Devices at or outside the perimeter of the substrate support

Industry

CPC
C23C16/4585

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4585Devices at or outside the perimeter of the substrate support

Industries

Patents Grantslast 30 patents

Information Patent Grant
Continuous liner for use in a processing chamber
- Patent number 12,163,218
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for introducing an optical lens into a turning...
- Patent number 12,129,540
- Issue date Oct 29, 2024
- Carl Zeiss Vision International GmbH
- Frank Macionczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber and exhaust liner system therefor
- Patent number 12,110,585
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Naman Apurva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor arrangement of a CVD reactor
- Patent number 12,110,591
- Issue date Oct 8, 2024
- Aixtron SE
- Francisco Ruda Y Witt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition ring for thin substrate handling via edge clamping
- Patent number 12,100,579
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Abhishek Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetrical sealing and gas flow control device
- Patent number 12,094,730
- Issue date Sep 17, 2024
- Samsung Electronics Co., Ltd.
- June Hee Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-stage pumping liner
- Patent number 12,068,144
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Mingle Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 12,068,139
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Shin Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicathode deposition system and methods
- Patent number 12,051,576
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Sanjay Bhat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing chamber and process gas flow deflector for use...
- Patent number 12,018,369
- Issue date Jun 25, 2024
- Infineon Technologies AG
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic coated quartz lid for processing chamber
- Patent number 12,009,178
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Bernard L. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 12,000,048
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin substrate handling via edge clamping
- Patent number 11,996,315
- Issue date May 28, 2024
- Applied Materials, Inc.
- Abhishek Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purge ring for pedestal assembly
- Patent number 11,976,363
- Issue date May 7, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit having tall deposition ring for PVD chamber
- Patent number 11,961,723
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chambers and methods for cleaning the same
- Patent number 11,952,660
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,952,663
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,946,158
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving thermal chemical vapor depositi...
- Patent number 11,939,675
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for backside deposition of a substrate
- Patent number 11,908,728
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor with ring to limit backside deposition
- Patent number 11,885,019
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ apparatus for semiconductor process module
- Patent number 11,887,879
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support cover for high-temperature corrosive environment
- Patent number 11,866,821
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Shuran Sheng
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vapor deposition device and method for manufacturing epitaxial sili...
- Patent number 11,846,039
- Issue date Dec 19, 2023
- Sumco Corporation
- Kazuhiro Narahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,827,980
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor process chamber including lower volume upper dome
- Patent number 11,821,106
- Issue date Nov 21, 2023
- Samsung Electronics Co., Ltd.
- Keum Seok Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous liner for use in a processing chamber
- Patent number 11,814,724
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier ring used in a deposition chamber
- Patent number 11,795,544
- Issue date Oct 24, 2023
- United Semiconductor (Xiamen) Co., Ltd.
- Min-Fu Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...
- Publication number 20240404861
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- SUSHIM KOSHTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...
- Publication number 20240392441
- Publication date Nov 28, 2024
- AIXTRON SE
- Jared Lee HOLZWARTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDE-BASED WAFER CHEMICAL VAPOR DEPOSITION DEVICE AND DEPOSITION...
- Publication number 20240384415
- Publication date Nov 21, 2024
- INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD.
- Tinglin YOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF SUBSTRATE PROCESSING AND METHODS OF MANUFACTURING SEMICO...
- Publication number 20240376600
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tsung-Cheng WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240371609
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Shin MATSUURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF
- Publication number 20240371676
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiqiang TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COOLING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240309509
- Publication date Sep 19, 2024
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, ASSEMBLY AND SYSTEM FOR FILM DEPOSITION AND CONTROL
- Publication number 20240258154
- Publication date Aug 1, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME
- Publication number 20240247371
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER
- Publication number 20240242947
- Publication date Jul 18, 2024
- Applied Materials, Inc.
- David GUNTHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER HAVING SHUTTER COVER FOR SUBSTRATE UNIFORMITY AND P...
- Publication number 20240240322
- Publication date Jul 18, 2024
- Abhishek CHOWDHURY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHADOW RING ALIGNMENT FOR SUBSTRATE SUPPORT
- Publication number 20240203703
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Vinayakaraddy GULABAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES
- Publication number 20240200191
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Christopher GAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE
- Publication number 20240194516
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIG...
- Publication number 20240175134
- Publication date May 30, 2024
- LAM RESEARCH CORPORATION
- Gary B. LIND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20240167160
- Publication date May 23, 2024
- ASM IP HOLDING B.V.
- Ankit Kimtee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20240150898
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Yoshiyuki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPI...
- Publication number 20240141495
- Publication date May 2, 2024
- Aniketnitin PATIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFT PIN ACTUATORS FOR SEMICONDUCTOR PROCESSING SYSTEMS AND RELATED...
- Publication number 20240112946
- Publication date Apr 4, 2024
- ASM IP HOLDING, B.V.
- Bradley Wayne Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20240112945
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Anhthu NGO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WAFER CARRIER ASSEMBLY WITH IMPROVED TEMPERATURE UNIFORMITY
- Publication number 20240102166
- Publication date Mar 28, 2024
- VEECO INSTRUMENTS INC.
- Aniruddha Bagchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...
- Publication number 20240093368
- Publication date Mar 21, 2024
- Samsung Electronics Co., Ltd.
- HONGTAEK LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT
- Publication number 20240084453
- Publication date Mar 14, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xu ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND APPARATUS FOR A REACTION CHAMBER
- Publication number 20240076778
- Publication date Mar 7, 2024
- ASM IP HOLDING B.V.
- Jessica Akemi Cimada da Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20240060183
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- Youngjoon OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CARRIER WITH ADJUSTABLE ALIGNMENT DEVICES AND DEPOSITION EQUI...
- Publication number 20240060182
- Publication date Feb 22, 2024
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240060185
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- Yeontae KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Handling System, Method, and Apparatus
- Publication number 20240044002
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Abhishek CHOWDHURY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
- Publication number 20240035161
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Devices at or outside the perimeter of the substrate support

