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SPECTROMETER CALIBRATION METHOD
- Publication number 20230402250
- Publication date Dec 14, 2023
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Paolo CATTANEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Creating Multiple Electron Beams with a Photocathode Film
- Publication number 20230395349
- Publication date Dec 7, 2023
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR INDEXING ELECTRON DIFFRACTION PATTERNS
- Publication number 20230395350
- Publication date Dec 7, 2023
- Oxford Instruments Nanotechnology Tools Limited
- Patrick Trimby
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device, Charged Particle Beam System, and Adj...
- Publication number 20230386781
- Publication date Nov 30, 2023
- HITACHI HIGH-TECH CORPORATION
- Zhao JINYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...
- Publication number 20230386785
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Analysis System
- Publication number 20230377836
- Publication date Nov 23, 2023
- Hitachi High-Tech Corporation
- Azusa KONNO
- H01 - BASIC ELECTRIC ELEMENTS

Detection characterized by the detecting means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam device and operation method therefor

Transmission charged particle microscope with an electron energy lo...

Pulsed charged-particle beam system

Field programmable detector array

Apparatus for detecting or monitoring for a chemical precursor in a...

Ion implanter and ion implantation method

Detector for process kit ring wear

Scanning electron microscope device and electron beam inspection ap...

Apparatus for ion energy analysis of plasma processes

Detection and correction of system responses in real-time

Device and method for measuring electron beam

Charged particle beam device

System and method for transferring a focus ring into processing app...

Apparatus of plural charged-particle beams

Backscattered electron detector, apparatus of charged-particle beam...

Charged particle beam device and charged particle beam device calib...

Scintillator for charged particle beam apparatus and charged partic...

Methods and systems for event modulated electron microscopy

Measurement device and signal processing method

Semiconductor detector and method of fabricating same

Embedded high-Z marker material and process for alignment of multil...

Mass spectrometer detector and system and method using the same

Charged particle beam device

Primary charged particle beam current measurement

System using pixelated faraday sensor

X-ray calibration standard object

Dual-mode silicon photomultiplier based LiDAR

Multi-cell detector for charged particles

System and method for targeted re-examination, inner layer defect a...

Scanning electron microscope

Patents Applicationslast 30 patents

ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATI...

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME

CHARGED PARTICLE APPARATUS AND METHOD

Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...

MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...

NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES

PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING...

Optical Emission Spectroscopy for Advanced Process Characterization

MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...

Scanning Electron Microscope and Map Display Method for Absorption...

CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...

DUAL-USE READ-OUT CIRCUITRY IN CHARGED PARTICLE DETECTION SYSTEM

SEMICONDUCTOR EQUIPMENT MONITORING APPARATUS, AND SEMICONDUCTOR EQU...

MONOLITHIC DETECTOR

Inspection System

ANALYSIS DEVICE, ANALYSIS METHOD, AND ANALYSIS PROGRAM

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM DEVICE AND IMAGING METHOD

METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...

Electron Spectrometer and Analytical Method

ELECTRON SPECTROMETER CALIBRATION METHOD

Creating Multiple Electron Beams with a Photocathode Film

METHOD AND SYSTEM FOR INDEXING ELECTRON DIFFRACTION PATTERNS

Charged Particle Beam Device, Charged Particle Beam System, and Adj...

SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...

Analysis System