Detector devices with moving charges in electric or magnetic fields

Industry

CPC
H01J2237/2449

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2449Detector devices with moving charges in electric or magnetic fields

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device
- Patent number 12,142,457
- Issue date Nov 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 12,094,683
- Issue date Sep 17, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF signal parameter measurement in an integrated circuit fabricatio...
- Patent number 11,994,542
- Issue date May 28, 2024
- Lam Research Corporation
- Sunil Kapoor
- G01 - MEASURING TESTING
Information Patent Grant
Detector for process kit ring wear
- Patent number 11,913,777
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for event modulated electron microscopy
- Patent number 11,848,173
- Issue date Dec 19, 2023
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Bryan Walter Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement device and signal processing method
- Patent number 11,842,881
- Issue date Dec 12, 2023
- HITACHI HIGH-TECH CORPORATION
- Akio Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 11,735,393
- Issue date Aug 22, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for charged particle detection
- Patent number 11,715,619
- Issue date Aug 1, 2023
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive sensing data integration for plasma chamber condition mo...
- Patent number 11,545,346
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impedance matching network and method with reduced memory requirements
- Patent number 11,538,662
- Issue date Dec 27, 2022
- RENO TECHNOLOGIES, INC.
- Michael Gilliam Ulrich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Impedance matching network and method with reduced memory requirements
- Patent number 11,521,831
- Issue date Dec 6, 2022
- RENO TECHNOLOGIES, INC.
- Michael Gilliam Ulrich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Image generation method, non-transitory computer-readable medium, a...
- Patent number 11,443,917
- Issue date Sep 13, 2022
- HITACHI HIGH-TECH CORPORATION
- Chikako Abe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods of inspecting samples with multiple beams of charged particles
- Patent number 11,430,631
- Issue date Aug 30, 2022
- ASML Netherlands B.V.
- Kuo-Shih Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 11,393,657
- Issue date Jul 19, 2022
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle detection system
- Patent number 11,322,333
- Issue date May 3, 2022
- EL-MUL TECHNOLOGIES LTD.
- Dmitry Shur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for charged particle detection
- Patent number 11,295,930
- Issue date Apr 5, 2022
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample inspection method and system
- Patent number 11,189,456
- Issue date Nov 30, 2021
- Universiteit Maastricht
- Paul Van Schayck
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle scanners
- Patent number 11,152,190
- Issue date Oct 19, 2021
- Decision Sciences International Corporation
- Robert D. Penny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope with composite detection system and sp...
- Patent number 11,145,487
- Issue date Oct 12, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 11,120,969
- Issue date Sep 14, 2021
- KLA Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for acquiring electron backscatter diffraction...
- Patent number 11,114,275
- Issue date Sep 7, 2021
- FEI Company
- Pavel Stejskal
- G01 - MEASURING TESTING
Information Patent Grant
Screening method and apparatus for detecting an object of interest
- Patent number 11,114,273
- Issue date Sep 7, 2021
- Wouter Arts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for charged particle beam modulation
- Patent number 11,049,689
- Issue date Jun 29, 2021
- ASML Netherlands B.V.
- Ehud Shaked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle detection system
- Patent number 11,031,210
- Issue date Jun 8, 2021
- EL-MUL TECHNOLOGIES LTD.
- Dmitry Shur
- G02 - OPTICS
Information Patent Grant
Scanning electron microscope
- Patent number 11,024,481
- Issue date Jun 1, 2021
- FEI Company
- Karel Diederick Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 11,017,981
- Issue date May 25, 2021
- HITACHI HIGH-TECH CORPORATION
- Ryo Kadoi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffraction pattern detection in a transmission charged particle mi...
- Patent number 11,004,655
- Issue date May 11, 2021
- FEI Company
- Bart Buijsse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of examining a sample using a charged particle microscope
- Patent number 11,002,692
- Issue date May 11, 2021
- FEI Company
- Tomas Tuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion plasma disintegrator
- Patent number 10,998,165
- Issue date May 4, 2021
- Bradley Nelson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,971,328
- Issue date Apr 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Takanori Kishimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20250006454
- Publication date Jan 2, 2025
- HITACHI HIGH-TECH CORPORATION
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...
- Publication number 20240412939
- Publication date Dec 12, 2024
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...
- Publication number 20240379324
- Publication date Nov 14, 2024
- FEI Company
- Wouter Rene J. VAN DEN BROEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
- Publication number 20240355581
- Publication date Oct 24, 2024
- Integrated Dynamic Electron Solutions, Inc.
- Bryan Walter REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPA...
- Publication number 20240339291
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Herre Tjerk STEENSTRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20240312759
- Publication date Sep 19, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Measuring Method and Plasma Processing Apparatus
- Publication number 20240290589
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Mitsutoshi Ashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...
- Publication number 20240272210
- Publication date Aug 15, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST...
- Publication number 20240222069
- Publication date Jul 4, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR FOR PROCESS KIT RING WEAR
- Publication number 20240183656
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20240096589
- Publication date Mar 21, 2024
- ASML NETHERLANDS B.V.
- Stoyan NIHTIANOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
- Publication number 20240096591
- Publication date Mar 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Dror Shemesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
- Publication number 20240087838
- Publication date Mar 14, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-USE READ-OUT CIRCUITRY IN CHARGED PARTICLE DETECTION SYSTEM
- Publication number 20240055221
- Publication date Feb 15, 2024
- ASML NETHERLANDS B.V.
- Jan Louis SUNDERMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR EQUIPMENT MONITORING APPARATUS, AND SEMICONDUCTOR EQU...
- Publication number 20240055243
- Publication date Feb 15, 2024
- Samsung Electronics Co., Ltd.
- Taekjin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC DETECTOR
- Publication number 20240047173
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Matthias OBERST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device, Charged Particle Beam System, and Adj...
- Publication number 20230386781
- Publication date Nov 30, 2023
- HITACHI HIGH-TECH CORPORATION
- Zhao JINYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Specimen Observation Method
- Publication number 20230343549
- Publication date Oct 26, 2023
- Hitachi High-Tech Corporation
- Masahiro FUKUTA
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
- Publication number 20230343568
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Yaoling Pan
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD AND IMAGE
- Publication number 20230304949
- Publication date Sep 28, 2023
- ASML NETHERLANDS B.V.
- Roy Ramon VEENSTRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION...
- Publication number 20230298851
- Publication date Sep 21, 2023
- ASML NETHERLANDS B.V.
- Chih-Yu JEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBSERVATION SYSTEM, OBSERVATION METHOD, AND PROGRAM
- Publication number 20230238210
- Publication date Jul 27, 2023
- HITACHI HIGH-TECH CORPORATION
- Hiroaki KASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20230215686
- Publication date Jul 6, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE
- Publication number 20230170179
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING
- Publication number 20230145436
- Publication date May 11, 2023
- DIRECT ELECTRON, LP
- Benjamin BAMMES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
- Publication number 20230103165
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, AND METHOD AND PROGRAM FOR CONTROLLING...
- Publication number 20230013805
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Yusuke SAITOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION
- Publication number 20220375716
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220367147
- Publication date Nov 17, 2022
- Hitachi High-Tech Corporation
- Takahiro NISHIHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT DEVICE AND SIGNAL PROCESSING METHOD
- Publication number 20220068597
- Publication date Mar 3, 2022
- Hitachi High-Tech Corporation
- Akio Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS