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Continuous liner for use in a processing chamber

Apparatus and method for introducing an optical lens into a turning...

Process chamber and exhaust liner system therefor

Susceptor arrangement of a CVD reactor

Deposition ring for thin substrate handling via edge clamping

Asymmetrical sealing and gas flow control device

Multi-stage pumping liner

Plasma processing apparatus

Multicathode deposition system and methods

Substrate processing chamber and process gas flow deflector for use...

Ceramic coated quartz lid for processing chamber

Pedestal for substrate processing chambers

Thin substrate handling via edge clamping

Purge ring for pedestal assembly

Process kit having tall deposition ring for PVD chamber

Semiconductor processing chambers and methods for cleaning the same

Hardware to prevent bottom purge incursion in application volume an...

Spatially tunable deposition to compensate within wafer differentia...

Apparatus for growing a semiconductor wafer and associated manufact...

Apparatus and methods for improving thermal chemical vapor depositi...

System for backside deposition of a substrate

Susceptor with ring to limit backside deposition

In-situ apparatus for semiconductor process module

Substrate support cover for high-temperature corrosive environment

Vapor deposition device and method for manufacturing epitaxial sili...

Thermal processing susceptor

Isolator apparatus and methods for substrate processing chambers

Semiconductor process chamber including lower volume upper dome

Continuous liner for use in a processing chamber

Carrier ring used in a deposition chamber

Patents Applicationslast 30 patents

APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...

CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...

NITRIDE-BASED WAFER CHEMICAL VAPOR DEPOSITION DEVICE AND DEPOSITION...

METHODS OF SUBSTRATE PROCESSING AND METHODS OF MANUFACTURING SEMICO...

PLASMA PROCESSING APPARATUS

SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF

METHOD OF COOLING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD, ASSEMBLY AND SYSTEM FOR FILM DEPOSITION AND CONTROL

SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME

PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER

PROCESS CHAMBER HAVING SHUTTER COVER FOR SUBSTRATE UNIFORMITY AND P...

SHADOW RING ALIGNMENT FOR SUBSTRATE SUPPORT

BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES

SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE

CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIG...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

SYSTEMS AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT

CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS

CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPI...

LIFT PIN ACTUATORS FOR SEMICONDUCTOR PROCESSING SYSTEMS AND RELATED...

THERMAL PROCESSING SUSCEPTOR

WAFER CARRIER ASSEMBLY WITH IMPROVED TEMPERATURE UNIFORMITY

EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...

CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT

SYSTEM AND APPARATUS FOR A REACTION CHAMBER

APPARATUS FOR PROCESSING A SUBSTRATE

WAFER CARRIER WITH ADJUSTABLE ALIGNMENT DEVICES AND DEPOSITION EQUI...

SUBSTRATE PROCESSING APPARATUS

Substrate Handling System, Method, and Apparatus

ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL