Devices at or outside the perimeter of the substrate support

Industry

CPC
C23C16/4585

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4585Devices at or outside the perimeter of the substrate support

Industries

Patents Grantslast 30 patents

Information Patent Grant
Process kit having tall deposition ring for PVD chamber
- Patent number 11,961,723
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chambers and methods for cleaning the same
- Patent number 11,952,660
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,952,663
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,946,158
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving thermal chemical vapor depositi...
- Patent number 11,939,675
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for backside deposition of a substrate
- Patent number 11,908,728
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor with ring to limit backside deposition
- Patent number 11,885,019
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ apparatus for semiconductor process module
- Patent number 11,887,879
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support cover for high-temperature corrosive environment
- Patent number 11,866,821
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Shuran Sheng
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vapor deposition device and method for manufacturing epitaxial sili...
- Patent number 11,846,039
- Issue date Dec 19, 2023
- Sumco Corporation
- Kazuhiro Narahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,827,980
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor process chamber including lower volume upper dome
- Patent number 11,821,106
- Issue date Nov 21, 2023
- Samsung Electronics Co., Ltd.
- Keum Seok Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous liner for use in a processing chamber
- Patent number 11,814,724
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier ring used in a deposition chamber
- Patent number 11,795,544
- Issue date Oct 24, 2023
- United Semiconductor (Xiamen) Co., Ltd.
- Min-Fu Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas confiner assembly for eliminating shadow frame
- Patent number 11,773,489
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Lai Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer heater with backside and integrated bevel purge
- Patent number 11,769,684
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pressure transmitter for a semiconductor processing environment
- Patent number 11,725,277
- Issue date Aug 15, 2023
- ASM IP Holding B.V.
- Joseph Charles Reed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for thinning wafer thereof
- Patent number 11,721,555
- Issue date Aug 8, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Ling Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Actively clamped carrier assembly for processing tools
- Patent number 11,715,662
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Benjamin B. Riordon
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Wafer level uniformity control in remote plasma film deposition
- Patent number 11,702,748
- Issue date Jul 18, 2023
- Lam Research Corporation
- Geoffrey Hohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,692,283
- Issue date Jul 4, 2023
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Separation of plasma suppression and wafer edge to improve edge fil...
- Patent number 11,674,226
- Issue date Jun 13, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,664,199
- Issue date May 30, 2023
- ASM IP Holding B.V.
- JaeMin Roh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,643,725
- Issue date May 9, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus
- Patent number 11,598,021
- Issue date Mar 7, 2023
- GlobalWafers Co., Ltd.
- Shawn George Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor with sidewall humps for uniform deposition
- Patent number 11,594,444
- Issue date Feb 28, 2023
- ASM IP Holding, B.V.
- Matthew Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 11,584,994
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for introducing an optical lens into a turning...
- Patent number 11,555,239
- Issue date Jan 17, 2023
- Carl Zeiss Vision International GmbH
- Frank Macionczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LIFT PIN ACTUATORS FOR SEMICONDUCTOR PROCESSING SYSTEMS AND RELATED...
- Publication number 20240112946
- Publication date Apr 4, 2024
- ASM IP HOLDING, B.V.
- Bradley Wayne Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20240112945
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Anhthu NGO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WAFER CARRIER ASSEMBLY WITH IMPROVED TEMPERATURE UNIFORMITY
- Publication number 20240102166
- Publication date Mar 28, 2024
- VEECO INSTRUMENTS INC.
- Aniruddha Bagchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...
- Publication number 20240093368
- Publication date Mar 21, 2024
- Samsung Electronics Co., Ltd.
- HONGTAEK LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT
- Publication number 20240084453
- Publication date Mar 14, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xu ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND APPARATUS FOR A REACTION CHAMBER
- Publication number 20240076778
- Publication date Mar 7, 2024
- ASM IP HOLDING B.V.
- Jessica Akemi Cimada da Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20240060183
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- Youngjoon OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CARRIER WITH ADJUSTABLE ALIGNMENT DEVICES AND DEPOSITION EQUI...
- Publication number 20240060182
- Publication date Feb 22, 2024
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240060185
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- Yeontae KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Handling System, Method, and Apparatus
- Publication number 20240044002
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Abhishek CHOWDHURY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
- Publication number 20240035161
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR WAFER MANUFACTURING APPARATUS
- Publication number 20240018687
- Publication date Jan 18, 2024
- DENSO CORPORATION
- Hiroaki FUJIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS LINER FOR USE IN A PROCESSING CHAMBER
- Publication number 20240011153
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL INCLUDING SEAL
- Publication number 20230416918
- Publication date Dec 28, 2023
- Christopher GAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20230392259
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
- Publication number 20230386802
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230383407
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Naoki UMEHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
- Publication number 20230386803
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE
- Publication number 20230369091
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING SUBSTRATE CARRIER OF DEPOSITION APPARATUS
- Publication number 20230366090
- Publication date Nov 16, 2023
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ASHABLE HARD MASK
- Publication number 20230360922
- Publication date Nov 9, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott WEIMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY
- Publication number 20230357929
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CLAMPED CARRIER ASSEMBLY FOR PROCESSING TOOLS
- Publication number 20230352336
- Publication date Nov 2, 2023
- Applied Materials, Inc.
- Benjamin B. RIORDON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...
- Publication number 20230352279
- Publication date Nov 2, 2023
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20230335379
- Publication date Oct 19, 2023
- TOKYO ELECTRON LIMITED
- Takahiro SHINDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR WITH TEMPERATURE-CONTROLLABLE GAS INLET REGION
- Publication number 20230332292
- Publication date Oct 19, 2023
- AIXTRON SE
- Philip HENS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...
- Publication number 20230323535
- Publication date Oct 12, 2023
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
- Publication number 20230304156
- Publication date Sep 28, 2023
- LAM RESEARCH CORPORATION
- Geoffrey HOHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POCKET HEATER WITH PURGE TO IMPROVE GAP TOLERANCE
- Publication number 20230265561
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS
- Publication number 20230257904
- Publication date Aug 17, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Devices at or outside the perimeter of the substrate support