Detector devices with moving charges in electric or magnetic fields

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam device

Method for operating a multi-beam particle beam microscope

RF signal parameter measurement in an integrated circuit fabricatio...

Detector for process kit ring wear

Methods and systems for event modulated electron microscopy

Measurement device and signal processing method

Method for operating a multi-beam particle beam microscope

Method and apparatus for charged particle detection

Capacitive sensing data integration for plasma chamber condition mo...

Impedance matching network and method with reduced memory requirements

Impedance matching network and method with reduced memory requirements

Image generation method, non-transitory computer-readable medium, a...

Methods of inspecting samples with multiple beams of charged particles

Electron beam device

Charged particle detection system

Method and apparatus for charged particle detection

Sample inspection method and system

Charged particle scanners

Scanning electron microscope with composite detection system and sp...

Method and system for charged particle microscopy with improved ima...

Methods and systems for acquiring electron backscatter diffraction...

Screening method and apparatus for detecting an object of interest

Systems and methods for charged particle beam modulation

Charged particle detection system

Scanning electron microscope

Charged particle beam system

Diffraction pattern detection in a transmission charged particle mi...

Method of examining a sample using a charged particle microscope

Ion plasma disintegrator

Charged particle beam device

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE

ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...

METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...

METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY

DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPA...

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

Plasma Measuring Method and Plasma Processing Apparatus

RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST...

DETECTOR FOR PROCESS KIT RING WEAR

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES

MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...

DUAL-USE READ-OUT CIRCUITRY IN CHARGED PARTICLE DETECTION SYSTEM

SEMICONDUCTOR EQUIPMENT MONITORING APPARATUS, AND SEMICONDUCTOR EQU...

MONOLITHIC DETECTOR

Charged Particle Beam Device, Charged Particle Beam System, and Adj...

Charged Particle Beam Device and Specimen Observation Method

CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD AND IMAGE

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION...

OBSERVATION SYSTEM, OBSERVATION METHOD, AND PROGRAM

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE

METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING

CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...

PLASMA PROCESSING APPARATUS, AND METHOD AND PROGRAM FOR CONTROLLING...

METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION

CHARGED PARTICLE BEAM DEVICE

MEASUREMENT DEVICE AND SIGNAL PROCESSING METHOD