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Process kit having tall deposition ring for PVD chamber

Semiconductor processing chambers and methods for cleaning the same

Hardware to prevent bottom purge incursion in application volume an...

Spatially tunable deposition to compensate within wafer differentia...

Apparatus for growing a semiconductor wafer and associated manufact...

Apparatus and methods for improving thermal chemical vapor depositi...

System for backside deposition of a substrate

Susceptor with ring to limit backside deposition

In-situ apparatus for semiconductor process module

Substrate support cover for high-temperature corrosive environment

Vapor deposition device and method for manufacturing epitaxial sili...

Thermal processing susceptor

Isolator apparatus and methods for substrate processing chambers

Semiconductor process chamber including lower volume upper dome

Continuous liner for use in a processing chamber

Carrier ring used in a deposition chamber

Gas confiner assembly for eliminating shadow frame

Wafer heater with backside and integrated bevel purge

Pressure transmitter for a semiconductor processing environment

Method and system for thinning wafer thereof

Actively clamped carrier assembly for processing tools

Wafer level uniformity control in remote plasma film deposition

Apparatus for growing a semiconductor wafer and associated manufact...

Separation of plasma suppression and wafer edge to improve edge fil...

Substrate processing apparatus and substrate processing method

Hardware to prevent bottom purge incursion in application volume an...

CVD apparatus

Susceptor with sidewall humps for uniform deposition

Pedestal for substrate processing chambers

Apparatus and method for introducing an optical lens into a turning...

Patents Applicationslast 30 patents

LIFT PIN ACTUATORS FOR SEMICONDUCTOR PROCESSING SYSTEMS AND RELATED...

THERMAL PROCESSING SUSCEPTOR

WAFER CARRIER ASSEMBLY WITH IMPROVED TEMPERATURE UNIFORMITY

EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...

CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT

SYSTEM AND APPARATUS FOR A REACTION CHAMBER

APPARATUS FOR PROCESSING A SUBSTRATE

WAFER CARRIER WITH ADJUSTABLE ALIGNMENT DEVICES AND DEPOSITION EQUI...

SUBSTRATE PROCESSING APPARATUS

Substrate Handling System, Method, and Apparatus

ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL

SEMICONDUCTOR WAFER MANUFACTURING APPARATUS

CONTINUOUS LINER FOR USE IN A PROCESSING CHAMBER

PEDESTAL INCLUDING SEAL

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...

SUBSTRATE PROCESSING APPARATUS

PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...

HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE

METHOD FOR CONTROLLING SUBSTRATE CARRIER OF DEPOSITION APPARATUS

ROBUST ASHABLE HARD MASK

APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY

ACTIVELY CLAMPED CARRIER ASSEMBLY FOR PROCESSING TOOLS

MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...

PLASMA PROCESSING DEVICE

CVD REACTOR WITH TEMPERATURE-CONTROLLABLE GAS INLET REGION

SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...

WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION

POCKET HEATER WITH PURGE TO IMPROVE GAP TOLERANCE

VAPOR PHASE GROWTH APPARATUS